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Priority claimed from PCT/US1982/001576external-prioritypatent/WO1983001866A1/en
Publication of JPS59501139ApublicationCriticalpatent/JPS59501139A/ja
Publication of JPH0586666B2publicationCriticalpatent/JPH0586666B2/ja
노출된 반도체 다이스를 테스트하기 위한 자기 제한 실리콘 베이스 상호접속부를 제조하는 방법(method for fabricating a self limting silcon based interconnect for testing bare semiconductor dice)