JPS595436A - Manufacturing device of magnetic recording medium - Google Patents
Manufacturing device of magnetic recording mediumInfo
- Publication number
- JPS595436A JPS595436A JP11506982A JP11506982A JPS595436A JP S595436 A JPS595436 A JP S595436A JP 11506982 A JP11506982 A JP 11506982A JP 11506982 A JP11506982 A JP 11506982A JP S595436 A JPS595436 A JP S595436A
- Authority
- JP
- Japan
- Prior art keywords
- base body
- ferromagnetic material
- material metal
- magnetic recording
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000002184 metal Substances 0.000 claims abstract description 24
- 229910052751 metal Inorganic materials 0.000 claims abstract description 24
- 230000005294 ferromagnetic effect Effects 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 9
- 230000008020 evaporation Effects 0.000 abstract description 6
- 238000001704 evaporation Methods 0.000 abstract description 6
- 239000003302 ferromagnetic material Substances 0.000 abstract 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/85—Coating a support with a magnetic layer by vapour deposition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、２層の磁性層を形成しつる磁気記録媒体の製
造装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an apparatus for manufacturing a magnetic recording medium in which two magnetic layers are formed.
プラスチックフィルム等の基体に強磁性体金属を斜めに
付着した磁気記録媒体は、従来の塗布型に比べて、抗磁
力や角形比、磁気記録密度等が優れており、最近、実用
化されるようになってきた。Magnetic recording media, in which ferromagnetic metal is obliquely attached to a substrate such as a plastic film, have superior coercive force, squareness ratio, magnetic recording density, etc. compared to conventional coated media, and have recently been put into practical use. It has become.
ところで、このような磁気記録媒体の製造装置は、一般
に強磁性体金属の大部分が基体に付着せず、付着効率が
低いという欠点があった。However, such magnetic recording medium manufacturing apparatuses generally have the disadvantage that most of the ferromagnetic metal does not adhere to the substrate, resulting in low adhesion efficiency.
このような欠点を改良するために１通常のハックローラ
の他に、より径の小さいパックルーラを下方に配置して
、基体をこれ等両方のパックルーラの周側面に沿って走
行させ、その途中において強磁性体金属を斜めに付着さ
せるようにした装置もある。この装置は一つの蒸発源か
ら蒸発した強磁性体金属を２個のバックローラで受ける
ので付着効率が従来の２倍以上なり、付着効率が向上す
る。In order to improve these drawbacks, 1. In addition to the normal hack roller, a pack ruler with a smaller diameter is arranged below, and the base body is run along the circumferential side of both pack rulers, and along the way, There is also a device in which ferromagnetic metal is deposited obliquely. Since this device receives the ferromagnetic metal evaporated from one evaporation source with two back rollers, the adhesion efficiency is more than twice that of the conventional method, and the adhesion efficiency is improved.
しかしながら、一方のバ、りｐ−ラの下方に他方のバク
クローラを配置するために、上方のバックローラと蒸発
源との間の距離が長く、そのために上方のパックルーラ
における強磁性体金属の付着強度が低く、磁性層が剥れ
易い欠点があった。However, since the other back crawler is placed below one pack ruler, the distance between the upper back roller and the evaporation source is long, which causes the ferromagnetic metal to adhere to the upper pack ruler. It had the drawback of low strength and easy peeling of the magnetic layer.
本発明は以上の欠点を改良し、基体に対する強磁性体金
属の付着強度を改良しつる磁気記録媒体の製造装置の提
供を目的とするものである。SUMMARY OF THE INVENTION An object of the present invention is to improve the above-mentioned drawbacks and to provide an apparatus for manufacturing a magnetic recording medium that improves the adhesion strength of a ferromagnetic metal to a substrate.
本発明は、上記の目的を達成するために、第１ノ・ツク
ルーラあるいは第２バ、クローラの少な（とも一方の周
側面の前面に設けられ１強磁性体金属をイオン化して基
体に付着し５るコイルを有することを特徴とする磁気記
録媒体の製造装置を提供するものである。In order to achieve the above object, the present invention provides a first crawler, a second crawler, and a crawler (both of which are provided on the front surface of one circumferential surface of the crawler to ionize a ferromagnetic metal and adhere to the substrate. The present invention provides an apparatus for manufacturing a magnetic recording medium characterized by having five coils.
以下１本発明の実施例を図面に基づいて説明する。An embodiment of the present invention will be described below based on the drawings.
図において、１は真空槽であり、１０Ｔｏｒｒ程度の真
空度に保持されている。２は原反ｐ−ラであり、ポリエ
ステル等の高分子フィルムからな゛る基体３を供給する
。４は径大の第１・・７りｐ−ラであり、その周側面に
清って基体３が走行させられる。５は径小の第２バ、り
ｐ−ラであり、第１バ７りｐ−ラ４の下方に緩和可能に
配置され、第１・・７りｐ−ラ４を通過後の基体３が周
側面に沿って走行させられる。６は登城ローラであり、
第２ハ、クローラ５を通過後の基体３を最終的に巻増る
ものである。７は第２バ、クローラ乙の下方に配置され
ている蒸発源であり、鉄やコバルト、ニッケル等の強磁
性体金属８が収容されている。９は第１バ、りｐ−ラ４
の周側面の前面に設けられた高周波コイルであり、蒸発
した強磁性体金属をイオン化しつるものである。１１は
第２ハ、りｐ −ラ５と蒸発源７との間に配置させられ
たマスクである。In the figure, 1 is a vacuum chamber, which is maintained at a vacuum level of about 10 Torr. Reference numeral 2 denotes a raw p-layer, which supplies a substrate 3 made of a polymeric film such as polyester. Reference numeral 4 designates first to seventh rollers having a large diameter, and the base body 3 is made to run along the circumferential side thereof. Reference numeral 5 designates a second bar with a small diameter, which is arranged so as to be able to relax below the first bar 7. The base 3 after passing through the first bar 7 is made to run along the circumferential side. 6 is Tojo Laura,
The second step is to finally increase the winding of the base body 3 after passing through the crawler 5. Reference numeral 7 denotes an evaporation source disposed below the second crawler B, in which a ferromagnetic metal 8 such as iron, cobalt, nickel, etc. is accommodated. 9 is the first bar, ri p-ra 4
This is a high-frequency coil installed on the front side of the circumferential surface of the ferromagnetic coil, which ionizes the evaporated ferromagnetic metal. Reference numeral 11 denotes a mask placed between the second printer 5 and the evaporation source 7.
すなわち、蒸発源７かも蒸発した強磁性体金属めに付着
し、下層の磁性層を形成する。次に、第２バツクｐ−ラ
６において１強磁性体金属が基体乙に所定の入射角度で
付着し上層の磁性層を形成する。That is, the evaporation source 7 also adheres to the evaporated ferromagnetic metal to form the lower magnetic layer. Next, in the second backplane 6, a ferromagnetic metal is deposited on the substrate B at a predetermined angle of incidence to form an upper magnetic layer.
従って、基体３に形成される磁性層の下層は。Therefore, the lower layer of the magnetic layer formed on the base body 3 is.
基体６との付着強度の大きい強磁性体金属によって形成
されており、下層と上層は強磁性体金属であるから、磁
性層全体と基体との付着強度が向上し剥離強度が大きく
なる。Since it is formed of a ferromagnetic metal that has a high adhesion strength to the base 6, and the lower and upper layers are made of ferromagnetic metal, the adhesion strength between the entire magnetic layer and the base is improved, and the peel strength is increased.
なお、基体の走行方向が逆の場合には、下層の磁性層の
付着強度を増加するために、下方の第２バツクローラの
周側面に沿ってコイルを配置してもよい。Note that when the running direction of the substrate is reversed, a coil may be arranged along the circumferential side of the lower second bag roller in order to increase the adhesion strength of the underlying magnetic layer.
また１以上の各実施例において、コイルをどちらか一方
のか、クローラの周側面にそって配置したか１両ハ、ク
ローラの周側面に沿って配置してもよい。この場合には
、独立にコイルのパワーを制御できるので、第１）・ツ
クローラと第２バ、クローラでの強磁性体金属の付着条
件を個々に制御でき、磁気特性をより改善できる。In one or more of the embodiments, the coils may be disposed along either one of the circumferential sides of the crawler or along the circumferential side of the crawler. In this case, since the power of the coils can be controlled independently, the conditions for adhering the ferromagnetic metal to the first and second crawlers can be individually controlled, and the magnetic properties can be further improved.
以上の通り１本発明によれば強磁性体金属の付着効率及
び付着強度の高い磁気記録媒体の製造装置か得られる。As described above, according to the present invention, an apparatus for manufacturing a magnetic recording medium with high adhesion efficiency and adhesion strength of ferromagnetic metal can be obtained.
図は本発明の実施例の断面図を示す。 ろ・・・・基体、４・・・・第１バツクローラ。 ５・・・・・・第２ハ、りｐ−ラ。 ８ ・・強磁性体金属、９・・・・・高周波コイル。 The figure shows a cross-sectional view of an embodiment of the invention. ro...Base body, 4...1st cross crawler. 5...Second c, ri p-ra. 8...Ferromagnetic metal, 9...High frequency coil.
Claims (1)
−ラの下方に配置された径小の第２バ、りｐ−ラとを有
し、基体を前記第１ノ・７クローラ及び前記第２バック
ｐ−ラの周側面に沿って走行させ、前記基体に強磁性体
金属を斜めに付着する磁気記録媒体の製造装置において
。 第１ハ、クローラあるいは第２バ、りｐ−ラの少なくと
も一方の周側面の前面に設けられ。 強磁性体金属をイオン化して基体に付着しうるコイルを
有することを特徴とする磁気記録媒体の製造装置。[Claims] +11 A first bar with a large diameter and a first bar with a large diameter;
- a second bar with a small diameter arranged below the back p-ra, and the base body runs along the circumferential side of the first No. 7 crawler and the second back p-ra; In an apparatus for manufacturing a magnetic recording medium, in which a ferromagnetic metal is obliquely attached to the substrate. The first bar is provided on the front surface of the circumferential side of at least one of the crawler or the second bar. 1. An apparatus for manufacturing a magnetic recording medium, comprising a coil capable of ionizing ferromagnetic metal and attaching it to a substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11506982A JPS595436A (en) | 1982-07-02 | 1982-07-02 | Manufacturing device of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11506982A JPS595436A (en) | 1982-07-02 | 1982-07-02 | Manufacturing device of magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS595436A true JPS595436A (en) | 1984-01-12 |
| JPH0125143B2 JPH0125143B2 (en) | 1989-05-16 |
Family
ID=14653406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11506982A Granted JPS595436A (en) | 1982-07-02 | 1982-07-02 | Manufacturing device of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS595436A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04217425A (en) * | 1990-10-08 | 1992-08-07 | Mitsubishi Electric Corp | Wire electric discharge machine |
| US6294479B1 (en) | 1992-05-21 | 2001-09-25 | Nissin Electric Co., Ltd | Film forming method and apparatus |
-
1982
- 1982-07-02 JP JP11506982A patent/JPS595436A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04217425A (en) * | 1990-10-08 | 1992-08-07 | Mitsubishi Electric Corp | Wire electric discharge machine |
| US6294479B1 (en) | 1992-05-21 | 2001-09-25 | Nissin Electric Co., Ltd | Film forming method and apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0125143B2 (en) | 1989-05-16 |
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