JPS5954843U - Actuator of sample stage - Google Patents

Actuator of sample stage

Info

Publication number
JPS5954843U
JPS5954843U JP14300082U JP14300082U JPS5954843U JP S5954843 U JPS5954843 U JP S5954843U JP 14300082 U JP14300082 U JP 14300082U JP 14300082 U JP14300082 U JP 14300082U JP S5954843 U JPS5954843 U JP S5954843U
Authority
JP
Japan
Prior art keywords
sample stage
holder
slider
actuator
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14300082U
Other languages
Japanese (ja)
Inventor
西村　寔
Original Assignee
セイコーインスツルメンツ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコーインスツルメンツ株式会社 filed Critical セイコーインスツルメンツ株式会社
Priority to JP14300082U priority Critical patent/JPS5954843U/en
Publication of JPS5954843U publication Critical patent/JPS5954843U/en
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本考案の実施例を示し、第１図は側面図、第２図
は第１図の矢印Ａ方向から見た側面図である。 １・・・・・・作動軸、３・・・・・・スライダ、４，
４′・・・・・・シャッタ、４ａ・・・・・・ストッパ
、５・・・・・・保持体、５ａ・・・・・・長穴、６・
・・・・・試料台、８・・・・・・押え板。The drawings show an embodiment of the present invention; FIG. 1 is a side view, and FIG. 2 is a side view seen from the direction of arrow A in FIG. 1...Operating axis, 3...Slider, 4,
4'...Shutter, 4a...Stopper, 5...Holding body, 5a...Elongated hole, 6...
...Sample stand, 8...Press plate.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 密閉された保持体とこの保持体に設けられた長穴と、前
記保持体に内蔵された試料台と、この試料台を前記保持
体の外より作動するための該試料台に連結された作動軸
と、この作動軸の移動にともなう前記長穴の開口を防止
するスライダとからなるものにおいて、前記スライダと
連動する一対のシャッタと、このシャッタの一端にそれ
ぞれ設けられたストッパと、このストッパと係合スるた
め前記保持体内部に設けられた押え板とを備え、前記作
動軸の移動にともなう前記長穴の開口を防止する構成と
したことを特徴とする試料台の作動装置。A sealed holder, a long hole provided in the holder, a sample stage built into the holder, and an actuator connected to the sample stage for operating the sample stage from outside the holder. A slider comprising a shaft and a slider that prevents the elongated hole from opening due to movement of the operating shaft, a pair of shutters interlocking with the slider, a stopper provided at one end of the shutter, and the stopper. 1. An actuating device for a sample stage, comprising a presser plate provided inside the holder for engagement, and configured to prevent opening of the elongated hole as the actuating shaft moves.
JP14300082U 1982-09-21 1982-09-21 Actuator of sample stage Pending JPS5954843U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14300082U JPS5954843U (en) 1982-09-21 1982-09-21 Actuator of sample stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14300082U JPS5954843U (en) 1982-09-21 1982-09-21 Actuator of sample stage

Publications (1)

Publication Number Publication Date
JPS5954843U true JPS5954843U (en) 1984-04-10

Family

ID=30319333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14300082U Pending JPS5954843U (en) 1982-09-21 1982-09-21 Actuator of sample stage

Country Status (1)

Country Link
JP (1) JPS5954843U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5786027A (en) * 1980-09-23 1982-05-28 Philips Corp X-ray inspector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5786027A (en) * 1980-09-23 1982-05-28 Philips Corp X-ray inspector

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