JPS5961794A - Structure for attaching liquid nitrogen container for cooling edx - Google Patents
Structure for attaching liquid nitrogen container for cooling edxInfo
- Publication number
- JPS5961794A JPS5961794A JP57172666A JP17266682A JPS5961794A JP S5961794 A JPS5961794 A JP S5961794A JP 57172666 A JP57172666 A JP 57172666A JP 17266682 A JP17266682 A JP 17266682A JP S5961794 A JPS5961794 A JP S5961794A
- Authority
- JP
- Japan
- Prior art keywords
- liquid nitrogen
- container
- edx
- cooling
- nitrogen container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measurement Of Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、Ｓｉ （Ｌｉ ）半導体を用いたＥ Ｄ Ｘ
（ＥｎｅｒｇｙＤｉｓｐｅｒｓｉｖｅ Ｘ−ｒａｙ Ａ
ｎａｌｙｚｅｒの略称でエネルギー分散形Ｘ線アナライ
ザのこと）の冷却用液体窒素容器の取付構造に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention provides an EDX using a Si (Li) semiconductor.
(Energy Dispersive X-ray A
This invention relates to a mounting structure for a liquid nitrogen container for cooling of a Nalyzer (abbreviation for energy dispersive X-ray analyzer).
このようなＥ Ｄ Ｘ （１）を第１図に示すようにＳ
ＥＭ（Ｓｃａｎｎｉｎｇ Ｅｌｅｃｔｒｏｎ Ｍｉｃｙ
ｏｓｃｏｐｅの略称で遺査電 。As shown in Fig. 1, such E D
EM (Scanning Electron Micy)
The abbreviation for oscope is Ikaden.
子顕微鏡のこと）、ＥＰＭＡ（Ｅｌｅｃｔｒｏｎ Ｐｒ
ｏｂｅ Ｍｉ −ｃｒｏ Ａｎａｌｙｚｅｒの略称で電
子線プローブマイクロアナライザのこと）の本体の真空
容器（２）外に取り付けた場合には、Ｅ Ｄ Ｘ （１
）の５ｉ（Ｌｉ）検出器（ｌａ）や前置増幅器（１ｂ）
を冷却するための液体窒素容器（１ｃ）は大気中に置か
れることになる。このため、従来てはこの容器（１ｃ）
内の液体窒素の蒸発を抑えるために容器（１ｃ）を断熱
材で構成し魔法瓶のようにしている。ところが、この封
入容器（１ｃ）を完壁な断熱作用を有するものにするこ
とはできず、このため容器（１ｃ）内の液体窒素は単に
５１（Ｌｉ）検出器（１ａ）や前置増幅器（１ｂ）の冷
却のだめに蒸発消失するばかりでなく、外気温によって
も蒸発消失してゆき、むしろこの外気温の方がその蒸発
消失に相当な影響を及ぼしている。electron microscope), EPMA (Electron Pr
When attached to the outside of the vacuum container (2) of the main body of an electron beam probe microanalyzer (abbreviation for obe Mi-cro Analyzer), EDX (1
) 5i (Li) detector (la) and preamplifier (1b)
A liquid nitrogen container (1c) for cooling will be placed in the atmosphere. For this reason, conventionally this container (1c)
In order to suppress the evaporation of the liquid nitrogen inside, the container (1c) is made of a heat insulating material and resembles a thermos flask. However, this enclosure (1c) cannot be made to have a perfect heat insulating effect, and for this reason, the liquid nitrogen in the container (1c) is simply passed through the 51 (Li) detector (1a) and the preamplifier (1c). Not only does it evaporate and disappear due to the cooling process in step 1b), but it also evaporates and disappears depending on the outside temperature, and rather, the outside temperature has a considerable influence on the evaporation and loss.
本発明＋、２上述に鑑み外気温による液体窒素の蒸発消
失を減少させて液体窒素の消費量を削減できるようにす
ることを主たる目的とする。Present Inventions + and 2 In view of the above, the main object is to reduce the amount of liquid nitrogen consumed by reducing evaporation and loss of liquid nitrogen due to outside temperature.
本発明は、この目的を達成するため、ＳＥＭ−ＥＰＭＡ
の本体の真空容器中にＥＤＸ冷却用液体窒素容器を収納
して構成され、この構成により液体窒素がその封入容器
を断熱材で構成することによる断熱作用の他に前記真空
容器からの断熱作用も受けることになり外気温による該
液体窒素の蒸発消失量が減少しその消費量が削減できる
ようにしている。また、液体窒素容器を非断熱材で構成
することによりζ液体窒素容器の外周側の温度低下をひ
きおこさせてコールドトラップ効果による真空容器内の
真空度を向上させ、コンタミネーションを減少させるこ
とによりＳＥＭ−ＥＰＭＡの性能を向上させ得るように
している、
以下、本発明を第２図、第８図に示す実施例に基づいて
詳細に説明する。To achieve this objective, the present invention provides SEM-EPMA
A liquid nitrogen container for EDX cooling is housed in a vacuum container of the main body of the main body, and with this structure, the liquid nitrogen has an insulating effect from the vacuum container in addition to the insulating effect due to the enclosing container being made of a heat insulating material. As a result, the amount of liquid nitrogen lost by evaporation due to outside temperature is reduced, and the amount of liquid nitrogen consumed can be reduced. In addition, by constructing the liquid nitrogen container with a non-insulating material, the temperature on the outer circumferential side of the liquid nitrogen container is lowered, and the degree of vacuum inside the vacuum container is improved due to the cold trap effect, thereby reducing contamination. The present invention, which is capable of improving the performance of SEM-EPMA, will be described in detail below based on the embodiments shown in FIGS. 2 and 8.
（実施例１．＞
第２図は本発明の実施例の°構成図であり、第１図と対
応する部分には同一の符号が付されている。(Embodiment 1) FIG. 2 is a block diagram of an embodiment of the present invention, and parts corresponding to those in FIG. 1 are given the same reference numerals.
第２図において、（２）はＳＥＭ−ＥＰＭＡ本体の真空
容器、（３）は電子光学系、（４）はステージ（５）に
載置された試片、（６）は電子光学系（３）からの電子
線、（７）は電子線（６）の照射により試料（４）から
発生する特性Ｘ線である。In Figure 2, (2) is the vacuum container of the SEM-EPMA main body, (3) is the electron optical system, (4) is the specimen placed on the stage (5), and (6) is the electron optical system (3). ), and (7) is the characteristic X-ray generated from the sample (4) by irradiation with the electron beam (6).
（１）ハ真空容器（２）内に配置された１州〕Ｘであり
、このＥ Ｄ Ｘ （１）は５ｉ（Ｌ：ｉ）検出器（１
ａ）と前置増幅器（１ｂ）と冷却用液体窒素容器（１ｃ
）とを備える、そして、この液体窒素容器（１ｃ）は断
熱材で構成され魔法瓶のようになっている。このような
構成において、電子光学系（３）からの電子線（６）に
より試料（４）から特性Ｘ線（７）が発生し、この特性
Ｘ線（７）はＥ Ｄ Ｘ （１）の５ｉ（Ｌｉ）検出器
（１ａ）と前置増幅器（１１） ）とを介してメイン増
幅器と多重波高分析器（いずれも図示省略）などで処理
されることにより試料（４）の元素分析が行われる。な
お、電子線（６）により試料（４）から発生した２次電
子の処理については本発明とは直接には係イ）りがない
ので省略する。(1) 1 state] X placed in the vacuum container (2), and this E D
a), preamplifier (1b), and cooling liquid nitrogen container (1c)
), and this liquid nitrogen container (1c) is made of a heat insulating material and resembles a thermos flask. In such a configuration, a characteristic X-ray (7) is generated from the sample (4) by the electron beam (6) from the electron optical system (3), and this characteristic X-ray (7) is Elemental analysis of the sample (4) is performed by processing the sample (4) through the main amplifier and multiple wave height analyzer (both not shown) via the 5i (Li) detector (1a) and preamplifier (11)). be exposed. Note that the treatment of secondary electrons generated from the sample (4) by the electron beam (6) is not directly related to the present invention and will therefore be omitted.
このような構成において、Ｅ Ｄ Ｘ （］）の液体窒
素容器（ｌｃ）は真空容器（２）内に配置されているの
で、液体窒素は両容器（ｌｃ）（２）により２重に外気
から断熱されることになり、外気温による蒸発消失量が
大幅に減少し、その消費量を削減することができる。In such a configuration, the liquid nitrogen container (lc) of E D As a result of the insulation, the amount lost by evaporation due to outside temperature is significantly reduced, and the amount consumed can be reduced.
〈実施例２〉
第３図は本発明の他の実施例の構成図であり、第２図と
対応する部分には同一の符号が付される。<Embodiment 2> FIG. 3 is a block diagram of another embodiment of the present invention, and parts corresponding to those in FIG. 2 are given the same reference numerals.
この実施例において注目すべきは、ＥＤＸ冷却用液体窒
素容器（ｌｃ’）が第２図とは異なり、非断熱材例えば
適当な伝熱性を有する材料で構成され、このためその断
熱性が成る程度の範囲で低く抑えられていることである
。従って、この容器（ｌｃ’）の断熱効果が小さくなる
ので、容器（ｌｃ’）の外周側の温度が低下してコール
ドトラップ効果により真空容器（２）内の残留ガスがそ
の外周面に吸着されてその真空度が向上してくる。この
向上により、ＳＥＭの観察やＥＰＭＡの分析精度に悪影
響を及ぼすコンタミネーションが低減できる。勿論、こ
の実施例においては、容器（ｌｃ’）の断熱性が第２図
のものよりも低いが、第１図の従来に比べてみると全体
的には従来よりも高いので、液体窒素の消費量を削減で
きる。What should be noted in this embodiment is that the liquid nitrogen container (lc') for EDX cooling is different from that shown in FIG. This means that it is kept low within the range of . Therefore, the heat insulating effect of this container (lc') decreases, so the temperature on the outer peripheral side of the container (lc') decreases, and the residual gas in the vacuum container (2) is adsorbed on the outer peripheral surface due to the cold trap effect. The degree of vacuum will improve. This improvement can reduce contamination that adversely affects the accuracy of SEM observation and EPMA analysis. Of course, in this embodiment, the thermal insulation of the container (lc') is lower than that in Figure 2, but overall it is higher than the conventional one in Figure 1. Consumption can be reduced.
以上説明したように、本発明によればＳＥＭ−ＥＰＭＡ
の本体の真空容器内にＥ Ｄ Ｘ冷却用液体窒素容器を
設置したので、この容器を断熱材で構成すれば、液体窒
素は前記両容器により２重に断熱されることになり、液
体窒素の外気温による蒸発消失を低減してその消費量を
削減することができる。また、本発明によれば、その容
器を適当な伝熱性を有する材料等の非断熱材で構成する
ことにより、コールドトラップ効果による真空容器の真
空度向上と相まってコンタミネーションの低減によりＳ
ＥＭとＥＰ Ｍ Ａの性能向」−が可能になる。さらに
、ＳＥＭ−ＥＰＭＡとＥＤＸとの一体化により装置の小
型化が可能になる等の効果が発揮される。As explained above, according to the present invention, SEM-EPMA
Since the liquid nitrogen container for cooling the EDX was installed inside the vacuum container of the main body of the ED It is possible to reduce its consumption by reducing evaporation loss due to outside temperature. Further, according to the present invention, by constructing the container with a non-insulating material such as a material having appropriate heat conductivity, the degree of vacuum of the vacuum container is improved due to the cold trap effect, and contamination is reduced.
EM and EPMA performance improvements are possible. Furthermore, by integrating the SEM-EPMA and EDX, effects such as miniaturization of the device are exhibited.
第１図は従来例の構成図、第２図は本発明の実施例の構
成図、第３図は本発明の他の実施例の構成図である。
（］）・ＥＤＸ 、 （ｌａ） −５ｉ（Ｌｉ）検出器
、（１ｂ） 前置増幅器、（Ｉｃ）（ｌｃ’）・・Ｅ
ＤＸ冷却用液体窒素封入容器、（２）・真空容器、（３
）・電子光学系、（４） 試料、（５） ステージ
出願人 株式会社島津製作所
代理人 弁理士 岡田和秀
第ｃ図
第２１２
第３FIG. 1 is a block diagram of a conventional example, FIG. 2 is a block diagram of an embodiment of the present invention, and FIG. 3 is a block diagram of another embodiment of the present invention. (])・EDX, (la) -5i (Li) detector, (1b) preamplifier, (Ic) (lc')...E
Liquid nitrogen enclosure for DX cooling, (2)・Vacuum container, (3
)・Electron optical system, (4) Sample, (5) Stage Applicant Shimadzu Corporation Agent Patent attorney Kazuhide Okada Figure c 212 No. 3
Claims (1)
冷却用液体窒素容器を収納してなるＥＤＸ冷却用液体窒
素容器の取付構造。 ２ 前記特許請求の範囲第１項に記載のＥＤＸ冷却用液
体窒素容器の取付構造において、この容器を断熱材で構
成してなるＥＤＸ冷却用液体窒素容器の取付構造。 ３、前記特許請求の範囲第１項に記載のＥＤＸ冷却用液
体窒素容器の取付構造において、この容器を非断熱材で
構成してなるＥＤＸ冷却用液体窒素容器の取付構造。[Claims] 1. EDX in the vacuum container of the main body of SEM-EpMA
Mounting structure for an EDX cooling liquid nitrogen container that houses a cooling liquid nitrogen container. 2. A mounting structure for a liquid nitrogen container for EDX cooling as set forth in claim 1, in which the container is made of a heat insulating material. 3. A mounting structure for a liquid nitrogen container for EDX cooling as set forth in claim 1, in which the container is made of a non-insulating material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57172666A JPS5961794A (en) | 1982-09-30 | 1982-09-30 | Structure for attaching liquid nitrogen container for cooling edx |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57172666A JPS5961794A (en) | 1982-09-30 | 1982-09-30 | Structure for attaching liquid nitrogen container for cooling edx |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5961794A true JPS5961794A (en) | 1984-04-09 |
| JPH0353586B2 JPH0353586B2 (en) | 1991-08-15 |
Family
ID=15946115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57172666A Granted JPS5961794A (en) | 1982-09-30 | 1982-09-30 | Structure for attaching liquid nitrogen container for cooling edx |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5961794A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS619761U (en) * | 1984-06-25 | 1986-01-21 | 日本電子株式会社 | electron beam equipment |
| US20130299698A1 (en) * | 2009-05-15 | 2013-11-14 | Fei Company | Electron Microscope with Integrated Detector(s) |
| WO2014094381A1 (en) * | 2012-12-20 | 2014-06-26 | 北京农业信息技术研究中心 | Method and system for quickly measuring nitrogen distribution on soil surface |
| US9972474B2 (en) | 2016-07-31 | 2018-05-15 | Fei Company | Electron microscope with multiple types of integrated x-ray detectors arranged in an array |
-
1982
- 1982-09-30 JP JP57172666A patent/JPS5961794A/en active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS619761U (en) * | 1984-06-25 | 1986-01-21 | 日本電子株式会社 | electron beam equipment |
| US20130299698A1 (en) * | 2009-05-15 | 2013-11-14 | Fei Company | Electron Microscope with Integrated Detector(s) |
| US8987665B2 (en) * | 2009-05-15 | 2015-03-24 | Fei Company | Electron microscope with integrated detector(s) |
| WO2014094381A1 (en) * | 2012-12-20 | 2014-06-26 | 北京农业信息技术研究中心 | Method and system for quickly measuring nitrogen distribution on soil surface |
| US9972474B2 (en) | 2016-07-31 | 2018-05-15 | Fei Company | Electron microscope with multiple types of integrated x-ray detectors arranged in an array |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0353586B2 (en) | 1991-08-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US3609992A (en) | Hermetically sealed box for maintaining a semiconductor radiation detector at a very low temperature | |
| US5357577A (en) | Vacuum tube microphone apparatus | |
| JP5732006B2 (en) | Sample cooling holder and cooling source container | |
| JPH065643B2 (en) | Open MRI magnet | |
| JP2014521976A (en) | Improved low temperature sample holder | |
| JPS5961794A (en) | Structure for attaching liquid nitrogen container for cooling edx | |
| Madey et al. | Ion angular distributions in electron stimulated desorption: Oxygen and CO on W (111) | |
| JPS62100936A (en) | Sample contamination preventive method for analyzer utilizing charged particle beam | |
| JPS59224187A (en) | Exciting leading conductor unit for superconductive unit andparticularly magnet | |
| Levi-Setti et al. | Secondary ion imaging in the scanning ion microscope | |
| Lehmpfuhl et al. | Direct electron microscopic imaging of surface topography by diffraction and phase contrast | |
| US3558878A (en) | Method of reducing specimen contamination in an electron probe by cooling the objective lens | |
| JPH05315293A (en) | Placing device for object to be processed | |
| JP4302722B2 (en) | Sample cooling apparatus and electron beam irradiation type analysis / observation apparatus provided with the same | |
| JPH09161707A (en) | Sample cooling observation device | |
| RU2194254C1 (en) | Device for receiving ultraviolet radiation | |
| JP2523384Y2 (en) | Sample holder for vacuum chamber | |
| JPS60201632A (en) | Dry etching apparatus | |
| Mapother et al. | Cryostat for Cyclotron Irradiation at Liquid Helium Temperatures | |
| JP2000226296A (en) | Molecular beam epitaxy equipment | |
| JPH08250057A (en) | Scanning electron microscope sample holder | |
| JPH08124502A (en) | Getter device and cathode ray tube | |
| JPS643171Y2 (en) | ||
| Dąbrowski et al. | Investigation of self-diffusion of titanium by fluctuation autocorrelation method | |
| JP2681028B2 (en) | Evacuation system |