JPS596238Y2 - Vacuum heating electric furnace - Google Patents

Vacuum heating electric furnace

Info

Publication number
JPS596238Y2
JPS596238Y2 JP16788479U JP16788479U JPS596238Y2 JP S596238 Y2 JPS596238 Y2 JP S596238Y2 JP 16788479 U JP16788479 U JP 16788479U JP 16788479 U JP16788479 U JP 16788479U JP S596238 Y2 JPS596238 Y2 JP S596238Y2
Authority
JP
Japan
Prior art keywords
heat
ray shielding
heated
furnace body
heat ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16788479U
Other languages
Japanese (ja)
Other versions
JPS5685290U (en
Inventor
英 上田
Original Assignee
株式会社 関西電研社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社 関西電研社 filed Critical 株式会社 関西電研社
Priority to JP16788479U priority Critical patent/JPS596238Y2/en
Publication of JPS5685290U publication Critical patent/JPS5685290U/ja
Application granted granted Critical
Publication of JPS596238Y2 publication Critical patent/JPS596238Y2/en
Expired legal-status Critical Current

Links

Landscapes

  • Muffle Furnaces And Rotary Kilns (AREA)

Description

【考案の詳細な説明】 本考案は各種の金属部品、非金属部品、化学材料、或い
は陶歯などの被加熱物を電熱を加熱源とする炉本体で被
冠しつつ真空下で熱処理する電気炉において、その真空
維持機構の安定化、耐久化を図ると共に熱効率を一段と
向上させたものに関する。
[Detailed description of the invention] This invention is an electric heat treatment method that heats various metal parts, non-metal parts, chemical materials, porcelain teeth, and other objects to be heated under vacuum while covering them with a furnace body that uses electric heat as the heating source. This invention relates to a furnace in which the vacuum maintenance mechanism is stabilized and durable, and the thermal efficiency is further improved.

被加熱物を炉本体で被冠しつつ真空下で熱処理する方式
の電気炉は各種部品、材料の熱処理用に広く重宝されて
いるが、従来のものは普通、炉本体の延長壁上などに設
けられる。
Electric furnaces, which heat treat objects under vacuum while covering the object with the furnace body, are widely used for heat treatment of various parts and materials, but conventional furnaces are usually placed on an extension wall of the furnace body. provided.

炉本体内を真空状態に維持するためのOリングなどが炉
本体の熱を受けて損傷し易く、ために被加熱物周囲を高
度の真空状態に維持した債で熱処理することには多少の
難点を有するものであった。
O-rings, etc. that maintain a vacuum state inside the furnace body are easily damaged by the heat of the furnace body, so there are some difficulties in heat treating with a bond that maintains a high degree of vacuum state around the object to be heated. It had a

本考案の目的の一つはその難点を克服して高度の真空の
維持が容易な電気炉を開発することにある。
One of the purposes of the present invention is to overcome these difficulties and develop an electric furnace that can easily maintain a high degree of vacuum.

又、従来のこの種電気炉においては被加熱物は炉本体内
に深々と収納されるかたちに炉本体によって被冠されて
加熱される形式となっていたので炉本体の内容積に比較
して熱処理される被加熱物の量が小さく、ために被加熱
物の熱処理に実際に利用される熱量は炉本体の全消費熱
量に較べて比較的小さなものであった。
In addition, in conventional electric furnaces of this type, the object to be heated is housed deep inside the furnace body and is heated by being covered by the furnace body. The amount of heat treated material is small, and therefore the amount of heat actually used for heat treatment of the material is relatively small compared to the total amount of heat consumed by the furnace body.

本考案の他の目的はこの炉本体の消費熱量の、被加熱物
の熱処理に実際に利用される割合を大として熱エネルギ
ーの有効利用率を向上させることにある。
Another object of the present invention is to increase the proportion of the heat consumed by the furnace body that is actually used for heat treatment of the object to be heated, thereby improving the effective utilization rate of thermal energy.

本考案をその実施例を示す図面に基いて説明すると、第
1図に示すごとく、動力及び制御機構を内蔵する卓10
上にフレーム11を立設し、底部を開口させた円筒状の
炉本体8及びその周辺を保温する外装具13とからなる
電熱炉14を実線矢印のごとく上下に昇降自在となるよ
う走行ブラケット15.15を介して該フレーム11の
側柱16,16間に垂設すると共に、該卓10上の該炉
本体8の直下には、空気吸引口1が上面に開口2し、内
部に冷却水通過空胴9が設けられた基台3を定置する一
方、頂部にカップ状の、多数の被加熱物17を収納し、
載置すべき石英硝子製の透明耐熱性被加熱物載置台4を
設けたうえ、その下方には同じく石英硝子製で不透明耐
熱性とした、二枚の同型円板状の熱線遮断板5,5′を
上下に適宜の間隔をおいてその各中心部を串刺し状にし
て並横設した支柱6を該基台3の中心部に立設すると共
に、それら熱線遮断板5,5′の径よりも稍々大きな内
径を有し、上端部が密閉されると共に開口底部のフラン
ジ状側縁18の底面には基台3に当接することによって
内部を気密状に密閉すべきOリング19が周設された同
じく石英硝子製の透明耐熱性円筒体7をその内胴面が各
熱線遮断板5,5′の周縁にごく近接状となるようにし
つつそれが被加熱物載置台4及び熱線遮断板5,5′を
被冠しつつ該基台3上に該Oリング19を押圧状に当接
して内部を気密状に密閉するようにして立設する一方、
該電熱炉14を第2図の2点鎖線で示すように下降させ
て該円筒体7の外径よりも稍々大きな内径をもつ円筒形
の炉本体8が該円筒体7の被加熱物載置台4周辺部位の
みを被冠して加熱し得る構造としている。
The present invention will be explained based on drawings showing an embodiment thereof.As shown in Fig. 1, a desk 10 with a built-in power and control mechanism;
A running bracket 15 is installed on which a frame 11 is erected, and an electric heating furnace 14 consisting of a cylindrical furnace body 8 with an open bottom and an exterior fitting 13 that insulates the surroundings can be moved up and down as shown by the solid line arrow. .15 between the side columns 16, 16 of the frame 11, and directly below the furnace body 8 on the table 10, an air suction port 1 is opened 2 in the upper surface, and a cooling water While the base 3 provided with the passage cavity 9 is fixed, a large number of cup-shaped objects to be heated 17 are stored at the top,
A transparent heat-resistant heated object mounting table 4 made of quartz glass to be placed is provided, and below it are two identical disc-shaped heat ray shielding plates 5, also made of quartz glass and opaque and heat-resistant. Supports 6 are erected in the center of the base 3, and the pillars 6 are arranged horizontally at appropriate intervals vertically with their centers skewered. The upper end is sealed, and an O-ring 19 is provided on the bottom surface of the flange-shaped side edge 18 at the bottom of the opening to airtightly seal the inside by contacting the base 3. The transparent heat-resistant cylindrical body 7 also made of quartz glass is arranged so that its inner surface is very close to the periphery of each heat ray shielding plate 5, 5', and it is connected to the heated object mounting table 4 and the heat ray shielding plate 4. While covering the plates 5 and 5', the O-ring 19 is erected on the base 3 so as to press against it and seal the inside airtightly,
The electric heating furnace 14 is lowered as shown by the two-dot chain line in FIG. The structure is such that only the surrounding area of the table 4 can be covered and heated.

このような構造の電気炉において、該円筒体7を基台3
から取外して被加熱物載置台4上に被加熱物17を載置
、収納したうえで、再び該円筒体7を被冠し、真空ポン
プ(図示せず)を運転して空気吸引管1経由で該速筒体
7内を真空状に吸引し、電熱炉14をその炉本体8が該
円筒体7の、被加熱物載置台4周辺部位のみを被冠する
位置に下降させたうえで電熱炉14に通電すれば、熱源
となる炉本体8からの放射熱線は透明性の該円筒体7並
びに被加熱物載置台4の側壁を透過して被加熱物17を
所定の温度に昇温させ、所期の熱処理を行い得るもので
ある。
In an electric furnace having such a structure, the cylindrical body 7 is mounted on the base 3.
After removing the heated object 17 from the heated object mounting table 4 and storing it therein, the cylindrical body 7 is covered again, and a vacuum pump (not shown) is operated to remove the heated object 17 from the heated object mounting table 4 through the air suction pipe 1. The interior of the cylindrical body 7 is vacuumed, and the electric heating furnace 14 is lowered to a position where the furnace body 8 covers only the area around the object mounting table 4 of the cylindrical body 7, and then the electric heating is performed. When the furnace 14 is energized, the radiant heat rays from the furnace body 8 serving as a heat source pass through the transparent cylindrical body 7 and the side wall of the object mounting table 4 to raise the temperature of the object 17 to a predetermined temperature. , it is possible to perform the desired heat treatment.

この際、その熱線並びに被加熱物体17からの二次放射
熱線は不透明性の熱線遮断板5,5′に遮られて下方の
基台3には達せず、炉本体8、該円筒体7及び熱線遮断
板5,5′間の僅かな各間隙を通過するもの以外は基台
3に輻射する熱線がないので、基台3は過熱されること
が無く、従ってOIJング19などが損傷を受ける度合
が激減して被加熱物17の順調な熱処理が可能となる。
At this time, the heat rays and the secondary radiation heat rays from the object to be heated 17 are blocked by the opaque heat ray shielding plates 5, 5' and do not reach the lower base 3. Since there are no heat rays radiating to the base 3 other than those passing through the small gaps between the heat ray shielding plates 5 and 5', the base 3 will not be overheated and the OIJ ring 19 etc. will be damaged. The degree of heat treatment is drastically reduced, allowing smooth heat treatment of the object to be heated 17.

また、炉本体8は下方の基台3附近を加熱することなく
、被加熱物17の存在個所のみを被冠して集中的に加熱
できるものであるから、従来のものに較べて小熱容量の
炉本体を用いて充分熱処理を施こすことができ、熱エネ
ルギーの有効利用率は著増する。
In addition, since the furnace body 8 can heat only the area where the object to be heated 17 is present without heating the vicinity of the base 3 below, it has a smaller heat capacity than the conventional one. The furnace body can be used to perform sufficient heat treatment, and the effective utilization rate of thermal energy is significantly increased.

なお、前述の実施例では熱線遮断板5,5′及び被加熱
物載置台4を石英硝子製としているが、これは陶器製な
どとした場合に比して内部からガスを放出して真空度を
低下させるといったトラブル発生が少く、好都合となる
。
In the above-mentioned embodiment, the heat ray shielding plates 5, 5' and the heated object mounting table 4 are made of quartz glass, which releases gas from the inside and lowers the vacuum level, compared to when they are made of ceramic or the like. This is convenient because there are fewer troubles such as lowering the performance.

また基台3が冷却水通過空洞9を内蔵するが、これに導
管12.12を介して冷却水を通過させることによって
基台3を更に効果的に保冷することができる。
Furthermore, the base 3 has a built-in cooling water passage cavity 9, and by passing cooling water through the cavity 9 through the conduits 12, 12, the base 3 can be kept cool even more effectively.

また、前述の実施例では熱線遮断板5,5′を二枚とし
ているが、必要に応じて三枚、四枚、或いは一枚と適宜
増減させ得ることはもとよりである。
Further, in the above-mentioned embodiment, the number of heat ray shielding plates 5, 5' is two, but it goes without saying that the number can be increased or decreased to three, four, or one as required.

更に被加熱物載置台4の底部を不透明性の耐熱硝子製と
して熱線遮断板を兼用させることのあるのももとよりで
ある。
Furthermore, the bottom of the heated object mounting table 4 may be made of opaque heat-resistant glass to serve also as a heat ray shielding plate.

なおまた前述の実施例では第1図に示すごとく炉本体8
に底蓋20をそれが破線矢印のように略90゜、前上方
と後下方の間を弧状の軌跡を画いて移動できるように付
設しているが、これは電熱炉14の使用のために下降さ
せるときにはその下降の邪魔にならないように後下方へ
移動させ、又電熱炉14を一時的に使用停止して上昇さ
せたときには炉本体8の底面を密閉した炉本体内の熱の
逸散を極力防止できるように図ったものである。
Furthermore, in the above-mentioned embodiment, the furnace body 8 as shown in FIG.
The bottom cover 20 is attached so that it can move approximately 90 degrees in an arc-shaped trajectory between the front upper part and the rear lower part as shown by the broken line arrow, but this is because the electric furnace 14 is used. When lowering it, it is moved rearward and downward so as not to interfere with the lowering, and when the electric heating furnace 14 is temporarily stopped and raised, the bottom surface of the furnace body 8 is sealed to prevent heat dissipation within the furnace body. This is intended to be prevented as much as possible.

なお、図面符号の21は熱電対式の温度測定器を示して
いる。
Note that the reference numeral 21 in the drawings indicates a thermocouple type temperature measuring device.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案一実施例の部分縦断正面図、第2図は該
実施例の基台、被加熱物載置台、熱線遮断板、透明性耐
熱硝子筒体及び支柱の各部の組立て斜視図。 1・・・・・・空気吸引管、2・・・・・・開口、3・
・・・・・基台、4・・・・・・被加熱物載置台、5,
5′・・・・・・熱線遮断板、6・・・・・・支柱、7
・・・・・・透明性耐熱硝子筒体、8・・・・・・炉本
体、9・・・・・・冷却水通過空洞、10・・・・・・
卓、11・・・・・・フレーム、17・・・・・・被加
熱物、19・・・・・・Oリング、20・・・・・・底
蓋。
Fig. 1 is a partial longitudinal sectional front view of an embodiment of the present invention, and Fig. 2 is an assembled perspective view of each part of the base, heated object mounting table, heat ray shielding plate, transparent heat-resistant glass cylinder, and support column of the embodiment. . 1...Air suction pipe, 2...Opening, 3.
... Base, 4 ... Heated object mounting table, 5,
5'... Heat ray shielding plate, 6... Support column, 7
...Transparent heat-resistant glass cylinder, 8...Furnace body, 9...Cooling water passage cavity, 10...
Table, 11... Frame, 17... Heated object, 19... O-ring, 20... Bottom cover.

Claims (1)

【実用新案登録請求の範囲】 空気吸引管1が上面に開口2する基台3上に、頂部に被
加熱物載置台4を設けまたその下方に適宜数の熱線遮断
板5.5′・・・・・・を並横設した支柱6を立設する
と共にその被加熱物載置台4及び熱線遮断板5.5′・
・・・・・を被冠する透明性耐熱硝子筒体7をその内胴
面が各熱線遮断板5.5’・・・・・の周縁にごく近接
状となるごとくまたその内部が密閉されるごとく立設す
る一方、炉本体8をして該透明性耐熱硝子筒体7の該被
加熱物載置台4周辺部位のみを被冠しつつ加熱させる構
造としたことを特徴とする真空加熱式電気炉。 2.実用新案登録請求の範囲第1項記載の真空加熱式電
気炉において、該熱線遮断板5.5′・・・・・・が不
透明性耐熱硝子製であるもの。
[Claims for Utility Model Registration] On a base 3 with an air suction pipe 1 having an opening 2 on the upper surface, a heated object mounting table 4 is provided on the top, and an appropriate number of heat ray shielding plates 5,5'... . . . are installed horizontally in parallel, and the heated object mounting table 4 and heat ray shielding plate 5.5'.
. . . The transparent heat-resistant glass cylinder 7 is sealed so that its inner surface is very close to the periphery of each heat ray shielding plate 5.5' . The vacuum heating type is characterized by having a structure in which the furnace body 8 covers only the surrounding area of the object to be heated table 4 of the transparent heat-resistant glass cylinder 7 and heats it, while the entire structure is erected. Electric furnace. 2. The vacuum heating electric furnace according to claim 1, wherein the heat ray shielding plates 5,5' are made of opaque heat-resistant glass.
JP16788479U 1979-12-03 1979-12-03 Vacuum heating electric furnace Expired JPS596238Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16788479U JPS596238Y2 (en) 1979-12-03 1979-12-03 Vacuum heating electric furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16788479U JPS596238Y2 (en) 1979-12-03 1979-12-03 Vacuum heating electric furnace

Publications (2)

Publication Number Publication Date
JPS5685290U JPS5685290U (en) 1981-07-09
JPS596238Y2 true JPS596238Y2 (en) 1984-02-25

Family

ID=29678721

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16788479U Expired JPS596238Y2 (en) 1979-12-03 1979-12-03 Vacuum heating electric furnace

Country Status (1)

Country Link
JP (1) JPS596238Y2 (en)

Also Published As

Publication number Publication date
JPS5685290U (en) 1981-07-09

Similar Documents

Publication Publication Date Title
US3002895A (en) Incubator-shaker apparatus
TWI785587B (en) Heat treatment device
TW303498B (en)
JP2000003918A (en) Semiconductor heat treatment apparatus and method
US3301541A (en) Heat treating furnace with circulated gas quench
JP2927877B2 (en) Uniform heating structure of semiconductor manufacturing equipment
JPH0313324Y2 (en)
JP4071047B2 (en) Heating / cooling equipment, vacuum processing equipment
JP2700243B2 (en) Heating equipment
JP3382064B2 (en) Heat treatment equipment
JPH0381295B2 (en)
JP2510035Y2 (en) Heat treatment furnace
EP0329378A2 (en) Vacuum heat treating furnace
JP2976363B2 (en) Vacuum heat treatment equipment
JPS6021389Y2 (en) heat treatment furnace
JPH063795B2 (en) Heat treatment equipment for semiconductor manufacturing
JPH0445031Y2 (en)
JPH0222317B2 (en)
JPH0848595A (en) Sheet type vapor growth device
JPS6124809Y2 (en)
JPS61279619A (en) Heating method for material to be heated in roller hearth type vacuum furnace
JPS6250755B2 (en)
JPH0228058B2 (en) KANETSUCHORISOCHI
KR860001742Y1 (en) Epitaxial device
JPS6039366B2 (en) electric cooker