JPS596427Y2 - 分光器用試料台 - Google Patents
分光器用試料台Info
- Publication number
- JPS596427Y2 JPS596427Y2 JP15493476U JP15493476U JPS596427Y2 JP S596427 Y2 JPS596427 Y2 JP S596427Y2 JP 15493476 U JP15493476 U JP 15493476U JP 15493476 U JP15493476 U JP 15493476U JP S596427 Y2 JPS596427 Y2 JP S596427Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- plate
- thin
- shape
- stepped portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15493476U JPS596427Y2 (ja) | 1976-11-17 | 1976-11-17 | 分光器用試料台 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15493476U JPS596427Y2 (ja) | 1976-11-17 | 1976-11-17 | 分光器用試料台 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5371484U JPS5371484U (da) | 1978-06-15 |
| JPS596427Y2 true JPS596427Y2 (ja) | 1984-02-28 |
Family
ID=28763082
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15493476U Expired JPS596427Y2 (ja) | 1976-11-17 | 1976-11-17 | 分光器用試料台 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS596427Y2 (da) |
-
1976
- 1976-11-17 JP JP15493476U patent/JPS596427Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5371484U (da) | 1978-06-15 |
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