JPS5979700A - Detector of vibration - Google Patents
Detector of vibrationInfo
- Publication number
- JPS5979700A JPS5979700A JP18948182A JP18948182A JPS5979700A JP S5979700 A JPS5979700 A JP S5979700A JP 18948182 A JP18948182 A JP 18948182A JP 18948182 A JP18948182 A JP 18948182A JP S5979700 A JPS5979700 A JP S5979700A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- movable electrode
- vibration
- case
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/46—Special adaptations for use as contact microphones, e.g. on musical instrument, on stethoscope
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Details Of Audible-Bandwidth Transducers (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は物体の振動を検知して電気信号に変換する、例
えば外耳道内に装着して人が話をした時に生じる骨伝導
振動を検知し、これを音声tm電気信号変換するイヤマ
イクロホンに応用し得る振動検知装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention detects the vibrations of an object and converts them into electrical signals.For example, the device is worn in the ear canal to detect bone conduction vibrations that occur when a person speaks, and converts this into audio TM electrical signals. The present invention relates to a vibration detection device that can be applied to a converting ear microphone.
従”来、この槙の振動検知装置、例えばイヤマイクロホ
ンに使用する振動検知装wは#41図a、bに示すよう
な構造のものが利用されていた。Conventionally, Maki's vibration detecting device, for example, a vibration detecting device w used in an ear microphone, had a structure as shown in Figures #41 a and b.
この振動検知装置は、圧電素子を飲用したものであり、
図において、1は外耳道内に挿入可能な形状に形成はれ
た金属または曾成樹Bh姶によるケース、2は該ケース
1の開口部に嵌虜されるIIIJじ〈合rii、樹脂に
よる支持体、3は該支持体2に一端が固定され片持ち支
持された圧電素子にして、リード線3&によって出力が
外部に取り出される構造となっている。This vibration detection device uses a piezoelectric element,
In the figure, 1 is a case made of metal or sojournal wood formed into a shape that can be inserted into the ear canal, 2 is a support made of resin, which is fitted into the opening of the case 1; Reference numeral 3 designates a piezoelectric element whose one end is fixed to the support body 2 and supported in a cantilevered manner, and the output is taken out to the outside by a lead wire 3 &.
而して、装着者が話をすると、骨伝導による音声振帥が
ケースIK伝達され、該ケース1から支持体2を介して
圧1!累子3に伝達される。従って圧vL素子3が振動
し、その出力がリード線3亀を介して電気信号として得
られるものである。When the wearer speaks, sound vibrations due to bone conduction are transmitted to the case IK, and pressure 1! is transmitted from the case 1 through the support 2! It is transmitted to Yuko 3. Therefore, the pressure VL element 3 vibrates, and its output is obtained as an electrical signal via the lead wire 3.
ところで、上記した圧電素子3は、第2図イの周波数特
性で示す如く、ある周波数において非常に高いピークを
生じる。そのためにピークの周波数では感度が著しく良
く、その他の帯域では感度が低いという欠点を有し、ま
た圧電素子固有のノイズを発生する外、リード線3aの
圧′RL素子3への接続が面旬]である等の欠点を有し
ていた。By the way, the piezoelectric element 3 described above produces a very high peak at a certain frequency, as shown in the frequency characteristic of FIG. 2A. Therefore, the sensitivity is extremely high at the peak frequency, but the sensitivity is low at other frequencies.In addition to generating noise inherent to piezoelectric elements, the connection of the lead wire 3a to the pressure RL element 3 is difficult. ].
不発IJIは紙上の欠点を是正せんとするもので、その
目的とするところは、感度が良好であると共に小型で太
さな出力を得ることができ、かつ所望の周波数特性の出
力な倚ることが谷易な振動検知装置紅を提供するにある
。The unexploded IJI is intended to correct the shortcomings on paper, and its purpose is to have good sensitivity, be able to obtain a small and thick output, and have an output with the desired frequency characteristics. We are here to provide you with an easy-to-use vibration detection device.
次に不発り」をエレクトレットを使用した場合の実施例
について第3図以降において説明する。Next, an example in which an electret is used will be described with reference to FIG. 3 and subsequent figures.
第3図a、bにおいて、4は金属製の有底円筒状のケー
ス、5は該ケース4の底部に嵌挿されたリング状の金属
スペーサ、6は金M箔やポリエステルフィルムに金稙蒸
−ij吟の処理を施した可4vJ電極にして、上記金属
スペーサ5に周縁部が電気的に接触して張1λ固定され
ている。なお、本実施例においては、少なくとも片面に
重り6!Lを貼着して実質的に可動電極6の質11を大
きくしている。In FIGS. 3a and 3b, 4 is a metal cylindrical case with a bottom, 5 is a ring-shaped metal spacer fitted into the bottom of the case 4, and 6 is a gold foil or polyester film coated with gold foil. The electrode is made of a 4vJ electrode which has been subjected to a treatment of -ijgin, and its peripheral portion electrically contacts the metal spacer 5 and is fixed with a tension of 1λ. In addition, in this embodiment, the weight 6! is placed on at least one side! By pasting L, the quality 11 of the movable electrode 6 is substantially increased.
Tは上記可動電極6の他面に11ねられるリング状の絶
縁スペーサ、8は合!戊樹脂製等の絶縁材による支持体
にして、上記絶縁スペーサIに1「ねられ釘
ている。そしてこの9%体Bには凹部8m、8bが両1
111而に形成されている。9は支持体8の凹部8a内
に接看固定された固定111.極にして、上−川m i
t電極と対応する面に永久的に電荷を1呆持するエレク
トレット10が貼着されている。11は1W界効果トラ
ンジスタ(FET)にして、上記支持体8の凹111t
ab内に埋設され、そのゲート111Lが上hピ固定電
極9と圧着接続されている。12は上記支持体8に重ね
られた印刷配線板に(−て、露出面にアースパターン1
21Lと細分パターン12bとが形成され、FKTll
のソース11bとドレイン110が夫々接続されている
。T is a ring-shaped insulating spacer 11 attached to the other surface of the movable electrode 6, and 8 is a joint! A support made of an insulating material such as resin is screwed into the insulating spacer I by 1 inch.The 9% body B has recesses 8m and 8b on both sides.
It is formed as 111. 9 is a fixing member 111 fixed in contact with the recess 8a of the support body 8. As a pole, Kamikawa mi
An electret 10 that permanently retains a charge is attached to the surface corresponding to the t-electrode. 11 is a 1W field effect transistor (FET), and the recess 111t of the support body 8 is
ab, and its gate 111L is crimped and connected to the upper h-pi fixed electrode 9. 12 is a printed wiring board superimposed on the support 8 (-), and a ground pattern 1 is provided on the exposed surface.
21L and subdivision pattern 12b are formed, FKTll
The source 11b and drain 110 of are connected to each other.
このようにケース4内にIir+次部品を挿入17終え
た後、該ケース4の開口部4aを内方に折曲して全部品
をカシメ固定して形成する。After inserting 17 the Iir+ parts into the case 4 in this way, the opening 4a of the case 4 is bent inward and all the parts are caulked and fixed.
次に上記した構造に基いて)助作な説明するに、今、ケ
ース4に振動が加わると、可動電極6が振動し、固定電
極9との間に容重変化が発生し、これが電気イ=号とし
てFET11に印加源れる。Next, based on the above-mentioned structure), when vibration is applied to the case 4, the movable electrode 6 vibrates, causing a change in volume and weight between it and the fixed electrode 9, which causes an electrical The voltage source is applied to FET 11 as a signal.
すなわち、FKTllに印加される電圧VはV、−Q1
0
となる。That is, the voltage V applied to FKTll is V, -Q1
It becomes 0.
なお、Qはエレクトレット10の電荷、Cは可動電極6
と固定電極9との間の6値である。Note that Q is the charge of the electret 10, and C is the charge of the movable electrode 6.
and the fixed electrode 9.
ここで、FlCTI 1を設けたのは、出力される信号
のインピーダンスが高いので、インピーダンスを下げる
ためである。そしてFET11のソース110は印刷P
線板12のアースノ(ターン12aを介してケース4に
接続されアースされる。Here, the reason why FlCTI 1 is provided is to lower the impedance since the impedance of the output signal is high. And the source 110 of FET11 is printed P
The wire plate 12 is connected to the case 4 through the ground terminal (turn 12a) and grounded.
なお、FET11を接続してインピーダンスを低下させ
るだめの回路を第4図に示す。Incidentally, a circuit for connecting the FET 11 to lower the impedance is shown in FIG.
而して、上記した如く可動電極6は蒸着層の重みにより
、良く外SW動に対し大きく振動するので、出力電圧と
して大きなものが得られると共に第2図イの如く全体と
して高出力の平坦な周波数特性となる。As mentioned above, the movable electrode 6 vibrates greatly due to the weight of the vapor deposited layer in response to the external SW movement, so a large output voltage can be obtained, and a flat, high output voltage can be obtained as a whole, as shown in Figure 2A. It becomes a frequency characteristic.
捷た、本実施例にあっては、固定電極9とFKTllの
ゲート111Lをケース4にて囲っているので、高キイ
ンピーダンスの出力であってもシールド効果によって訪
専ノイズを除去することかできる。In this embodiment, since the fixed electrode 9 and the gate 111L of the FKTll are surrounded by the case 4, the noise can be removed by the shielding effect even in the case of a high impedance output. .
第5図は上記した本発明に係る振動検知装置ムを取付け
た外耳道内水方向通話装置を圧(2、Br[外耳道内に
押入される拒鉛ダイキャスト叫の+1樽犬なる材料で形
成された挿入体に1.て、貫通孔B1と取付孔B、とが
形成されている。そしてこのJIV。FIG. 5 shows the ear canal water directional communication device equipped with the above-mentioned vibration detection device according to the present invention. 1. A through hole B1 and a mounting hole B are formed in the insert body.
付札B、内には、上記した振動検知@e#人が仲人固′
iEきれている。Cは挿入体Bの背面に接着固2j!さ
れる外部ダンパにして、硬度10°以上の成型シリコン
ゴム、ウレタンゴムによって形成されて材料によって形
成されている。そしてこの外体りにはスピーカ収納部り
、が形成される。Eはスピーカにして、弾性係数の高い
材料(例えば一定の形状を保持し得るシリコンゲルの成
形物)で作られたスピーカ用ダンパFによって浮かされ
た状態でスピーカ収納部り、に収納されている。Gはス
ビー力Eの故音部E、に一端が接続された弾性係数の大
なる肉薄のシリコンチューブより成る音導管にして、外
部ダンパCの空間を介して挿入体Bの貫通孔B、内に挿
入されている。Hは該音響管Gの他hi〜が接続された
金属パインにして、先端は挿入体Bの先端に開口されて
いる。■は全域パイプHな挿入体Bに弾性的に支持する
音導管ダンパにして、弾性係数の大きな材料が使用され
る。すなわち、上口己スピーカEのダンパFと同じよう
な材料を用いる。Jは外体りの表面に固定された中継基
板にして、振動検知装置ムとスピーカEよりのリード線
人、とE、とが接線されている。そしてこのリード線入
、とE、とは、肯い弾性係数が必要であることから極細
より線が1史用されている。Attachment B, inside is the above-mentioned vibration detection @e# person is the matchmaker'
iE is exhausted. C is glued firmly to the back of insert B! The external damper is made of molded silicone rubber or urethane rubber with a hardness of 10° or more. A speaker housing portion is formed in this outer body. E is a speaker, and is housed in a speaker storage part in a suspended state by a speaker damper F made of a material with a high elastic modulus (for example, a molded silicone gel that can maintain a certain shape). G is a sound conduit made of a thin silicone tube with a large elastic modulus, one end of which is connected to the sound part E of the sound force E. is inserted into. H is a metal pine to which the acoustic tube G and other parts hi are connected, and its tip is opened at the tip of the insert B. (2) is a sound pipe damper that is elastically supported by the insert B, which is a pipe H across the entire area, and is made of a material with a large elastic modulus. That is, the same material as the damper F of the upper speaker E is used. J is a relay board fixed to the surface of the outer body, and the lead wire from the vibration detecting device and the speaker E is tangential to E. For the lead wires and E, extremely thin stranded wires have been used because they require a positive elastic modulus.
Kは中継基&Jを介してリード線人1 とE、に接続さ
れる外部リード線、Lは外体りの表面をへい、外部リー
ド線に1でもモールドした外部である。K is an external lead wire that is connected to lead wires 1 and E via a relay group &J, and L is an external part that is passed through the surface of the outer body and even 1 is molded on the external lead wire.
そしてリード線人、は外部リード1ilKを介して送信
機に、またリード1hは同じく外部リード線Kを介して
受信機に接続されている。The lead wire 1 is connected to the transmitter via an external lead 1ilK, and the lead 1h is connected to the receiver via an external lead K.
次に動作について説明するに、使用者が発生する音声は
骨伝導振動として挿入体Bに伝達されて、振動検知装置
ムで振動から電気信号に変換きnる。Next, to explain the operation, the sound generated by the user is transmitted to the insert B as bone conduction vibration, and the vibration is converted into an electric signal by the vibration detection device.
そしてこの*気lTh号はインピーダンス変換回路でイ
ンピーダンス変換され、リード線人2、中継基板Jを介
して外部リード線Kに送出され、該外部リード腺により
送信機に送られ電波とl−て放射され(または有線によ
り)、相手方に伝送される。The impedance of this signal is converted by the impedance conversion circuit, and sent to the external lead wire K via the lead wire 2 and the relay board J. The signal is then sent to the transmitter by the external lead wire and radiated as a radio wave. (or by wire) and transmitted to the other party.
一方相手方よりの音声伝号は受傷偵で無線として、ある
いは有線で父信され、外部リード線に1リード線E、を
介してスピーカEK伝送される。On the other hand, the voice transmission from the other party is transmitted to the patient via radio or wired, and is transmitted to the speaker EK via the external lead wire 1 lead wire E.
従ってスピーカXが駆動されて音声は音2#管G1金端
パイプHを介して外耳道内に放音される。Therefore, the speaker X is driven and the sound is emitted into the ear canal through the sound 2# tube G1 and the metal end pipe H.
ところで、口で発生する音声は、骨伝導により外耳道に
伝達される間に受ける音声の減衰の周波数特性は、周波
数が高くなるに従って対数目盛で略直線的に減涙する。Incidentally, the frequency characteristic of the attenuation of sound generated in the mouth while being transmitted to the external auditory canal by bone conduction decreases approximately linearly on a logarithmic scale as the frequency increases.
そこでマイクロホンを口から発生する音声に近づけ明瞭
度も鍋くするには、周波数を必要音声帯域内で補正する
必閥がある。Therefore, in order to bring the microphone closer to the sound generated from the mouth and improve the intelligibility, it is necessary to correct the frequency within the required audio band.
本発明は、上記した振動検知装置1 kを上記したした
骨伝導による周波数特性を考慮して、第6図a −Cの
如く可動電極6に孔6bまたはスリット6Cを形成し、
該可動電極6の振動、特に高域での振動に対し良く追随
するようにした。このように可vn心=eに孔6b、ス
リット60を形成すると、第2図の特性ハの如く低域か
ら高域に向って高くなるので、骨伝導による周波数特性
を補正できて平坦な特性の出力を得ることができる。The present invention provides the above-described vibration detection device 1k by forming holes 6b or slits 6C in the movable electrode 6 as shown in FIGS.
It is designed to follow vibrations of the movable electrode 6 well, especially vibrations in high frequencies. When the holes 6b and slits 60 are formed in the vn core = e in this way, the characteristics increase from the low range to the high range as shown in Figure 2, so the frequency characteristics due to bone conduction can be corrected and the characteristics are flat. You can get the output of
なお、孔6bやスリット60の形状は図示のものに限定
されるものではない。Note that the shapes of the holes 6b and slits 60 are not limited to those shown in the drawings.
第7図aは、可動電極6の振動幅の大きい側にゴム等の
弾性体6dを固此したもので、可動電極6が揚動してエ
レクトレット10に接触することを防止するために設け
たものである。固定電極9と可動電極6間には制い電圧
が印加されているため、両7ヒ極9.6は電気的に引き
合っていて接触が起り易く、従って接触しても大きな衝
撃を起さないようにしている。In FIG. 7a, an elastic body 6d such as rubber is fixed to the side of the movable electrode 6 where the vibration width is large, and is provided to prevent the movable electrode 6 from lifting and coming into contact with the electret 10. It is something. Since a restraining voltage is applied between the fixed electrode 9 and the movable electrode 6, both 7 hypopoles 9 and 6 are electrically attracted to each other and contact is likely to occur, so even if they come into contact, a large impact will not occur. That's what I do.
また第7図すは可動電極6にブチルゴム等の抵抗体6e
を固定したもので、可動電極6のもつ固有振動周波数で
のQの高い共振を防止するために設けたものである。そ
してこの抵抗体6dを取付けて、Qを低下させ所望の周
波数付性な倚るよりにする。In addition, Fig. 7 shows a resistor 6e made of butyl rubber etc. on the movable electrode 6.
is fixed, and is provided to prevent high Q resonance at the natural vibration frequency of the movable electrode 6. Then, this resistor 6d is attached to lower the Q and obtain a desired frequency characteristic.
なお、夾施例においては、1!す61Lと弾性体6dま
たは抵抗体6eを別のものとしたが、弾杓体6dあるい
は抵抗体6eに1りとしての役11=likねさせるこ
ともできる。In addition, in the case of confinement, 1! Although the spring 61L and the elastic body 6d or the resistor 6e are separate, the elastic body 6d or the resistor 6e can also serve as one.
また、上記においてはエレクトレットの場合について説
明したが、静電形のものにも応用できる。Moreover, although the case of an electret was explained above, it can also be applied to an electrostatic type.
本発明は上記したように、固定電極に可動電極を対向さ
せると共に可動電極の少なくとも片11IIに1plり
を取付けて笑質的な質量を大きくしたことにより、小型
で、かつケースに加わる振動を良く検知して感度が良好
であると共に対向面接か大きいことから大きな出力が侍
られ、1だイヤマイクに応用した場合には可動電極に孔
やスリットを形成することによって骨伝導による高置の
低下を補正して出力として平坦な周波数特性を得ること
ができる等の効果を有するものである。As described above, the present invention has a movable electrode facing a fixed electrode, and a 1 PL is attached to at least one piece 11II of the movable electrode to increase the material mass, thereby making the present invention compact and suppressing vibrations applied to the case. It has good detection sensitivity and a large output due to the large face-to-face interface, and when applied to an ear microphone, it compensates for the drop in height due to bone conduction by forming holes or slits in the movable electrode. This has effects such as being able to obtain flat frequency characteristics as an output.
第1図a、bは従来の出室索子を使用した振動検知装置
Mの4jltb而図および同上のb−b断凹図、m2図
は周波数特性図、第3図a、bは本発明に係る振動検知
装置の横断面図および同上の左側面図、第4図は本発明
装置の1OU路図、第5図は本発明装置を外耳進向双方
向通話装置に応用した横断面図、第6図a〜0は可動t
&の種々なる形状の正+’in図、第7図a、bは可動
[極に弾性体および抵抗体を固定した場合の正面図であ
る。
4・・・ケース、6・・・可動電極、6a・・・重り、
9・・・固定ffl&、1 G・・・エレクトレット。
1
()
第1図
(b) (a)
第2図
周〉反故−歩 t0Figures 1a and b are a 4jltb diagram of a vibration detection device M using a conventional exit cord and a bb cutaway diagram of the same, Figure m2 is a frequency characteristic diagram, and Figures 3a and b are those of the present invention. FIG. 4 is a 1OU path diagram of the device of the present invention, and FIG. 5 is a cross-sectional view of the device of the present invention applied to a two-way conversation device directed toward the outer ear. Figure 6 a to 0 are movable t
Figures 7a and 7b are front views of the case where an elastic body and a resistor are fixed to the movable pole. 4... Case, 6... Movable electrode, 6a... Weight,
9...Fixed ffl&, 1 G...Electret. 1 () Fig. 1 (b) (a) Fig. 2 circumference〉Failure-step t0
Claims (3)
に対向して配置された可動′#L極とより形成し、かつ
可動電極の少なくとも片肉に可fiI]電極としての質
1゛を増すだめの重りを付けたことを特徴とする振動検
知装置。(1) It is formed of a fixed electrode fixed to a case and a movable L pole placed opposite to the fixed electrode, and has quality 1 as a movable electrode on at least one side of the movable electrode. A vibration detection device characterized by having an additional weight attached.
したことを特徴とする特許r1v求の範囲第1珈記載の
振動検知装置。(2) The vibration detection device according to Section 1 of Patent R1V, characterized in that a hole or slit is formed in the -1 dynamic electrode.
けたことを特徴とする特許請求の範囲第1項記載の振動
検知装置。(3) The vibration detection device according to claim 1, wherein an elastic body or a resistor is attached to the movable electrode.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18948182A JPS5979700A (en) | 1982-10-28 | 1982-10-28 | Detector of vibration |
| US06/480,723 US4516428A (en) | 1982-10-28 | 1983-03-31 | Acceleration vibration detector |
| DE8383110478T DE3373858D1 (en) | 1982-10-28 | 1983-10-20 | Acceleration vibration detector |
| EP83110478A EP0107843B1 (en) | 1982-10-28 | 1983-10-20 | Acceleration vibration detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18948182A JPS5979700A (en) | 1982-10-28 | 1982-10-28 | Detector of vibration |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5979700A true JPS5979700A (en) | 1984-05-08 |
Family
ID=16241980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18948182A Pending JPS5979700A (en) | 1982-10-28 | 1982-10-28 | Detector of vibration |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5979700A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63165987U (en) * | 1986-09-25 | 1988-10-28 | ||
| WO1995035485A1 (en) * | 1994-06-20 | 1995-12-28 | Sony Corporation | Vibration sensor and navigation apparatus |
| US5798460A (en) * | 1994-06-20 | 1998-08-25 | Sony Corporation | Vibration sensor employing a flexible diaphragm and an electret film |
| JP2003052690A (en) * | 2001-08-20 | 2003-02-25 | Akoo:Kk | Capacitive heart sound microphone with acceleration detected by attaching a weight to a movable membrane. |
| WO2005024360A1 (en) * | 2003-09-02 | 2005-03-17 | Hosiden Corporation | Vibration sensor |
| WO2005029013A1 (en) * | 2003-09-22 | 2005-03-31 | Hosiden Corporation | Vibration sensor |
| WO2005029012A1 (en) * | 2003-09-22 | 2005-03-31 | Hosiden Corporation | Vibration sensor |
| WO2005111555A1 (en) * | 2004-05-18 | 2005-11-24 | Hosiden Corporation | Vibration sesor |
| JP2008148283A (en) * | 2006-12-06 | 2008-06-26 | Korea Electronics Telecommun | Condenser microphone having flexible spring-type diaphragm and method for manufacturing the same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58120399A (en) * | 1982-01-13 | 1983-07-18 | Toshiba Corp | Electrostatic type electro-acoustic transducer |
-
1982
- 1982-10-28 JP JP18948182A patent/JPS5979700A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58120399A (en) * | 1982-01-13 | 1983-07-18 | Toshiba Corp | Electrostatic type electro-acoustic transducer |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63165987U (en) * | 1986-09-25 | 1988-10-28 | ||
| WO1995035485A1 (en) * | 1994-06-20 | 1995-12-28 | Sony Corporation | Vibration sensor and navigation apparatus |
| US5798460A (en) * | 1994-06-20 | 1998-08-25 | Sony Corporation | Vibration sensor employing a flexible diaphragm and an electret film |
| US5827965A (en) * | 1994-06-20 | 1998-10-27 | Sony Corporation | Navigation device employing an electret vibration sensor |
| US6026690A (en) * | 1994-06-20 | 2000-02-22 | Sony Corporation | Vibration sensor using the capacitance between a substrate and a flexible diaphragm |
| JP2003052690A (en) * | 2001-08-20 | 2003-02-25 | Akoo:Kk | Capacitive heart sound microphone with acceleration detected by attaching a weight to a movable membrane. |
| WO2005024360A1 (en) * | 2003-09-02 | 2005-03-17 | Hosiden Corporation | Vibration sensor |
| US7430915B2 (en) | 2003-09-02 | 2008-10-07 | Hosiden Corporation | Vibration sensor |
| WO2005029013A1 (en) * | 2003-09-22 | 2005-03-31 | Hosiden Corporation | Vibration sensor |
| WO2005029012A1 (en) * | 2003-09-22 | 2005-03-31 | Hosiden Corporation | Vibration sensor |
| WO2005111555A1 (en) * | 2004-05-18 | 2005-11-24 | Hosiden Corporation | Vibration sesor |
| JP2008148283A (en) * | 2006-12-06 | 2008-06-26 | Korea Electronics Telecommun | Condenser microphone having flexible spring-type diaphragm and method for manufacturing the same |
| US8422702B2 (en) | 2006-12-06 | 2013-04-16 | Electronics And Telecommunications Research Institute | Condenser microphone having flexure hinge diaphragm and method of manufacturing the same |
| US8605920B2 (en) | 2006-12-06 | 2013-12-10 | Electronics And Telecommunications Research Institute | Condenser microphone having flexure hinge diaphragm and method of manufacturing the same |
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