JPS5981002A - Coating tool and its manufacturing method - Google Patents

Coating tool and its manufacturing method

Info

Publication number
JPS5981002A
JPS5981002A JP19058182A JP19058182A JPS5981002A JP S5981002 A JPS5981002 A JP S5981002A JP 19058182 A JP19058182 A JP 19058182A JP 19058182 A JP19058182 A JP 19058182A JP S5981002 A JPS5981002 A JP S5981002A
Authority
JP
Japan
Prior art keywords
coating
coating layer
layer
temperature
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19058182A
Other languages
Japanese (ja)
Other versions
JPH0235027B2 (en
Inventor
Katsuya Yamamoto
勝也 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAN ALLOY KOGYO KK
Original Assignee
SAN ALLOY KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAN ALLOY KOGYO KK filed Critical SAN ALLOY KOGYO KK
Priority to JP19058182A priority Critical patent/JPS5981002A/en
Publication of JPS5981002A publication Critical patent/JPS5981002A/en
Publication of JPH0235027B2 publication Critical patent/JPH0235027B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/403Oxides of aluminium, magnesium or beryllium

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)

Abstract

PURPOSE:To prolong the life of a tool by improving resistance against fused deposition and wear by directly forming an aluminium oxide coating layer over the tool surface at temperature lower than that of a specific coating reaction. CONSTITUTION:An aluminum oxide coating layer is directly formed over the tool surface at temperature lower than the coating reaction temperature of 400 deg.C by a chemical vacuum evaporation method. A host material is oxidized at reaction temperature over 400 deg.C, and a decarburized layer is formed between the host material and the coating layer, resulting in the reduction of an adhesive property. Upon performing the chemical vacuum evaporation, at least one kind of diethyl aluminium chloride, triethylaluminium chloride, triethylaluminium, and ethyl aluminium dichloride is used, and a mixture of hydrogen gas and methane gas is used as carrier gas.

Description

【発明の詳細な説明】 本発明は−・1溶着性が極めて高くしかも非常に高い耐
摩耗f1、靭性を有する被覆層で保護された超硬質合金
製、特殊鋼製等の被覆工具に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a coated tool made of cemented carbide, special steel, etc. that is protected by a coating layer that has extremely high welding properties and extremely high wear resistance f1 and toughness. be.

周期表のIV八、VA、 VIA族の内の1種又は2種
V)。
One or two of the groups IV8, VA, and VIA of the periodic table (V).

−1−の遷移金属元素の炭化物及び/又は窒化物からな
る超硬質合金]二具、特殊鋼]−具等の1−具表面にI
)炭化チタン、ii)窒化チタン、 111)酸化アル
ミニューム、あるいは1シ献シ八、VI八への炭化物、
窒化物、酸化物の1種又は2種からなる単層、二重層、
二重層及び多重層を被筏して耐用に命を飛WIJ的に向
トさせた被覆超硬質合金工具、被覆特殊鋼工具は広く知
られており、既に広く利用されている。
-1- Super hard alloy consisting of carbides and/or nitrides of transition metal elements]2 tools, special steel]-tools, etc.
) titanium carbide; ii) titanium nitride; 111) aluminum oxide;
Single layer or double layer consisting of one or two types of nitrides and oxides,
Coated super hard alloy tools and coated special steel tools coated with double layers and multiple layers to increase durability and durability are widely known and have already been widely used.

一般に、」二足超硬質合金工具や特殊wII−具の表面
に酸化アルミニュームを被覆するためには、A (CC
i+ l−12,v ス、、 C02h’スヲ適当に(
7?:合し、その02分圧を10−4〜10−’気圧に
調筋して反応炉に導入し、950 ’(:〜1050°
Cの温度で適当な時間保持すれば良いことが知られてい
る。その化学式は、 2 A f、 Ce 3+ 311,0→A Q 20
3+ G II C(lであると考えられる。
In general, in order to coat aluminum oxide on the surface of two-legged cemented carbide tools and special wII-tools, A (CC
i+ l-12,v Su,, C02h' Suwo suitably (
7? :, adjust the partial pressure to 10-4 to 10-' atmosphere, introduce it into the reactor, and heat it to 950' (: ~1050°
It is known that it is sufficient to maintain the temperature at C for an appropriate period of time. Its chemical formula is: 2A f, Ce 3+ 311,0→A Q 20
3+ G II C (l).

かかる製造方法を用い、工具の表面に直接に酸化アルミ
ニューム層を形成して単層被覆を施すことか理論」−シ
えられないことはないか、かかる製造方法は、基本的(
翻o (1(1’C程度の高温下で行なう必要があるた
め、材質的に超硬質合金であれ、特殊鋼であれ、ljJ
祠表面表面化され、著しい脱炭層か生成され、被覆がき
わめて1髭弱となって、到j戊実用に供する、−とかで
きない問題かある。
Is it possible to use this manufacturing method to directly form an aluminum oxide layer on the surface of the tool to provide a single layer coating?
Translation (1) Because it is necessary to carry out the process at a high temperature of about 1'C, whether the material is ultra-hard alloy or special steel, ljJ
There is a problem in that the surface of the ashes is surfaced, a significant decarburized layer is formed, and the coating becomes less than one layer thick, making it impossible to put it to practical use.

、二のため、従来に+3いては、工具表面にまず炭化チ
タン層を形成して母材を保護したうえで酸比アルミニュ
ーム層を」1記の方法により炭化チタンj(4の1[層
に形成する方法か一般に行なわれてす゛・る。
, 2, in the past, a titanium carbide layer was first formed on the tool surface to protect the base material, and then an acid-ratio aluminum layer was formed using the method described in 1. This is a commonly used method of forming.

ががる従来プロセスでは、 (+ ) I o o n °Crfiff&の高温下
での酸化雰囲気では1:J相に多大な悪影響を与えるこ
と。
In the conventional process, an oxidizing atmosphere at a high temperature of (+)I o o n °Crfiff& has a significant adverse effect on the 1:J phase.

(2)そのために本来無意味なr上材を保護するための
、1毛被覆、肌iL被覆を行なわなければならず、経済
的なロスか1・可避であること。
(2) For this reason, it is necessary to perform hair coating and skin iL coating to protect the R upper material, which is essentially meaningless, and the economic loss is 1. avoidable.

(:))同一反応炉で少なくとも2JT+の被覆雰囲気
を生成しなけれは゛ならないために、ガスの置換に時間
と無駄なガスの流失を要するこ−と。
(:)) Since a coating atmosphere of at least 2 JT+ must be generated in the same reactor, time and wasteful gas flow are required for gas replacement.

(4) li)材の材質的な限界に近い温度が反応温度
であるために実際の量産ベースでは反応温度としては下
限で作業げざるを11Fず、歩留りが悪く品質が安定し
ないこと。
(4) li) Since the reaction temperature is close to the material limit of the material, in actual mass production, the reaction temperature must be set at the lower limit of 11F, resulting in poor yield and unstable quality.

(5)キャリャーカ゛スとして純度の高い物を必要とし
、非常に高価格なものとなっており、コスト的ネックと
なっていること。
(5) It requires a carrier gas of high purity and is extremely expensive, creating a cost bottleneck.

等々の問題点から経済的に多大なコストアップ要因とな
り、製品の品質が不安定となるうえ、価格的にも極めて
高11■1とな1)、この種の被覆工具の普及を阻害す
る要因となっていfこものと考えられる。
Due to these problems, it becomes a major cost increase factor, the quality of the product becomes unstable, and the price is extremely high11. Therefore, it can be considered as f-komono.

本発明者等は−1−記従来の諸問題を解消すべく研究χ
験を繰り返した結果、本発明を完成するに至ったもので
ある。
The present inventors conducted research χ in order to solve the conventional problems described in -1-
As a result of repeated experiments, the present invention was completed.

本発明の第1の目的は、酸化アルミニューム被覆をその
本来の[1(1月こ従って母材に河んらのマイナス要因
を!jえずに直接母材に被覆しjこ被覆]−具を提(共
する、二とにある。
The first object of the present invention is to coat the aluminum oxide coating directly onto the base material without causing any negative factors to the base material. To present the ingredients.

本発明の第2の目的は、安価かつ容易に寅施することか
出来しがも量産レベルで安定した品質を保証することの
可能な被覆工具の製造方法を提供孝−る、二とにある。
The second object of the present invention is to provide a method for manufacturing a coated tool that can be inexpensively and easily applied, and that can guarantee stable quality at a mass production level. .

本イC明の第1のII的は、本発明によれは、被覆度1
もl晶)臭を・100℃以下に設定することによって達
成される。即ち1.−1. (110℃を越える被覆反
応温度1ζて゛は、lit材の酸化を招来し、また11
材と被覆層との間に111L炭層が形成され、被覆層の
密着性か賎1・シ、被覆層が脆化する。
The first feature of the present invention is that according to the present invention, the degree of coverage is 1.
This is achieved by setting the odor to 100°C or below. Namely 1. -1. (A coating reaction temperature of 1ζ that exceeds 110°C will lead to oxidation of the lit material, and
A 111L carbon layer is formed between the material and the coating layer, and the adhesion of the coating layer deteriorates, causing the coating layer to become brittle.

本発明の第2の[1的は、塩化ジエチルアルミニューl
、(C:II、)=AfCfを水素ガスとメタンガスの
混合ガスを用いて反応炉内で反応させ化学蒸着により超
硬質合金、特殊$1]−具の表面を酸化アルミニューム
層で被覆するようにしたことによって基本的(こ達成さ
れる。
The second aspect of the present invention [1] is diethyl aluminum chloride l
, (C:II,)=AfCf is reacted in a reactor using a mixed gas of hydrogen gas and methane gas, and the surface of the ultra-hard alloy is coated with an aluminum oxide layer by chemical vapor deposition. By doing this, the basic (this is achieved).

1記塩化ノエチルアルミニユームと同様の効果を期待出
来る均等物質としては、トリエチルアルミニューム(C
,II、)3A (+、エチルアルミニュー11ツクロ
イド((二、1(5)l’cf2等かある。
1. Triethylaluminum (C
, II, ) 3A (+, Ethyl aluminum 11 tsukuroid ((2, 1(5) l'cf2, etc.).

反応IJiとしては従来プロセスで酸化アルミニュー1
.被覆を形成するために使用されている化学蒸着用反応
炉をそのまま使用することか出来゛ると同11、冒こ、
耐高温構造が不要な簡易な専用反応炉を用いても良い。
As reaction IJi, aluminum oxide 1 is produced using the conventional process.
.. 11, blasphemy, it is possible to use the same chemical vapor reactor used to form the coating.
A simple dedicated reactor that does not require a high-temperature resistant structure may be used.

本発明に使用されるこれらの化合物は重合触媒としては
既に量産されてす3す、工業規(矢で(史用されている
These compounds used in the present invention have already been mass-produced as polymerization catalysts and have been used in industrial standards (historically).

特徴としては、 (イ)沸点が低い2 +111 ”C0(ロ)分解点が
低い3 +、10 ’C0従って低温で反応させる、−
とかJ fiヒで、反応速度が多少遅い程度でこれら温
度が低いために、品質−1−の影響は全くなく、従来プ
ロセスによる高温下での反応と同様の効果を得ることか
出来る。
The characteristics are: (a) Low boiling point 2 +111 ``C0 (b) Low decomposition point 3 +, 10 'C0 Therefore, the reaction is performed at low temperature, -
Since the reaction rate is somewhat slow and the temperature is low, there is no influence on the quality -1-, and the same effect as the reaction at high temperature in the conventional process can be obtained.

従来のプロセスでは、反応−1要する4(J1度条1′
1としては+ 00 +1 ’C前後を必要としたか、
本プロセスでは31) IJ ℃〜40(ピCで充分1
]的を達する二とか出来、以下のメリットが得られる。
In the conventional process, reaction-1 requires 4 (J1 degrees 1'
1 required around + 00 + 1 'C,
In this process, 31) IJ °C ~ 40 (PiC is sufficient
] You can hit the target and get the following benefits.

(1)  低温での反応であっても、一旦被覆されると
高温での被覆と全く同質の被覆層であり、しかも均一・
な層が得られる。
(1) Even if the reaction occurs at a low temperature, once the coating is applied, the coating layer is completely the same as the coating at a high temperature, and is uniform and coated.
layer is obtained.

(2)低温下でのコーティングは従来のプロセスC゛は
防11.する、−とが国運であった1す材への悪影響を
完全に防11.出来る。従って1i上材の酸化、脱炭の
恐れはやくなく被覆層がfil材に密着し、従来プロセ
スの欠点であ−、〕た被覆層の剥^11、脆弱性等がな
く な−ノIこ。
(2) Coating at low temperatures is a conventional process C.11. 11. Completely prevent the negative impact on the lumber, which was the country's fortune. I can do it. Therefore, there is a risk of oxidation and decarburization of the 1i upper material, and the coating layer adheres to the fil material, eliminating the peeling of the coating layer and brittleness, which are the drawbacks of the conventional process.

(3)超硬質合金切削チップ(スローアウェイチップ)
のみならず、同様に超硬質合金製耐摩耗工具にも適応す
ること力呵能で、特記すべき点は、従来のプロセスて′
超不史耐)γ耗コニ具にコーティングを行なう場合には
、高温下のためにスチール製補強邊(の焼外が戻ってし
ま−)て使用出来ないので、わされさ IL仕上った製
品がら超硬部のみコーティングを行なって、しがるベト
後に再びスチール製?+li強材と接合していたが、こ
の場合、接合時に超不史合金かある程反変形し、プレス
金型等の最も効果の期待出来る分野に工業的に採用する
ことが4・ijj能て゛あっtこが、本プロセスでは、
スチール製補強ヰ7(の規戻し温r= l:J、下でコ
ーティングが11なえるため、超硬部とスチール部とを
同時にコーチインクする、二とか初めて可能となり、超
硬部、スチール部)(に材質に全く変質せず、しかも形
状、サイズも変化なくそのままの状態で使用出来る。
(3) Super hard alloy cutting tip (throw-away tip)
Not only that, but it can also be applied to wear-resistant tools made of cemented carbide.It should be noted that the conventional process
When coating γ-wearing tools (extremely durable), it is difficult to use because the steel reinforcement parts (the outside of the firing have returned) due to the high temperature, so it is difficult to coat the IL-finished products. Is it possible to coat only the carbide part and re-make it made of steel after it gets sticky? In this case, the super-historical alloy deforms to some extent during joining, making it possible to use it industrially in fields where it can be expected to be most effective, such as press molds. However, in this process,
Steel reinforcement ヰ7 (Returning temperature r = l: J, because the coating deteriorates under 11, it becomes possible for the first time to coat the carbide part and the steel part at the same time, and the carbide part and the steel part) (The material does not change in quality at all, and it can be used as is without any change in shape or size.)

(4)特殊鋼工具、(穴掘部品及びその池全てのスチー
ル製品にコーティングを行なう場合、従来のC,V、D
、プロセスで行なウド1.反応i、’A 1% カto
 O0℃前後で・あるために、母Hの焼入れが完全に戻
ってしまい、コーティング処理後に真空炉で再焼入れを
行なう必要があった。その焼入れの際にひずみ、変形等
が必然的に発生するために、ひずみ直し、曲り直し等の
矯正を行なわなければならず、矯正手段の煩雑さ、矯正
出来る限度、矯正の技術的困fIll性等々の問題が製
品の原価フスYを非常1こ高価なものにし、技術面から
の制約と価格的な制約から、コーティング製品の利用範
囲を非常に狭めていたが、本発明プロセスによる低温コ
ーティングでは、v上材スチールの焼入れ状態は全く影
響を受けず、従って再焼入れ、矯正といった工程は不要
となI)、従来のプロセスの問題点が一挙に解決され、
その効果は計り知れないものがあり、価格的にも従来の
数分の1に引ぎ下げられると考えられ、二の而からも、
スチール工具、部品のコーチインク使用分野は飛yノr
的に拡大すると思われる。
(4) Special steel tools (when coating all steel products such as drilling parts and their ponds, conventional C, V, D
, process 1. Reaction i, 'A 1% Cato
Since the temperature was around 0°C, the hardening of the mother H was completely reversed, and it was necessary to re-harden it in a vacuum furnace after the coating process. Since distortion, deformation, etc. inevitably occur during the hardening process, corrections such as straightening and bending must be performed, resulting in the complexity of correction means, the limits of correction, and the technical difficulty of correction. These problems made the cost of the product extremely high, and the range of application of coated products was extremely narrow due to technical and price constraints. However, low-temperature coating using the process of the present invention , v The quenching condition of the top steel is not affected at all, so there is no need for processes such as re-quenching and straightening.1) The problems of the conventional process are solved at once.
The effects are immeasurable, and it is thought that the price will be reduced to a fraction of the conventional price.
Coach ink is used for steel tools and parts.
expected to expand.

(5)反応温度か1氏いtこめに、直接的にはヒートフ
ス)が低1゛シ、間接的には高温を必要とLないtこめ
1:、反応炉の構造−L diJ高l;シ炉材を必要と
せず、本発明ツノ法専用炉を開発すれば、簡易な装置で
可能となり、現状の高価な反応炉に比較孝−ると、イン
コネル耐熱鋼製のレトルト、炉殻笠は不要となり、大幅
なコストダウンか可能である。
(5) The reaction temperature must be 1 degree Celsius; directly, the heat flux is low; indirectly, it requires a high temperature; If we develop a specialized furnace for the horn method of the present invention, which does not require a furnace material, it will be possible with a simple device, and compared to the current expensive reactor, the retort and furnace shell made of Inconel heat-resistant steel will be It is no longer necessary, resulting in a significant cost reduction.

(に)本発明プロセスに必要とする有機化合物は触媒用
として広く−1−楽曲に生産されており、従来プロセス
1こ使用される高価なハロケ゛ン化物と比較すると、’
f:易に安1曲に人士することが出来る。
(2) The organic compounds required for the process of the present invention are widely produced for use as catalysts, and compared to the expensive halides used in the conventional process.
f: Can be easily converted into a single song.

以l:(1)・・(6)のメリット以外に本発明プロセ
スによる被覆は製品の安定性が非常に良0Yであり、ノ
、(本的C9V、l)、プロセスが開発されて以来、最
も1ijii期的発明ではないかと考えられる。尚、本
発明プロセスに要する有(燻化合物は空気中で発火する
性質のために、ボンベから反)も炉への導入路は気密性
を必要とし、その取扱いには厳重に注意する必要がある
In addition to the advantages of (1)...(6), the coating produced by the process of the present invention has a very good stability of the product, and since the process was developed, This is considered to be the most epoch-making invention. Furthermore, since the process of the present invention requires smoke compounds to ignite in the air, the introduction path from the cylinder to the furnace must be airtight, and strict care must be taken when handling them. .

以下に本発明の実施例を列記する。Examples of the present invention are listed below.

1実施例1 (1)本発明プロセスによって1.JIS規格1:’ 
−:((1超硬質合金切削チップcNNq(: 432
と、JIS規格。
1 Example 1 (1) By the process of the present invention: 1. JIS standard 1:'
-:((1 super hard alloy cutting tip cNNq(: 432
And JIS standard.

■−5冷間鍛造用超硬質合金へラダーダイス(第1図)
及びSKI’)61製パンチ(第2図)に酸化アルミニ
ューi、FJを行なった。装置6は従来通りのプロセス
て使用される反応かをそのまま用い、[ζ□記条111
で被覆を行なった。
■-5 Ladder die for ultra-hard alloys for cold forging (Fig. 1)
and SKI') 61 punch (Fig. 2) was subjected to aluminum oxide i and FJ. Apparatus 6 uses the reaction used in the conventional process as it is, and [ζ□Article 111]
The coating was carried out with

(C,II、)2A ff C(−’、    3容置
%−CO,3容量% 11、            残容]1:%反応温度
       300〜400°Cガス流速 、   
   10(□/制制御及反応間        :4
−、5時間被覆層の強度、厚みを変化させるために反応
温度保持時間を若干変化させ、それぞれ層厚の違った6
種類のテスト用製品を製作した。テストピースを切断し
、被覆層をも■磨腐食し、Fi (1f、1倍顕微鏡で
測定すると、被覆層は約3μで超硬質lid材の表面に
は酸化層、脱炭層、異常層は全く認められなかった(楢
ζ(図、第4図参照)。
(C, II,)2A ff C(-', 3% by volume -CO, 3% by volume 11, remaining volume] 1:% Reaction temperature 300-400°C Gas flow rate,
10 (□/Between control and reaction: 4
-, 5 hours In order to change the strength and thickness of the coating layer, the reaction temperature holding time was slightly changed, and 6
We have produced various test products. The test piece was cut, and the coating layer was also polished and corroded. When measured with a Fi (1 f, 1x microscope), the coating layer was approximately 3μ, and there were no oxidized layers, decarburized layers, or abnormal layers on the surface of the ultra-hard lid material. It was not recognized (see Fig. 4).

(1) 、、lt記肢被覆行なったテストピースを従来
通りのプロセスで被覆した被覆超硬チップと同−条1′
1で比較するために、切削テストを行なった。結果は第
1表、第2表に示す通りである。
(1) The coated test piece was coated with the coated carbide tip using the conventional process.
1, a cutting test was conducted for comparison. The results are shown in Tables 1 and 2.

第1表 切削摩耗試験データー 第2表 断続切削欠損試験データー (II)本プロセスによる被覆コーティングを施したヘ
ラグーダイスと被覆を施していない従来通りの超硬質合
金製ヘッダーダイスの比較テストを行なった。結果は第
3表に示す通りである。
Table 1 Cutting Wear Test Data Table 2 Intermittent Cutting Defect Test Data (II) A comparative test was conducted between a Hellagu die coated with this process and a conventional carbide header die without coating. The results are shown in Table 3.

第:(表  ヘソグーグイス使用試験データ(Il+)
本yロセスによる被覆コーティングを施したパンチとi
;を米油I)のプロセスによる−・層]−1に’l’ 
i C1一層L1にA、(720,を施したパンチとの
比較iス1を行な−)だ。結果は第4表に示す通りであ
る。。
No.: (Table Hesogouguisu usage test data (Il+)
Punches and i coated with this Y process
; by the process of rice oil I) - layer] -1 to 'l'
i C1 layer L1 is A, (720, Comparison with the punch which has been applied -). The results are shown in Table 4. .

第4表  プレスKOピン使用試験 各種テストデータを分析し、以下に要約すると、(1)
従来技術的に被覆出来ないと考えられていた製品に本発
明プロセスで被覆し、めざましい試験結果が得られた。
Table 4 Press KO pin use test We analyzed various test data and summarized below: (1)
Products previously thought to be uncoatable have been coated using the process of the present invention, and impressive test results have been obtained.

(2)従来トリゾ)し又はダブル被覆しか行なわれてい
なかった製品に本発明プロセスで被覆し、従来製品以]
二の好結果を得られた。
(2) The process of the present invention coats products that have conventionally only been coated with trisol or double coating, making them more than conventional products.
The second good result was obtained.

(3)温度及び保持時間を変化させて被m層厚を4種類
に分類したが、結果は層厚とは1α接関係がないことを
示しており、このことは被覆層が母材に密着し完全に拡
散すれば層厚に左右されろことなくAf゛、03被覆層
本来の性能を充分発J−1i していろと4察される。
(3) The thickness of the covered m layer was classified into four types by changing the temperature and holding time, but the results showed that there was no 1α tangent relationship with the layer thickness, which indicates that the coating layer adhered to the base material. However, if it is completely diffused, it is assumed that the original performance of the Af゛,03 coating layer will be sufficiently exhibited regardless of the layer thickness.

(4)、−れら一連の試験データーから従来プロセスと
本発明プロセスの決定的な違いである低温て゛のaXl
で・1り月に全く悪影響をjjえず、しかも11ヰ]と
被覆層とが拡散一体化したノこめに得られた結果である
と考えられる。
(4) - From these series of test data, the decisive difference between the conventional process and the process of the present invention is the low temperature aXI.
This result is thought to be due to the diffusion and integration of the coating layer and the coating layer, with no adverse effect on the temperature at all.

(5)(、、、〜′、D、化学蒸オ′f法の従来の概念
を打破しIこ低温被覆が実際に製品としC充分に効果を
発揮する、−とが立#iFされ、C,V、I)、化学蒸
着法の従来になかった全く新しい使用分野が開拓される
ものと考えられる。
(5) Breaking through the conventional concept of chemical vaporization, the low-temperature coating can actually be used as a product and fully effective. C, V, I), it is believed that a completely new field of use for chemical vapor deposition will be opened up.

以上の柿なデーターか呟単に超硬質合金被覆品として切
削用のみならず、その優秀な耐摩耗性、耐衝撃性、被加
工物との耐溶着性がら冷間鍛造用金型、プレス金型等の
耐摩耗超硬工具としても非常に有効であり、又、特殊鋼
製」1具及び機械部品の被覆に本発明プロセスを適用す
ると、低コストでしかも高品質な製品が量産出来ること
が立証出来た。
The above data is useful not only for cutting as a super-hard alloy coated product, but also for cold forging molds and press molds due to its excellent wear resistance, impact resistance, and welding resistance with workpieces. It is also very effective as a wear-resistant carbide tool such as those made of special steel, and it has been proven that by applying the process of the present invention to the coating of special steel tools and machine parts, it is possible to mass-produce high-quality products at low cost. done.

C0〜“、I)、化学蒸着法は、従来プロセスで・はt
oo。
C0 ~ ", I), chemical vapor deposition is a conventional process.
oo.

’C1iij後という高温で゛の反応が基本となってい
るために、被覆1す4・4に種々の悪影響を−りえ、技
やjj的、価格的な制約を受けていたが、本発明プロセ
スによれば、この様な従来の問題点が一挙に11イ決さ
れ、午後被覆]−具部品の飛躍的な市場拡大が考えられ
る画期的な発明である。
Since the reaction is basically based on the reaction at the high temperature after C1iij, it had various negative effects on coatings 1, 4 and 4, and was subject to technical, technical and cost constraints.However, the process of the present invention According to the authors, it is an epoch-making invention that solves 11 of these conventional problems at once, and is expected to dramatically expand the market for coated parts.

【図面の簡単な説明】 第1図は本発明の〜適用例を示すパイロットヘラグーダ
イスの断面図、第2図は本発明の池のja用例を示すプ
レスKOピンの側面図、第3図、第4図は夫々本発明に
したがって被覆した酸化アルミニューム層の断面を示す
(x8oo)の顕@鋭″す真である。 特 許 出 願 人 1J゛ンアロ仁に業株式会社代 
理 人  弁理士 青 山  葆はが2名第1偶
[BRIEF DESCRIPTION OF THE DRAWINGS] Fig. 1 is a cross-sectional view of a pilot helagoo die showing an application example of the present invention, Fig. 2 is a side view of a press KO pin showing an example of the use of a pond ja of the present invention, Fig. 3 , and Figure 4 are (x8oo) sharp images showing cross-sections of aluminum oxide layers coated in accordance with the present invention. Patent Applicant: 1 J.A.
Patent attorney Aoyama Bohha is the 2nd person.

Claims (2)

【特許請求の範囲】[Claims] (1)被覆反応温度40 +l ”C以下で」−具の表
面りに直接に酸化アルミニューム被覆層を形成した、こ
とを特徴とする被覆工具。
(1) A coated tool characterized in that an aluminum oxide coating layer is formed directly on the surface of the tool at a coating reaction temperature of 40 + l "C or less".
(2)  化学蒸着により被11層を形成する被覆]−
具の製造ノj法において1 .1−配化″゛V蒸Vtに際して、塩化ノエチルアルミ
ニューl1、トリエチルアルミニューム、エチルアルミ
ニュームシクロイドの少なくとも一種を用い、Aヤリャ
ーガスとして水素ガスとメタンガスの混合ガスを用いた
ことを特徴とする被覆工具の製造方法。
(2) Coating that forms 11 layers by chemical vapor deposition]-
In the method of manufacturing ingredients: 1. In the 1-arrangement "V vapor Vt, at least one of noethylaluminum chloride, triethylaluminum, and ethylaluminum cycloid is used, and a mixed gas of hydrogen gas and methane gas is used as the A gas. A method for manufacturing a coated tool.
JP19058182A 1982-10-28 1982-10-28 Coating tool and its manufacturing method Granted JPS5981002A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19058182A JPS5981002A (en) 1982-10-28 1982-10-28 Coating tool and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19058182A JPS5981002A (en) 1982-10-28 1982-10-28 Coating tool and its manufacturing method

Publications (2)

Publication Number Publication Date
JPS5981002A true JPS5981002A (en) 1984-05-10
JPH0235027B2 JPH0235027B2 (en) 1990-08-08

Family

ID=16260439

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19058182A Granted JPS5981002A (en) 1982-10-28 1982-10-28 Coating tool and its manufacturing method

Country Status (1)

Country Link
JP (1) JPS5981002A (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5115957A (en) * 1974-07-31 1976-02-07 Shimada Rika Kogyo Kk Koshuhayo 1*2 bunshuki
JPS5142030A (en) * 1974-10-09 1976-04-09 Mitsubishi Metal Corp HIFUKUCHOKOSUROOAUEICHITSUPU
JPS542983A (en) * 1977-06-09 1979-01-10 Yoichi Murayama Preparation of tool covered with hard substance
JPS542982A (en) * 1977-06-09 1979-01-10 Yoichi Murayama Preparation of tool covered with aluminum oxide

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5115957A (en) * 1974-07-31 1976-02-07 Shimada Rika Kogyo Kk Koshuhayo 1*2 bunshuki
JPS5142030A (en) * 1974-10-09 1976-04-09 Mitsubishi Metal Corp HIFUKUCHOKOSUROOAUEICHITSUPU
JPS542983A (en) * 1977-06-09 1979-01-10 Yoichi Murayama Preparation of tool covered with hard substance
JPS542982A (en) * 1977-06-09 1979-01-10 Yoichi Murayama Preparation of tool covered with aluminum oxide

Also Published As

Publication number Publication date
JPH0235027B2 (en) 1990-08-08

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