JPS598355Y2 - semiconductor equipment - Google Patents

Description

[Detailed Description of the Invention] This invention relates to a semiconductor device, particularly a packaged semiconductor device.

As shown in FIG. 1, a conventional semiconductor device of this type, such as a power silice, is composed of a semiconductor element, a cathode package 2, and an anode package.

Specifically, the semiconductor element 1 includes a silicon wafer 11 having a PNPN junction, an anode main electrode 12 such as a molybdenum plate soldered to a first main surface of the silicon wafer 11, and a second main surface. It has a cathode main electrode 13 made of a ring-shaped aluminum vapor deposited layer, and an auxiliary (gate) electrode 14 similarly shaped in the center of this cathode main electrode 13, with appropriate bevelling and passivation. has been applied.

The cathode package 2 also includes a cathode conductor 21 made of columnar copper or the like that is in pressure contact with the cathode main electrode 13 via a cathode compensation ring 4, a cylindrical insulator 22 surrounding these, and this cylindrical insulator. A metal ring 23 connecting one end surface of the body 22 and the cathode conductor 21, a first welding tongue 24 provided on the other end surface, and an auxiliary electrode lead-out terminal fixed through the cylindrical insulator 22. (gate pipe) 25, and the anode package 3 further includes an anode conductor 31 made of columnar copper or the like that is in pressure contact with the anode main electrode 12, and a second anode conductor 31 attached to the anode conductor 31. welding ring 32
It has

The auxiliary electrode 14 is also provided on the cathode conductor 21.
A cylindrical hole 21a facing the auxiliary electrode lead-out terminal 25 and a groove 2lb communicating with the hole 21a facing the auxiliary electrode lead-out terminal 25 are formed. The ring 5 is pressurized and holds the cathode compensation ring 4 at its upper end.

Furthermore, the auxiliary electrode conductive wire 6 is made of elastic stainless steel, etc.
has one end inserted into the auxiliary electrode extraction terminal 25, and the other end into which the insulating tube 7 is partially fitted is inserted into the groove 21.
b, it is pressed into contact with the auxiliary electrode 14 through the hole 5a of the auxiliary ring 5.

However, in this thyristor, the auxiliary electrode conductive wire 6 is first inserted into the cathode package 2 through the auxiliary electrode lead-out terminal 25 at one end, and the other end is inserted into the cathode conductor 21 through the groove 21b and into the hole 21a. After placing the auxiliary ring 5 into which the cathode compensation ring 4 is press-fitted, insert the auxiliary ring 5 into the hole 5a.
By press-fitting the auxiliary electrode conductive wire 6 into the hole 21 a so that the other end of the auxiliary electrode conductive wire 6 is received within the hole 21 a, the auxiliary electrode conductive wire 6 is prevented from falling sideways and is guided to contact the next auxiliary electrode 14. to do.

Next, the semiconductor element 1 is inserted with its cathode main electrode 13 side down, and the cathode main electrode 13 is brought into contact with the cathode compensation ring 4, and the auxiliary electrode conductor protruding upward from the hole 5a of the auxiliary ring 5 is inserted. The other end surface of the wire 6 is brought into contact with the auxiliary electrode 14 and pushed in, and then the main anode package is inserted.
After inserting the anode conductor 31 in contact with the anode main electrode 12, the first and second welding rings 24
．． 32 are welded together at their circumferential surfaces, and one end of the auxiliary electrode conductive wire 6 and the auxiliary electrode lead terminal 25 are welded together in an inert gas atmosphere to assemble the whole.

In the conventional power thyristor constructed as described above, the other end of the auxiliary electrode conductive wire 6 protruding from the hole 5a of the auxiliary ring 5 is connected to the hole 5a by the auxiliary electrode 14.
In order to be pressed into contact by bending as if being pushed inside,
It is necessary to make the inner diameter of the hole 5a relatively thick so that the pressing force does not decrease due to contact with the inner wall of the hole 5a due to this bending action.

This means that the degree of freedom of the other end of the auxiliary electrode conductive wire 6 within the hole 5a increases, and for this reason, the auxiliary electrode conductive wire 6 has a degree of freedom within the hole 5a. In other words, there is a possibility that the gap size is tilted, and the other end face does not come into contact with the auxiliary electrode 14 surface over a wide area at right angles, increasing contact resistance.In addition, there are inconveniences such as contacting the inner wall and reducing the pressing force. .

In order to improve the above-mentioned drawbacks of the conventional device, this invention is designed to prevent the cross-sectional shapes of the auxiliary electrode lead-out terminal and at least one end of the auxiliary electrode conductive wire inserted therein from swinging around the insertion direction axis. This shape prevents the other end of the conductive wire from tilting.

Hereinafter, one embodiment of this invented device will be described in detail with reference to FIG. 2.

Figure 2 shows the structure of the main parts to which this invention is applied, and in the figure, the same reference numerals as in Figure 1 represent the same or corresponding parts. The outer end of the pull-out terminal 25 is an elliptical tubular end 25a that fits within the circular tube shape, and one end of the auxiliary electrode conductive wire 6 to be inserted into the auxiliary electrode pull-out terminal 25 is the end 25a. The end portion 6a has an elliptical shape that can be inserted into the end portion 6a.

However, in this embodiment, first, as shown by the broken line arrow A, one end of the auxiliary electrode conductive wire 6 is inserted into the auxiliary electrode lead-out terminal 25, and the ends 6a and 25a are also inserted into each other. After matching, the auxiliary electrode conductive wire is then press-fitted as shown by the broken line arrow B, and the other end of the conductive wire is made to protrude from the hole 5a. Since one end of the electrode 6 is restrained by the insertion and engagement of the respective ends 6 a and 25 a with the auxiliary electrode extraction terminal 25, the electrode 6 does not tilt in the lateral direction.

In the above embodiment, a part of the lead-out terminal has an oval tubular cross-section, and a part of the conductive wire inserted therein has a similar oval cross-section, but it is also possible to have the same shape along the entire length of each. Alternatively, each cross-section may have a shape other than a circle, and in short, it is sufficient that both of the cross-sections have a cross-sectional shape that cannot be swung or rotated about the axis in the insertion direction.

As described in detail above, according to this invention, the cross-sectional shapes of the auxiliary electrode lead-out terminal and at least one end of the auxiliary electrode conductive wire inserted therein can be shaped so that they cannot pivot about the insertion direction axis. Therefore, by inserting the conductive wire into the auxiliary electrode extraction terminal, the conductive wire will not be tilted laterally, that is, within the hole of the auxiliary ring, and the auxiliary electrode surface and the other end surface of the conductive wire will be mutually flat. Since the conductive wire is pressed into contact with the conductive wire, the resistance at the contact surface does not increase, and the fear that the other end of the conductive wire may come into contact with the inner surface of the hole, causing a decrease in the pressing force, can be eliminated.

[Brief explanation of the drawing]

Figure 1 is a sectional view showing the structure of a conventional power thyristor.
FIG. 2 is an exploded perspective view showing the structure of the main parts to which an embodiment of this invention is applied. Material: Semiconductor element, 11: Silicon wafer, 12: Anode main electrode, 13:...
Cathode main electrode, 14... Auxiliary electrode, 2...
・Cathode package, 21...Cathode conductor, 22
......Cylindrical insulator, 25...Auxiliary electrode extraction terminal, 25a...Oval tubular end, 3...
...Anode package, 31...Anode conductor,
4... Cathode compensation ring, 5... Auxiliary ring, 5a... Hole, 6... Auxiliary electrode conductive wire, 6a... Oval shaped end.

Claims (1)

[Scope of utility model registration request] a semiconductor element having two main electrodes and at least one auxiliary electrode; a conductor connected to each of the main electrodes;
A cylindrical insulator that surrounds these and is attached to each conductor through a metal plate and seals the semiconductor element, an auxiliary electrode lead-out terminal fixed through the cylindrical insulator, and an auxiliary electrode Insert and fix one end into the electrode pull-out terminal,
In a semiconductor device comprising an elastic auxiliary electrode conductive wire whose other end surface is brought into pressure contact with the auxiliary electrode, each of the auxiliary electrode lead terminal and at least one end portion of the auxiliary electrode conductive wire inserted therein. A semiconductor device characterized in that its cross-sectional shape is such that it cannot swing or rotate around an axis in the insertion direction.