JPS5984104A - 長さ測定装置における補償装置 - Google Patents

長さ測定装置における補償装置

Info

Publication number
JPS5984104A
JPS5984104A JP58180932A JP18093283A JPS5984104A JP S5984104 A JPS5984104 A JP S5984104A JP 58180932 A JP58180932 A JP 58180932A JP 18093283 A JP18093283 A JP 18093283A JP S5984104 A JPS5984104 A JP S5984104A
Authority
JP
Japan
Prior art keywords
measuring
auxiliary
measurement
mirror
thermal expansion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58180932A
Other languages
English (en)
Japanese (ja)
Inventor
マンフリ−ト・スタインバツハ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
VEB Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VEB Carl Zeiss Jena GmbH filed Critical VEB Carl Zeiss Jena GmbH
Publication of JPS5984104A publication Critical patent/JPS5984104A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP58180932A 1982-10-01 1983-09-30 長さ測定装置における補償装置 Pending JPS5984104A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DD01B/24372 1982-10-01
DD24372582A DD210746A1 (de) 1982-10-01 1982-10-01 Anordnung zur kompensation von umwelteinfluessen bei laengenmessgeraeten

Publications (1)

Publication Number Publication Date
JPS5984104A true JPS5984104A (ja) 1984-05-15

Family

ID=5541565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58180932A Pending JPS5984104A (ja) 1982-10-01 1983-09-30 長さ測定装置における補償装置

Country Status (4)

Country Link
JP (1) JPS5984104A (de)
DD (1) DD210746A1 (de)
DE (1) DE3326867A1 (de)
GB (1) GB2127969A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4436922C2 (de) * 1994-10-15 1997-07-31 Jenoptik Technologie Gmbh Interferometeranordnung zur frequenz- und umweltunabhängigen Längenmessung

Also Published As

Publication number Publication date
GB2127969A (en) 1984-04-18
GB8326199D0 (en) 1983-11-02
DD210746A1 (de) 1984-06-20
DE3326867A1 (de) 1984-04-05

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