JPS5985572U - Image observation devices such as electron microscopes - Google Patents
Image observation devices such as electron microscopesInfo
- Publication number
- JPS5985572U JPS5985572U JP18141182U JP18141182U JPS5985572U JP S5985572 U JPS5985572 U JP S5985572U JP 18141182 U JP18141182 U JP 18141182U JP 18141182 U JP18141182 U JP 18141182U JP S5985572 U JPS5985572 U JP S5985572U
- Authority
- JP
- Japan
- Prior art keywords
- image
- image observation
- transmission
- phosphor plate
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図及び第２区は電子顕微鏡の像観察装置の従来装置
の構成略図、第３図は本考案の一実施例装置の構成略図
、第４図は第３図のＡ−Ａ’断面図、第５図は第１図に
示した一実施例装置のレバー２２を９０°移動した場合
の中間室２０の状態を示す図である。
１：試料、２：結像系コイル、３：螢光板、４：カメラ
室、ト螢光ガラス、６：光学レンズ、７：撮像管、８：
走査電源、９．ＣＲＴ、 ｌ Ｏ：偏向コイル、１１：
シンチレータ、１２ニライトガイド、１３：ノオトマル
、２０：中間室、２１：円板、２２：ｔ／パー・、２３
：Ｘ線反射板、２４：Ｘ線遮蔽ガラス、２５：撮像管収
納容器、２６． ２８：切欠部、２７：フードカバー、
２９：Ｌ／ンズ収納筒、３０：鏡筒、３１：絞り、３２
：観察窓。
冒＋〒ト
３二こ
［−奪ｌ；
δFigures 1 and 2 are schematic diagrams of the configuration of a conventional image observation device for an electron microscope, Figure 3 is a schematic diagram of the configuration of an embodiment of the device of the present invention, and Figure 4 is a sectional view taken along line A-A' in Figure 3. 5 is a view showing the state of the intermediate chamber 20 when the lever 22 of the embodiment shown in FIG. 1 is moved by 90 degrees. 1: Sample, 2: Imaging system coil, 3: Fluorescent plate, 4: Camera chamber, fluorescent glass, 6: Optical lens, 7: Image pickup tube, 8:
Scanning power supply, 9. CRT, l O: Deflection coil, 11:
Scintillator, 12 Nilight guide, 13: Nootomaru, 20: Intermediate chamber, 21: Disc, 22: t/par, 23
: X-ray reflecting plate, 24: X-ray shielding glass, 25: Image pickup tube storage container, 26. 28: Notch, 27: Hood cover,
29: L/lens storage tube, 30: Lens barrel, 31: Aperture, 32
: Observation window. blasphemy + 〒to32ko [-deprivationl;
Claims (1)
おいて、透過電子顕微鏡を撮影するためのカメラ室の下
部に該カメラ室と連通した中間室と、該中間室内に配置
され透過走査像観察モードにおける試料透過電子線を光
に変換するシンチレータと、該中間室内に配置され透過
像観察モードにおける電子線像を光像に変換する螢光板
と、該シンチレータと螢光板とを光軸上に切換えて配置
するための切換手段と、該螢光板が光軸上に配置された
際該変換された光像がその受光面上に投影される撮像管
とを備えたことを特徴とする電子顕微鏡等の像観察装置
。In a transmission imaging electron microscope having a transmission scanning image observation function, there is an intermediate chamber communicating with the camera chamber at the bottom of the camera chamber for photographing the transmission electron microscope, and a transmission scanning image observation mode arranged in the intermediate chamber. a scintillator that converts the electron beam transmitted through the sample into light; a phosphor plate disposed in the intermediate chamber that converts the electron beam image into a light image in the transmission image observation mode; and a scintillator and the phosphor plate that are switched on the optical axis. An electron microscope, etc., characterized in that it is equipped with a switching means for arranging the phosphor plate, and an image pickup tube through which the converted light image is projected onto the light receiving surface when the phosphor plate is placed on the optical axis. Image observation device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18141182U JPS5985572U (en) | 1982-11-30 | 1982-11-30 | Image observation devices such as electron microscopes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18141182U JPS5985572U (en) | 1982-11-30 | 1982-11-30 | Image observation devices such as electron microscopes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5985572U true JPS5985572U (en) | 1984-06-09 |
Family
ID=30393114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18141182U Pending JPS5985572U (en) | 1982-11-30 | 1982-11-30 | Image observation devices such as electron microscopes |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5985572U (en) |
-
1982
- 1982-11-30 JP JP18141182U patent/JPS5985572U/en active Pending
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