JPS598732Y2 - Filter mounting device - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a filter mounting device used in IC, LSI clean rooms, etc.

In recent years, with the development of ultra-LSI, the efficiency of filters has decreased to 0.3μ.
However, in order to fix the filter conventionally, the filter 22 was attached and fixed on the filter cell 21 formed by a square metal pipe or the like suspended from the ceiling, as shown in Fig. 1. Place the wooden frame 23 directly on the wooden frame 23.
The sealing material 2 is inserted into the notch 24 provided on the inner peripheral edge of the lower end.
5 to fix the wooden frame 23 and filter cell 21.

However, in this conventional method, since it takes time for the sealing material 25 to harden, there is a risk that the sealing material 25 may be cut if the wooden frame 23 is moved by some force during that time.

The present invention was devised from this point of view, and by firmly fixing the wooden frame with the filter attached and fixed to the filter cell so that it does not move, there is no risk of the sealing material breaking, and the filter can be mounted vertically. It is an object of the present invention to provide a filter mounting device that can also be mounted.

Now, an example of the implementation of the present invention will be explained in detail with reference to the drawings.
A filter 2 is mounted and fixed in a wooden frame 1 connected and fixed in a rectangular cylindrical shape, and a fitting tube 4 is vertically fixed in the center of a substrate 3 to form a support 5, and the substrate of the support 5 is fixed. A plurality of supports 5 are fixed to the outer side of the bottom surface of the side plate 8 of the wooden frame 1 with wood screws 7 through the mounting holes 6 provided in the wooden frame 3, and the filter 2 is further attached and fixed to the wooden frame. The filter cell 9 is formed by connecting and fixing metal pipes or metal plates having sufficient width and length in a rectangular shape so that the filter cell 9 can be placed on the top surface, and the filter cell 9 is connected at an appropriate position on the top surface of the filter cell 9. Protruding metal fittings 10,
The hanging fitting 11 suspended from the ceiling is connected to the connecting fitting 10 so that the filter cell 9 can be suspended and fixed,
At the corresponding position of the support 5 on the filter cell 9,
A stopper 13 having a screw hole 12 in the center is planted and fixed.

Then, the wooden frame 1 is placed on the filter cell 9,
Align the fitting tube 4 of the support 5 with the screw hole 12 of the stopper 13, insert the locking bolt 14 from the fitting tube 4 side and screw it into the screw hole 12 to prevent the wooden frame 1 from moving. To prevent this, a sealing material 15 is filled between the inner peripheral edge of the bottom surface of the wooden frame 1 and the filter cell 9.

As described above, in the present invention, the filter 2 is installed and fixed in the wooden frame 1, and the fitting cylinder 4 is fixed to the substrate 3 to form the support 5, and each of the supports 5 is formed into a plurality of pieces. It is fixed to the outer side of the bottom of the frame 1, and at the same time, a stopper 13 having a screw L12 is fixed at a position corresponding to the support 5 of the filter cell 9, and a stopper bolt 14 is inserted into the support 5. The cylinder 4 and the screw hole 12 of the stopper 13 are inserted and screwed together, and the sealing material 15 is filled between the inner periphery of the bottom surface of the wooden frame 1 and the filter cell 9.Then, the wooden frame 1 with the filter 2 attached and fixed is inserted into the filter. After firmly fixing to the cell 9, the sealing material 15 can be filled, and the filling operation is easy, and the wooden frame 1 does not move after filling the sealing material 15 until it dries. There is no risk of the sealing material 15 breaking, and since the present invention fixes the wooden frame 1 via the support 5 and the stopper 13, the wooden frame 1 with the filter 2 attached and fixed can be installed vertically. There are great benefits to this, such as being able to do it.

[Brief explanation of the drawing]

Figure 1 is a vertical cross-sectional view of the conventional product, Figure 2 is a perspective view of the wooden frame of the present invention, Figure 3 is a perspective view of the filter cell, Figure 4 is a perspective view of the support, and Figure 5 is a perspective view of the wooden frame of the present invention. FIG. 3 is a longitudinal cross-sectional view showing the attached state. 1...Wooden frame, 2...Filter, 3.
... Board, 4 ... Fitting tube, 5 ...
・Support, 9...Filter cell, 12...
...Threaded hole, 13... Fastener, 14...
... Fixing bolt, 15 ... Seal material.

Claims (1)

[Scope of utility model registration request] The filter 2 is installed and fixed in the wooden frame 1, and the insertion tube 4 is fixed to the substrate 3 to form the support 5.
while fixing a plurality of each on the outside of the bottom of the book frame 1,
A screw hole 1 is provided at a position corresponding to the support 5 of the filter cell 9.
Fix the stopper fitting 13 with the hole 2 drilled therein, and tighten the stopper bolt 14.
Insert and screw into the fitting tube 4 of the support 5 and the screw hole 12 of the stopper 13, and connect it to the inner periphery of the bottom surface of the wooden frame 1 and the filter cell 9.
A filter mounting device that fills a sealing material 15 between the holes.