JPS5993641U - 反応ガス供給装置 - Google Patents

反応ガス供給装置

Info

Publication number
JPS5993641U
JPS5993641U JP18677682U JP18677682U JPS5993641U JP S5993641 U JPS5993641 U JP S5993641U JP 18677682 U JP18677682 U JP 18677682U JP 18677682 U JP18677682 U JP 18677682U JP S5993641 U JPS5993641 U JP S5993641U
Authority
JP
Japan
Prior art keywords
reaction gas
saturator
temperature
supply device
generation means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18677682U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6327782Y2 (cs
Inventor
匡弘 森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP18677682U priority Critical patent/JPS5993641U/ja
Publication of JPS5993641U publication Critical patent/JPS5993641U/ja
Application granted granted Critical
Publication of JPS6327782Y2 publication Critical patent/JPS6327782Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP18677682U 1982-12-09 1982-12-09 反応ガス供給装置 Granted JPS5993641U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18677682U JPS5993641U (ja) 1982-12-09 1982-12-09 反応ガス供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18677682U JPS5993641U (ja) 1982-12-09 1982-12-09 反応ガス供給装置

Publications (2)

Publication Number Publication Date
JPS5993641U true JPS5993641U (ja) 1984-06-25
JPS6327782Y2 JPS6327782Y2 (cs) 1988-07-27

Family

ID=30403350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18677682U Granted JPS5993641U (ja) 1982-12-09 1982-12-09 反応ガス供給装置

Country Status (1)

Country Link
JP (1) JPS5993641U (cs)

Also Published As

Publication number Publication date
JPS6327782Y2 (cs) 1988-07-27

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