JPS5998714A - Preparation of gas suspending fine water droplet - Google Patents

Abstract

PURPOSE:To prepare a gas suspending fine water droplets by a method wherein water is collided with an object while spraying and injecting the same to form fine water droplets which are contained in a gas and large water droplets are subsequently removed from the gas. CONSTITUTION:A plurality of water jet nozzles 2 are provided to the side surfaces of a tank 1. In this case, said nozzles 2 are alternately arranged so as to be slightly shifted from the positions of the nozzles 2 provided to the opposed side surface and the mutually opposed nozzles are not arranged on a straight line. Water injected from each water jet nozzle 2 is collided with the opposed side surface while traversing the tank 1 along an arrow D to form fine water droplets E and the tank 1 is filled with these fine water droplets while rising through the tank 1 and exhausted from the upper outlet of the tank 1 to obtain the objective gas suspending fine water droplets.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for producing a gas in which fine water droplets are suspended. More specifically, the present invention relates to a method for producing a gas in which fine water droplets are suspended. Generate,
The present invention relates to a method for producing a gas suspended in fine water droplets by incorporating this into a gas.

Hospitals, drug manufacturing factories 1 Food manufacturing factories, research institutes, laboratories, etc. require clean gas that does not contain dust or microorganisms. Measures such as installing air curtains are being taken. However, with such a method, it is not possible to obtain sufficiently purified gas, and even if an air shower room is used, the purpose cannot be fully achieved.

Furthermore, in places such as LSI and VLSI manufacturing plants, biological products manufacturing plants, operating rooms, precision machinery cleaning plants, and sterile food manufacturing plants, not only bacteria and viruses, but also dust of 0.5μ or less cannot be allowed to enter. It is currently impossible to deliver ultra-clean gas on an industrial scale under strict conditions.

However, the production of highly purified gas is widely desired in various industries.
The present invention has been made in response to the demands of this era.

Therefore, we conducted extensive research and focused on the phenomenon that water droplets mixed in the air cleanse the air by attaching dust mixed in the air, and we further made the water droplets smaller to form fine water droplets. It has been found that it is possible to cleanse and sterilize not only fine dust in the air, but also bacteria, filamentous fungi, spores, and even viruses. Furthermore, in a gaseous atmosphere in which such fine water droplets are suspended, it is possible to purify the atmosphere and, quite unexpectedly, the phenomenon of objects becoming wet despite the presence of water droplets does not occur. It was found that a remarkable effect was produced. As a result of further investigation, we found that when normal gas was passed through a gas atmosphere containing suspended fine water droplets, the normal gas was highly purified to an extremely lean state. We also discovered that it can be applied directly to rooms, departments, and other related areas.

Based on these new findings, and as a result of various experiments and research on a particularly industrially effective method for producing this microscopic water droplet suspended gas, we have completed the present invention. It is something.

That is, the present invention provides a method for producing fine water droplets, which is characterized in that water is sprayed and/or jetted to collide with an object to generate fine water droplets, the fine water droplets are incorporated into a gas, and the large water droplets are then removed from the gas. This is a method for producing floating gas.

The method of the invention will now be described in detail with reference to the drawings, which illustrate some examples of apparatus for carrying out the method of the invention.

Please refer to FIG. 1 first. This device is the most basic device for implementing the present invention, and a large number of water injection nozzles 2 are provided on the side of a tank 1.

It is preferable that these nozzles 2 are arranged alternately and slightly shifted from the positions of the nozzles provided on the opposing sides, so that the opposing nozzles are not arranged on a straight line. water injection nozzle 2
The water injected from the tank 1 crosses the tank 1 according to the arrow direction and collides with the opposite side, becoming fine water droplets (E).
The inside of the tank 1 is filled with these fine water droplets. Therefore, when gas is supplied from the bottom of the tank 1 according to the arrow A, as the gas rises through the tank 1, it contains enough fine water droplets and is discharged from the upper tank outlet, suspending the fine water droplets. The desired gas can be obtained. If necessary, install one or more baffle plates (not shown) vertically or at an angle (in series, in parallel, or alternately) in the tank 1, and install jets on these baffle plates. Fine water droplets may be generated by colliding water streams.

FIGS. 2 and 3 show an apparatus for producing fine water droplet suspended gas more efficiently and with temperature control.

Here, we will explain the case of producing cooled fine water droplet suspended gas as an example, but if the cooling-related system described below is replaced with a heated system, heated fine water droplet suspended gas can also be freely produced.

The cyclone 40 has an air population 4 at the top of its cylindrical portion 41.
2 are provided in the tangential direction. An outlet pipe 43 is provided in the center of the cylindrical portion 41 extending downward from above, and a cold water injection pipe 44 is disposed coaxially with the outlet pipe 46 to surround the outlet pipe 43.

The injection pipe 44 is provided with a large number of injection nozzles 45 . In the cylindrical portion 41 of the cyclo/40, an evaporation pipe 47 of a refrigeration device is arranged. Evaporation pipe 47 and injection nozzle 4
5 may be completely shifted from each other, or may be slightly shifted from each other, and the water from the injection nozzle 45 may be sprayed or sprayed perpendicularly to the evaporation pipe 47. It is located in Cyclone cone 5
A filtration device 48, a water tank 49, and a pump 50 are sequentially provided at the lower end of the container 1. Therefore, the cold water flows in the direction of arrow B, that is, the pump 5o, the circulation pipe 46, the injection pipe 44
, cylindrical part 41 of the cyclone, conical part 51, filtration device 48
, water tank 49, and pump 5o in this order.

A refrigerant, in particular a high temperature refrigerant (1°C to -5°C), circulates within the evaporator tube 47 in the direction of arrow C. The gas is fed into the cyclone through the inlet 42 in the direction of arrow A;
It contains minute water droplets in the cyclone and is simultaneously cooled and turned into the desired gas through the extraction pipe 46 and used for each purpose. The water injected or sprayed from the injection nozzle 45 provided in the injection pipe 44 (D) is transferred to the evaporation pipe 4 of the refrigeration device.
7 and/or the side wall of the cylindrical part 41 (E)
, fine water droplets are generated, and at the same time, the water flow that collides with the evaporation tube 47 exchanges heat with the refrigerant passing through the tube 47 and is cooled), and the water droplets are cooled. When gas is passed through such an atmosphere in the direction of arrow A, the gas contains fine water droplets and exchanges heat with the cooled water droplets to cool itself and become the desired gas.

FIG. 4 is a schematic diagram showing a total system in which the method of the present invention is actually applied to a factory that mass-produces 64K RAM. The fine water droplet floating gas produced in cyclone 9A as described above is sent to the drip removal cyclone ΣA in accordance with arrow A. That is,
The gas coming out from the mouth enters the inside of the cyclone through an inlet provided in the tangential direction on the side wall of the drip removing cyclone 50, and while circulating inside the cyclone, excess water droplets and large water droplets are removed and the target fine particles are removed. water droplets (for example, 1 μ or less, preferably 0
．． Only water droplets of 5 microns or less are collected and prepared into a suspended gas, which is taken out from an outlet pipe provided at the center of the cyclone 50.

The fine water droplet suspended gas thus extracted is sent to the air shower room 60 through the pipe P to wash the people working in the adjacent super clean room 1. Further, a part of the fine water droplet floating gas is directly sent to the ultra-clean room-70, where the purified gas containing no dust is introduced into the room and is also used for cleaning the silicon plates used in the LSI. Also, if necessary.

Instead of directly using the fine water droplet suspended gas, it is also possible to clean the air by blowing ordinary air into the shower of this gas and use the air thus purified. The gas used in the super clean room 70 is taken out from there and returned to the cyclone 40 via the pipe P and fan F, and this cycle is repeated. According to this method, it has been found that the ultra-clean room is kept in an ultra-clean state with less than one particle of dust larger than 0.5 microns per foot3 space. By the way, there are tens of thousands of pieces of dust floating in a normal factory, and from this,
It should be seen how superior the method according to the invention is.

As the gas, air is used, and if oxidation is undesirable, carbon dioxide gas, nitrogen gas, and other rare gases can also be used. Conversely, oxygen gas can also be used, and various gases or mixtures thereof can be freely used. Can be used.

Although the details of the mechanism of the method of the present invention are unknown, it is presumed that fine water droplets adhere to dust floating in the air, and that when the dust adheres to the water droplets in this way, the dust is easily removed along with the water droplets. Ru. In particular, since this method uses microscopic water droplets, it is possible to remove not only extremely microscopic dust but also bacteria and viruses, resulting in a gas that is both physically and biologically purified. The effect of being able to do so is achieved.

Viruses have conventionally been removed using air filters, etc., but since viruses have a size of only 0.5 to 0.01 microns, it has been impossible to remove them sufficiently with air filters. Therefore, it is extremely rare to actually catch a cold in such a clean gas atmosphere, making it extremely suitable for use in hospitals, pharmacies, laboratories, maternity hospitals, etc.

In addition, the gas produced by the method of the present invention has a hygienic characteristic of not containing germs, so it can be used in food manufacturing factories for cleaning food and equipment.
For example, it is extremely suitable for use in grocery stores, supermarkets, etc., such as thawing frozen meat, preserving salads, vegetables, fresh fish, and meat, etc., and is especially suitable for use in food stores, supermarkets, and other places. You can also freely produce raw ham.

As mentioned above, this gas is extremely clean because of its ultra-clean properties.
In addition to cleaning precision instruments, it can also be used to clean surgical tools. It is also highly expected to be used in medical fields such as lung cleansing.

[Brief explanation of the drawing]

Fig. 1 shows one embodiment of the micro water droplet floating gas production device, Fig. 2 shows another embodiment thereof, and Fig. 3 shows the central part of the device shown in Fig. 2 cut away. FIG. 4 is a cross-sectional view showing a total system when the method of the present invention is applied in an actual semiconductor manufacturing factory. 1- Tank 2.45 Nozzle 40 Cyclone 42 Gas inlet 46 Fine water droplet suspended gas outlet pipe 50 Droplet removal cyclone 60 Air shower room 70 Super clean room agent Patent attorney Door 1) Parent Male No. 1 Figure Figure 3 Figure 2 Figure 4

Claims (1)

[Claims] 1. A method for producing a gas suspended in fine water droplets, which comprises spraying water and colliding with an object to obtain fine water droplets, incorporating the fine water droplets into a gas, and removing large water droplets from the gas.