JPS60122361U - 気相成長装置の加熱炉 - Google Patents

気相成長装置の加熱炉

Info

Publication number
JPS60122361U
JPS60122361U JP705684U JP705684U JPS60122361U JP S60122361 U JPS60122361 U JP S60122361U JP 705684 U JP705684 U JP 705684U JP 705684 U JP705684 U JP 705684U JP S60122361 U JPS60122361 U JP S60122361U
Authority
JP
Japan
Prior art keywords
phase growth
heating furnace
vapor phase
susceptor
growth equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP705684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH017727Y2 (2
Inventor
岩田　公弟
関谷　功
石川　武敏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP705684U priority Critical patent/JPS60122361U/ja
Publication of JPS60122361U publication Critical patent/JPS60122361U/ja
Application granted granted Critical
Publication of JPH017727Y2 publication Critical patent/JPH017727Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP705684U 1984-01-20 1984-01-20 気相成長装置の加熱炉 Granted JPS60122361U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP705684U JPS60122361U (ja) 1984-01-20 1984-01-20 気相成長装置の加熱炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP705684U JPS60122361U (ja) 1984-01-20 1984-01-20 気相成長装置の加熱炉

Publications (2)

Publication Number Publication Date
JPS60122361U true JPS60122361U (ja) 1985-08-17
JPH017727Y2 JPH017727Y2 (2) 1989-03-01

Family

ID=30485060

Family Applications (1)

Application Number Title Priority Date Filing Date
JP705684U Granted JPS60122361U (ja) 1984-01-20 1984-01-20 気相成長装置の加熱炉

Country Status (1)

Country Link
JP (1) JPS60122361U (2)

Also Published As

Publication number Publication date
JPH017727Y2 (2) 1989-03-01

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