JPS60129061U - 電子顕微鏡等における二段偏向装置の偏向方向補正装置 - Google Patents

電子顕微鏡等における二段偏向装置の偏向方向補正装置

Info

Publication number
JPS60129061U
JPS60129061U JP1565184U JP1565184U JPS60129061U JP S60129061 U JPS60129061 U JP S60129061U JP 1565184 U JP1565184 U JP 1565184U JP 1565184 U JP1565184 U JP 1565184U JP S60129061 U JPS60129061 U JP S60129061U
Authority
JP
Japan
Prior art keywords
amplifier
deflection
potentiometers
deflector
supplying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1565184U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0316204Y2 (2
Inventor
平田　義弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP1565184U priority Critical patent/JPS60129061U/ja
Publication of JPS60129061U publication Critical patent/JPS60129061U/ja
Application granted granted Critical
Publication of JPH0316204Y2 publication Critical patent/JPH0316204Y2/ja
Granted legal-status Critical Current

Links

JP1565184U 1984-02-07 1984-02-07 電子顕微鏡等における二段偏向装置の偏向方向補正装置 Granted JPS60129061U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1565184U JPS60129061U (ja) 1984-02-07 1984-02-07 電子顕微鏡等における二段偏向装置の偏向方向補正装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1565184U JPS60129061U (ja) 1984-02-07 1984-02-07 電子顕微鏡等における二段偏向装置の偏向方向補正装置

Publications (2)

Publication Number Publication Date
JPS60129061U true JPS60129061U (ja) 1985-08-29
JPH0316204Y2 JPH0316204Y2 (2) 1991-04-08

Family

ID=30501687

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1565184U Granted JPS60129061U (ja) 1984-02-07 1984-02-07 電子顕微鏡等における二段偏向装置の偏向方向補正装置

Country Status (1)

Country Link
JP (1) JPS60129061U (2)

Also Published As

Publication number Publication date
JPH0316204Y2 (2) 1991-04-08

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