JPS6018231B2 - cleaning equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a cleaning device for cleaning an object to be cleaned.

It is particularly suitable for a cleaning device that performs rinsing (hereinafter referred to as "rinsing") after cleaning an object to be cleaned. Glass plates, semiconductor substrates, ceramic plates, etc. used in electronic devices, etc. are cleaned with surfactants, organic solvents, acid solutions, alkaline solutions, etc., and then rinsed with water, distilled water, organic solvents, etc. It was necessary to remove contamination from the object to be cleaned and to remove the cleaning agent by rinsing with a flowing liquid while applying ultrasonic waves.

In particular, since even the amount of the cleaning agent itself has a significant effect on the characteristics of electronic devices, sufficient consideration has been required not only in the main cleaning process but also in the rinsing process. For example, dirt on the glass plates used in liquid crystal display devices deteriorates the alignment of liquid crystal molecules and also reduces the lifespan, so surfactants are used to remove the dirt. Since remaining on the plate significantly deteriorates the alignment of liquid crystal molecules, it was necessary to thoroughly rinse with water after using the surfactant.

Therefore, a large amount of water was required. As a conventional device of this kind, there is one shown in a vague cross-sectional view in FIG.

In the figure, 1 is an inlet for unused cleaning liquid, such as water;
1 is a cleaning liquid outlet, 3 is a shelf with holes, and 4 is an ultrasonic generator. Next, the operation will be explained.

For example, in cleaning a glass plate, a case will be described in which a glass plate that has been cleaned in a surfactant solution is rinsed in a cleaning device as shown in FIG. A certain flow rate of rinsing cleaning liquid, for example water, is taken in from the cleaning intake port 1, flows uniformly into the cleaning device through the shelf 3 with holes, and removes dirt and surfactant adhering to the glass plate while diluting it. To go.

Therefore, in order to perform a sufficient rinse, a considerable amount of water and a considerable amount of time were required. In order to improve the rinsing effect, ultrasonic waves were applied, and a perforated shelf 3 was arranged so that water could hit the object to be cleaned efficiently, so that water flowed from below and was disposed of from above. FIG. 2 is a schematic cross-sectional view illustrating the flow of cleaning liquid when an object to be cleaned is inserted into the cleaning apparatus shown in FIG. 1 (the holder for the object to be cleaned is not shown).

In the figure, 5 is the object to be cleaned, and 6 is the streamline of the cleaning liquid.
Since the conventional cleaning device was constructed as described above, as shown in Figure 2, the water that passes near the glass plate (area A shown in the figure) among the input water acts as a rinsing cleaning liquid, but other In the region (region B shown in the figure), there was almost no rinsing effect or only light pollution was discharged.

Therefore, the usage efficiency (hereinafter referred to as "go") of the rinse cleaning solution is extremely low, ranging from about 10-2% to several tens of percent.
It is considered to be a rank. As described above, the conventional cleaning apparatus has the drawbacks that the efficiency of using the rinsing liquid is low, a large amount of the rinsing liquid is required, and the rinsing time is long.

This has led to significant cost increases in mass production. This invention was made in order to eliminate the drawbacks of the conventional machine as described above, and by increasing the efficiency of use of cleaning liquid, the cleaning effect of the conventional machine is improved by using a small amount of cleaning liquid and a shorter cleaning time. The purpose is to provide cleaning equipment.

Hereinafter, this invention will be explained based on examples.

FIG. 3 is a schematic cross-sectional view of one embodiment of the cleaning device according to the present invention. In the figure, numerals 1 to 4 represent the same components as shown in FIG. 7 is a separation system for the discharged liquid and the circulating liquid, 8 is a mixing system for the cleaning liquid used and the circulating liquid, 9 is a circulation pipe, 10' is a circulation pump (including a flow rate regulating mechanism),
11 is an intake port of the circulation system, and 12 is an outlet of the circulation system.

Here, the intake port 11 of the circulation system is disposed below the cleaning liquid discharge port 2. After the unused cleaning liquid and the circulating liquid are mixed in the mixing system 8, they flow into the cleaning tank. In this way, in the cleaning device, by circulating only a part of the E solution only for the cleaning solution, the usage efficiency of the cleaning solution is increased, and the same cleaning effect as before can be achieved with the use of a smaller amount of cleaning solution and a shorter cleaning time. .

Next, the operating principle of the device of this invention will be explained. FIG. 4 shows a schematic diagram of a cleaning device according to the present invention. In the figure,
6 indicates the flow of the cleaning liquid. 7 is a separation system for washing discharge liquid and circulating liquid; 8 is a mixing system for unused washing liquid and circulating liquid; 13 is a washing tank shown schematically. Let the amount of new cleaning liquid flowing into the cleaning device per minute be lo (night/min),
The amount of cleaning liquid discharged to the outside is set as lout (t/min).

In steady state, lo=lout. Let the amount of liquid circulated from the discharge side of the cleaning device be IF (hours/min). IF is determined by the capacity of the shielding pump, etc. The effective usage efficiency of the cleaning liquid is determined by the structure of the cleaning device and the structure and arrangement of the objects to be cleaned. Usually, rice is considered to be ranked 10-4 to 10-1. The solubility of dirt, surfactants, and other contaminants on the object to be washed is dissolved in the cleaning solution [the amount of solute (in grams) per 100 grams of solvent in a saturated solution] is defined as the effective dissolution rate [in flowing water]. If the ratio of the amount of solute (in grams) dissolved in unsaturated solvent per unit time to the solubility of that solute in that solvent is n (1/min), then the amount dissolved is m and n.
is proportional to. Since the effective dissolution rate n varies depending on the flow rate, the time when the cleaning solution is not circulated is expressed as (1/min), and the time when the cleaning solution can be circulated is expressed as nF (1/min). When circulating, the flow velocity near the object to be cleaned is farther than when not circulating, so nF is larger than no. Assuming that the effective contamination concentration of the cleaning liquid near the object to be cleaned is Q%, and that the contamination concentration is uniformly homogenized in the separation system 8, and the contamination concentration is 3%, then 8 = Q ( %〉 (1) It can be expressed as

The effective usage efficiency of the cleaning solution is 1 to 4, and 8 to 8.
It becomes Q. Therefore, when the cleaning liquid is circulated, the contamination concentration on the input side is assumed that the new cleaning liquid and the recycled cleaning liquid are sufficiently homogenized in the mixing system 8, and if it is y%, then y = ¥ is simply ( %) Ku.

), and y is always smaller than 8.

If the amount of contaminants dissolved from the object to be cleaned when the cleaning solution is not circulated is defined as the amount of contaminants dissolved in the object to be cleaned (minutes/min), then it can be easily expressed as Ha = Continuation x Do1
It can be expressed as 0.

Next, if the amount of contaminants dissolved from the object to be cleaned when the cleaning solution is circulated is MF (night/min), then simply, 1F MF = {Obi 6-Zoku Ichioka} X (L + IF) XnF ( W).

Transforming equation (W), MF=high.

XdoLXnF+Spicy×GoIFXnF (V
) becomes.

Since m is always greater than 3 and nF is greater than no, MF is greater than Mo from formulas (m) and (V). A schematic diagram of the time change in the total amount of dissolved contaminants based on this calculation is shown in Figure 5.
As shown in the figure. In the figure, the solid line A is the total dissolution curve when the cleaning liquid is circulated in the cleaning device according to the present invention, and the dotted line B is the total dissolution amount when the conventional cleaning device is used. In this way, even if the consumption amount of unused cleaning liquid per unit time is the same, according to the cleaning device according to the present invention,
The same cleaning effect as the conventional one can be obtained in a shorter cleaning time than the conventional one. Therefore, less cleaning liquid can be used.
In the above embodiments, the separation of the discharged liquid and the circulating liquid or the mixing of the unused cleaning liquid and the circulating liquid were carried out using a separation system or a mixing system provided separately from the cleaning tank. The cleaning may be carried out in a cleaning tank using a cleaning device as shown in the schematic cross-sectional view.

In the cleaning device shown in FIG. 6, the intake port 11 of the circulation system
is arranged near the outlet 2 of the cleaning liquid and on the lower surface of the outlet 2. The discharge port 12 of the shield system is arranged near the intake port for the unused cleaning liquid so that the unused cleaning liquid and the circulating liquid are well mixed. Furthermore, a separation system and a mixing system may be configured as in the cleaning device whose schematic cross-sectional view is shown in FIG. In the cleaning device shown in FIG. 7, after taking out the same pipe from the cleaning tank, the pipe is divided into two to form the discharge port 2 and the circulation system. In FIG. 7, 14 is a flow valve. Reference numeral 15 is a flow valve for adjusting the amount of circulating fluid.

Alternatively, as shown in FIG. 7, the inlet 1 for the used cleaning liquid may be brought in front of the circulation pump 10 to mix the unused cleaning liquid and the circulating liquid. Also, if a filter is attached to the circulation pump, it will be even more effective in preventing foreign matter.

It goes without saying that the present invention can be applied not only to advanced cleaning of substrates used in electronic devices and the like, but also to other industrial cleaning equipment and household cleaning equipment.

As described in detail above, the cleaning device according to the present invention is equipped with a cleaning liquid circulation mechanism and circulates a portion of the discharged liquid to the cleaning device, so that the usage efficiency of the cleaning liquid can be increased and a small amount of By using a cleaning liquid and cleaning for a short time, the same and sufficient cleaning effect as before can be obtained, and it is possible to save resources, reduce product costs, and improve product performance.

In addition, when the supply amount of cleaning liquid is limited, for example, when using tap water, the supply amount is limited due to the diameter of the water pipe, etc., and the amount of water can be effectively reduced without doing any plumbing work. It also has the advantage of increasing the

[Brief explanation of drawings]

Figures 1 and 2 are schematic cross-sectional views of conventional cleaning equipment;
FIG. 3 is a schematic cross-sectional view of a cleaning device that is an embodiment of the present invention, FIG. 4 is a schematic diagram showing the flow of cleaning liquid in the embodiment device, and FIG. 5 is a diagram showing the cleaning time of the embodiment device and the conventional device. Graphs showing the relationship between the total amount of dissolved contaminants, FIGS. 6 and 7, are vague cross-sectional views of other embodiments of the present invention. In the figure, 1 is an intake port for unused cleaning liquid, 2 is an outlet for cleaning liquid, 5 is an object to be cleaned, 6 is a flow line for cleaning liquid, 7 is a separation system for drained liquid and circulating liquid, and 8 is an unused cleaning liquid 9 is a circulation pipe, 10 is a shielding pump, 11 is an intake port of the circulation system, and 12 is an outlet of the circulation system. Note that the same reference numerals in the figures indicate the same or corresponding parts. Figure 1 L, Figure 2 Figure 3 Figure 4 Figure 5 Figure 6 Figure 7

Claims (1)

[Scope of Claims] 1. A cleaning tank having an inlet for taking in unused cleaning liquid from the outside and an outlet for discharging the cleaning liquid to the outside, and a part of the discharged cleaning liquid to be circulated and the unused cleaning liquid to be taken in from the outside. A cleaning device equipped with a circulation system that mixes with 2. The cleaning device according to claim 1, further comprising a separation system between the cleaning tank body and the discharge port to separate the discharged liquid to be discharged to the outside from the discharged liquid to be circulated. 3. Claims 1 or 2, characterized in that a mixing system is provided between the cleaning tank body and the intake port to mix the unused cleaning liquid taken in from the outside with the recycled discharged liquid. The cleaning device described. 4. The cleaning device according to claim 1, wherein the intake port for the discharge liquid of the circulation system is provided in the discharge pipe between the cleaning tank main body and the discharge port to the outside. 5 Claims 1 and 2, characterized in that an intake port for unused cleaning liquid from the outside is provided in the middle of the circulation system.
The cleaning device according to any one of Items 1 and 4.