JPS6018513U - electromagnet device - Google Patents

electromagnet device

Info

Publication number
JPS6018513U
JPS6018513U JP11039083U JP11039083U JPS6018513U JP S6018513 U JPS6018513 U JP S6018513U JP 11039083 U JP11039083 U JP 11039083U JP 11039083 U JP11039083 U JP 11039083U JP S6018513 U JPS6018513 U JP S6018513U
Authority
JP
Japan
Prior art keywords
magnetic
electromagnet device
opposing
poles
core
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11039083U
Other languages
Japanese (ja)
Inventor
横井 哲夫
松本 教之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokin Corp filed Critical Tokin Corp
Priority to JP11039083U priority Critical patent/JPS6018513U/en
Publication of JPS6018513U publication Critical patent/JPS6018513U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来のこの種装置の路線図、第2図はイオン打
込み装置の系統図、第3図は本案装置の一例を示す図で
ある。 11・・・磁心、13.14・・・磁極、15・・・ギ
ャップスペーサ。
FIG. 1 is a route diagram of a conventional device of this type, FIG. 2 is a system diagram of an ion implantation device, and FIG. 3 is a diagram showing an example of the proposed device. 11...Magnetic core, 13.14...Magnetic pole, 15...Gap spacer.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 磁心に巻線を施して、閉磁路の途中に対向する磁極間に
強磁場を発生させる電磁石装置において、対向する先端
の磁極間に一定の間隙を有するように非磁性のギヤラチ
スペーサを介して挟持した磁極を前記磁心に装着しであ
ることを特徴とした電磁石装置。
In an electromagnet device that winds a magnetic core and generates a strong magnetic field between opposing magnetic poles in the middle of a closed magnetic path, a non-magnetic gear latch spacer is used to create a fixed gap between the opposing magnetic poles. An electromagnet device characterized in that a sandwiched magnetic pole is attached to the magnetic core.
JP11039083U 1983-07-16 1983-07-16 electromagnet device Pending JPS6018513U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11039083U JPS6018513U (en) 1983-07-16 1983-07-16 electromagnet device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11039083U JPS6018513U (en) 1983-07-16 1983-07-16 electromagnet device

Publications (1)

Publication Number Publication Date
JPS6018513U true JPS6018513U (en) 1985-02-07

Family

ID=30256746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11039083U Pending JPS6018513U (en) 1983-07-16 1983-07-16 electromagnet device

Country Status (1)

Country Link
JP (1) JPS6018513U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10125267A (en) * 1996-10-16 1998-05-15 Jeol Ltd Energy filter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10125267A (en) * 1996-10-16 1998-05-15 Jeol Ltd Energy filter

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