JPS6020683B2 - Calibration method of ultrasonic dimension measuring device - Google Patents
Calibration method of ultrasonic dimension measuring deviceInfo
- Publication number
- JPS6020683B2 JPS6020683B2 JP3477979A JP3477979A JPS6020683B2 JP S6020683 B2 JPS6020683 B2 JP S6020683B2 JP 3477979 A JP3477979 A JP 3477979A JP 3477979 A JP3477979 A JP 3477979A JP S6020683 B2 JPS6020683 B2 JP S6020683B2
- Authority
- JP
- Japan
- Prior art keywords
- value
- ultrasonic
- test piece
- tube
- dimension
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
Description
【発明の詳細な説明】 この発明は超音波寸法測定装置の鮫正万法に関する。[Detailed description of the invention] The present invention relates to Sameshomanpo, an ultrasonic dimension measuring device.
近時、各種管の全長にわたる内外径および肉厚の自動測
定は、超音波寸法測定装置を用いることによって便利に
行われるようになってきた。In recent years, automatic measurement of the inner and outer diameters and wall thicknesses of various pipes over their entire length has become convenient by using ultrasonic dimension measuring devices.
超音波寸法測定装置は、たとえば次のように構成されて
いる。すなわち、第1図および第2図に示すように、水
の入った糟2の前後壁3a,3bには被測定管(以下、
単に「管」という)1送り込み、送り出し用の入口4a
と出口4bとが設けられ、これら出入口4a,4b‘ま
管1の移動を妨げないようにして水の漏出を防止し得る
適宜の封止機構5a,5bによって閉封されている。管
1は糟2の前後に設けられたスパイラル送りローフ6・
・・によって鮫心廻りに回転しつつ鞠心方向に送られる
ようになっている。糟2は水温測定用温度検出子7や水
循環ノズル8等、槽内の水温を均一かつ一定に保つため
の器具を備えるほか、管1の移動路両側に測定用探触子
9a,9b、その上方両側にスラグ10aと水温保償用
探触子10bとを備えている。そして、測定用探触子9
a,gbの発する超音波が管1の表面に垂直に入射する
と、表面エコーS,,S2と底面エコーB,,B,2,
B,3…およびB幻,&2,&3・・・が生じる。The ultrasonic dimension measuring device is configured as follows, for example. That is, as shown in FIGS. 1 and 2, there are tubes to be measured (hereinafter referred to as
(simply referred to as "pipe") 1 Inlet 4a for inlet and outlet
and an outlet 4b are provided, and these inlets and outlets 4a and 4b' are sealed by appropriate sealing mechanisms 5a and 5b that can prevent leakage of water without interfering with the movement of the tube 1. The tube 1 has a spiral feeding loaf 6 installed before and after the rice cake 2.
... rotates around the shark's center and is sent toward the shark's center. The tank 2 is equipped with devices for keeping the water temperature in the tank uniform and constant, such as a temperature sensor 7 for water temperature measurement and a water circulation nozzle 8, as well as measurement probes 9a and 9b on both sides of the path of movement of the pipe 1. A slug 10a and a water temperature guarantee probe 10b are provided on both upper sides. Then, the measurement probe 9
When the ultrasonic waves emitted by a and gb are perpendicularly incident on the surface of tube 1, surface echoes S,,S2 and bottom echoes B,,B,2,
B, 3... and B illusion, &2, &3... occur.
表面エコーS,,S2は入射波が管1の表面で反射され
て生じるものであり、底面エコーB,.,B2,B3・
・・および&,,B22,B23・・・は、管1の肉内
に入った入射波が管1の内周面で反射されて生じるもの
である。測定用探触子gaの側の発振パルス○,と表面
エコーS,との間の時間間隔によって探触子9aと管1
との間の距離W.が求まり、第1の底面エコーB.,と
と第2の底面エコーB,2との間の時間間隔によって管
1のこの側の肉厚T,が求まる。測定用探触子9bの側
からも、同様にして、探触子9bと管1との間の距離W
2と管1のこの側の肉厚T2が求まる。探触子間隔に相
当する定数Cとすると、管1の外径○D、肉厚WT、内
蚤IDはそれぞれ、OD−(W,十W2)WT=T,
ID=OD−(T,十T2)
として求められる。The surface echoes S, , S2 are generated when the incident wave is reflected on the surface of the tube 1, and the bottom echoes B, . ,B2,B3・
. . , &, , B22, B23 . . . are generated when an incident wave entering the flesh of the tube 1 is reflected by the inner circumferential surface of the tube 1. Depending on the time interval between the oscillation pulse ○ on the measurement probe ga side and the surface echo S, the probe 9a and tube 1
The distance between W. is obtained, and the first bottom echo B. , and the second bottom echo B,2 determines the wall thickness T, on this side of the tube 1. Similarly, from the measuring probe 9b side, the distance W between the probe 9b and the tube 1 is
2 and the wall thickness T2 on this side of the tube 1. Assuming that the constant C corresponds to the probe spacing, the outer diameter ○D, wall thickness WT, and inner flea ID of the tube 1 are respectively OD-(W, 10W2) WT=T, ID=OD-(T, 10 T2).
本装置は上記原理に基づいて寸法測定をするので水温変
化に極めて鋭敏である。Since this device measures dimensions based on the above principle, it is extremely sensitive to changes in water temperature.
そのため、水温が水槽内全体にわたって均一に保たれる
ように、水循環ノズル則こよって水を循環させるととも
に、水温が変化しても定数Cが一定になるように水温保
横用探触子軍obによって、自動的に補正するようにし
ている。ところで、原子炉用ジルカロィ燃料管のように
極めて厳しい寸法精度が要求されるような管の寸法測定
を行なうためには「測定装置鮫正用テストピースの寸法
精度も高くなければならないが「単に鮫正用テストピー
スの寸法精度を高めるということだけでなく、テストピ
ースの材料の選定および加工条件の設定にも十分配慮す
ることが極めて重要である。Therefore, in order to keep the water temperature uniform throughout the tank, water is circulated according to the water circulation nozzle rule, and the water temperature horizontal probe force is used to keep the constant C constant even if the water temperature changes. This will automatically be corrected. By the way, in order to measure the dimensions of tubes that require extremely strict dimensional accuracy, such as Zircaloy fuel tubes for nuclear reactors, the dimensional accuracy of the test piece for measuring equipment must be high. It is extremely important not only to increase the dimensional accuracy of the test piece for normal use, but also to give sufficient consideration to the selection of the material of the test piece and the setting of processing conditions.
すなわち「テストピースの組成、加工度、Q値、熱処理
条件等が被測定物と異なることにより、超音波の音速が
異なり測定結果に誤差を生じることになる。このため、
現在超音波の寸法測定装置の鮫正方法は「少なくともテ
ストピースは管等被測定物と組成を同じくする材料を用
い、前記被測定物の加工条件のうち少なくとも加工度、
Q値と熱処理条件とを同じくするようにして加工したも
のという限定条件でのテストピースによって鮫正を行な
っている。In other words, ``If the composition, processing degree, Q value, heat treatment conditions, etc. of the test piece are different from those of the object to be measured, the sound speed of the ultrasonic wave will differ, causing an error in the measurement results.
Currently, the Samesho method of ultrasonic dimension measuring equipment is ``at least the test piece is made of a material with the same composition as the object to be measured such as a pipe, and at least the processing degree of the object to be measured is
Test pieces were tested under the limited conditions of being processed with the same Q value and heat treatment conditions.
しかしながら、実際の寸法測定作業においてテストピー
スと被測定物とが全く同じ組成、粒度、加工度のものを
得ることは、非常に困難である。However, in actual dimension measurement work, it is extremely difficult to obtain a test piece and an object to be measured that have exactly the same composition, grain size, and processing degree.
たとえば、一般に超音波寸法測定を行なう鮫正用テスト
ピースは、規格に定まった公差の上限用と下限用の標準
部がある。この上限用、下限用の標準部を製作するため
には「テストピースの原管となる素材は、前記上限用の
標準部寸法より大きな寸法をもつものでなければならな
い。故に前記鮫正用テストピースの標準部と規格上限、
下限公差内に納まっているべき被測定物との間には、当
然加工条件が異なり加工度が異なる。従来この加工度の
差異が寸法指示値に与える程度を定量的に求めることが
できなかった。For example, shark test pieces that are generally subjected to ultrasonic dimension measurements have standard parts for upper and lower limits of tolerance determined by the standard. In order to manufacture the standard parts for the upper and lower limits, the material that becomes the original tube of the test piece must have dimensions larger than the dimensions of the standard parts for the upper limit. Standard part and upper limit of the piece,
Naturally, the machining conditions and the machining degree are different between the workpiece and the workpiece, which should be within the lower limit tolerance. Conventionally, it has not been possible to quantitatively determine the extent to which this difference in working degree affects the specified dimension value.
そして従来は、テストピースと被測定物の集合組織を×
線による正反射極点図法により定性的に判定していた。
本発明は、上述のごとくテストピースと被測定物の加工
度の差異による寸法指示値差が生ずると考えられる場合
に、テストピースと被測定物の定量的差異を判定し「そ
の結果補正して鮫正を行なう鮫正法に関するものである
。Conventionally, the texture of the test piece and the object to be measured was
Qualitative determination was made using specular reflection pole mapping using lines.
As described above, when it is thought that a difference in dimensional indication value occurs due to the difference in processing degree of the test piece and the workpiece, the present invention determines the quantitative difference between the test piece and the workpiece and corrects the result. It concerns the shark-sho method of performing shark-sho.
その具体的方法としては、少なくとも鮫正用テストピー
スの標準部は、被測定物と同一〆値である材料を用いる
かまたは、同一〆値でない場合でも鮫正用テストピース
と被測定物のナ値の偏差に相当した寸法測定指示値差を
補正して鮫正を行なう方法である。発明者らの研究した
ところによれば、集合組織の定量的な解析法としてト近
時導入されるようになってきた〆値と超音波音速すなわ
ち寸法指示値差との間に密接な関係があることがわかっ
た。f値とは、第3図に示すように被測定物11の結晶
方位があると考えている方向本発明に関してはr方向に
平行に配列している全給晶に対する結晶の割合を表わし
たものであり、その程度は下式に示す。〆=」客上多K
凶?)Sinocos2 ぬdび少ノ多′毒九1(Q,
〇畑n◇dQd〇.・−‐‐。As a specific method, at least the standard part of the test piece for shark measurement should be made of a material that has the same limit value as the object to be measured, or even if the standard part of the test piece for shark measurement and the object to be measured are not the same, This method corrects the difference in the dimension measurement instruction value corresponding to the deviation of the value. According to the inventors' research, there is a close relationship between the threshold value, which has recently been introduced as a quantitative analysis method for texture, and the ultrasonic sound velocity, that is, the difference in dimension indicated values. I found out something. The f value is the direction in which the crystal orientation of the object to be measured 11 is considered to be, as shown in FIG. The degree is shown in the formula below. 〆=”Customer Kamida K
Evil? ) Sinocos 2 Nudbi Shonota' Poison 91 (Q,
〇Field n◇dQd〇.・--.
{1){1}式中1(Q,?):額斜角Q,CIこおけ
るX線強度ここで{1’式で求めたナ値と超音波音速(
寸法測定指示値)の関係を述べる。{1) {1} In the formula, 1 (Q,?): X-ray intensity at the forehead oblique angle Q, CI Here, the n value obtained by the formula {1' and the ultrasonic sound velocity (
The following describes the relationship between the dimensions (dimension measurement instructions).
たとえばジルコニュームを主成分とするジルカロィ原子
燃料被覆管篭2のように鋼密六方晶13から構成されて
いるものは、第4図に示すごとく(0002)面垂直方
向(c軸方向)の懐斜角8で音速が最も遠くc軸方向か
ら傾斜が倒れるにつれてしだいに音速は遅くなる。従っ
て超音波音速(寸法測定指示値)はc軸方向への集合度
つまり単結晶の集積濃度を表わす集合組織によって変動
することになる。例えば第7図に示す極点図で判断する
とジルカロィ被覆管の(0002)面の集積濃度は、8
=30o付近で最大となり、この付近を通過する音速は
最も速くなる。次に第5図は、厚さ1仇奴のジルカロィ
についてのナ値と超音波音速(寸法測定指示値)の関係
を示したものである。For example, a Zircaloy nuclear fuel cladding tube 2 whose main component is zirconium, which is composed of steel-tight hexagonal crystals 13, has a phys- ical slope in the direction perpendicular to the (0002) plane (c-axis direction) as shown in Fig. 4. The sound speed is the farthest at corner 8, and as the slope falls from the c-axis direction, the sound speed gradually decreases. Therefore, the ultrasonic sound velocity (dimensional measurement instruction value) varies depending on the degree of aggregation in the c-axis direction, that is, the texture representing the integrated concentration of single crystals. For example, judging from the pole figure shown in Figure 7, the accumulated concentration on the (0002) plane of the Zircaloy cladding tube is 8
It reaches its maximum near =30o, and the speed of sound passing around this area is the fastest. Next, FIG. 5 shows the relationship between the null value and the ultrasonic sound velocity (dimensional measurement instruction value) for Zircaloy with a thickness of 1 mm.
第5図において横軸のナ値は、超音波の照射方向に(0
002)の結晶面がどの程度の割合で向いているかを定
量的に表わしたものであり、たて軸は超音波寸法測定指
示値を示す。たとえば「値が0.55の場合寸法測定指
示値は、10.0物帆となり〆値が0.45の場合寸法
測定指示値はト10.10肋となる。すなわち、この付
近のナ値が0.1変化すれば寸法指示値は1%変化する
。一般にジルカロィ原子燃料被覆管の場合管表面の(0
002)に関する〆値は、0.6±0.05程度である
。次に前記ジルカロィ組成の被覆鋼管において、結晶の
集合組織に大きな影響を及ぼすQ値について述べる。In Fig. 5, the Na value on the horizontal axis is (0) in the ultrasonic irradiation direction.
002) is a quantitative representation of the orientation of the crystal planes, and the vertical axis indicates the ultrasonic dimension measurement instruction value. For example, if the value is 0.55, the dimension measurement instruction value is 10.0, and if the value is 0.45, the dimension measurement instruction value is 10.10. If the dimensional value changes by 0.1, the dimensional value will change by 1%.Generally, in the case of Zircaloy nuclear fuel cladding, the (0
002) is approximately 0.6±0.05. Next, the Q value, which has a large effect on the crystal texture in the Zircaloy coated steel pipe, will be described.
Q値は、加工条件を示すパラメータでその程度を下式に
示す。(2}式中 の:加工前の肉厚,t:加工後の肉
厚do:加工前の内蓬,d:加工後の内径
第6図は、ジルコニュームが98%のジルカ。The Q value is a parameter indicating processing conditions, and its degree is shown in the formula below. (2) In the formula: Wall thickness before processing, t: Wall thickness after processing do: Inner diameter before processing, d: Inner diameter after processing Figure 6 shows Zirca with 98% zirconium.
ィについての〆値とQ値との関係を示したものである。
第6図に示すようにQ値が大きくなるにつれてナ値は大
きくなる。すなわち、Q値が大きくなるにつれて結晶の
c軸が管の半径方向(第3図に示すr方向)に集積した
集合組織となる。以上述べたごとくQ値つまり加工条件
と〆値との関係、ナ値と超音波音速(寸法測定指示値)
とは、互いに相関関係があることを見出した。This shows the relationship between the final value and the Q value for .
As shown in FIG. 6, as the Q value increases, the NA value increases. That is, as the Q value becomes larger, the c-axis of the crystal becomes a texture that is accumulated in the radial direction of the tube (r-direction shown in FIG. 3). As mentioned above, the relationship between the Q value, that is, the processing conditions and the final value, the N value and the ultrasonic sound velocity (dimension measurement instruction value)
It was found that there is a correlation between the two.
その結果、超音波寸法測定に際し鮫正用テストピースと
被測定物のナ値を同一にすればよく、また同一でなくと
もf値差に相当した寸法指示値差を補正すればよい。こ
のことによって鮫正精度が著しく向上し、その効果は大
である。As a result, when performing ultrasonic dimension measurement, it is sufficient to make the n values of the shark test piece and the object to be measured the same, and even if they are not the same, it is sufficient to correct the difference in dimension indicated values corresponding to the f value difference. This significantly improves the accuracy of shark alignment, and the effect is significant.
第1図は管寸法測定中の超音波寸法測定装置とこれから
得られるパルス波形とを示す正面断面図、第2図は同上
装置の側断面図、第3図は被測定物の結晶方位を示すス
テレオ投影図、第4図はジルカロィ原子燃料被覆管の結
晶方位を示す図、第5図はジルカロィのf値と寸法測定
指示値の関係の1例を表わした図、第6図はジルカロィ
についてのf値とQ値の関係の1例を表わした図、第7
図は極点図法によるジルカロィ原子燃料被覆管の集合組
織を示した図である。
12・・…・ジルカロィ原子燃料被覆管、13・・・・
・・鋼密六方晶。
第1図
第2図
第3図
第4図
第5図
第6図
第T図Fig. 1 is a front sectional view showing the ultrasonic dimension measuring device during tube dimension measurement and the pulse waveform obtained from it, Fig. 2 is a side sectional view of the same device, and Fig. 3 shows the crystal orientation of the object to be measured. Stereo projection diagram, Figure 4 is a diagram showing the crystal orientation of Zircaloy nuclear fuel cladding, Figure 5 is a diagram showing an example of the relationship between Zircaloy's f value and dimension measurement instruction value, and Figure 6 is a diagram showing Zircaloy's crystal orientation. Diagram 7 showing an example of the relationship between f value and Q value
The figure is a diagram showing the texture of a Zircaloy nuclear fuel cladding tube using the pole projection method. 12... Zircaloy nuclear fuel cladding tube, 13...
... Steel-tight hexagonal crystal. Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6 Figure T
Claims (1)
材料よりなる較正用テストピースを用い、前記被測定物
と較正用テストピース相互間のf値が同一の場合は補正
することなく、前記相互間のf値に差異のある場合は、
該差異の程度に相当する寸法測定指示値を補正すること
によつて行なうことを特徴とする超音波寸法測定装置の
較正方法。1. When measuring dimensions using ultrasonic waves, use a calibration test piece made of the same material as the object to be measured, and if the f value between the object to be measured and the calibration test piece is the same, the If there is a difference in the f-values,
A method for calibrating an ultrasonic dimension measuring device, characterized in that the calibration method is carried out by correcting a dimension measurement instruction value corresponding to the degree of the difference.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3477979A JPS6020683B2 (en) | 1979-03-23 | 1979-03-23 | Calibration method of ultrasonic dimension measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3477979A JPS6020683B2 (en) | 1979-03-23 | 1979-03-23 | Calibration method of ultrasonic dimension measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55126806A JPS55126806A (en) | 1980-10-01 |
| JPS6020683B2 true JPS6020683B2 (en) | 1985-05-23 |
Family
ID=12423765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3477979A Expired JPS6020683B2 (en) | 1979-03-23 | 1979-03-23 | Calibration method of ultrasonic dimension measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6020683B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5029194A (en) * | 1990-02-05 | 1991-07-02 | Troxler Electronic Laboratories, Inc. | Method and apparatus for accurately measuring the distance to a surface |
-
1979
- 1979-03-23 JP JP3477979A patent/JPS6020683B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55126806A (en) | 1980-10-01 |
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