JPS60227178A - Magnetic field sensor - Google Patents
Magnetic field sensorInfo
- Publication number
- JPS60227178A JPS60227178A JP59267594A JP26759484A JPS60227178A JP S60227178 A JPS60227178 A JP S60227178A JP 59267594 A JP59267594 A JP 59267594A JP 26759484 A JP26759484 A JP 26759484A JP S60227178 A JPS60227178 A JP S60227178A
- Authority
- JP
- Japan
- Prior art keywords
- sensor according
- magnetic
- sensor
- magnetic circuit
- amorphous metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/2804—Printed windings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
- G01D5/2013—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by a movable ferromagnetic element, e.g. a core
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F3/00—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow
- G01F3/02—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow with measuring chambers which expand or contract during measurement
- G01F3/04—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow with measuring chambers which expand or contract during measurement having rigid movable walls
- G01F3/06—Measuring the volume flow of fluids or fluent solid material wherein the fluid passes through the meter in successive and more or less isolated quantities, the meter being driven by the flow with measuring chambers which expand or contract during measurement having rigid movable walls comprising members rotating in a fluid-tight or substantially fluid-tight manner in a housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/42—Devices characterised by the use of electric or magnetic means
- G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
- G01P3/48—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
- G01P3/481—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals
- G01P3/488—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals delivered by variable reluctance detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V3/00—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation
- G01V3/08—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices
- G01V3/10—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices using induction coils
- G01V3/101—Electric or magnetic prospecting or detecting; Measuring magnetic field characteristics of the earth, e.g. declination, deviation operating with magnetic or electric fields produced or modified by objects or geological structures or by detecting devices using induction coils by measuring the impedance of the search coil; by measuring features of a resonant circuit comprising the search coil
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F17/0033—Printed inductances with the coil helically wound around a magnetic core
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F2017/0066—Printed inductances with a magnetic layer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Remote Sensing (AREA)
- Power Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Electromagnetism (AREA)
- Fluid Mechanics (AREA)
- Geology (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geophysics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measuring Magnetic Variables (AREA)
- Measuring Volume Flow (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔発明の技術分野〕
この発明は、インダクチ！部品と、このインダクチブ部
品のインダクタンスの変化を検出する評価回路とを具備
している磁気センナに関するものである。[Detailed Description of the Invention] [Technical Field of the Invention] This invention relates to Induct! The present invention relates to a magnetic sensor that includes a component and an evaluation circuit that detects changes in inductance of the inductive component.
プロセス制御においては本質的な動作パラメータが決定
されることが要求される。これらのパラメータには特に
位置、角度変位、回転速度等が含まれている。これらの
パラメータはしばしば光学的に決定される。しかしなが
ら光学的な技術は汚染を生じない場所でしか使用できな
い。ノ＋ラメータはまた磁石を使用して決定することも
できる。すなわちその磁石の位置が磁界センサによりで
決定される。しかしながらそのようなセンサによって非
常に正確な位置の決定を行うには多大の費用を要する。Process control requires that essential operating parameters be determined. These parameters include, among others, position, angular displacement, rotational speed, etc. These parameters are often determined optically. However, optical techniques can only be used where they do not cause contamination. Parameters can also be determined using magnets. That is, the position of the magnet is determined by the magnetic field sensor. However, very accurate position determinations with such sensors are expensive.
この方法の特に大きな欠点は位置が検出されるべき部品
が永久磁石によってマークを付されなければならないこ
とである。そのような永久磁石のために製造中側の操作
が必要になる。A particularly significant disadvantage of this method is that the part whose position is to be detected must be marked with a permanent magnet. Such permanent magnets require some manipulation during manufacture.
〔発明の目的」
この発明の目的は、磁性材料の位置が非常に正確に決定
できるセンサを提供することである。OBJECT OF THE INVENTION The object of the invention is to provide a sensor in which the position of magnetic material can be determined very precisely.
〔発明の概要Ｊ
この目的は、特許請求の範囲第１項に記載した構成のセ
ンサによって達成される。すなわち、本発明によるセン
サはインダクチブ部品と、このインダクチプ部品のイン
ダクタンスの変化を検知する評価回路とを具備している
。[Summary of the Invention J This object is achieved by a sensor configured as set forth in claim 1. That is, the sensor according to the invention includes an inductive component and an evaluation circuit that detects a change in the inductance of the inductive component.
このインダクチプ部品は基体上の薄層として構成され、
その層の一つは磁性材料で作られて空隙を有する磁気回
路を形成している。また別の層が磁気回路を囲むコイル
を形成するように設けられ、その層は磁気回路から絶縁
されている。もしも磁性材料が間隙の付近にもたらされ
るならばインダクチブ部品のインダクタンスは変化する
。This inductor chip component is constructed as a thin layer on a substrate,
One of the layers is made of magnetic material to form a magnetic circuit with an air gap. Another layer is provided to form a coil surrounding the magnetic circuit, and is insulated from the magnetic circuit. If magnetic material is brought into the vicinity of the gap, the inductance of the inductive component changes.
磁芯として作用する磁気回路はまた同じような構造の第
２のコイルで囲まれることもできる。The magnetic circuit acting as a magnetic core can also be surrounded by a second coil of similar construction.
その場合には相互インダクタンスの変化が評価回路によ
って検知される。評価回路は少なくともその一部がイン
ダクチプ部品の層と同じ基板上に付着されてもよい。磁
気回路の磁性材料は強磁性アモルファス金属であること
が好ましい。Changes in the mutual inductance are then detected by the evaluation circuit. The evaluation circuit may be deposited, at least in part, on the same substrate as the layer of the inductive chip component. Preferably, the magnetic material of the magnetic circuit is a ferromagnetic amorphous metal.
特に適しているアモルファス金属については特許請求の
範囲第５項乃至第１０項に記載しである。磁気回路の間
隙はその付近の磁性材料が磁気回路の特性に影響を与え
るためにはあまり狭過ぎてはならない。本発明の装置に
おいては磁気回路は非常に薄い層であるために、間隙の
幅が磁気回路の層の厚さの１０倍以下であってもセンサ
は非常に高感度である。したがって、非常に高い位置分
解能が得られる。しかしながら、間隙の幅は層の厚さよ
り小さくなりてはならない。本発明によるセンサは回転
運動の検出、内燃機関における回転角度依存プロセスの
始動、流量計等の種々の用途に適したものである。Particularly suitable amorphous metals are described in claims 5 to 10. The gap in the magnetic circuit must not be too narrow for the magnetic material in its vicinity to affect the characteristics of the magnetic circuit. Since in the device of the invention the magnetic circuit is a very thin layer, the sensor is very sensitive even if the width of the gap is less than 10 times the thickness of the layer of the magnetic circuit. Therefore, very high positional resolution can be obtained. However, the width of the gap must not be less than the thickness of the layer. The sensor according to the invention is suitable for various applications, such as the detection of rotational movements, the initiation of angle-of-rotation-dependent processes in internal combustion engines, flow meters, etc.
以下、添付図面を参照に実施例により詳細に説明する。 Hereinafter, embodiments will be described in detail with reference to the accompanying drawings.
本発明によるセンサはインダクチブ部品ｌと評価回路（
図示せず）により構成されている。The sensor according to the invention includes an inductive component l and an evaluation circuit (
(not shown).
そのインダクチプ部品について第１図を参照に以下詳細
に説明する。第１図において（ｂ）は平面図を示し、（
ａ）は（ｂ）の線Ａ−ＡＩＣ沿りた断面図を示す。図は
実際の寸法とは一致しない。部品Ｉの基体はガラスより
なる基体ＺＯである。その他の材料、例えば石英、半導
体、セラミック等も使用可能である。基体１０上に磁気
回路ＩＩが長方形リングの形轢で付着されている。長方
形の長辺の一方には間隙１２が設けられている。The inductor chip component will be explained in detail below with reference to FIG. In FIG. 1, (b) shows a plan view, and (
a) shows a sectional view along the line A-AIC in (b). The drawings do not correspond to the actual dimensions. The base of part I is a base ZO made of glass. Other materials such as quartz, semiconductors, ceramics, etc. can also be used. On the base body 10 a magnetic circuit II is attached in the form of a rectangular ring. A gap 12 is provided on one of the long sides of the rectangle.
この辺と反対伸の長辺にはその磁気回路ＩＩ。The magnetic circuit II is on the long side opposite to this side.
上および下に幅の狭い導電材料の多帯が配置されてこの
磁気回路１１の一辺を囲むコイル１３を形成している。Multiple narrow strips of conductive material are placed above and below to form a coil 13 surrounding one side of the magnetic circuit 11.
コイル１３の区域においては、磁気回路１１はその上ｙ
ｋ覆う絶縁中間層１５および子細の絶縁中間層Ｉ４によ
ってコイルと絶縁されている。In the area of the coil 13, the magnetic circuit 11 is
It is insulated from the coil by a covering insulating intermediate layer 15 and a thin insulating intermediate layer I4.
第１図の（ａ）に示す断面図からインダクチプ部品Ｉの
個々の層の付着される順序が明らかになる。まずコイル
１３の磁気回路Ｚ１の下に位置する部分がマスクを使用
してスパッタリングすることによって付着される。それ
に続いて第１の絶縁中間層Ｉ４、磁気回路１１、第２の
絶縁中間層Ｉ５、コイル１３の残りの部分が順次付着さ
れる＠ス・ｅ、タリングの代りに蒸着によって各層を付
着させることもできる。個々の層の選択的付着はまたフ
ォトリングラフ技術を使用して行うこともできる。何れ
の場合にも間隙１２が形成されなければならず、それは
鋭いエツジを持ち、正確な再現性のある寸法が得られる
ような方法、例えばフォトリソグラフ法によって形成さ
れなければならない。間隙１２の幅は磁気回路１１の層
の厚さの略々ｌ乃至１０倍であることが好ましい。The cross-sectional view shown in FIG. 1(a) reveals the sequence in which the individual layers of the inducting chip I are deposited. First, the part of the coil 13 located below the magnetic circuit Z1 is deposited by sputtering using a mask. Subsequently, the first insulating interlayer I4, the magnetic circuit 11, the second insulating interlayer I5, and the remaining parts of the coil 13 are deposited in sequence. You can also do it. Selective deposition of individual layers can also be performed using photophosphorographic techniques. In each case, the gap 12 must be formed, which must have sharp edges and be formed by a method that allows accurate and reproducible dimensions to be obtained, for example photolithography. Preferably, the width of the gap 12 is approximately 1 to 10 times the thickness of the layers of the magnetic circuit 11.
磁気回路１１に特に適した材料は強磁性アモルファス金
属である。そのような金属は非常にすぐれた出猟的特性
を有し、薄層の製作には理想的な材料である。良好な強
磁性特性はアモルファス金属によって与えられるもので
あり、アモルファス金属は鉄族の遷移元素をペースとす
る合金である。アモルファス金属はメタロイドＣＢ Ｉ
ＣＩ Ｓｉ ｌ Ｇｅ 、 Ｐ ）およびチタニウム
、ジルコニウム、ノ・フニウムおよび、またはニオビウ
ムを含んでいてもよいＯアモルファス金属の５チ（原子
％）まで他の元素が含まれてもよい。特に適したアモル
ファス金属は（：０−Ｆｅヘ−スの合金、特に好ましい
のはＣ０ＸＦ”ｙＢｌ ［１Ｏ−ｘ−アの組成の合金で
ある。ここでＸは７０≦Ｘ≦８０ であり、ｙは４ ＜
ｙ≦１０である（ただしＸ ｒ ｙ共に原子チ）。絶
縁中間層１４および１５は石英で作られるがＡｔ２０３
． Ｔｍ２Ｏ３およびＴｌＯ２のようなその他の通常使
用されている絶縁材料も同様に使用可能である。コイル
１３は金（Ａｕ ）で作られるが、薄膜製作に通常使用
される任意のその他の導電材料で作ることができる。コ
イル１３を磁気回路１１の材料と同じ材料で作ることも
可能である。A particularly suitable material for the magnetic circuit 11 is a ferromagnetic amorphous metal. Such metals have very good mechanical properties and are ideal materials for the production of thin layers. Good ferromagnetic properties are provided by amorphous metals, which are alloys based on transition elements of the iron group. Amorphous metal is metalloid CB I
Other elements may be included (at. A particularly suitable amorphous metal is an alloy with a composition of (:0-Fe base), particularly preferred is an alloy with the composition COXF"yBl[1O-x-A, where X is 70≦X≦80 is 4 <
y≦10 (however, both X ry and y are atoms). The insulating intermediate layers 14 and 15 are made of quartz, but At203
．． Other commonly used insulating materials such as Tm2O3 and TlO2 can be used as well. Coil 13 is made of gold (Au), but can be made of any other conductive material commonly used in thin film fabrication. It is also possible to make the coil 13 from the same material as the magnetic circuit 11.
評価回路にはインダクタンスの変化を検知することので
きる、或はインダクタンスの絶対値を決定することので
きる任意の回路が使用できる。評価回路或はその一部は
インダクチプ部品ｌの基板１０上に付着させることがで
きる。Any circuit capable of detecting changes in inductance or determining the absolute value of inductance can be used as the evaluation circuit. The evaluation circuit or a part thereof can be deposited on the substrate 10 of the inductive chip component l.
コイル１３と同様の方法で第２のコイルを磁気回路１１
ｆ囲んで設けることができる。この場合には評価回路は
相互インダクタンスの変化を検知するように設計されな
ければならない。The second coil is connected to the magnetic circuit 11 in the same manner as the coil 13.
It can be provided surrounding f. In this case the evaluation circuit must be designed to detect changes in mutual inductance.
次に、本発明センサのいくつかの応用例について説明す
る。Next, some application examples of the sensor of the present invention will be explained.
本発明によるセンサは装置の回転運動の検知に使用する
のに有効である。例えば自動車において駆動歯車の回転
運動が走行速度および走行キロメートル数を決定するた
めに評価されるようにすることができる。エンジン速度
も同じようにして決定できる。回転運動を検出するため
に例えば回転運動が検知されるべき本体、或はそれに恒
久的に固定された部品に磁化可能な材料の突出部が設け
られる。センサのイングクチブ部品Ｉは前記突出部が間
隙Ｉ２の近傍を通過するようにこの突出部のすぐ近くに
取付けられる。このようにして間隙１２の区域における
磁気リラクタンスが変化し、したがってインダクチブ部
品Ｉのインダクタンスが変化する。例えば自動車ではエ
ンジンの回転の検出にはスタータのリングギアを利用す
るのが理想的である。A sensor according to the invention is useful for detecting rotational movement of a device. For example, in a motor vehicle, the rotational movement of a drive gear can be evaluated in order to determine the driving speed and the number of kilometers traveled. Engine speed can be determined in the same way. For detecting rotational movements, projections of magnetizable material are provided, for example, on the body, or on parts permanently fixed thereto, whose rotational movements are to be detected. The active part I of the sensor is mounted in close proximity to said projection in such a way that it passes close to the gap I2. In this way, the magnetic reluctance in the area of the gap 12 changes and thus the inductance of the inductive component I. For example, in a car, it is ideal to use the starter's ring gear to detect engine rotation.
このギアはエンジンと同じ速度で回転し、そのギアの歯
は必要な磁性材料の突出部として使用できる。したがっ
て回転速度のみならずそれぞれの角度変位もまた非常に
正確に決定されることができる。しかしながら、角度変
位の決定の場合にはゼロ位置の決定のためにギアからの
別の突出部および追加のセンサが必要である。This gear rotates at the same speed as the engine, and its teeth can be used as protrusions for the necessary magnetic material. Therefore, not only the rotational speed but also the respective angular displacement can be determined very precisely. However, in the case of determining the angular displacement, another protrusion from the gear and an additional sensor are required for determining the zero position.
上述の装置は内燃機関において回転角に依存したプロセ
スを電気的に始動させることを可能にする。電気的始動
ができるそのようなプロセスは点火および電気作動弁の
開閉である。The above-mentioned device makes it possible to electrically start processes that depend on the angle of rotation in an internal combustion engine. Such processes that can be electrically started are ignition and the opening and closing of electrically operated valves.
本発明センサの別の応用について以下第２図を参照に説
明する。第２図の（ａ）および（ｂ）は流量計の２個の
断面（縦断面および横断面）ｖＩ−略図で示す。翼車４
Ｉは流体の流れによって回転するようにケース４内に取
付けられている。ケース４の側壁の一方はセンナのイン
ダクチブ部品Ｉの基板１０でもある。第２図の（ｃ）は
基板１０を形成している側壁の平面図（第２図の（ｂ）
の右から見た図）である。この（ｅ）Ｋは間隙Ｉ２を有
する磁気回路ＩＺが示され、コイル１３け輪郭で描かれ
ている。図の６）にはまたコイルＩ３の接続が薄い層と
して外部に導出させる方法が示されている。翼車４１の
翼４２の少なくとも１個は磁性材料を含んでいる。した
がってそのような楓４２の間隙１２の近傍の通過が検出
されることか可能である。このような流量計は例えば自
動車の消費燃料の測定に使用できる。Another application of the sensor of the present invention will be described below with reference to FIG. FIGS. 2a and 2b show two cross-sections (longitudinal and transverse) vI-schematically of the flowmeter. wing wheel 4
I is mounted in the case 4 so as to be rotated by the flow of fluid. One of the side walls of the case 4 is also the substrate 10 of Senna's inductive component I. FIG. 2(c) is a plan view of the side wall forming the substrate 10 (FIG. 2(b))
(view from the right). In this (e) K, a magnetic circuit IZ with a gap I2 is shown, and the coil 13 is drawn in outline. 6) of the figure also shows a method in which the connection of the coil I3 is led out as a thin layer. At least one of the blades 42 of the wheel 41 includes magnetic material. Therefore, it is possible to detect the passage of such a maple 42 in the vicinity of the gap 12. Such a flowmeter can be used, for example, to measure the fuel consumption of a motor vehicle.
本発明によるセンサはまた直線運動用の位置センサとし
て使用することも可能であり、例えばエレベータ制机機
構用の接点として利用できる。The sensor according to the invention can also be used as a position sensor for linear movements, for example as a contact for an elevator machine.
或種の液体もまた多少とも強磁性体である。Some liquids are also more or less ferromagnetic.
したがって、本発明のセンサはタンク内の液体の液面の
レベルを決定するのにも利用できる。Therefore, the sensor of the invention can also be used to determine the level of liquid in a tank.
絶対値の測定によってレベルは単一のセンナによって決
定することができる。インダクタンスの変化の測定によ
って液面が所定のレベルを超えた時、或は所定の限度以
下に低下した時に検知することが可能である。By measuring the absolute value the level can be determined by a single sensor. By measuring the change in inductance it is possible to detect when the liquid level exceeds a predetermined level or falls below a predetermined limit.
第１図は、本発明センナの１実施例の断面図および平面
図を示し、第２図は本発明センサを備えた流量計を示す
。
ｒｏ・・・基板、ＩＩ・・・磁気回路、Ｉ３・・・コイ
ル、１４．１５・・・中間層、４１・・・翼車、４２・
・・翼。
Ｆｉｇ、 １FIG. 1 shows a cross-sectional view and a plan view of an embodiment of the sensor of the invention, and FIG. 2 shows a flowmeter equipped with the sensor of the invention. ro... Substrate, II... Magnetic circuit, I3... Coil, 14.15... Intermediate layer, 41... Impeller, 42...
...Wings. Fig, 1
Claims (9)
インダクタンスの変化を検知する評価回路とを具備する
磁気センサにおいて、 インダクチプ部品は基体上の薄層として構成され、その
層の一つは磁性材料で作られて空隙を有する磁気回路を
形成しており、別の層が前記空隙から離れた磁気回路の
地点において部分的に磁気回路の上方および部分的に磁
気回路の下方を通過して磁気回路を囲むコイルを形成し
ており、磁気回路は絶縁中間層によって前記コイルから
絶縁されていることを特徴とする磁気センサ。(1) In a magnetic sensor that includes an inductive component and an evaluation circuit that detects changes in the inductance of the inductive component, the inductive component is constructed as a thin layer on a substrate, and one of the layers is made of a magnetic material. a coil that surrounds the magnetic circuit by passing partially above the magnetic circuit and partially below the magnetic circuit at a point of the magnetic circuit remote from the gap; A magnetic sensor comprising: a magnetic circuit formed therein, wherein a magnetic circuit is insulated from the coil by an insulating intermediate layer.
まれており、相互インダクタンスの変化が評価回路によ
って検知される特許請求の範囲第１項記載のセンナ。(2) The sensor according to claim 1, wherein the magnetic circuit is surrounded by two coils of similar construction, and a change in mutual inductance is detected by an evaluation circuit.
基体上に付着されている特許請求の範囲第１項または第
２項記載のセンサ。(3) The sensor according to claim 1 or 2, wherein at least a part of the evaluation circuit is attached on the base of the inductive component.
求の範囲第１項乃至第３項の何れか１項記載のセンサ。(4) The sensor according to any one of claims 1 to 3, wherein the magnetic material is a ferromagnetic amorphous metal.
する合金である特許請求の範囲第４項記載のセンサ。(5) The sensor according to claim 4, wherein the amorphous metal is an alloy based on an iron group transition element.
記載のセンサ。(6) The sensor according to claim 5, wherein the amorphous metal contains metalloids (B, C, Si, Gs, P).
、ハフニウムおよび／またはニオビウムを含んでいる特
許請求の範囲第５項または第６項記載のセンサ。(7) The sensor according to claim 5 or 6, wherein the amorphous metal contains titanium, zirconium, hafnium and/or niobium.
元素より成る特許請求の範囲第５項乃至第７項の何れか
１項記載のセンサ。(8) The sensor according to any one of claims 5 to 7, wherein up to five atoms of the amorphous metal are other elements.
ある特許請求の範囲第５項記載のセンサ。 ０１ アモルファス金属がＣｏＸＦａｙ Ｂ１゜。＝Ｘ
−アの組成であり、Ｘが、７０≦ｘく８０、ｙが、４≦
ｙ≦１０（ただしｘ、ｙは原子幅による）である特許請
求の範囲第６項または第９項記載のセンサ。 θカ 空隙の幅が磁気回路の層の厚さの略々ｌ乃至１０
倍である特許請求の範囲第１項乃至第１０項の何れか１
項記載のセンサ。 ａ９ 回転運動が検知されるべき本体またはそれに恒久
的に固定された部品に磁性材料の１以上の突出部が設け
られ、センサのインダクチブ部品はこの突出部の運動に
よって間隙部分における磁気リラクタンスが変化される
ような位置に配置されている回転運動の検知用として構
成された特許請求の範囲第１項乃至第１１項の何れか１
項記載のセンサ。 り→ 回転角度依存プロセスが始動されるように前記突
出部に対してインダクチブ部品の前記間隙が配置されて
いる内燃機関に配置された特許請求の範囲第１２項記載
のセンサ。 α４ 内部に流体の流れを回転運動に変換する翼車が設
けられているケースの側壁の一方がインダクチブ部品の
基体を構成しており、翼車の翼の少なくとも一つが磁性
材を含んでいる流量計として構成された特許請求の範囲
第１２項記載のセンサ・(9) The sensor according to claim 5, wherein the amorphous metal is a Co-Fs-based alloy. 01 The amorphous metal is CoXFay B1°. =X
-A composition, where X is 70≦x80, and y is 4≦
The sensor according to claim 6 or 9, wherein y≦10 (where x and y depend on the atomic width). θ Ka The width of the air gap is approximately 1 to 10 times the thickness of the layer of the magnetic circuit.
Any one of claims 1 to 10 that is
Sensor described in section. a9 The body whose rotational movement is to be detected or a part permanently fixed thereto is provided with one or more protrusions of magnetic material, and the inductive part of the sensor is such that the movement of the protrusions changes the magnetic reluctance in the gap. Any one of claims 1 to 11 configured for detecting rotational motion arranged at a position such that
Sensor described in section. 13. Sensor according to claim 12, arranged in an internal combustion engine, in which the gap of the inductive part is arranged with respect to the protrusion such that a rotation angle-dependent process is initiated. α4 One of the side walls of the case is provided with an impeller that converts the flow of fluid into rotational motion and constitutes the base of the inductive component, and at least one of the blades of the impeller contains a magnetic material. The sensor according to claim 12 configured as a meter.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19833346643 DE3346643A1 (en) | 1983-12-23 | 1983-12-23 | SENSOR FOR MAGNETIZABLE MATERIALS |
| DE3346643.2 | 1983-12-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60227178A true JPS60227178A (en) | 1985-11-12 |
Family
ID=6217844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59267594A Pending JPS60227178A (en) | 1983-12-23 | 1984-12-20 | Magnetic field sensor |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4649755A (en) |
| JP (1) | JPS60227178A (en) |
| DE (1) | DE3346643A1 (en) |
| FR (1) | FR2557310B1 (en) |
| GB (1) | GB2151793B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010112792A (en) * | 2008-11-05 | 2010-05-20 | Nippon Soken Inc | Collision detector |
| JP2016111048A (en) * | 2014-12-02 | 2016-06-20 | 学校法人福岡大学 | Inductor built-in substrate |
| JP2019512703A (en) * | 2016-03-24 | 2019-05-16 | ザ・スウォッチ・グループ・リサーチ・アンド・ディベロップメント・リミテッド | Force sensor especially for touch pads |
| JP2020506404A (en) * | 2017-01-27 | 2020-02-27 | ヒルテンベルガー エンジニアド サーフェスィズ ゲーエムベーハー | Magnetic force sensor and its manufacture |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3502008A1 (en) * | 1985-01-23 | 1986-07-24 | Standard Elektrik Lorenz Ag, 7000 Stuttgart | EXPANSION SENSOR |
| DE3738455A1 (en) * | 1986-11-25 | 1988-06-01 | Landis & Gyr Ag | ARRANGEMENT FOR MEASURING A LOW-FLOW MAGNETIC FIELD |
| US5414356A (en) * | 1987-09-21 | 1995-05-09 | Hitachi, Ltd. | Fluxmeter including squid and pickup coil with flux guiding core and method for sensing degree of deterioration of an object |
| JPH01212301A (en) * | 1988-02-19 | 1989-08-25 | Toshiba Corp | Strain sensor |
| EP0359922A1 (en) * | 1988-09-13 | 1990-03-28 | Landis & Gyr Betriebs AG | Apparatus for magnetic-field measurement |
| US5070317A (en) * | 1989-01-17 | 1991-12-03 | Bhagat Jayant K | Miniature inductor for integrated circuits and devices |
| DE4018148A1 (en) * | 1990-06-06 | 1991-12-12 | Siemens Ag | MAGNETIC SENSITIVE SETUP WITH SEVERAL MAGNETIC SENSORS |
| US5068607A (en) * | 1990-06-22 | 1991-11-26 | Data Instruments, Inc. | Electrical linear position transducer with silicon steel foil shield surrounding transducer coil |
| EP0959330B1 (en) * | 1990-08-20 | 2006-01-18 | Oval Corporation | Positive displacement flowmeter and method of producing the same |
| US5831431A (en) * | 1994-01-31 | 1998-11-03 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. | Miniaturized coil arrangement made by planar technology, for the detection of ferromagnetic materials |
| US5576680A (en) * | 1994-03-01 | 1996-11-19 | Amer-Soi | Structure and fabrication process of inductors on semiconductor chip |
| GB2304735A (en) * | 1995-08-31 | 1997-03-26 | Penny & Giles Position Sensors | Transducer cores |
| AUPO511397A0 (en) * | 1997-02-14 | 1997-04-11 | Resmed Limited | An apparatus for varying the flow area of a conduit |
| AUPO742297A0 (en) | 1997-06-18 | 1997-07-10 | Resmed Limited | An apparatus for supplying breathable gas |
| US6166422A (en) * | 1998-05-13 | 2000-12-26 | Lsi Logic Corporation | Inductor with cobalt/nickel core for integrated circuit structure with high inductance and high Q-factor |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3344237A (en) * | 1967-09-26 | Desposited film transducing apparatus and method op producing the apparatus | ||
| US3053087A (en) * | 1957-08-06 | 1962-09-11 | Foxboro Co | Flowmeter |
| US3177711A (en) * | 1961-09-08 | 1965-04-13 | Fischer & Porter Co | Turbine flowmeter |
| US3290758A (en) * | 1963-08-07 | 1966-12-13 | Hybrid solid state device | |
| GB1161774A (en) * | 1966-02-21 | 1969-08-20 | Int Standard Electric Corp | An Inductor on a Flat Insulating Substrate |
| US3636470A (en) * | 1967-12-04 | 1972-01-18 | Olivetti & Co Spa | Variable inductance-controlled oscillator switching circuit |
| US3986210A (en) * | 1973-02-20 | 1976-10-12 | Matsushita Electric Industrial Co., Ltd. | Magnetic head device using printed circuit techniques |
| US3858138A (en) * | 1973-03-05 | 1974-12-31 | Rca Corp | Tuneable thin film inductor |
| US4116728B1 (en) * | 1976-09-02 | 1994-05-03 | Gen Electric | Treatment of amorphous magnetic alloys to produce a wide range of magnetic properties |
| SU669392A1 (en) * | 1978-01-11 | 1979-06-25 | Предприятие П/Я В-8466 | Integral magnetic head |
| US4158213A (en) * | 1978-06-19 | 1979-06-12 | Spin Physics, Inc. | Multitrack magnetic heads |
| SU980145A1 (en) * | 1981-11-20 | 1982-12-07 | Киевский Научно-Исследовательский И Конструкторский Институт Периферийного Оборудования | Method of manufacturing integral magnetic heads |
| FR2525776A1 (en) * | 1982-04-21 | 1983-10-28 | Renault | Variable magnetic field influence proximity pick=up - has inductance of thin conductor bonded on magnetic strip placed in oscillator circuit |
| DE3323197A1 (en) * | 1983-02-18 | 1984-08-23 | Standard Elektrik Lorenz Ag, 7000 Stuttgart | MAGNETIC FIELD SENSOR AND A POSITION SENSOR CONTAINING MAGNETIC FIELD SENSOR |
| DE3346659A1 (en) * | 1983-12-23 | 1985-07-04 | Standard Elektrik Lorenz Ag, 7000 Stuttgart | Inductive component |
| JPH119A (en) * | 1997-06-11 | 1999-01-06 | Kobashi Kogyo Co Ltd | Sugar cane planting equipment |
-
1983
- 1983-12-23 DE DE19833346643 patent/DE3346643A1/en not_active Withdrawn
-
1984
- 1984-12-07 GB GB08431017A patent/GB2151793B/en not_active Expired
- 1984-12-20 JP JP59267594A patent/JPS60227178A/en active Pending
- 1984-12-24 US US06/685,869 patent/US4649755A/en not_active Expired - Fee Related
- 1984-12-24 FR FR8419780A patent/FR2557310B1/en not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010112792A (en) * | 2008-11-05 | 2010-05-20 | Nippon Soken Inc | Collision detector |
| JP2016111048A (en) * | 2014-12-02 | 2016-06-20 | 学校法人福岡大学 | Inductor built-in substrate |
| JP2019512703A (en) * | 2016-03-24 | 2019-05-16 | ザ・スウォッチ・グループ・リサーチ・アンド・ディベロップメント・リミテッド | Force sensor especially for touch pads |
| JP2020506404A (en) * | 2017-01-27 | 2020-02-27 | ヒルテンベルガー エンジニアド サーフェスィズ ゲーエムベーハー | Magnetic force sensor and its manufacture |
Also Published As
| Publication number | Publication date |
|---|---|
| US4649755A (en) | 1987-03-17 |
| GB2151793A (en) | 1985-07-24 |
| FR2557310B1 (en) | 1988-02-12 |
| FR2557310A1 (en) | 1985-06-28 |
| DE3346643A1 (en) | 1985-07-04 |
| GB2151793B (en) | 1986-12-10 |
| GB8431017D0 (en) | 1985-01-16 |
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