JPS60230058A - ポータブルキャピラリーガスクロマトグラフ装置用シリコンウエハ - Google Patents

ポータブルキャピラリーガスクロマトグラフ装置用シリコンウエハ

Info

Publication number: JPS60230058A
Authority: JP; Japan
Prior art keywords: silicon wafer; pressure; gas; carrier gas; groove
Prior art date: 1984-04-27
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP59085796A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0460219B2 (it

Inventor

Shiyousuke Hagiwara

萩原　▲しよう▼介

Yasuo Takayama

康夫高山

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Sord Computer Systems Inc

Sord Computer Corp

Original Assignee

Sord Computer Systems Inc

Sord Computer Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-04-27

Filing date

1984-04-27

Publication date

1985-11-15

1984-04-27 Application filed by Sord Computer Systems Inc, Sord Computer Corp filed Critical Sord Computer Systems Inc

1984-04-27 Priority to JP59085796A priority Critical patent/JPS60230058A/ja

1985-11-15 Publication of JPS60230058A publication Critical patent/JPS60230058A/ja

1992-09-25 Publication of JPH0460219B2 publication Critical patent/JPH0460219B2/ja

Status Granted legal-status Critical Current

Links

XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 28
229910052710 silicon Inorganic materials 0.000 title claims description 28
239000010703 silicon Substances 0.000 title claims description 28
239000007789 gas Substances 0.000 claims description 40
239000012159 carrier gas Substances 0.000 claims description 28
235000012431 wafers Nutrition 0.000 description 25
239000010408 film Substances 0.000 description 9
238000005530 etching Methods 0.000 description 7
YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 6
238000002347 injection Methods 0.000 description 6
239000007924 injection Substances 0.000 description 6
BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 5
238000004458 analytical method Methods 0.000 description 5
239000012528 membrane Substances 0.000 description 5
238000004891 communication Methods 0.000 description 4
239000011521 glass Substances 0.000 description 4
239000000203 mixture Substances 0.000 description 4
239000004065 semiconductor Substances 0.000 description 4
QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
239000012670 alkaline solution Substances 0.000 description 3
239000003795 chemical substances by application Substances 0.000 description 3
238000004817 gas chromatography Methods 0.000 description 3
229910052697 platinum Inorganic materials 0.000 description 3
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 2
KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
238000003780 insertion Methods 0.000 description 2
230000037431 insertion Effects 0.000 description 2
239000005297 pyrex Substances 0.000 description 2
239000010409 thin film Substances 0.000 description 2
206010021143 Hypoxia Diseases 0.000 description 1
GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
239000007864 aqueous solution Substances 0.000 description 1
238000009530 blood pressure measurement Methods 0.000 description 1
229910003460 diamond Inorganic materials 0.000 description 1
239000010432 diamond Substances 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000010438 heat treatment Methods 0.000 description 1
230000014759 maintenance of location Effects 0.000 description 1
238000005259 measurement Methods 0.000 description 1
238000000034 method Methods 0.000 description 1
229910017604 nitric acid Inorganic materials 0.000 description 1
239000003921 oil Substances 0.000 description 1
230000000149 penetrating effect Effects 0.000 description 1
229920001296 polysiloxane Polymers 0.000 description 1
238000004445 quantitative analysis Methods 0.000 description 1
230000001105 regulatory effect Effects 0.000 description 1
230000003068 static effect Effects 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/60—Construction of the column
- G01N30/6095—Micromachined or nanomachined, e.g. micro- or nanosize

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Nanotechnology (AREA)
Physics & Mathematics (AREA)
Health & Medical Sciences (AREA)
Life Sciences & Earth Sciences (AREA)
Analytical Chemistry (AREA)
Biochemistry (AREA)
General Health & Medical Sciences (AREA)
General Physics & Mathematics (AREA)
Immunology (AREA)
Pathology (AREA)
Treatment Of Liquids With Adsorbents In General (AREA)
Weting (AREA)

JP59085796A 1984-04-27 1984-04-27 ポータブルキャピラリーガスクロマトグラフ装置用シリコンウエハ Granted JPS60230058A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP59085796A JPS60230058A (ja)	1984-04-27	1984-04-27	ポータブルキャピラリーガスクロマトグラフ装置用シリコンウエハ

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP59085796A JPS60230058A (ja)	1984-04-27	1984-04-27	ポータブルキャピラリーガスクロマトグラフ装置用シリコンウエハ

Publications (2)

Publication Number	Publication Date
JPS60230058A true JPS60230058A (ja)	1985-11-15
JPH0460219B2 JPH0460219B2 (it)	1992-09-25

Family

ID=13868843

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP59085796A Granted JPS60230058A (ja)	1984-04-27	1984-04-27	ポータブルキャピラリーガスクロマトグラフ装置用シリコンウエハ

Country Status (1)

Country	Link
JP (1)	JPS60230058A (it)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4891120A (en) *	1986-06-06	1990-01-02	Sethi Rajinder S	Chromatographic separation device
US5116495A (en) *	1987-09-11	1992-05-26	Ottosensors Corporation	Capillary chromatography device
US5132012A (en) *	1988-06-24	1992-07-21	Hitachi, Ltd.	Liquid chromatograph
US5500071A (en) *	1994-10-19	1996-03-19	Hewlett-Packard Company	Miniaturized planar columns in novel support media for liquid phase analysis
US5658413A (en) *	1994-10-19	1997-08-19	Hewlett-Packard Company	Miniaturized planar columns in novel support media for liquid phase analysis
JP2002228647A (ja) *	2001-01-31	2002-08-14	Shimadzu Corp	ガスクロマトグラフ
JP2008232799A (ja) *	2007-03-20	2008-10-02	Shimadzu Corp	熱分解ガスクロマトグラフ装置
JP2011524536A (ja) *	2008-06-17	2011-09-01	トライコーンテックコーポレイション	医療用途のためのハンドヘルドガス分析システム
US9658196B2 (en)	2009-07-31	2017-05-23	Tricorntech Corporation	Gas collection and analysis system with front-end and back-end pre-concentrators and moisture removal
US9683974B2 (en)	2009-07-07	2017-06-20	Tricorntech Corporation	Cascaded gas chromatographs (CGCs) with individual temperature control and gas analysis systems using same
US9921192B2 (en)	2010-04-23	2018-03-20	Tricorntech Corporation	Gas analyte spectrum sharpening and separation with multi-dimensional micro-GC for gas chromatography analysis

1984
- 1984-04-27 JP JP59085796A patent/JPS60230058A/ja active Granted

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4891120A (en) *	1986-06-06	1990-01-02	Sethi Rajinder S	Chromatographic separation device
US5116495A (en) *	1987-09-11	1992-05-26	Ottosensors Corporation	Capillary chromatography device
US5132012A (en) *	1988-06-24	1992-07-21	Hitachi, Ltd.	Liquid chromatograph
US5500071A (en) *	1994-10-19	1996-03-19	Hewlett-Packard Company	Miniaturized planar columns in novel support media for liquid phase analysis
US5658413A (en) *	1994-10-19	1997-08-19	Hewlett-Packard Company	Miniaturized planar columns in novel support media for liquid phase analysis
JP2002228647A (ja) *	2001-01-31	2002-08-14	Shimadzu Corp	ガスクロマトグラフ
JP2008232799A (ja) *	2007-03-20	2008-10-02	Shimadzu Corp	熱分解ガスクロマトグラフ装置
JP2011524536A (ja) *	2008-06-17	2011-09-01	トライコーンテックコーポレイション	医療用途のためのハンドヘルドガス分析システム
JP2014232110A (ja) *	2008-06-17	2014-12-11	トライコーンテックコーポレイション	医療用途のためのハンドヘルドガス分析システム
US9683974B2 (en)	2009-07-07	2017-06-20	Tricorntech Corporation	Cascaded gas chromatographs (CGCs) with individual temperature control and gas analysis systems using same
US9658196B2 (en)	2009-07-31	2017-05-23	Tricorntech Corporation	Gas collection and analysis system with front-end and back-end pre-concentrators and moisture removal
US9921192B2 (en)	2010-04-23	2018-03-20	Tricorntech Corporation	Gas analyte spectrum sharpening and separation with multi-dimensional micro-GC for gas chromatography analysis
US11035834B2 (en)	2010-04-23	2021-06-15	TricornTech Taiwan	Gas analyte spectrum sharpening and separation with multi-dimensional micro-GC for gas chromatography analysis
US11796515B2 (en)	2010-04-23	2023-10-24	Tricorntech Corporation	Gas analyte spectrum sharpening and separation with multi-dimensional micro-GC for gas chromatography analysis
US12265067B2 (en)	2010-04-23	2025-04-01	Tricorntech Corporation	Gas analyte spectrum sharpening and separation with multi-dimensional micro-GC for gas chromatography analysis

Also Published As

Publication number	Publication date
JPH0460219B2 (it)	1992-09-25

Publication	Publication Date	Title
US4764797A (en)	1988-08-16	Chemical-sensitive semiconductor device
JPS60230058A (ja)	1985-11-15	ポータブルキャピラリーガスクロマトグラフ装置用シリコンウエハ
US10480974B2 (en)	2019-11-19	Composite MEMS flow sensor on silicon-on-insulator device and method of making the same
JPH02232554A (ja)	1990-09-14	センサー構造
US20050183496A1 (en)	2005-08-25	Micro slit viscometer with monolithically integrated pressure sensors
US6290388B1 (en)	2001-09-18	Multi-purpose integrated intensive variable sensor
US5767387A (en)	1998-06-16	Chromatograph having pneumatic detector
KR100954025B1 (ko)	2010-04-20	낮은 농도의 대상 물질을 검출하기 위한 센서
US4115230A (en)	1978-09-19	Partial oxygen measurement system
DK0566717T3 (da)	1998-12-21	Miniaturiseret sensorelement til bestemmelse af stofkoncentrationer i væsker og fremgangsmåde til dets fremstilling
EP1754036A2 (en)	2007-02-21	Micro slit viscometer with monolithically integrated pressure sesonrs
US10677622B2 (en)	2020-06-09	System for measuring flow of a liquid in a microfluidic circuit by determining gas and liquid pressures
US3388597A (en)	1968-06-18	Measuring and computing device and method
JP3318405B2 (ja)	2002-08-26	参照電極
US4151741A (en)	1979-05-01	Method and apparatus for gas chromatographic analysis
Phansi et al.	2017	Kinetic thermometric methods in analytical chemistry
FR2647907A1 (fr)	1990-12-07	Procede pour etalonner un appareil de mesure de l'acceleration
US3436190A (en)	1969-04-01	Device for the determination of the concentration of a chemical compound in a liquid
Van Putten et al.	2003	Multisensor microsystem for pulmonary function diagnostics
CN117783401A (zh)	2024-03-29	单沟道微热导检测器及其制备方法
Walker et al.	1957	Precision Thermal‐Conductivity Gas Analyzer Using Thermistors
RU221540U1 (ru)	2023-11-10	Детектор по теплопроводности для газовой хроматографии
US20100181211A1 (en)	2010-07-22	Electrochemical sensor and biosensor and method of electrochemical measurement
JPS60229342A (ja)	1985-11-14	貫通孔を有するｎ形シリコンウエハ及びその製造方法
Reay et al.	1994	Microfabricated electrochemical detector for capillary electrophoresis