JPS60249792A - High hermetic sealing fluid coupling - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a cap nut tightening fluid coupling that has excellent airtightness and is easy to install.

In recent years, with the increasing speed of technological innovation, there has been a need to manufacture extremely large-scale integrated circuits, as seen in very large scale integrated circuits (VLSIs) and super large scale integrated circuits (VLSIs). Manufacturing such large-scale integrated circuits requires the use of ultra-toxic gaseous fluids such as the semiconductor compound gallium arsenide and the formation of highly pure films in ultra-high vacuums. Semiconductor manufacturing equipment is inevitably required to have a high degree of airtightness.

However, in order to connect the flow path forming elements of such a device, it is impossible to weld all of them, and the device cannot be completed without a fluid joint that can be mechanically connected and has excellent air resistance. I can't do it. The joints used for this purpose are mainly foreign-made joints because of their high reliability, and there are various types, but a typical one is the one shown in Figure 6. ,2
Two sleeves 1 and 2 through Caskerato 3 I! I! The other sleeve 2 is connected to the gland 4, which has a threaded part on the outer periphery of the sleeve 1, which is fitted with this connection tightening.
An example of this is a fluid coupling that is achieved by screwing together a nut 5 that is fitted into the body. However, this type of cap nut tightening is often used especially for small diameter pipes because it is simple and does not take up much space. Rotational torque is applied to the sleeve 2 due to friction, which causes the piping welded to the sleeve 2 to twist, and the rotation of the sleeve scratches the gasket surface, which can cause fluid leaks. . In order to prevent this, a method is generally used in which two sides of the sleeve 2 are chamfered, and a slat is applied to the chamfered position 6 to suppress rotation of the sleeve 2 while tightening a bag nand. However, with this method, the rotation of the gland 4 and the sleeve 2 must be suppressed in two places, and the cap nut 5 must be tightened, so it is impossible for one person to do the work alone, and the work must be done carefully. This has the drawback of extremely poor workability.

The present inventor has focused on this point and, as a result of intensive research, has succeeded in developing a cap nut tightening fluid coupling that can eliminate the above drawbacks and exhibits outstanding airtightness, and has arrived at the present invention.

That is, the present invention provides a tube having a threaded portion on the outer periphery of one end of the tube, and a short annular portion on the outer periphery of the tip that abuts and communicates with a through hole on the neck side of the tenon via a caskerat. In a fluid coupling comprising a sleeve consisting of a body, and a cap nut fitted into the sleeve and threadedly engaged with a threaded portion of an Ij-line book distribution zone to firmly tighten the podium and the sleeve, the sleeve and the The present invention is characterized in that a rotating means is provided between the cap nut and the cap nut so that only the cap nut can be rotated without rotating the sleeve when tightening the cap nut.

Next, embodiments of the present invention will be described based on the drawings.

In FIG. 1, 11 is a poday, 12 is a sleeve, and 13 is a cap nut, and the cap nut 13 is fitted into the sleeve 12.

The Pod 11 has a through hole in its center, and a threaded portion 14 is provided on the outer periphery of one end, and a protrusion 25 having a polygonal outer circumference is provided on the outer periphery in a continuous manner with the threaded portion. The sleeve 12 is tightened to the podium 11 via the gasket 15 by screwing the cap nut 13 onto the threaded portion 14. The sleeve 12 has a through hole in its center, and a short annular portion 16 is provided on the outer periphery of its tip, and the surface of the short annular portion that is pressed into contact with the cap nut has a hole as shown in FIG. A ring-shaped groove 18 is provided in which a number of small balls 17 are fitted, which act as bearings.

In this way, in the present invention, since the rotating means is provided between the sleeve 12 and the cap nut 13, when the cap nut 13 is screwed into the threaded portion 14 of the podium, the sleeve 12 is rotated. Even if rotational torque is applied, the sleeve 12 does not rotate and only the bag of nuts 13 rotates, so that no more force than is applied to the sleeve 12.

FIG. 4 shows another embodiment of the rotating means of the present invention.
Ring 28 with an angular cross section and S5J annular portion 16 of the sleeve
A small ball 17 is interposed between the pipe and the side surface of the pipe. In this case, the tube 29 of the sleeve may be provided with projections or grooves for locking the ring 28.

Another embodiment of the present invention shown in FIG. 5 shows an example in which the ring 28 has a U-shaped cross section and a small ball 17 is held between the U-shaped section.

Such a rotating means is not limited to the means using a small ball as described in the above embodiment, but other known means such as fitting a bush into the inner surface of a cap nut can be used as long as airtightness is maintained. Alternatively, the rotating means may be used.

The tube end of the sleeve and the tube end of the podium are connected to the pipe by welding, whereby 26.2
The fluid passages between 7 are in communication with each other.

As shown in FIG. 3, the gasket 15 used in the above embodiment has a coil spring 19 formed into a circular shape by connecting both ends of a relatively thin helical coil spring, and a metal covering material 20.
It is constructed by covering the outside so that the center is open. Examples of materials for coil springs include:
Stainless steel, Inconel, or the like, or aluminum, nickel, copper, monel, or the like is preferably used as the material for the covering material.

In the present invention, it is of course possible to use not only the gasket described in the above embodiment but also a conventional metal O-ring or metal C-ring. However, if the gasket used in the above embodiment is used, this gasket has a coil spring inside, so it has much stronger elasticity than the metal 0 ring or the metal C ring, so this gasket 15 When pressure is applied to the material, a strong repulsive force acts against the pressure, resulting in a high degree of airtightness.

In order to allow the fluid coupling having the above-mentioned structure to exhibit its functions more fully, in the above-mentioned embodiment, an annular recess 21 is provided on the end surface of the body 11 on the thread 14 side, and the sleeve 1
A protruding portion 22 that fits into the recessed portion 21 is provided on the surface that abuts the gasket (2) 15.

The caskera) 15 is fitted into this recess 21 and is brought into contact with the protrusion 22 by 1. The depth of the concave portion 21 and the height of the convex portion 22 are set so that the stepped portion 23 of the convex portion 22 rests on the end surface 24 of the body when the gasket is pressed to an effective elastic compression amount.

In conventional foreign-made fluid couplings, the effective compression amount of the gasket is expressed as the number of revolutions, or the number of revolutions varies depending on the setting position of the gasket, the material, etc., and is constant in actual work. There are cases where this is not the case. For this reason, too much concern about leak tightness leads to supercharging, but this results in the problem of damage or breakage of the power sket. If the gasket is damaged in this way, even if it is a rod, the flatness of the contact portion will be impaired and the airtightness will deteriorate. However, -1-
In this embodiment, the stepped portion of the convex portion prevents the gasket from being compressed beyond the effective compression amount, thereby eliminating the drawback of conventional gaskets that the gasket is easily damaged.

In this way, the fluid coupling of the above embodiment uses a special gasket, so it has extremely good airtightness, but by further applying roll burnishing to the sealing surface, the airtightness is dramatically improved. do.

For example, if the sealing surface of the fluid coupling in the above embodiment is turned with a degree of 325 and then subjected to roll burnishing,
A mirror surface with a roughness of 1.05 to 0.75 can be easily obtained with a machining time of 2 seconds.

The joints treated in this way have excellent airtightness, and even non-experts can use a helium leak rate of 10 atm*.
A fluid coupling with high airtightness of cc/sec can be easily obtained. In addition, this burnishing treatment improves the surface hardness (in the case of stainless steel, the base material hardness of 180HB becomes over 300HB hardness), and as a result, fine linear scratches are formed on the gasket, which causes the deterioration of thermal properties. This provides advantages such as being difficult to handle and not requiring excessive care in handling.

As described below, in the present invention, since the rotating means is formed on the contact surface between the cap nut and the sleeve, when the cap nut is released, the rotational force is not directly transmitted to the sleeve. Disadvantages such as damage to the gasket due to the rotation of the sleeve and kinking of the pipe connected to the sleeve can be eliminated, and there are many advantages such as extremely high workability.

[Brief explanation of the drawing]

FIG. 1 is a half-sectional view showing an embodiment of the invention, and FIG. 2 is a half-sectional view showing an embodiment of the present invention.
FIG. 3 is a perspective view of the sleeve of the present invention, and FIG. 3 is a partially cutaway perspective view of the gasket of the present invention. 4 and 5 are cross-sectional views showing other embodiments of the rotating means, and FIG. 6 is a cross-sectional view showing a conventional fluid coupling. ---Cap nut, 14...Threaded part 15-Gasket), 16@-
ψ short annular portion 17...small ball, 18...ring-shaped groove 1
9...Coil spring 20...Fist metal tube (metal covering material) Patent applicant: Niss DC Co., Ltd. Representative patent attorney: Inagaki
Go to Figure 1, Figure 2, Figure 4, Figure 5, and Figure 6.

Claims (1)

[Claims] (1) A sleeve consisting of a Pode with a threaded portion on the outer periphery of one end of the tubular body, and a tubular body with a short annular portion on the outer periphery of the tip that abuts and communicates with a through hole on the threaded portion side of the Pode via a caskerato. , a fluid coupling comprising a cap nut fitted into the sleeve and screwed into a threaded portion of the pode to firmly tighten the pode and the sleeve; A highly airtight cap nut tightening fluid joint characterized by being provided with a rotation means that can rotate only the cap nut without rotating the sleeve when tightening the nut.