JPS6027138A - 半導体装置用外観検査装置 - Google Patents

半導体装置用外観検査装置

Info

Publication number
JPS6027138A
JPS6027138A JP58135597A JP13559783A JPS6027138A JP S6027138 A JPS6027138 A JP S6027138A JP 58135597 A JP58135597 A JP 58135597A JP 13559783 A JP13559783 A JP 13559783A JP S6027138 A JPS6027138 A JP S6027138A
Authority
JP
Japan
Prior art keywords
semiconductor device
microscope
inspection
tray
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58135597A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0247860B2 (2
Inventor
Naoto Kimura
直人 木村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP58135597A priority Critical patent/JPS6027138A/ja
Publication of JPS6027138A publication Critical patent/JPS6027138A/ja
Publication of JPH0247860B2 publication Critical patent/JPH0247860B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Microscoopes, Condenser (AREA)
JP58135597A 1983-07-25 1983-07-25 半導体装置用外観検査装置 Granted JPS6027138A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58135597A JPS6027138A (ja) 1983-07-25 1983-07-25 半導体装置用外観検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58135597A JPS6027138A (ja) 1983-07-25 1983-07-25 半導体装置用外観検査装置

Publications (2)

Publication Number Publication Date
JPS6027138A true JPS6027138A (ja) 1985-02-12
JPH0247860B2 JPH0247860B2 (2) 1990-10-23

Family

ID=15155535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58135597A Granted JPS6027138A (ja) 1983-07-25 1983-07-25 半導体装置用外観検査装置

Country Status (1)

Country Link
JP (1) JPS6027138A (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6250719A (ja) * 1985-08-29 1987-03-05 Nireko:Kk 顕微鏡等による画像測定における走査位置の割り出し方法
KR20230012865A (ko) * 2021-07-16 2023-01-26 주식회사 센서뷰 소형 커넥터 테스트용 연결지그

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5054344A (2) * 1973-09-10 1975-05-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5054344A (2) * 1973-09-10 1975-05-14

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6250719A (ja) * 1985-08-29 1987-03-05 Nireko:Kk 顕微鏡等による画像測定における走査位置の割り出し方法
KR20230012865A (ko) * 2021-07-16 2023-01-26 주식회사 센서뷰 소형 커넥터 테스트용 연결지그

Also Published As

Publication number Publication date
JPH0247860B2 (2) 1990-10-23

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