JPS6029263U - Measurement device light source tilt detection device - Google Patents

Measurement device light source tilt detection device

Info

Publication number
JPS6029263U
JPS6029263U JP12093283U JP12093283U JPS6029263U JP S6029263 U JPS6029263 U JP S6029263U JP 12093283 U JP12093283 U JP 12093283U JP 12093283 U JP12093283 U JP 12093283U JP S6029263 U JPS6029263 U JP S6029263U
Authority
JP
Japan
Prior art keywords
light source
light
photosensor array
tilt detection
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12093283U
Other languages
Japanese (ja)
Inventor
三谷 清治
諸橋 和男
健司 山田
権田 常躬
英夫 水谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP12093283U priority Critical patent/JPS6029263U/en
Publication of JPS6029263U publication Critical patent/JPS6029263U/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案め実施例を応用した光学系の配置を示す
図、第2図はマスク板5の平面図、第3図は実施例での
電気ブロック図、第4図は第3図のタイムチャートであ
る。 主要部分の符号の説明 1・・・・・・光源(LED)
、5・・・・・・マスク板、10・・・・・・CCDイ
メージセンサ、22・・・・・・最大値検出回路、23
・・・・・・最小値検出回路、24・・・・・・加算増
幅器。
1 is a diagram showing the arrangement of an optical system to which an embodiment of the present invention is applied, FIG. 2 is a plan view of the mask plate 5, FIG. 3 is an electrical block diagram of the embodiment, and FIG. This is a time chart. Explanation of symbols of main parts 1...Light source (LED)
, 5... Mask plate, 10... CCD image sensor, 22... Maximum value detection circuit, 23
... Minimum value detection circuit, 24 ... Summing amplifier.

Claims (1)

【実用新案登録請求の範囲】 光源と、フォトセンサアレイと、前記光源からの光を前
記フォトセンサアレイに入光する光学系と、を有する測
定装置の前記光源の傾きを検出す−る装置において、 
     ′。 前記光源と前記フォトセンサアレイとを共役関係から外
す手段と、前記光源と前記フォトセンサーアレ4との間
に配設され、前記フォトセンサアレイの受光面の配列方
向に配設した2つの光透過部又は2つの光速閉部を有す
るマスク板と、前記フォトセンサアレ、イから出力され
る前記光透過部又は光速閉部に対応した2つの信号Q差
に応じた信号を出力する減算手段と、 を有することを特徴とする光源の傾き検出装置。
[Claims for Utility Model Registration] In a device for detecting the inclination of the light source of a measuring device, which includes a light source, a photosensor array, and an optical system that allows light from the light source to enter the photosensor array. ,
'. means for removing the light source and the photosensor array from a conjugate relationship; and two light transmitting devices disposed between the light source and the photosensor array 4 and arranged in the arrangement direction of the light receiving surface of the photosensor array. a mask plate having one or two light-fast closing parts, and a subtraction means for outputting a signal corresponding to a difference in Q between two signals corresponding to the light-transmitting part or the light-fast closing part output from the photosensor array, A; A light source tilt detection device comprising:
JP12093283U 1983-08-03 1983-08-03 Measurement device light source tilt detection device Pending JPS6029263U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12093283U JPS6029263U (en) 1983-08-03 1983-08-03 Measurement device light source tilt detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12093283U JPS6029263U (en) 1983-08-03 1983-08-03 Measurement device light source tilt detection device

Publications (1)

Publication Number Publication Date
JPS6029263U true JPS6029263U (en) 1985-02-27

Family

ID=30276965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12093283U Pending JPS6029263U (en) 1983-08-03 1983-08-03 Measurement device light source tilt detection device

Country Status (1)

Country Link
JP (1) JPS6029263U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5430884A (en) * 1977-08-12 1979-03-07 Mitsubishi Electric Corp Light directivity characteristic judgement apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5430884A (en) * 1977-08-12 1979-03-07 Mitsubishi Electric Corp Light directivity characteristic judgement apparatus

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