JPS6037187B2 - 亜鉛蒸発器 - Google Patents
亜鉛蒸発器Info
- Publication number
- JPS6037187B2 JPS6037187B2 JP8332782A JP8332782A JPS6037187B2 JP S6037187 B2 JPS6037187 B2 JP S6037187B2 JP 8332782 A JP8332782 A JP 8332782A JP 8332782 A JP8332782 A JP 8332782A JP S6037187 B2 JPS6037187 B2 JP S6037187B2
- Authority
- JP
- Japan
- Prior art keywords
- evaporator
- zinc
- lid
- graphite
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 title claims description 22
- 229910052725 zinc Inorganic materials 0.000 title claims description 22
- 239000011701 zinc Substances 0.000 title claims description 22
- 229910000831 Steel Inorganic materials 0.000 claims description 13
- 239000010959 steel Substances 0.000 claims description 13
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 11
- 229910002804 graphite Inorganic materials 0.000 claims description 11
- 239000010439 graphite Substances 0.000 claims description 11
- 239000000126 substance Substances 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 8
- 229910052918 calcium silicate Inorganic materials 0.000 claims description 5
- 239000000378 calcium silicate Substances 0.000 claims description 5
- OYACROKNLOSFPA-UHFFFAOYSA-N calcium;dioxido(oxo)silane Chemical compound [Ca+2].[O-][Si]([O-])=O OYACROKNLOSFPA-UHFFFAOYSA-N 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 5
- 239000000835 fiber Substances 0.000 claims description 5
- 239000011888 foil Substances 0.000 claims description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 230000005855 radiation Effects 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 description 25
- 239000010410 layer Substances 0.000 description 21
- 230000008020 evaporation Effects 0.000 description 20
- 239000000463 material Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 210000000038 chest Anatomy 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 101100298222 Caenorhabditis elegans pot-1 gene Proteins 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 210000000481 breast Anatomy 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 229910001338 liquidmetal Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L3/00—Supports for pipes, cables or protective tubing, e.g. hangers, holders, clamps, cleats, clips, brackets
- F16L3/16—Supports for pipes, cables or protective tubing, e.g. hangers, holders, clamps, cleats, clips, brackets with special provision allowing movement of the pipe
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD23173481A DD206499A3 (de) | 1981-07-14 | 1981-07-14 | Zinkverdampfer |
| DD23C/231734 | 1981-07-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5811784A JPS5811784A (ja) | 1983-01-22 |
| JPS6037187B2 true JPS6037187B2 (ja) | 1985-08-24 |
Family
ID=5532328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8332782A Expired JPS6037187B2 (ja) | 1981-07-14 | 1982-05-19 | 亜鉛蒸発器 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS6037187B2 (de) |
| DD (1) | DD206499A3 (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62500110A (ja) * | 1984-06-12 | 1987-01-16 | キエフスキ ポリテヒニチェスキ インスティテュト イメニ 50−レティア ベリコイ オクトヤブルスコイ ソツィアリスティチェスコイ レボリュツィイ | 真空中でフィルムを蒸着させるための蒸発器 |
| JPH06449Y2 (ja) * | 1987-03-16 | 1994-01-05 | 日新製鋼株式会社 | 真空蒸着めつき装置の蒸発槽 |
| DE4442733C2 (de) * | 1994-12-01 | 2001-04-26 | Ardenne Anlagentech Gmbh | Einrichtung zur Bedampfung bandförmiger Substrate im Vakuum |
-
1981
- 1981-07-14 DD DD23173481A patent/DD206499A3/de active IP Right Grant
-
1982
- 1982-05-19 JP JP8332782A patent/JPS6037187B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5811784A (ja) | 1983-01-22 |
| DD206499A3 (de) | 1984-01-25 |
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