JPS6041973Y2 - UV cleaning equipment - Google Patents
UV cleaning equipmentInfo
- Publication number
- JPS6041973Y2 JPS6041973Y2 JP13543483U JP13543483U JPS6041973Y2 JP S6041973 Y2 JPS6041973 Y2 JP S6041973Y2 JP 13543483 U JP13543483 U JP 13543483U JP 13543483 U JP13543483 U JP 13543483U JP S6041973 Y2 JPS6041973 Y2 JP S6041973Y2
- Authority
- JP
- Japan
- Prior art keywords
- lamp
- ultraviolet
- irradiation
- box
- ultraviolet lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Discharge Lamps And Accessories Thereof (AREA)
- Apparatus For Disinfection Or Sterilisation (AREA)
Description
【考案の詳細な説明】 本考案は紫外線洗浄装置に関するものである。[Detailed explanation of the idea] The present invention relates to an ultraviolet cleaning device.
紫外線ランプより発生するオゾンを利用して汚染物を分
解洗浄することが従来より行なわれている。Conventionally, ozone generated from ultraviolet lamps has been used to decompose and clean contaminants.
例えばシリコンウェハーに感光レジストを塗布する際の
前処理として主洗浄後にシリコンウェハーに付着した大
気中の有機汚染物を塗布直前に追加洗浄することにより
分解したり、電子ビームによるスパッタリング蒸着の際
に基体に付着した真空ポンプの油などによる有機汚染物
を同じく追加洗浄すると塗布膜あるいは蒸着膜の密着性
を著しく向上できることが明らかになっている。For example, as a pretreatment when applying a photoresist to a silicon wafer, organic contaminants in the air that have adhered to the silicon wafer after main cleaning can be decomposed by additional cleaning immediately before application, or when sputtering deposition using an electron beam is performed on the substrate. It has been found that the adhesion of a coated or deposited film can be significantly improved by additionally cleaning organic contaminants such as vacuum pump oil that have adhered to the surface.
その他にもレンズや水晶振動子など多くの被洗浄体に適
用されるが、いずれにしてもウェット法による主洗浄工
程の後にこの紫外線洗浄装置を用いると優れた洗浄効果
を得ることができる。It is also applied to many other objects to be cleaned, such as lenses and crystal oscillators, but in any case, excellent cleaning effects can be obtained by using this ultraviolet cleaning device after the main cleaning step using the wet method.
ところで、この紫外線洗浄装置では、紫外線ランプの灯
具は照射箱内でこれと一体に固着された構造となってい
るので、照射箱に灯具を取り出すための蓋が必要であり
、このため構造が複雑であって製作が困難であり、また
、紫外線ランプの保守点検を行うにあたっては、灯具を
照射箱内から分解して取り出す必要があり、その作業が
非常に煩雑であった。By the way, in this ultraviolet cleaning device, the ultraviolet lamp lamp is fixed in the irradiation box, so a lid is required to take out the lamp, which makes the structure complicated. Moreover, when performing maintenance and inspection of the ultraviolet lamp, it is necessary to disassemble and take out the lamp from the irradiation box, which is a very complicated process.
そこで本考案は、構造が簡単であり、紫外線ランプの保
守点検も容易に行うことが可能な紫外線洗浄装置を提供
することを目的とし、その構成は、照射室内の被洗浄体
に紫外線ランプの光を照射して表面に付着する有機汚染
物などを分解して洗浄する紫外線洗浄装置であって、紫
外線ランプの灯具を照射箱の外面に脱着自在に取付け、
紫外線ランプの発光部のみを照射室内に突出させてなる
ことを特徴とする。Therefore, the purpose of the present invention is to provide an ultraviolet cleaning device that has a simple structure and allows easy maintenance and inspection of the ultraviolet lamp. This is an ultraviolet cleaning device that decomposes and cleans organic contaminants adhering to the surface by irradiating it with ultraviolet rays.
It is characterized in that only the light emitting part of the ultraviolet lamp projects into the irradiation chamber.
以下に図面に示す実施例に基いて本考案を具体的に説明
する。The present invention will be specifically described below based on embodiments shown in the drawings.
第１図は装置の断面図を示すが、装置箱１には照射箱２
が内蔵されて二重構造をなし、発生したオゾンが外部に
漏洩しないようになっている。FIG. 1 shows a cross-sectional view of the device.
It has a built-in double structure to prevent the generated ozone from leaking outside.
照射箱２の内部が照射室３であるが、照射箱２の側面に
は長方形の開口２ａがあけられ、この開口２ａ部の外面
には灯具４が取付けられて、紫外線ランプ５の発光部５
ａが照射室３内に突出している。The inside of the irradiation box 2 is an irradiation chamber 3, and a rectangular opening 2a is formed in the side surface of the irradiation box 2. A lamp 4 is attached to the outside of this opening 2a, and a light emitting part 5 of an ultraviolet lamp 5 is provided.
a protrudes into the irradiation chamber 3.
灯具４には紫外線ランプ５としてＵ字状の３５０Ｗ高出
力低圧水銀灯が２本配設されているが、その内部は第３
図に示すように、紫外線ランプ５のバルブ部５ｂにはベ
ルチェ効果素子からなる温度制御部材１４が接触してお
り、水銀の最冷温度点制御が行われ、その周囲は水冷パ
イプ１５により冷却されている。The lamp 4 is equipped with two U-shaped 350W high-output low-pressure mercury lamps as ultraviolet lamps 5.
As shown in the figure, a temperature control member 14 made of a Beltier effect element is in contact with the bulb portion 5b of the ultraviolet lamp 5, and the coldest temperature point of mercury is controlled, and the surrounding area is cooled by a water cooling pipe 15. ing.
そして固着ボルト６がフランジ部の取付孔４ａに挿入さ
れて脱着自在に照射箱２に取付けられている。A fixing bolt 6 is inserted into the mounting hole 4a of the flange portion and is detachably mounted to the irradiation box 2.
従って、灯具４が開口２ａの蓋体の役目を果している。Therefore, the lamp 4 serves as a lid for the opening 2a.
紫外線ランプ５の背後にはミラー７が配置され、紫外線
ランプ５の光は下方に照射される。A mirror 7 is arranged behind the ultraviolet lamp 5, and the light from the ultraviolet lamp 5 is irradiated downward.
なお、照射箱２の上面には冷却水路８が固着されており
、紫外線ランプ５やミラー７が冷却される。Note that a cooling channel 8 is fixed to the upper surface of the irradiation box 2, and the ultraviolet lamp 5 and mirror 7 are cooled.
照射室３の中央には被洗浄体９が支持具１０によって支
持される。An object to be cleaned 9 is supported by a support 10 in the center of the irradiation chamber 3 .
そして、照射箱２の側方には酸素を含むガスを照射室３
に供給する吸入孔１１と、内部のガスを分解された汚染
物とともに排出する排気孔１２が設けられているが、排
気孔１２より吸引されたガスはオゾン分解室で処理され
た後に大気中に放出される。Then, gas containing oxygen is supplied to the irradiation chamber 3 on the side of the irradiation box 2.
An inlet hole 11 is provided to supply the gas to the ozone decomposition chamber, and an exhaust hole 12 is provided to exhaust the internal gas together with decomposed pollutants. released.
なお、装置箱１は、トランスなどを内蔵した電源箱１３
とは別体となってその上に載置されており、両者はケー
ブル１４で接続されている。Note that the device box 1 includes a power supply box 13 containing a built-in transformer, etc.
It is placed on top of this separately, and the two are connected by a cable 14.
トランスなどの電源機器は絶縁性を向上させるために有
機物などが含浸されており、通電されて温度が上昇する
とガスが放出される。Power equipment such as transformers are impregnated with organic substances to improve insulation, and gas is released when the temperature rises when electricity is applied.
従って装置箱１内に電源機器を一緒に配置すると、前述
のガスによって被洗浄体９が汚染される恐れがあるが、
本実施例の様にこれを分離して、装置箱１と電源箱１３
とを別体とすることにより、電源機器による汚染を防止
することができる。Therefore, if power equipment is placed together in the equipment box 1, there is a risk that the object to be cleaned 9 will be contaminated by the aforementioned gas.
As in this embodiment, these are separated and the equipment box 1 and power supply box 13 are
By separating them from each other, it is possible to prevent contamination caused by the power supply equipment.
この様に本考案は、紫外線ランプの灯具を照射箱の外面
に脱着自在に取付けたので、この灯具が照射箱の開口の
蓋体の役目を果し、従来の様に灯具を取り出すための蓋
体を照射箱に設ける必要がないので構造が簡単であり、
製作も容易となる。In this way, in this invention, the ultraviolet lamp lamp is removably attached to the outside of the irradiation box, so this lamp functions as a lid for the opening of the irradiation box, and the lid for taking out the lamp can be used as a cover for the opening of the irradiation box. The structure is simple as there is no need to install the body in the irradiation box.
Manufacturing is also easy.
そして紫外線ランプの保守点検に際しては、固着ボルト
を緩めることにより簡単に灯具を取り出すことができ、
従来の様に照射箱内より取り出す必要がないのでその操
作は非常に簡単である。When performing maintenance and inspection of the UV lamp, the lamp can be easily removed by loosening the fixing bolt.
The operation is very simple as there is no need to take it out from the irradiation box as in the conventional case.
従って、本考案によれば、構造が簡単であり、紫外線ラ
ンプの保守点検も容易に行うことが可能な紫外線洗浄装
置を提供することができる。Therefore, according to the present invention, it is possible to provide an ultraviolet cleaning device that has a simple structure and allows easy maintenance and inspection of the ultraviolet lamp.
第１図は本考案実施例の断面図、第２図は灯具の斜視図
、第３図は灯具の断面図である。
１・・・・・・装置箱、２・・・・・・照射箱、２ａ・
・・・・・開口、３・・・・・・照射室、４・・・・・
・灯具、５・・・・・・紫外線ランプ、５ａ・・・・・
・発光部、５ｂ・・・・・・バルブ部、６・・・・・・
固着ボルト、７・・・・・・ミラー、９・・・・・・被
洗浄体、１０・・・・・・支持具、１３・・・・・・電
源箱、１４・・・・・・温度制御部材。FIG. 1 is a sectional view of an embodiment of the present invention, FIG. 2 is a perspective view of the lamp, and FIG. 3 is a sectional view of the lamp. 1... Equipment box, 2... Irradiation box, 2a.
...Opening, 3...Irradiation chamber, 4...
・Lighting equipment, 5... Ultraviolet lamp, 5a...
・Light emitting part, 5b...Bulb part, 6...
Fixing bolt, 7...Mirror, 9...Object to be cleaned, 10...Support, 13...Power supply box, 14... Temperature control parts.
Claims (1)
に付着する有機汚染物などを分解して洗浄する紫外線洗
浄装置であって、紫外線ランプの灯具を照射箱の外面に
着脱自在に取付け、紫外線ランプの発光部のみを照射室
内に突出させてなる紫外線洗浄装置。This is an ultraviolet cleaning device that irradiates the object to be cleaned in an irradiation chamber with light from an ultraviolet lamp to decompose and clean organic contaminants adhering to the surface.The ultraviolet lamp lamp is removably attached to the outside of the irradiation box. , an ultraviolet cleaning device in which only the light-emitting part of an ultraviolet lamp protrudes into an irradiation chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13543483U JPS6041973Y2 (en) | 1983-09-02 | 1983-09-02 | UV cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13543483U JPS6041973Y2 (en) | 1983-09-02 | 1983-09-02 | UV cleaning equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6043326U JPS6043326U (en) | 1985-03-27 |
| JPS6041973Y2 true JPS6041973Y2 (en) | 1985-12-21 |
Family
ID=30304834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13543483U Expired JPS6041973Y2 (en) | 1983-09-02 | 1983-09-02 | UV cleaning equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6041973Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6797966B2 (en) * | 2001-01-26 | 2004-09-28 | Engineering Dynamics, Ltd. | Quick-install irradiation unit and method of making same |
-
1983
- 1983-09-02 JP JP13543483U patent/JPS6041973Y2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6043326U (en) | 1985-03-27 |
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