JPS6042731U - Exhaust equipment for semiconductor manufacturing equipment - Google Patents
Exhaust equipment for semiconductor manufacturing equipmentInfo
- Publication number
- JPS6042731U JPS6042731U JP13365383U JP13365383U JPS6042731U JP S6042731 U JPS6042731 U JP S6042731U JP 13365383 U JP13365383 U JP 13365383U JP 13365383 U JP13365383 U JP 13365383U JP S6042731 U JPS6042731 U JP S6042731U
- Authority
- JP
- Japan
- Prior art keywords
- equipment
- semiconductor manufacturing
- exhaust
- manufacturing equipment
- cold trap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Mechanical Optical Scanning Systems (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Drying Of Semiconductors (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の排気装置の簡略図、第２図は本考案の排
気装置の簡略図である。
１・・・・・・処理室、２・・・・・・配管、３・・・
・・・バルブ、４・・・・・・コールドトラップ、５・
・・・・・真空ポンプ、６・・・・・・バイパス配管、
７・・・・・・フィルター。FIG. 1 is a simplified diagram of a conventional exhaust system, and FIG. 2 is a simplified diagram of an exhaust system according to the present invention. 1...Processing room, 2...Piping, 3...
...Valve, 4...Cold trap, 5.
...Vacuum pump, 6...Bypass piping,
7...Filter.
Claims (1)
管およびバルブと反応生成ガスを吸着させるコールドト
ラップよりなる排気装置において、コールドトラップの
前に反応生成物を捕獲するフィルターを設けたことを特
徴とする半導体製造装置の排気装置。An exhaust system for semiconductor manufacturing equipment consisting of a vacuum pump, piping and valves connected thereto, and a cold trap for adsorbing reaction product gases, characterized in that a filter is provided in front of the cold trap to capture reaction products. Exhaust equipment for semiconductor manufacturing equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13365383U JPS6042731U (en) | 1983-08-31 | 1983-08-31 | Exhaust equipment for semiconductor manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13365383U JPS6042731U (en) | 1983-08-31 | 1983-08-31 | Exhaust equipment for semiconductor manufacturing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6042731U true JPS6042731U (en) | 1985-03-26 |
Family
ID=30301417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13365383U Pending JPS6042731U (en) | 1983-08-31 | 1983-08-31 | Exhaust equipment for semiconductor manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6042731U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6013071A (en) * | 1983-07-01 | 1985-01-23 | Canon Inc | Evacuating system of device for vapor phase method |
-
1983
- 1983-08-31 JP JP13365383U patent/JPS6042731U/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6013071A (en) * | 1983-07-01 | 1985-01-23 | Canon Inc | Evacuating system of device for vapor phase method |
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