JPS6048233U - Moving platform for vacuum containers - Google Patents

Moving platform for vacuum containers

Info

Publication number
JPS6048233U
JPS6048233U JP13917083U JP13917083U JPS6048233U JP S6048233 U JPS6048233 U JP S6048233U JP 13917083 U JP13917083 U JP 13917083U JP 13917083 U JP13917083 U JP 13917083U JP S6048233 U JPS6048233 U JP S6048233U
Authority
JP
Japan
Prior art keywords
vacuum container
stage
moving platform
vacuum containers
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13917083U
Other languages
Japanese (ja)
Other versions
JPH0128686Y2 (en
Inventor
博司 山口
朗 嶋瀬
宮内　建興
勝久 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13917083U priority Critical patent/JPS6048233U/en
Publication of JPS6048233U publication Critical patent/JPS6048233U/en
Application granted granted Critical
Publication of JPH0128686Y2 publication Critical patent/JPH0128686Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Vibration Prevention Devices (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の構造の真空容器用のテーブルを示す断面
図、第２図は本考案の一実施例の真空容器用テーブルを
示す断面図、第３図は本考案の他の実施例の真空容器用
テーブルを示す断面図である。 ２・・・・・・試料台、３・・・・・・支持棒、８，１
ｏ・・・・・・マイクロメータヘッド、９・・・・・・
Ｙ方向テーブル、５２・・・・・・Ｘ方向テーブル。Fig. 1 is a cross-sectional view showing a table for a vacuum vessel having a conventional structure, Fig. 2 is a cross-sectional view showing a table for a vacuum vessel according to an embodiment of the present invention, and Fig. 3 is a sectional view showing a table for a vacuum vessel according to an embodiment of the present invention. It is a sectional view showing a table for vacuum vessels. 2...Sample stand, 3...Support rod, 8,1
o...Micrometer head, 9...
Y-direction table, 52...X-direction table.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空容器の内部に設置する移動台において、テーブル移
動機構を真空容器にとりつけ、テーブルより試料台を真
空容器内に支持棒によりたち上げ、かつ試料台とテーブ
ルとをベローズで接続することにより、試料台の十分な
移動量を有しつつかつ試料台の真空容器に対する振動を
小さくしたことを特徴とする真空容器用移動台。In a moving stage installed inside a vacuum container, a table moving mechanism is attached to the vacuum container, the sample stage is raised from the table into the vacuum container by a support rod, and the sample stage and table are connected with a bellows to move the sample. A moving stage for a vacuum container, characterized in that the stage has a sufficient amount of movement and the vibration of the sample stage relative to the vacuum container is reduced.
JP13917083U 1983-09-09 1983-09-09 Moving platform for vacuum containers Granted JPS6048233U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13917083U JPS6048233U (en) 1983-09-09 1983-09-09 Moving platform for vacuum containers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13917083U JPS6048233U (en) 1983-09-09 1983-09-09 Moving platform for vacuum containers

Publications (2)

Publication Number Publication Date
JPS6048233U true JPS6048233U (en) 1985-04-04
JPH0128686Y2 JPH0128686Y2 (en) 1989-08-31

Family

ID=30312021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13917083U Granted JPS6048233U (en) 1983-09-09 1983-09-09 Moving platform for vacuum containers

Country Status (1)

Country Link
JP (1) JPS6048233U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004043673A1 (en) * 2002-11-14 2004-05-27 Takara Tool & Die Co., Ltd. Resin seal device
JP2009033018A (en) * 2007-07-30 2009-02-12 Daihen Corp Transport device
JP2012087357A (en) * 2010-10-19 2012-05-10 National Institute Of Advanced Industrial Science & Technology Film deposition apparatus
JP2023025706A (en) * 2020-03-27 2023-02-22 株式会社Kokusai Electric SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING METHOD, AND PROGRAM

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004043673A1 (en) * 2002-11-14 2004-05-27 Takara Tool & Die Co., Ltd. Resin seal device
JP2009033018A (en) * 2007-07-30 2009-02-12 Daihen Corp Transport device
JP2012087357A (en) * 2010-10-19 2012-05-10 National Institute Of Advanced Industrial Science & Technology Film deposition apparatus
JP2023025706A (en) * 2020-03-27 2023-02-22 株式会社Kokusai Electric SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING METHOD, AND PROGRAM
US11935762B2 (en) 2020-03-27 2024-03-19 Kokusai Electric Corporation Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium
US12518981B2 (en) 2020-03-27 2026-01-06 Kokusai Electric Corporation Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

Also Published As

Publication number Publication date
JPH0128686Y2 (en) 1989-08-31

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