JPS6048236U - Opening/closing door of ultraviolet cleaning equipment - Google Patents

Opening/closing door of ultraviolet cleaning equipment

Info

Publication number
JPS6048236U
JPS6048236U JP13912183U JP13912183U JPS6048236U JP S6048236 U JPS6048236 U JP S6048236U JP 13912183 U JP13912183 U JP 13912183U JP 13912183 U JP13912183 U JP 13912183U JP S6048236 U JPS6048236 U JP S6048236U
Authority
JP
Japan
Prior art keywords
opening
closing door
ultraviolet cleaning
cleaning equipment
ultraviolet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13912183U
Other languages
Japanese (ja)
Inventor
一也 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP13912183U priority Critical patent/JPS6048236U/en
Publication of JPS6048236U publication Critical patent/JPS6048236U/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案実施例の縦断面図、第2図は同じく斜視
図、第3図と第4図は要部の平面断面図である。 1・・・・・・装置箱、2・・・・・・照射箱、la、
2a・・・・・・開口、3・・・・・・ミラー、4・・
・・・・紫外線ランプ、5・・・・・・被洗浄体、7・
・・・・・開閉扉、7c・・・・・・斜面、8・・・・
・・ヒンジ、9・・・・・・蓋体。
FIG. 1 is a longitudinal sectional view of an embodiment of the present invention, FIG. 2 is a perspective view thereof, and FIGS. 3 and 4 are plan sectional views of main parts. 1... Equipment box, 2... Irradiation box, la,
2a...Opening, 3...Mirror, 4...
...Ultraviolet lamp, 5...Object to be cleaned, 7.
...Opening/closing door, 7c...Slope, 8...
...Hinge, 9...Lid body.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 被洗浄体に紫外線ランプの光を照射して表面に付着する
有機汚染物などを分解して洗浄する紫外線洗浄装置の被
洗浄体出し入れ用開口の開閉扉であって、装置箱の外面
に回動可能に軸支され、回動中心側の端面に回動軸を中
心にして鋭角となる斜面を設けてなる紫外線洗浄装置の
開閉扉。
This is an opening/closing door for loading and unloading the object to be cleaned in an ultraviolet cleaning device that irradiates the object with light from an ultraviolet lamp to decompose and clean organic contaminants adhering to the surface, and it rotates on the outside of the device box. An opening/closing door for an ultraviolet cleaning device that is pivotably supported and has a slope formed at an acute angle around the rotation axis on the end face on the rotation center side.
JP13912183U 1983-09-09 1983-09-09 Opening/closing door of ultraviolet cleaning equipment Pending JPS6048236U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13912183U JPS6048236U (en) 1983-09-09 1983-09-09 Opening/closing door of ultraviolet cleaning equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13912183U JPS6048236U (en) 1983-09-09 1983-09-09 Opening/closing door of ultraviolet cleaning equipment

Publications (1)

Publication Number Publication Date
JPS6048236U true JPS6048236U (en) 1985-04-04

Family

ID=30311924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13912183U Pending JPS6048236U (en) 1983-09-09 1983-09-09 Opening/closing door of ultraviolet cleaning equipment

Country Status (1)

Country Link
JP (1) JPS6048236U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020203244A (en) * 2019-06-14 2020-12-24 株式会社日本フォトサイエンス Organic material stain removal device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56105480A (en) * 1980-01-25 1981-08-21 Mitsubishi Electric Corp Plasma etching method
JPS5652579B2 (en) * 1978-10-28 1981-12-12
JPS5852827A (en) * 1981-09-25 1983-03-29 Hitachi Ltd Dry etching and device thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5652579B2 (en) * 1978-10-28 1981-12-12
JPS56105480A (en) * 1980-01-25 1981-08-21 Mitsubishi Electric Corp Plasma etching method
JPS5852827A (en) * 1981-09-25 1983-03-29 Hitachi Ltd Dry etching and device thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020203244A (en) * 2019-06-14 2020-12-24 株式会社日本フォトサイエンス Organic material stain removal device

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