JPS6050758B2 - 半導体棒のるつぼなし帯域溶融装置 - Google Patents

半導体棒のるつぼなし帯域溶融装置

Info

Publication number
JPS6050758B2
JPS6050758B2 JP10101277A JP10101277A JPS6050758B2 JP S6050758 B2 JPS6050758 B2 JP S6050758B2 JP 10101277 A JP10101277 A JP 10101277A JP 10101277 A JP10101277 A JP 10101277A JP S6050758 B2 JPS6050758 B2 JP S6050758B2
Authority
JP
Japan
Prior art keywords
circuit
relay
frequency generator
induction heating
heating coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10101277A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5326705A (en
Inventor
ウオルフガング・ケラ−
ノルベルト・ウイ−ドル
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of JPS5326705A publication Critical patent/JPS5326705A/ja
Publication of JPS6050758B2 publication Critical patent/JPS6050758B2/ja
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Induction Heating (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Furnace Details (AREA)
JP10101277A 1976-08-23 1977-08-23 半導体棒のるつぼなし帯域溶融装置 Expired JPS6050758B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19762637939 DE2637939C3 (de) 1976-08-23 1976-08-23 Vorrichtung für das tiegelfreie Zonenschmelzen von Halbleiterstäben
DE2637939.5 1976-08-23

Publications (2)

Publication Number Publication Date
JPS5326705A JPS5326705A (en) 1978-03-13
JPS6050758B2 true JPS6050758B2 (ja) 1985-11-09

Family

ID=5986149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10101277A Expired JPS6050758B2 (ja) 1976-08-23 1977-08-23 半導体棒のるつぼなし帯域溶融装置

Country Status (4)

Country Link
JP (1) JPS6050758B2 (da)
DE (1) DE2637939C3 (da)
DK (1) DK372977A (da)
IT (1) IT1086508B (da)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2929119A1 (de) * 1979-07-18 1981-02-05 Siemens Ag Verfahren und vorrichtung zum herstellen von silicium durch tiegelfreies zonenschmelzen
US7113535B2 (en) * 2004-05-21 2006-09-26 Ajax Tocco Magnethermic Corporation Induction furnace for melting granular materials
JP4730238B2 (ja) * 2006-07-21 2011-07-20 トヨタ自動車株式会社 Ｖ型エンジン
JP6780377B2 (ja) * 2016-08-30 2020-11-04 日亜化学工業株式会社 発光装置

Also Published As

Publication number Publication date
JPS5326705A (en) 1978-03-13
DK372977A (da) 1978-02-24
DE2637939C3 (de) 1979-07-26
IT1086508B (it) 1985-05-28
DE2637939A1 (de) 1978-03-02
DE2637939B2 (de) 1978-11-30

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