JPS6056329A - Electrode manufacturing method - Google Patents

Abstract

PURPOSE:To improve size accuracy while simplifying the division of each electrode by forming patterns on both surfaces of a metal plate followed by etching, then forming patterns again on the plate by fixing them to a part of one side with an electrically insulating material while dividing the electrode connecting parts by the second etching. CONSTITUTION:The photoresist patterns 13 and 13' having different shapes are formed on both sides of a metal plate 12 of stainless steel or the like to become electrodes. Next, the metal on needless parts is etched with a prescribed etching fluid. Secondly, a supporting plate 15 made of frit glass or the like is stuck to a part of said electrodes with adhesive 14 so as to traverse individual control electrodes. Then photoresist patterns are formed again while setting the positions to the firstly formed electrode patterns. Next. resist films 16 and 16' are removed from both surfaces of the metal plate 12. The modulation electrodes 12 fixed with adhensive 14 and a supporter 15 are obtained as the individual independent electrodes divided in the horizontal direction by the second etching process.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method of manufacturing electrodes of flat cathode ray tubes used in color image display devices such as color television receivers and terminal displays of converters.

Conventional structure and its problems ``Conventionally, as a flat cathode ray tube, Japanese Patent Application Laid-Open No. 14306/1983
The methods described in Publication No. 3, Japanese Unexamined Patent Publication No. 56-33734, etc. have been proposed. In this method, a tower-shaped electron beam is obtained using an electron source consisting of a linear hot cathode and deflection electrodes facing each other, which is deflected vertically by applying a potential difference to the deflection electrodes, and then horizontally. This flat cathode ray method displays a black and white or color image, two characters, etc. by deflecting an electron beam horizontally using a deflection electrode and stimulating a phosphor formed on a transparent substrate. A typical structure of the tube will be explained using FIG. Reference numeral 1 denotes a back electrode, which is constructed by forming a conductive film such as a metal film or a transparent conductive film on the inner surface of a metal plate or an envelope (not shown) of the cathode ray tube by means such as vacuum evaporation or sputtering. The thermoelectrons generated from the linear hot cathode 2 are pushed out in a predetermined direction. The linear hot cathode 2il-1 is a tungsten wire with a diameter of 10 to several 10 μm coated with an oxide electron emitting material of several μm to several tens of μm, and a predetermined voltage is applied to both ends of the linear hot cathode 2. Then, 600-8
Uniform thermoelectrons are generated from the oxide electron emitting material by heating to 0°C. The control electrode 3 is a reservoir electrode for extracting electrons generated in the linear hot cathode 2, and has a through hole 3' provided opposite to the linear hot cathode 2. The shape, dimensions, quantity, etc. of the through hole 3' are determined depending on the required number of electron beam spots and the magnitude of the electron beam current. Reference numeral 4 denotes a vertical deflection electrode that deflects the electron beam in a direction perpendicular to the screen, and a conductive electrode 4' is formed on the surface (both sides) of a substrate made of an insulator by means of vacuum evaporation or screen printing. ing. Reference numeral 5 denotes a control electrode, which has the role of controlling the flow of the electron beam (eg, ON, OFF). 6
8 is an electrode for accelerating the electron beam, and 8 is a horizontal deflection electrode for deflecting the electron beam in the horizontal direction with respect to the screen.
It has a comb-shaped shape divided into two parts. Reference numeral 9 indicates an electrode for accelerating the electron beam, and reference numeral 10 indicates a transparent substrate (glass). Usually, a face plate, which is the envelope of a cathode ray tube, is used. On the vacuum side of the transparent substrate, there is a phosphor layer and a transparent substrate (glass). The light emitting section 11 is constituted by a metal back layer made of a thin aluminum film. Similar to the accelerating electrode 9, a high voltage (5
~20KV) is applied. In the figure, numeral 7 indicates the trajectory of the electron beam, which cannot actually be seen. The above is the basic structure of a flat plate cathode ray tube.The feature of this method is that it uses multiple linear hot cathodes 2, deflects the electron beam vertically and horizontally for each block, and The above image is combined into one image, and has a simple structure,
A thin display device with high brightness and high resolution can be obtained.

The problem with the flat cathode ray tube described above is that various planar electrodes are arranged facing the screen, and each electrode has an aperture through which an individual electron beam passes. In order to apply a modulation signal to each electron beam, it is necessary to arrange them individually and electrically independently. For horizontal deflection electrodes, it is necessary to use electrodes that are electrically divided into two in a comb shape so that each electron beam is horizontally deflected.

As described above, each electrode is a planar electrode with a fine pattern, and moreover, it is necessary to use an independent electrode for each electron beam in a vacuum.

Also, depending on the positional accuracy of these electrodes, the electron beam may not pass through the specified trajectory but may travel in other areas, emitting other colors instead of emitting the specified phosphor, for example in the case of a color display. This may cause color shift and a decrease in color purity.

OBJECTS OF THE INVENTION An object of the present invention is to facilitate the individual division of each electrode in electrodes used in flat cathode ray tubes, improve dimensional accuracy, and facilitate manufacturing methods.

Structure of the Invention The present invention involves forming a pattern with a photoresist film on both sides of a metal plate that will become an electrode, in the production of electrodes used in flat cathode ray tubes, especially electrodes that require electrical division on a flat surface. Next, the metal plate is etched with a predetermined etching solution, the metal plate is fixed with an electrically insulated material on at least a part of one side of the metal plate, and then,
A photoresist film pattern is formed on the metal plate again, and at this time, the electrode joint part that was provided to prevent the electrodes from separating during the first etching process is etched during the second etching process. do. Next, a second etching is performed using a predetermined etching solution, and by these two etchings, a flat cathode ray tube electrode in which the metal plate has a predetermined size and is electrically divided on a plane is obtained.

Description of examples The present invention will be described in detail below based on examples.

As an actual example of the present invention, the method of manufacturing the control electrode 5 will be explained by taking as an example the control electrode 5 in the block diagram of a flat plate cathode ray tube shown in FIG.

As a first embodiment of the present invention, a method of manufacturing electrodes for a flat cathode ray tube shown in FIG. 2 will be described. First, as shown in FIG. 2 (A), a metal plate 12 that will become an electrode, for example, a metal plate made of stainless steel and having a thickness of 0.05 to 0.3 mm, is coated with a metal plate 12 as shown in FIG. 2 (B). Photoresist pattern 13 on both sides of 12
%3' is formed. Normally, when etching a metal plate with high precision, such as the shadow mask used in color TV cathode ray tubes, the same photoresist pattern is formed in alignment on both sides of the metal plate, and then a protective film is applied to the same photoresist pattern. The desired electrode pattern is obtained by etching unnecessary parts of the metal using a predetermined etching solution.

In the present invention, the photoresist patterns 13 and 13' are formed on both sides of the metal plate in the same way, but the photoresist patterns 13 and 13' on both sides are formed with different shapes. Ultimately, the control electrodes 5 must be electrically independent so that each electron beam can be modulated independently, as shown in FIG.

Moreover, it is also necessary that the individually divided electrodes as planar electrodes be arranged while maintaining positional accuracy.

Therefore, if the same photoresist no-turn is formed on both sides of the metal plate 12 and the etching process is performed, the individual electrodes are separated from each other in one etching process, making it difficult to maintain positional accuracy. becomes difficult. Therefore, the photoresist patterns 13 and 13' applied to both sides of the metal plate 12 are such that the metal plate 12 is exposed to the third layer after etching.
The shape of the photoresist pattern formed on both sides of the metal plate 120 is changed at the position (P part) where each modulation electrode is separated so that the shape shown in the figure is obtained, and either side is separated. In order to do this, the pattern 7 is designed to etch the metal plate 12, and the other side is designed to function as a protective film to prevent etching.

Next, as shown in FIG. 2(C), the metal plate 12 with photoresist patterns 13 and 13' formed on both sides is etched with an etching solution of J''R constant (for example, a ferric chloride aqueous solution for stainless steel). Then, as shown in Fig. 2), the photoresist films 13 and 13' are removed from the metal plate 12.The electrodes shown in Fig. 3 are now completed, and the individual control electrodes are The areas where the metal plate 12
A single electrode is obtained in which a portion of approximately % of the thickness of the metal plate 12 is etched on only one side of the metal plate 12. Next, as shown in FIG. 2(E), a support 15 is adhered to a portion of these electrodes with an insulating adhesive 14 (for example, I-knot glass) so as to cross each control electrode. The support 15 may be made of an insulating material or a conductive material such as metal. FIG. 4 shows a state in which an insulating adhesive 14 and a support 15 are attached to the etched metal plate 12. next,
As shown in FIG. 2(f), after coating photoresist films 16 and 16' on both sides of the electrode on which the metal plate 12 and the support 15 are formed, the opposite side to the side on which the support 15 is formed is applied. A photoresist pattern is formed on the photoresist film 16 on the metal plate 12 in alignment with the electrode pattern formed by the first etching. At this time, the photoresist pattern is formed so as to remove the metal parts connecting each control electrode. Next, as shown in Figure 2 (G),
The metal plate 12 is etched again in the same manner as in FIG. 2 (-9). Next, as shown in FIG. As shown in FIG. 5, the modulation electrodes 12 fixed by the adhesive 14 and the support 15 were connected to each other during the first etching process, but they were connected to each other in the water direction by the second etching process. The electrodes are divided into individual independent electrodes.

The above is the explanation of the first embodiment of the present invention,
The photoresist patterns formed on both sides of the metal plate 12 here need only have a shape that prevents the individual modulation electrodes from being divided during the first etching of the metal plate, and as explained in the embodiment. It is not necessary for the divided portions to remain during the first etching of the entire area, and the same effect can be achieved as long as the divided portions are scattered to prevent the modulation electrodes from being separated. It's Kade.
In the above embodiment, a method of fixing to the support body with an adhesive was described, but if the adhesive has sufficient strength, an adhesive alone may be used.

Next, a method shown in FIG. 6 will be described as a second embodiment of the present invention.

First, a metal plate 17 (for example, made of stainless steel with a thickness of 0.05 to 0.3 yen -
), as shown in FIG. 6(o), a uniform photoresist film or a protective film 18 for protection during etching is formed on one side (-), and a layer 18 is formed on the other side to serve as a modulation electrode. A photoresist pattern 18' is formed to obtain a desired pattern.Next, as shown in FIG. The metal plate 17 is etched with a di-iron aqueous solution. At this time, the etching is performed to a depth of approximately % of the thickness of the metal plate, and at that point the etching is completed.

Next, as shown in Fig. 6), the etched metal plate 1
7 on! :Remove the photoresist film 18, 18'.

The metal plate 17 having a uniform thickness up to this point has a flat surface on one side and a desired electrode pattern etched on the other side to a depth of approximately % of the thickness of the metal plate. Next, as shown in FIG. 6(E), a support 20 (for example, an insulating material such as glass or ceramics) is attached to the etched side of the metal plate 17 using an insulating adhesive 19 (for example, frit glass). or metal plate). Next, as shown in FIG. 6(f), a photoresist pattern 21 similar to that formed in FIG. 6(b) is formed on the flat side of the metal plate 17 by the first etching. The pattern 61 on the other side of the metal plate 17 is aligned and formed. Further, a protective film 21 (for example, a photoresist I-film) is uniformly formed on the first etched surface. Next, as shown in FIG. 6(G), the metal plate 17 is etched again using an etching solution. Through this step, the electrode pattern formed on the gold/shuttle plate 17 by the j[j+jth etching and the electrode pattern formed by the second etching are integrated on the support 2Q to complete a desired electrode pattern. Figure 6 (E) (Ha,
This is a state in which the photoresist pattern and photoresist film formed on the metal plate 17 have been removed.

By the above method, modulation electrodes fixed on the support 2o and separated from each other are completed. With this method, only one side of the metal plate 17 is etched during the 111th etching, so a flat surface on which the photoresist pattern is formed is obtained during the second etching, which is effective in forming a fine pattern. It's advantageous.

Next, a manufacturing method shown in FIG. 7 will be described as a third embodiment of the present invention. In FIGS. 2 and 6, a method has been described in which the electrode is fixed in advance with a support to prevent the electrode from being divided and separated after etching on one side of the metal plate. In FIG. 7, an example of a method for bonding this support to an electrode plate will be explained.

In FIG. 7, a U-shaped metal fixing frame 24, 24' is fixed to a fixing base 22 made of an insulator with screws 23, and the central part of the U-shaped fixing frame 24, 24' is The metal plate 28 that has been etched for the first time as explained in FIGS. 2 and 6 is installed, and the surface of the thin metal wire 25 (for example, tungsten or titanium) is insulated on the side to which the support is bonded. A support coated with an adhesive 26 (for example, frit glass) is arranged, and the support has one end fixed to the fixed frame 24' and the other end fixed to the fixed frame 24'.
It is fixed under tension by a spring 27. Such a support is installed at the required part of the metal plate 28, and then the curing temperature of the insulating adhesive 26 (approximately 430'C in the case of 7 litho glass) is set by energizing the metal thin M25 at t. The temperature is raised to bond and fix the thin metal wire 25 and the metal plate 28.

According to this method, it is possible to reduce the number of man-hours in that the support can be bonded without raising the temperature of the entire metal plate 28, and it is also possible to prevent the metal plate 28 itself from being oxidized. Here, in order to prevent electrical short circuits from occurring due to the use of the metal thin wire 25, a metal thin wire 25 is prepared in advance.
It is better to apply the adhesive after coating the surface of the adhesive 25 with a substance having a softening point higher than the curing temperature of the adhesive (for example, glass + S i 02 ). Of course, after the adhesion is completed in FIG. 7, the thin metal wire 25 is removed from the fixing frame 24, 24' and used as an electrode fixed with a support for the next step.

Effects of the Invention The present invention is effective when obtaining a single electrode that does not need to be electrically divided on a plane in an electrode used in a flat cathode ray tube. Completely etch the part that will become , and at the same time etch only one side of the divided part, making sure that each electrode does not separate during the first etching.
After using metal or insulating material for these electrodes and fixing them with an insulating adhesive, the division between each electrode can be further divided by photo-etching, or only one side of the metal plate that will become the electrode can be etched for the first time. After that, fix the etched side with an insulating adhesive using metal or insulating material, and then align the metal side opposite to the first etched side with the first etched evaturn. Each electrode is divided on a plane by the second photo-etching process, which provides the same dimensional accuracy as the conventional method of etching both sides at the same time, and each electrode is fixed with a support before being separated. Therefore, the dimensional accuracy between the electrodes does not deteriorate, and a pattern equivalent to a photoetched pattern can be obtained.

In addition, as a method of fixing the electrode, in addition to the above 1.
By applying an insulating adhesive around a thin metal wire, electricity is applied to the thin metal wire to harden the adhesive and fix the electrode, which greatly reduces the number of man-hours and the need to heat the electrode itself. Since there is no mechanical strain on the electrode, a highly accurate electrode can be obtained.

[Brief explanation of the drawing]

Figure 1 is a structural diagram showing -f1↓ of a flat cathode ray tube, Figure 2
Figures (A) to (B) are process diagrams for manufacturing a temporary electrode to explain the first embodiment of the present invention, and each of Figures 3 to 5 (in, (b) is the same as in Figure 2). A plan view showing the shape of the electrode in some steps and a sectional view taken along the line A-A', and FIGS. , FIG. 7 is a plan view of a final electrode configuration for explaining the third embodiment of the present invention. 1. Back electrode, 2. Linear hot cathode, 5. Control electrode, 12. Metal. Plate, 13.13' --- Photoresist pattern, 14 --- Insulating adhesive, 15. Support, 16 --- Photoresist. ] -12 Figure 3 (B) δΣmouth Figure ■ 4 Figure 2 / (B) Figure 6 (A) 7

Claims (1)

[Claims] (1) A photoresist pattern is formed on one side of a metal plate serving as an electrode to obtain a divided electrode pattern with a desired final shape, and the divided portions of each divided electric chair are etched on the other side. a first etching step in which etching patterns are formed in alignment with the photoresist pattern, and the metal plate is etched using these as a mask; and after the first etching step is completed, the photoresist film is removed. , Etch the final shape of the metal plate and cross each electrode to be divided into planes using an insulating adhesive, or a support made of an insulating adhesive and an insulating material, or a metal. In a second etching step, the electrode is fixed, and a photoresist pattern is formed so as to etch only the divided portions of the electrode left in the first etching step, and etching is performed using this as a mask.
A method for producing an electrode characterized by obtaining an electrode divided by a plane fixed with a support or an adhesive. <2) In the process of fixing the electrode, a support coated with an adhesive material made of at least an insulator is placed on the surface of the thin metal wire under tension in the horizontal direction, and the electrode is fixed vertically to the support. Claim 1, wherein an electrode is placed, and the temperature is raised to the curing temperature of the adhesive by looking through the thin metal wire, and the pot, the thin metal wire, and the electrode are bonded while maintaining electrical insulation. Method of manufacturing the electrodes described in Section. (3) Photoresist of the electrode that will eventually be obtained on one side of the metal plate that will become the electrode!・The first etching process involves forming a pattern and forming a uniform protective film on the other side, then etching a part of the thickness of the metal plate using a predetermined etching solution, and removing the photoresist film. Also, apply insulating glue across each electrode that you are going to split onto the etched surface.
After fixing the electrode using an insulating adhesive and an insulating or metal support, a first etching process is applied only to the other side of the metal plate that was not subjected to the etching process in the first etching process.
1. A method for manufacturing an electrode, which comprises forming a photoresist pattern equivalent to the etching pattern, and performing a second etching process in which a metal plate is etched using the photoresist pattern as a mask to obtain a desired divided electrode. (4) In the process of fixing the electrodes, a support coated with an adhesive material made of at least an insulator is placed on the surface of the thin metal wire under tension in the horizontal direction, and an attempt is made to fix the electrode in the vertical direction. According to claim 3, the thin metal wire and the electrode are bonded to a groove where electrical insulation is maintained by placing an electrode thereon and applying electricity to the thin metal wire to raise the temperature by reducing the curing temperature of the adhesive. How to make electrodes.