JPS606338A - Polishing device - Google Patents
Polishing deviceInfo
- Publication number
- JPS606338A JPS606338A JP58114507A JP11450783A JPS606338A JP S606338 A JPS606338 A JP S606338A JP 58114507 A JP58114507 A JP 58114507A JP 11450783 A JP11450783 A JP 11450783A JP S606338 A JPS606338 A JP S606338A
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- flat plate
- main surface
- polishing
- abrasive grains
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/0031—Machines having several working posts; Feeding and manipulating devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/005—Blocking means, chucks or the like; Alignment devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
産業上の利用分野
本発明は球面レンズ、あるいは非球面レンズの研磨加工
に用いる研磨装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a polishing apparatus used for polishing spherical lenses or aspheric lenses.
従来例の構成とその問題点
ガラスなどを材料として凸球面を得るだめの研磨装置の
従来例を第１図に、その１１ＩＩｌ＠面を第２図に示す
。従来凸球面は、球状をなす基板１の主面に被加工物保
持体３を複数個設けてそれに被加工物４を貼り付け、そ
れに研磨用ピッチあるいはポリメユグ・パッド７の表面
が被加工物所望の曲率半径になるように付着させた研磨
皿６を矢印入方向から常に一定圧力を加えて圧接させ、
研磨砥粒を被加工物の表面に表面に供給しながら、基板
回転軸２を矢印８の方向に、研磨皿回転軸６を矢印９の
方向に回転させ、かつ研磨皿６を矢印１０の方向に揺動
させる方法で得ていた。しかしこの研磨装置は、研磨皿
内壁を球面に仕上げる必要があシ、その加面が非常に困
難であった。また被加工物は、各被加工物の法線方向が
研磨面内壁球面の径方向に一致するようにして被加工物
保持具に固定することが必要であるが、本例では被加工
物が球面状をなす基板に固定されるため、各被加工物の
法線方向が一致せず、したがって被加工物の基板への固
定方向にばらつきが生じやすいという問題があった０
また、凸非球面を得るための研磨装置の従来例を第３図
に示す。従来凸非球面は、所望の非球面断面形状を溝型
とするドラム１１の溝１３に被加工物保持体１４に固定
した被加工物１６を押し当て、ドラム回転軸１２を矢印
１７の方向に回転させ、被加工物保持体回転軸１５を矢
印１８の方向に回転させながら、ドラム溝１３に貼シ付
けた砥粒あるいは遊離砥粒を用いて被加工物１６の主面
を非球面に研磨する方法で得ていた。しかしこの方法に
よって複数の被加工物を研磨する場合、各被加工物主面
の法線方向がドラム１１の軸に関して放射状に広がシ、
被加工物保持部の回転機構が複雑になること、遊離砥粒
を用いて研磨する場合、砥粒が研磨面であるドラム溝に
停まシに＜＜、各被加工物の加工速度に差が生じやすい
こと、などの欠点があった。Structure of a conventional example and its problems A conventional example of a polishing apparatus for obtaining a convex spherical surface using glass or the like is shown in FIG. 1, and its 11IIl@ surface is shown in FIG. Conventionally, with a convex spherical surface, a plurality of workpiece holders 3 are provided on the main surface of a spherical substrate 1, a workpiece 4 is attached to the workpiece holder 3, and the polishing pitch or the surface of a polymeyug pad 7 is set to the desired workpiece. The polishing plate 6 attached so that the radius of curvature is
While supplying abrasive grains to the surface of the workpiece, the substrate rotation axis 2 is rotated in the direction of arrow 8, the polishing plate rotation axis 6 is rotated in the direction of arrow 9, and the polishing plate 6 is rotated in the direction of arrow 10. It was obtained by shaking it. However, in this polishing device, it was necessary to finish the inner wall of the polishing dish into a spherical surface, which was extremely difficult to finish. In addition, it is necessary to fix the workpieces to the workpiece holder so that the normal direction of each workpiece coincides with the radial direction of the spherical surface of the inner wall of the polished surface, but in this example, the workpieces are Since the workpieces are fixed to a spherical substrate, the normal direction of each workpiece does not match, and therefore there is a problem that variations tend to occur in the direction in which the workpieces are fixed to the substrate. FIG. 3 shows a conventional example of a polishing apparatus for obtaining. Conventionally, a convex aspherical surface is produced by pressing a workpiece 16 fixed to a workpiece holder 14 into a groove 13 of a drum 11 having a desired aspherical cross-sectional shape, and rotating the drum rotation shaft 12 in the direction of an arrow 17. While rotating the workpiece holder rotating shaft 15 in the direction of the arrow 18, the main surface of the workpiece 16 is polished into an aspherical surface using abrasive grains stuck to the drum groove 13 or free abrasive grains. I got it in a way. However, when polishing multiple workpieces using this method, the normal direction of the main surface of each workpiece spreads radially with respect to the axis of the drum 11.
The rotation mechanism of the workpiece holder becomes complicated, and when polishing with free abrasive grains, the abrasive grains do not stay in the drum groove, which is the polishing surface, and there are differences in the processing speed of each workpiece. There were disadvantages such as the fact that it was easy to cause
発明の目的
本発明は、上述の従来の欠点を解決することを目的とし
、精度のよい凸球面あるいは凸非球面が容易に得られる
研磨装置を提供するものである。OBJECTS OF THE INVENTION The present invention aims to solve the above-mentioned conventional drawbacks, and provides a polishing apparatus that can easily obtain a highly accurate convex spherical surface or convex aspherical surface.
発明の構成
本発明による研磨装置は、主面を所望の球面断面形状あ
るいは非球面断面形状を溝型として加工した平板と、被
加工物保持部とによって構成され、被加工物保持部に固
定された被加工物を平板主面に押し当て、平板と被加工
物保持部の間に相対的な直線往復運動を与え、同時に、
被加工物保持部をクランクで駆動部に連結することによ
シ回転運動を与えて、平板主面に貼υ付けだ砥粒あるい
は遊離砥粒によって被加工物の主面を球面あるいは非球
面に加工するものである。Structure of the Invention The polishing apparatus according to the present invention is composed of a flat plate whose main surface is processed into a groove shape with a desired spherical cross-sectional shape or aspherical cross-sectional shape, and a workpiece holding part, and is fixed to the workpiece holding part. The workpiece is pressed against the main surface of the flat plate, a relative linear reciprocating motion is applied between the flat plate and the workpiece holding part, and at the same time,
By connecting the workpiece holding part to the drive part with a crank, rotational motion is applied, and the main surface of the workpiece can be made into a spherical or aspherical surface using abrasive grains stuck to the main surface of the flat plate or loose abrasive grains. It is something to be processed.
実施例の説明 以下、本発明を図面を参照して説明する。Description of examples Hereinafter, the present invention will be explained with reference to the drawings.
第４図は、本発廚による研磨装置の一実施例を表わす斜
視図である。FIG. 4 is a perspective view showing an embodiment of the polishing apparatus according to the present invention.
平板２０は、図中のＸ方向に垂直な断面が所望の球面あ
るいは非球面の断面形状どなるように主面２１が加工さ
れている。被加工物２２を貼シ付けた被加工物保持体２
３は、保持体基板２４を挾んで回転板２５と保持体回転
軸２６によって連結されており、Ｘ方向に複数設けられ
ている。回転板２５にはその中心から半径ｒの位置にク
ランク受け２７が設けられておシ、それに、複数の被加
工物保持体２３の中心間隔に等しい位置に穴を設けたク
ランク腕２８が取シ付けられ、有効長ｒのアーム３ｏを
介して駆動部２９に連結されている。The main surface 21 of the flat plate 20 is processed so that a cross section perpendicular to the X direction in the figure has a desired spherical or aspherical cross-sectional shape. Workpiece holder 2 with workpiece 22 attached
3 are connected to the rotary plate 25 and the holder rotation shaft 26 with the holder substrate 24 in between, and a plurality of them are provided in the X direction. The rotary plate 25 is provided with a crank receiver 27 at a position at a radius r from its center, and a crank arm 28 with holes provided at positions equal to the center spacing of the plurality of workpiece holders 23 is provided for the crank receiver. and is connected to the drive unit 29 via an arm 3o having an effective length r.
これにより、駆動部２９の矢印３１方向の回転運動が各
被加工物保持体２３に伝達され、被加工物２２は保持体
回転軸２６を軸として回転運動する。As a result, the rotational movement of the drive unit 29 in the direction of arrow 31 is transmitted to each workpiece holder 23, and the workpieces 22 rotate around the holder rotation axis 26.
また、被加工物保持体が設けられている保持体基板２４
は、変心カム３２の矢印３５の方向の回転運動がばね３
３と連結棒３４によって矢印３６の方向の往復運動に変
換されるため、Ｘ方向に直線往復運動する。Further, a holder substrate 24 on which a workpiece holder is provided
, the rotational movement of the eccentric cam 32 in the direction of the arrow 35 is caused by the spring 3
3 and the connecting rod 34 into a reciprocating motion in the direction of the arrow 36, resulting in a linear reciprocating motion in the X direction.
被加工物２２は、被加工物保持体２３の回転運動と保持
体基板２４の往復運動によシ、遊離砥粒が供給された平
板主面２１に押し当てられながら加工され、平板主面２
１の断面形状と同一の断面を有する凸球面、あるいは凸
非球面に研磨加工される。The workpiece 22 is machined while being pressed against the main surface 21 of the flat plate supplied with free abrasive grains by the rotational movement of the workpiece holder 23 and the reciprocating movement of the holder substrate 24.
It is polished into a convex spherical surface or a convex aspherical surface having the same cross-sectional shape as No. 1.
上述の実施例においては研磨材として遊離砥粒を用いた
が、平板主面に砥粒を貼り付けても同様の効果が得られ
る。Although free abrasive grains were used as the abrasive material in the above-described embodiments, the same effect can be obtained even if the abrasive grains are attached to the main surface of the flat plate.
発明の効果
以上のように、本発明による研磨装置は所望の研磨面の
断面形状をなす平板主面に被加工物を押し当てて加工す
るものであり、球面研磨の場合には従来のような球面加
工皿を使用しない。平板主面の円筒状曲面は旋盤加工に
よって容易に高精度のものが得られるため、従来の研磨
装置に比べて精度のよい凸球面を容易に得ることができ
る。Effects of the Invention As described above, the polishing apparatus according to the present invention processes a workpiece by pressing it against the main surface of a flat plate having a desired cross-sectional shape of the polished surface. Do not use spherical plates. Since the cylindrical curved surface of the main surface of the flat plate can be easily obtained with high precision by lathe processing, it is possible to easily obtain a convex spherical surface with higher precision than with conventional polishing equipment.
また、各被加工物を一直線に甚べて固定するため、各被
加工物の法線方向が平行となり、保持部への貼り付は精
度が向上するとともに、遊離砥粒の保留性がよい平板上
で研磨が行なわれるため、各被加工物の仕上がりむらが
減少される長所を有する。In addition, since each workpiece is fixed in a straight line, the normal direction of each workpiece is parallel, which improves the accuracy of attachment to the holding part, and the flat plate has good retention of loose abrasive grains. Since polishing is performed on the top, it has the advantage that unevenness in the finish of each workpiece is reduced.
被加工物はクランク機構によって回転運動するため被加
工物に加わる振動が少なく、各被加工物に伝達される回
転力が均等化されて、精度のそろった凸球面、凸非球面
が得られる。Since the workpiece is rotated by a crank mechanism, there is little vibration applied to the workpiece, and the rotational force transmitted to each workpiece is equalized, resulting in convex spherical surfaces and convex aspherical surfaces with uniform precision.
第１図は球面研磨装置の一従来例を表わす斜視図、第２
図は第１図に示す装置の側断面図、第３図は非球面研磨
装置の一従来例を表わす斜視図、第４図は本発明による
研磨装置の一実施例を表わす斜視図である。
１・・・・・・基板、２・・・・・・基板回転軸、３，
１４．２３・・・・・被加工物保持体、４．１６．２２
・・・・・被加工物、６・・・・・研磨皿、６・・・・
・・研磨皿回転軸、７・・・・・・研磨用ピッチあるい
はポリッシング・バッド、１１・・・−・・ドラム、１
２・・・・・・ドラム回転動、１６，２６・・・・−被
加工物保持体回転軸、２ｏ・・・・・・平板、２４・・
・・・・保持体基板、２５・・・・・・回転板、２７・
・・・・・クランク受け、２８・・・・クランク腕、２
９・・・・・・駆動部、３０・・−アーム、３２・・・
・変心カム、３３・・・・ばね、３４・・・・・連結棒
。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名菓
２ 図 Ａ
！
第３図Figure 1 is a perspective view showing a conventional example of a spherical polishing device;
The drawings are a sectional side view of the apparatus shown in FIG. 1, FIG. 3 is a perspective view showing a conventional example of an aspheric polishing apparatus, and FIG. 4 is a perspective view showing an embodiment of the polishing apparatus according to the present invention. 1... Board, 2... Board rotation axis, 3,
14.23... Workpiece holder, 4.16.22
...Workpiece, 6... Polishing plate, 6...
...polishing plate rotating shaft, 7...polishing pitch or polishing pad, 11...--drum, 1
2...Drum rotation, 16, 26...-Workpiece holder rotating shaft, 2o...Flat plate, 24...
... Holder substrate, 25 ... Rotating plate, 27.
...Crank receiver, 28 ...Crank arm, 2
9... Drive unit, 30...-arm, 32...
- Eccentric cam, 33... spring, 34... connecting rod. Name of agent: Patent attorney Toshio Nakao and one other name
2 Figure A! Figure 3
Claims (2)
をなす曲面に加工された平板と、板状の被加工物を保持
する被加工物保持部と、前記被加工物保持部に保持され
た被加工物を前記平板の主面に押し尚てる手段と、前記
平板と前記被加工物保持部の間に、前記平板主面が同一
断面となる上述の方向に対して直角な方向に相対的な直
線往復運動を与える手段と、前記被加工物に、クランク
によって駆動部と前記被加工物保持部とを連結して、前
記平板の垂直方向を軸とした回転運動を与える手段とを
備えてなり、前記平板主面に貼シ付けた砥粒遇しくは遊
離砥粒を用い、前記被加工物の主面を球面あるいは非球
面に加工することを特徴とする研磨装置。(1) A flat plate whose main surface is curved so that all cross sections parallel to one direction have the same shape, a workpiece holder that holds a plate-shaped workpiece, and the workpiece holder means for pushing the held workpiece back onto the main surface of the flat plate, and a direction perpendicular to the above-mentioned direction in which the main surface of the flat plate has the same cross section between the flat plate and the workpiece holding part. means for imparting relative linear reciprocating motion to the workpiece; and means for imparting rotational motion to the workpiece around an axis perpendicular to the flat plate by connecting a drive section and the workpiece holding section through a crank; A polishing apparatus comprising: a polishing apparatus for processing the main surface of the workpiece into a spherical or aspherical surface using abrasive grains stuck to the main surface of the flat plate or free abrasive grains.
部にクランクで連結され、平板主面の垂直方向を軸とし
た回転運動をすることを特徴とする特許請求の範囲第１
項記載の研磨装置。(2) A plurality of workpiece holding parts are provided, all of which are connected to a drive part by a crank, and rotate about a direction perpendicular to the main surface of the flat plate.
The polishing device described in Section 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58114507A JPS606338A (en) | 1983-06-24 | 1983-06-24 | Polishing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58114507A JPS606338A (en) | 1983-06-24 | 1983-06-24 | Polishing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS606338A true JPS606338A (en) | 1985-01-14 |
Family
ID=14639484
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58114507A Pending JPS606338A (en) | 1983-06-24 | 1983-06-24 | Polishing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS606338A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5278216A (en) * | 1989-04-18 | 1994-01-11 | Mitsui Toatsu Chemicals, Incorporated | Syndiotactic polypropylene resin composition |
| DE19814045A1 (en) * | 1998-03-31 | 1999-10-14 | Fraunhofer Ges Forschung | Aspherical plano-convex cylindrical micro-lens, e.g. a collimator lens for a high power laser diode, is produced |
-
1983
- 1983-06-24 JP JP58114507A patent/JPS606338A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5278216A (en) * | 1989-04-18 | 1994-01-11 | Mitsui Toatsu Chemicals, Incorporated | Syndiotactic polypropylene resin composition |
| DE19814045A1 (en) * | 1998-03-31 | 1999-10-14 | Fraunhofer Ges Forschung | Aspherical plano-convex cylindrical micro-lens, e.g. a collimator lens for a high power laser diode, is produced |
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