JPS606892U - Small helium cryopump - Google Patents
Small helium cryopumpInfo
- Publication number
- JPS606892U JPS606892U JP9872383U JP9872383U JPS606892U JP S606892 U JPS606892 U JP S606892U JP 9872383 U JP9872383 U JP 9872383U JP 9872383 U JP9872383 U JP 9872383U JP S606892 U JPS606892 U JP S606892U
- Authority
- JP
- Japan
- Prior art keywords
- cryopump
- small helium
- type
- small
- helium refrigerator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 3
- 239000001307 helium Substances 0.000 claims description 3
- 229910052734 helium Inorganic materials 0.000 claims description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 239000002826 coolant Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の実施例の一部截断斜視図、第２図はそ
の変形例の要部の截断側面図である。
１・・・・・・クライオポンプ、２・・・・・・ポンプ
ケース、３・・・・・・ヘリウム冷凍機、４・・・・・
・シリンダ、５・・・・・・凝縮部材、６・・・・・・
補助冷却パイプ。FIG. 1 is a partially cutaway perspective view of an embodiment of the present invention, and FIG. 2 is a cutaway side view of the main part of a modification thereof. 1... Cryopump, 2... Pump case, 3... Helium refrigerator, 4...
・Cylinder, 5... Condensing member, 6...
Auxiliary cooling pipe.
Claims (1)
冷凍機３のシリンダ４に、これにより冷却されて気体分
子を凝縮するシールドその他の凝縮部材５を取付けする
式のものに於て、該凝縮部材５に液体窒素その他の冷却
液が循環する補助冷却バイブロを設けて成る小型ヘリウ
ム冷凍機式クライオポンプ。In a type of cryopump 1 in which a shield or other condensing member 5 is attached to the cylinder 4 of a helium refrigerator 3 provided in the pump case 2 of the cryopump 1 for cooling and condensing gas molecules, the condensing member 5 A small helium refrigerator type cryopump equipped with an auxiliary cooling vibro that circulates liquid nitrogen or other coolant.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9872383U JPS606892U (en) | 1983-06-28 | 1983-06-28 | Small helium cryopump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9872383U JPS606892U (en) | 1983-06-28 | 1983-06-28 | Small helium cryopump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS606892U true JPS606892U (en) | 1985-01-18 |
Family
ID=30234266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9872383U Pending JPS606892U (en) | 1983-06-28 | 1983-06-28 | Small helium cryopump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS606892U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57186075A (en) * | 1981-05-12 | 1982-11-16 | Ulvac Corp | Cryo-pump and operating method thereof |
-
1983
- 1983-06-28 JP JP9872383U patent/JPS606892U/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57186075A (en) * | 1981-05-12 | 1982-11-16 | Ulvac Corp | Cryo-pump and operating method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6039753U (en) | free piston heat engine | |
| JPS58124679U (en) | cryopump | |
| JPS6097342U (en) | Cylinder block of boiling-cooled internal combustion engine | |
| JPS59115895U (en) | rotary compressor | |
| JPS58184179U (en) | Accumulator and receiver tank for refrigeration equipment | |
| JPS5862193U (en) | rotary compressor | |
| JPS6096549U (en) | Refrigeration equipment | |
| JPS59127625U (en) | cooling pillow | |
| JPS6011300U (en) | ship cooler | |
| JPS58142570U (en) | Heat exchanger | |
| JPS60148566U (en) | heat pump | |
| JPS59186491U (en) | Pump case in cryopump | |
| JPS6118488U (en) | chilled water device | |
| JPS60175224U (en) | coolant | |
| JPS6049279U (en) | cryopump | |
| JPS60115501U (en) | Oil rotary vacuum pump suction gas cooling and purifying device | |
| JPS59175963U (en) | Refrigeration equipment | |
| JPS58153904U (en) | Gas stove with alarm | |
| JPS5975575U (en) | compressor | |
| JPS60107499U (en) | Liquefied gas transfer equipment | |
| JPS606890U (en) | Cryopump vibration isolator | |
| JPS6033175U (en) | Exhaust heat utilization system | |
| JPS60141411U (en) | Silencer with air cooling function | |
| JPS58169350U (en) | Exhaust pipe top | |
| JPS60145285U (en) | Packing case |