JPS6071136U - Mask blank storage case - Google Patents
Mask blank storage caseInfo
- Publication number
- JPS6071136U JPS6071136U JP1983162444U JP16244483U JPS6071136U JP S6071136 U JPS6071136 U JP S6071136U JP 1983162444 U JP1983162444 U JP 1983162444U JP 16244483 U JP16244483 U JP 16244483U JP S6071136 U JPS6071136 U JP S6071136U
- Authority
- JP
- Japan
- Prior art keywords
- storage case
- mask blank
- blank storage
- groove
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Packaging For Recording Disks (AREA)
- Packaging Frangible Articles (AREA)
- Weting (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来の収納ケースを示す斜視図、第2図は同収
納ケースの要部平面図、第3図は本考案による一実施例
を示す要部平面図、第4図は本考案による他の実施例を
示す要部平面図である。
2・・・・・・側壁、6・・・・・・マスク、6at
6bt 6c・・・・・・ガラス板平面、6d、6
e・・・・・・エツジ、8・・・・・・溝、9・・・・
・・空隙。Fig. 1 is a perspective view showing a conventional storage case, Fig. 2 is a plan view of main parts of the storage case, Fig. 3 is a plan view of main parts showing an embodiment according to the present invention, and Fig. 4 is a plan view of main parts according to the present invention. FIG. 7 is a plan view of main parts showing another embodiment. 2...Side wall, 6...Mask, 6at
6bt 6c...Glass plate plane, 6d, 6
e...Edge, 8...Groove, 9...
...Void.
Claims (1)
を刻設してなるマスクブランク収納ケースにおいて、上
記溝の形状は、ガラス基板の平面で溝壁面に当接し、ガ
ラス基°板のエツジが対向する溝壁面に空隙が設けられ
てなることを特徴とするマスクブランク収納ケース。In a mask blank storage case in which a groove for guiding a glass mask substrate is carved on opposing side walls, the shape of the groove is such that the plane of the glass substrate contacts the groove wall surface, and the edge of the glass substrate A mask blank storage case characterized in that a gap is provided between opposing groove walls.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983162444U JPS6071136U (en) | 1983-10-19 | 1983-10-19 | Mask blank storage case |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1983162444U JPS6071136U (en) | 1983-10-19 | 1983-10-19 | Mask blank storage case |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6071136U true JPS6071136U (en) | 1985-05-20 |
| JPS6311729Y2 JPS6311729Y2 (en) | 1988-04-05 |
Family
ID=30356718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1983162444U Granted JPS6071136U (en) | 1983-10-19 | 1983-10-19 | Mask blank storage case |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6071136U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02295150A (en) * | 1989-05-09 | 1990-12-06 | Yodogawa Kasei Kk | Cassette for substrate |
| JP2002362671A (en) * | 2001-06-08 | 2002-12-18 | Umeda Shinku Hoso Kk | Container structure |
-
1983
- 1983-10-19 JP JP1983162444U patent/JPS6071136U/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02295150A (en) * | 1989-05-09 | 1990-12-06 | Yodogawa Kasei Kk | Cassette for substrate |
| JP2002362671A (en) * | 2001-06-08 | 2002-12-18 | Umeda Shinku Hoso Kk | Container structure |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6311729Y2 (en) | 1988-04-05 |
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