JPS6071136U - Mask blank storage case - Google Patents

Mask blank storage case

Info

Publication number
JPS6071136U
JPS6071136U JP1983162444U JP16244483U JPS6071136U JP S6071136 U JPS6071136 U JP S6071136U JP 1983162444 U JP1983162444 U JP 1983162444U JP 16244483 U JP16244483 U JP 16244483U JP S6071136 U JPS6071136 U JP S6071136U
Authority
JP
Japan
Prior art keywords
storage case
mask blank
blank storage
groove
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1983162444U
Other languages
Japanese (ja)
Other versions
JPS6311729Y2 (en
Inventor
稲岡 健治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP1983162444U priority Critical patent/JPS6071136U/en
Publication of JPS6071136U publication Critical patent/JPS6071136U/en
Application granted granted Critical
Publication of JPS6311729Y2 publication Critical patent/JPS6311729Y2/ja
Granted legal-status Critical Current

Links

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  • Packaging For Recording Disks (AREA)
  • Packaging Frangible Articles (AREA)
  • Weting (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の収納ケースを示す斜視図、第2図は同収
納ケースの要部平面図、第3図は本考案による一実施例
を示す要部平面図、第4図は本考案による他の実施例を
示す要部平面図である。 2・・・・・・側壁、6・・・・・・マスク、6at 
 6bt  6c・・・・・・ガラス板平面、6d、6
e・・・・・・エツジ、8・・・・・・溝、9・・・・
・・空隙。
Fig. 1 is a perspective view showing a conventional storage case, Fig. 2 is a plan view of main parts of the storage case, Fig. 3 is a plan view of main parts showing an embodiment according to the present invention, and Fig. 4 is a plan view of main parts according to the present invention. FIG. 7 is a plan view of main parts showing another embodiment. 2...Side wall, 6...Mask, 6at
6bt 6c...Glass plate plane, 6d, 6
e...Edge, 8...Groove, 9...
...Void.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 相対向する側壁に、マスク用ガラス基板をガイドする溝
を刻設してなるマスクブランク収納ケースにおいて、上
記溝の形状は、ガラス基板の平面で溝壁面に当接し、ガ
ラス基°板のエツジが対向する溝壁面に空隙が設けられ
てなることを特徴とするマスクブランク収納ケース。
In a mask blank storage case in which a groove for guiding a glass mask substrate is carved on opposing side walls, the shape of the groove is such that the plane of the glass substrate contacts the groove wall surface, and the edge of the glass substrate A mask blank storage case characterized in that a gap is provided between opposing groove walls.
JP1983162444U 1983-10-19 1983-10-19 Mask blank storage case Granted JPS6071136U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983162444U JPS6071136U (en) 1983-10-19 1983-10-19 Mask blank storage case

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983162444U JPS6071136U (en) 1983-10-19 1983-10-19 Mask blank storage case

Publications (2)

Publication Number Publication Date
JPS6071136U true JPS6071136U (en) 1985-05-20
JPS6311729Y2 JPS6311729Y2 (en) 1988-04-05

Family

ID=30356718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983162444U Granted JPS6071136U (en) 1983-10-19 1983-10-19 Mask blank storage case

Country Status (1)

Country Link
JP (1) JPS6071136U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02295150A (en) * 1989-05-09 1990-12-06 Yodogawa Kasei Kk Cassette for substrate
JP2002362671A (en) * 2001-06-08 2002-12-18 Umeda Shinku Hoso Kk Container structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02295150A (en) * 1989-05-09 1990-12-06 Yodogawa Kasei Kk Cassette for substrate
JP2002362671A (en) * 2001-06-08 2002-12-18 Umeda Shinku Hoso Kk Container structure

Also Published As

Publication number Publication date
JPS6311729Y2 (en) 1988-04-05

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