JPS6073162U - Electronic lenses for electron microscopes, etc. - Google Patents
Electronic lenses for electron microscopes, etc.Info
- Publication number
- JPS6073162U JPS6073162U JP16499283U JP16499283U JPS6073162U JP S6073162 U JPS6073162 U JP S6073162U JP 16499283 U JP16499283 U JP 16499283U JP 16499283 U JP16499283 U JP 16499283U JP S6073162 U JPS6073162 U JP S6073162U
- Authority
- JP
- Japan
- Prior art keywords
- spacer
- pole pieces
- magnetic pole
- electron microscopes
- electronic lenses
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来の電子レンズを説明するためめ図、第2図
は本考案の一実施例を示すための図である。
1.2:励磁コイル、3a:上磁極片、′3b=中磁極
片、3c:下磁極片、4:ヨーク、5゜6.7,8ニス
ペーサ−19,10:切り欠き。FIG. 1 is a diagram for explaining a conventional electronic lens, and FIG. 2 is a diagram for showing an embodiment of the present invention. 1.2: Excitation coil, 3a: Upper magnetic pole piece, '3b = Middle magnetic pole piece, 3c: Lower magnetic pole piece, 4: Yoke, 5°6.7,8 varnish spacer-19, 10: Notch.
Claims (1)
イルよりの磁束をこれら磁極片に導くためのヨークと、
第1、第2の磁極片同志を同軸に固定するための非磁性
材料で形成された第1のスペーサーと、第2、第3の磁
極片同志を同軸に固定するための非磁性材料で形成され
た第2のスペーサーとを具備するレンズにおいて、第1
のスペーサーと第2のスペーサーの径を異ならせたこと
を特徴とする電子顕微鏡等用電子レンズ。first, second, and third magnetic pole pieces, an excitation coil, and a yoke for guiding magnetic flux from the excitation coil to these magnetic pole pieces;
A first spacer made of a non-magnetic material to coaxially fix the first and second magnetic pole pieces, and a non-magnetic material to coaxially fix the second and third magnetic pole pieces. In the lens, the first spacer is provided with a second spacer.
An electron lens for an electron microscope, etc., characterized in that the spacer and the second spacer have different diameters.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16499283U JPS6073162U (en) | 1983-10-25 | 1983-10-25 | Electronic lenses for electron microscopes, etc. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16499283U JPS6073162U (en) | 1983-10-25 | 1983-10-25 | Electronic lenses for electron microscopes, etc. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6073162U true JPS6073162U (en) | 1985-05-23 |
| JPH0136284Y2 JPH0136284Y2 (en) | 1989-11-06 |
Family
ID=30361580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16499283U Granted JPS6073162U (en) | 1983-10-25 | 1983-10-25 | Electronic lenses for electron microscopes, etc. |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6073162U (en) |
-
1983
- 1983-10-25 JP JP16499283U patent/JPS6073162U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0136284Y2 (en) | 1989-11-06 |
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