JPS6073162U - Electronic lenses for electron microscopes, etc. - Google Patents

Electronic lenses for electron microscopes, etc.

Info

Publication number
JPS6073162U
JPS6073162U JP16499283U JP16499283U JPS6073162U JP S6073162 U JPS6073162 U JP S6073162U JP 16499283 U JP16499283 U JP 16499283U JP 16499283 U JP16499283 U JP 16499283U JP S6073162 U JPS6073162 U JP S6073162U
Authority
JP
Japan
Prior art keywords
spacer
pole pieces
magnetic pole
electron microscopes
electronic lenses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16499283U
Other languages
Japanese (ja)
Other versions
JPH0136284Y2 (en
Inventor
勝重 津野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP16499283U priority Critical patent/JPS6073162U/en
Publication of JPS6073162U publication Critical patent/JPS6073162U/en
Application granted granted Critical
Publication of JPH0136284Y2 publication Critical patent/JPH0136284Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の電子レンズを説明するためめ図、第2図
は本考案の一実施例を示すための図である。 1.2:励磁コイル、3a:上磁極片、′3b=中磁極
片、3c:下磁極片、4:ヨーク、5゜6.7,8ニス
ペーサ−19,10:切り欠き。
FIG. 1 is a diagram for explaining a conventional electronic lens, and FIG. 2 is a diagram for showing an embodiment of the present invention. 1.2: Excitation coil, 3a: Upper magnetic pole piece, '3b = Middle magnetic pole piece, 3c: Lower magnetic pole piece, 4: Yoke, 5°6.7,8 varnish spacer-19, 10: Notch.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 第1、第2、第3の磁極片と、励磁コイルと、該励磁コ
イルよりの磁束をこれら磁極片に導くためのヨークと、
第1、第2の磁極片同志を同軸に固定するための非磁性
材料で形成された第1のスペーサーと、第2、第3の磁
極片同志を同軸に固定するための非磁性材料で形成され
た第2のスペーサーとを具備するレンズにおいて、第1
のスペーサーと第2のスペーサーの径を異ならせたこと
を特徴とする電子顕微鏡等用電子レンズ。
first, second, and third magnetic pole pieces, an excitation coil, and a yoke for guiding magnetic flux from the excitation coil to these magnetic pole pieces;
A first spacer made of a non-magnetic material to coaxially fix the first and second magnetic pole pieces, and a non-magnetic material to coaxially fix the second and third magnetic pole pieces. In the lens, the first spacer is provided with a second spacer.
An electron lens for an electron microscope, etc., characterized in that the spacer and the second spacer have different diameters.
JP16499283U 1983-10-25 1983-10-25 Electronic lenses for electron microscopes, etc. Granted JPS6073162U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16499283U JPS6073162U (en) 1983-10-25 1983-10-25 Electronic lenses for electron microscopes, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16499283U JPS6073162U (en) 1983-10-25 1983-10-25 Electronic lenses for electron microscopes, etc.

Publications (2)

Publication Number Publication Date
JPS6073162U true JPS6073162U (en) 1985-05-23
JPH0136284Y2 JPH0136284Y2 (en) 1989-11-06

Family

ID=30361580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16499283U Granted JPS6073162U (en) 1983-10-25 1983-10-25 Electronic lenses for electron microscopes, etc.

Country Status (1)

Country Link
JP (1) JPS6073162U (en)

Also Published As

Publication number Publication date
JPH0136284Y2 (en) 1989-11-06

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