JPS6076178A - Semiconductor light emitting device - Google Patents

Semiconductor light emitting device

Info

Publication number
JPS6076178A
JPS6076178A JP58185604A JP18560483A JPS6076178A JP S6076178 A JPS6076178 A JP S6076178A JP 58185604 A JP58185604 A JP 58185604A JP 18560483 A JP18560483 A JP 18560483A JP S6076178 A JPS6076178 A JP S6076178A
Authority
JP
Japan
Prior art keywords
light emitting
submount
pellet
copper
emitting diode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58185604A
Other languages
Japanese (ja)
Inventor
Yoshimitsu Yamazoe
山添 良光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP58185604A priority Critical patent/JPS6076178A/en
Publication of JPS6076178A publication Critical patent/JPS6076178A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/858Means for heat extraction or cooling
    • H10H20/8585Means for heat extraction or cooling being an interconnection
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/858Means for heat extraction or cooling
    • H10H20/8582Means for heat extraction or cooling characterised by their shape

Landscapes

  • Led Device Packages (AREA)
  • Led Devices (AREA)
  • Die Bonding (AREA)

Abstract

PURPOSE:To obtain an element with good heat dissipating property as well as high reliability by interposing a submount of composite structure including a second material having thermal expansivity identical with that of the semiconductor light emitting pellet between the pellet and the package. CONSTITUTION:A light emitting diode pellet 3 is fixed on a stem body 1 of the package through a submount 10 consisting of two different submount members 8 and 9. The first member 8 directly under the light emitting diode is made of a material having good heat conductivity (e.g. copper). The second member 9 of the submount is made of a material having a thermal expansivity equivalent to that of InP which is a main material of the light emitting diode pellet 3, for example of copper-tungsten alloy. By such a construction, heat dissipation directly under the diode pellet can be maintained in a preferably state. Although copper has a thermal expansivity approximately three times larger than that of InP, expansion of copper can be controlled by the alloy layer surrounding it in the construction as described above, and the thermal expansion directly under the substrate is sharply reduced. Thus, a stress due to difference of thermal expansivities, which would deteriorate the reliability, can be minimized.

Description

【発明の詳細な説明】 (技術分野) 本発明は半導体発光装置の放熱特性及び信頼性の改良に
関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to improvements in heat dissipation characteristics and reliability of semiconductor light emitting devices.

(従来技術の問題点) 半導体発光装置における大きな問題点のひとつは、発光
素子ペレットの放熱設計にある。
(Problems with the Prior Art) One of the major problems with semiconductor light emitting devices lies in the heat dissipation design of the light emitting element pellets.

一般に発光ダイオードや半導体レーザ等の半導体発光装
置は、(1,l mm3以下程度の微細な素子に対し数
十ミリアンペアもの大電流をもって駆動するため、高密
度の熱発生がともなう。このため適切な放熱設計がなさ
れていない場合には、通電使用中に発熱による性能の劣
化や素子寺命の減少、あるいは発光素子自身の破壊をも
まねく危険性がある。
In general, semiconductor light-emitting devices such as light-emitting diodes and semiconductor lasers are driven with large currents of several tens of milliamps for microscopic elements (1,1 mm3 or less), which generates a high density of heat. Therefore, appropriate heat dissipation is required. If the design is not done properly, there is a risk that performance may deteriorate due to heat generation during energized use, the life of the device may be reduced, or the light emitting device itself may be destroyed.

ところが半導体発光装置は一般に小型である特性を生か
して高密度に実装されることが多く放熱器の使用に対し
て制約が大きい。このため装置自体の放熱特性を少しで
も良くする必要がある。
However, semiconductor light emitting devices are generally compact and are often packaged in high density to take advantage of their characteristics, which places great restrictions on the use of heat sinks. Therefore, it is necessary to improve the heat dissipation characteristics of the device itself.

第1図(a)及びΦ)はそれぞれ従来より広く用いられ
ているいわゆるTO−46型と呼ばれるパッケージを用
いた半導体発光装置の上面図及び中央断面図である。図
において発光素子ベレット3はサブマウント2を介して
ステム本体1に固着されている。サブマウンl−2には
放熱特性の上で、できるだけ熱伝導率の良い材料を用い
る事が望ましい。
FIGS. 1(a) and Φ) are respectively a top view and a central sectional view of a semiconductor light emitting device using a so-called TO-46 type package, which has been widely used in the past. In the figure, a light emitting element pellet 3 is fixed to a stem body 1 via a submount 2. In terms of heat dissipation characteristics, it is desirable to use a material with as good thermal conductivity as possible for the submount l-2.

ところが、一般に熱伝導率の良好な金属材料は熱膨張率
が半導体発光素子の主材料である半導体結晶と異なって
いる。このため半導体発光素子ペレツ、トに少しでも発
熱があった場合、熱膨張率の差にともなう応力が発生し
、信頼性に悪影響を与える。このため、放熱特性上不利
ではあるが、サブマウントとしてSiのような、半導体
発光素子ペレット自身と熱1鰹張率が比較的近b−14
料が用bXられる。
However, metal materials with good thermal conductivity generally have a coefficient of thermal expansion different from that of semiconductor crystals, which are the main materials of semiconductor light emitting devices. Therefore, if the semiconductor light emitting device pellets generate even a small amount of heat, stress is generated due to the difference in thermal expansion coefficients, which adversely affects reliability. For this reason, although it is disadvantageous in terms of heat dissipation characteristics, the semiconductor light emitting element pellet itself and the heat 1 bonito elongation are relatively close to each other, such as Si, as a submount.
Fees are used bX.

(発明の開示) 本発明は上記の如き問題点を解決するために成されたも
ので、熱伝導率の良好な材料を自由tv使用出来、しか
も熱膨張率差にもとづく応力カ;与える悪影響を発生せ
しめない構造のサブマウントを使用する事により、放熱
特性が良く、しかも信頼性の高い半導体発光素子を提供
しようとするものである。
(Disclosure of the Invention) The present invention has been made to solve the above-mentioned problems, and allows the use of materials with good thermal conductivity for free TVs, and also avoids the adverse effects of stress caused by differences in thermal expansion coefficients. By using a submount with a structure that does not generate heat, it is possible to provide a semiconductor light emitting device with good heat dissipation characteristics and high reliability.

本発明の半導体発光素子は、熱伝導率が20W/m’C
以上である第1の材料と、前記第1の材料の外周に環状
に固着され、しかも半導体発光素子ペレットと同一の熱
膨張率をもつ第2の材料から成る複合構造のサブマウン
トを半導体発光素子ペレットとパッケージの間に介在せ
しめた事を特徴としている。
The semiconductor light emitting device of the present invention has a thermal conductivity of 20 W/m'C.
A submount having a composite structure consisting of the first material as described above and a second material that is annularly fixed to the outer periphery of the first material and has the same coefficient of thermal expansion as the semiconductor light emitting device pellet is used as a semiconductor light emitting device. It is characterized by being interposed between the pellet and the package.

以下、半導体発光装置のひとつであるInPを主材料と
する通信用の発光ダイオードを例にとって図にもとづい
て本発明について説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings, taking as an example a light emitting diode for communication mainly made of InP, which is one of semiconductor light emitting devices.

第2図(a)及び(b)はそれぞれ本発明の一実施例を
示す、第1図の如き上面図及び中央断面図である。
FIGS. 2(a) and 2(b) are a top view and a central sectional view similar to FIG. 1, respectively, showing an embodiment of the present invention.

図において、発光ダイオードペレット3は、第2図に示
すように2種類のサブマウント部材8及び9からなる複
合構造のサブマウントIOを介してパッケージのステム
本体1に固着されている。発光ダイオード直下の第1の
部材8は熱伝導率の良好な材料(たとえば銅)を使用す
る。サブマウントの第2の部月9は発光ダイオードペレ
ット3の主材料であるInPと熱膨張率の等、い材料、
たとえば銅・タングステン合金を使用する。上記構造に
よれば、発光ダイオードペレット直下の放熱は良好に保
たれる。銅の熱膨張率はInPに比べて約3倍も大きい
が、上記構造にし、た場合、銅の膨張は外周部にある合
金層に上って抑制され、基板直下では水平方向の熱膨張
は大幅に低瀘される。従って信頼性悪化の原因となる熱
膨張率差による応力は最低限におさえることが出来る。
In the figure, a light emitting diode pellet 3 is fixed to the stem body 1 of the package via a submount IO having a composite structure consisting of two types of submount members 8 and 9 as shown in FIG. The first member 8 directly below the light emitting diode is made of a material with good thermal conductivity (for example, copper). The second part 9 of the submount is made of a material with a thermal expansion coefficient similar to that of InP, which is the main material of the light emitting diode pellet 3.
For example, use a copper-tungsten alloy. According to the above structure, heat dissipation directly below the light emitting diode pellet is maintained well. The coefficient of thermal expansion of copper is about three times higher than that of InP, but with the above structure, the expansion of copper goes up to the alloy layer on the outer periphery and is suppressed, and the thermal expansion in the horizontal direction is suppressed directly below the substrate. Significantly lower filtration. Therefore, the stress caused by the difference in thermal expansion coefficient, which causes reliability deterioration, can be suppressed to a minimum.

外周部に用いる第2の部449の月利としては、発光ダ
イオードの主材料の膨張率に応じて、他の材料たとえば
ユバール等の合金を使用することが出来るし、さらに熱
膨張率の小さい材料の場合にはインパール等の鉄ニツケ
ル系合金を使用する事も考えられる。
Depending on the expansion coefficient of the main material of the light emitting diode, other materials such as alloys such as Yuval can be used as the material for the second part 449 used for the outer peripheral part, or materials with a smaller coefficient of thermal expansion can be used. In this case, it may be possible to use an iron-nickel alloy such as Imphal.

(実施例) InP上にI nGaAsPをエピタキシャル成長させ
た結晶を用いて第1図に示す発光ダイオードを作製し、
サブマウントとしてSiを用いた場合、発光ダイオード
ペレットの温度上昇は、発光ダイオードを100mWに
て駆動した場合、特に冷却器を用いない場合で外気に対
して63°C程度上昇する。
(Example) A light emitting diode shown in FIG. 1 was manufactured using a crystal in which InGaAsP was epitaxially grown on InP.
When Si is used as the submount, the temperature of the light emitting diode pellet increases by about 63° C. relative to the outside air when the light emitting diode is driven at 100 mW, especially when no cooler is used.

−力木発明の方法により基板直下部分に厚さ0.8飢の
本発明のサブマウントを使用した場合、近似理論計算に
よれば、温度上昇は60“C以下におさえることができ
る。同温度降下により素子寿命で約30%程度改良され
る。また発光パワーでは3%程度の改良が可能である。
- When the submount of the present invention with a thickness of 0.8 mm is used directly under the substrate by the method of Riki's invention, the temperature rise can be suppressed to 60"C or less, according to approximate theoretical calculations. Due to the drop, the device life can be improved by about 30%, and the emission power can be improved by about 3%.

(産業」二の利用°可能性) 本発明は上記のように13頼性、1゛口°に素f−スを
命に関して効果が火であり、上記の詳細説明において例
にとった通信用発光ダイオードのように信頼性を要求さ
れる分野では非常に有効である。しかしながら、もちろ
ん通信用発光装置に限定する必要は全くなく、表示用発
光装置にも使用でき、同様の効果を期待できることはい
うまでもなく、いわゆるオプトエレクトロニクスと呼ば
れる発光受光素子を含むエレクトロニクス技術の発展に
資するところ大である。
(Possibilities for industrial use) As mentioned above, the present invention has 13 reliability, has a fire effect on life, and is useful for communications as taken as an example in the detailed explanation above. This is extremely effective in fields that require reliability, such as light-emitting diodes. However, it is of course not necessary to limit the use to light-emitting devices for communications; it can also be used for light-emitting devices for display, and it goes without saying that similar effects can be expected, as well as the development of electronics technology that includes light-emitting and light-receiving elements called optoelectronics. It greatly contributes to

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a)及び(b)はそれぞれ、従来から広く使用
されている発光ダイオードの上面図及び中央部の断面図
を示す。第2図(a)及び(b)は本発明の一実施例を
示す発光ダイオードの上面図及び側面図である。 ■・・・パッケージのステム本体 2・・ザブマウント 3・・・発光素子ペレット 4・・・リードワイヤー 5・・・第1のリード引出線 6・・・絶縁ガラス 7・・・第2のリード引出線 8・・・熱伝導率の良好な第1のサブマウント材料カラ
なる第1のサブマウント部材 9・・熱膨張率が発光素子ペレットと等しい第2のサブ
マウント材料からなる第2のサブマウント部材 10・・・複合構造のサブマウント 矛1胆 第2図
FIGS. 1(a) and 1(b) respectively show a top view and a sectional view of the central part of a conventionally widely used light emitting diode. FIGS. 2(a) and 2(b) are a top view and a side view of a light emitting diode showing an embodiment of the present invention. ■...Package stem body 2...Zub mount 3...Light emitting element pellet 4...Lead wire 5...First lead wire 6...Insulating glass 7...Second lead drawer Line 8: A first submount material having good thermal conductivity; a first submount member made of a blank material; 9: a second submount made of a second submount material having a coefficient of thermal expansion equal to that of the light emitting element pellet; Member 10: Composite structure submount head 1 Figure 2

Claims (1)

【特許請求の範囲】[Claims] (1)半導体発光素子ベレットをパッケージに固光する
際に、熱伝導率が20 W/m’C以上である第1の材
料と、前記第1の材料の外周に環状に固着され、しかも
半導体発光素子ベレットと同一の熱膨張率をもつ第2の
材料からなる複合構造のサブマウントを半導体発光素子
ベレットとノ々ツケージとの間に介在せしめた事を特徴
とする半導体発光装置。
(1) When fixing a semiconductor light-emitting device pellet to a package, a first material having a thermal conductivity of 20 W/m'C or more and a semiconductor A semiconductor light emitting device characterized in that a submount having a composite structure made of a second material having the same coefficient of thermal expansion as the light emitting element pellet is interposed between the semiconductor light emitting element pellet and the cage.
JP58185604A 1983-10-03 1983-10-03 Semiconductor light emitting device Pending JPS6076178A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58185604A JPS6076178A (en) 1983-10-03 1983-10-03 Semiconductor light emitting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58185604A JPS6076178A (en) 1983-10-03 1983-10-03 Semiconductor light emitting device

Publications (1)

Publication Number Publication Date
JPS6076178A true JPS6076178A (en) 1985-04-30

Family

ID=16173701

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58185604A Pending JPS6076178A (en) 1983-10-03 1983-10-03 Semiconductor light emitting device

Country Status (1)

Country Link
JP (1) JPS6076178A (en)

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