JPS6077168A - Moisture-sensitive material and moisture-sensitive element - Google Patents
Moisture-sensitive material and moisture-sensitive elementInfo
- Publication number
- JPS6077168A JPS6077168A JP58185041A JP18504183A JPS6077168A JP S6077168 A JPS6077168 A JP S6077168A JP 58185041 A JP58185041 A JP 58185041A JP 18504183 A JP18504183 A JP 18504183A JP S6077168 A JPS6077168 A JP S6077168A
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- sensitive
- sensitive material
- zirconium oxide
- binder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title claims description 18
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 10
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 10
- 239000011230 binding agent Substances 0.000 claims description 8
- 239000005388 borosilicate glass Substances 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- 150000003839 salts Chemical class 0.000 claims description 4
- 239000007772 electrode material Substances 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 241000849798 Nita Species 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- TUEZDIDMUOSELF-UHFFFAOYSA-N [O-2].[Rb+].[Ru+3].[O-2] Chemical compound [O-2].[Rb+].[Ru+3].[O-2] TUEZDIDMUOSELF-UHFFFAOYSA-N 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010411 cooking Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- DGXKDBWJDQHNCI-UHFFFAOYSA-N dioxido(oxo)titanium nickel(2+) Chemical compound [Ni++].[O-][Ti]([O-])=O DGXKDBWJDQHNCI-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Non-Adjustable Resistors (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
本発明は、感湿素材及びそれを用いた感湿素子に関する
。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a moisture-sensitive material and a moisture-sensitive element using the same.
近年において感湿素子は、家庭用例おいては電子レンジ
等の食品調理制御素子、衣類乾燥機の乾燥検出システム
用、ＶＴＲのシリンダの結露検出用、また工業用として
は電子部品製造の際の湿度管理用、農業用として超ハウ
ス空調用。In recent years, humidity sensing elements have been used in household applications such as food cooking control elements in microwave ovens, dryness detection systems in clothes dryers, and condensation detection in VTR cylinders, and in industrial applications such as humidity sensing devices used in the manufacture of electronic parts. Super house air conditioning for management and agricultural purposes.
自動車にあっては、リアウィンド・デ・フオツガの結露
防止用等広く用いられている。In automobiles, it is widely used to prevent condensation on rear windows.
ただ湿度の変化に対しよ＃）感度が良く、さらに電気抵
抗値が低く、ヒステリシス曲線の直線性が良いものが望
まれている。However, it is desirable to have good sensitivity to changes in humidity, low electrical resistance, and good linearity of the hysteresis curve.
本発明者らは、酸化ジルコニウムに一定の添加物を加え
ることによシ、低い電気抵抗値であって、ヒステリシス
曲線が直線に近くなる感湿素子を見い出した。また上記
感湿素材を用いた好しい感湿素子をも見い出した。The present inventors have discovered a moisture-sensitive element with a low electrical resistance value and a hysteresis curve close to a straight line by adding a certain additive to zirconium oxide. We have also discovered a preferred moisture-sensitive element using the above-mentioned moisture-sensitive material.
即ち２本発明は、酸化ジルコニウムを含み。That is, the present invention includes zirconium oxide.
かつチタン酸塩、タンタル酸塩、ニオブ酸塩。and titanates, tantalates, and niobate.
ルテニウム酸塩、イツトリウム酸塩のうち一種以上を含
む感湿素材に関する。The present invention relates to a moisture-sensitive material containing one or more of ruthenate and yttriate.
また、バインダーとして無鉛ホウケイ酸ガラスを混合し
、低温で焼結可能とされる感湿素材をも提供ｆる・ ア
ンダー電極である
含み、かつチタン酸塩、タンタル酸塩、ニオブ酸塩ルテ
ニウム酸塩、イツトリウム酸塩のうち一種以上からなる
感湿素材をバインダーとともに混合したものを前記電極
材上に塗布し・乾燥後焼結したことを特徴とする感湿素
子をも提供する。We also provide moisture-sensitive materials that can be mixed with lead-free borosilicate glass as a binder and sintered at low temperatures. The present invention also provides a moisture-sensitive element, characterized in that a moisture-sensitive material made of one or more of yttriate salts mixed with a binder is coated on the electrode material, dried, and then sintered.
また、上記電極が、くシ形である感湿素子は。Further, in the moisture sensing element, the electrode is in the shape of a comb.
その具体的実施態様の一つである。This is one of its specific embodiments.
以下本発明について、詳細に説明する。The present invention will be explained in detail below.
本発明に用いる酸化ジルコニウムおよびチタン酸塩、タ
ンタル酸塩、ニオブ酸塩、ルテニウム）゛酸塩、イツ）
ＩＪウム酸塩は、高純度のものであって、平均粒径が
細かいものであって２例えば０．５μｍ以下のものを用
いることが好ましい。Zirconium oxide and titanate, tantalate, niobate, ruthenium) used in the present invention
It is preferable to use IJ mate salt having high purity and having a fine average particle size, for example, 0.5 μm or less.
チタン酸塩とは１例えばＮｉＴｉ０＃、 ＣｏＴｉ０＊
等であ）、タンタル酸塩とは、 ＮｉＴａ＋ Ｑｇ＋
０ＯＴＦＬｔ Ｏ−等であシワニオブ酸塩とは、 Ｎｉ
Ｎｂ＊ ０１．０ＯＮｂ１０ｓ等であシ。Titanates are 1 e.g. NiTi0#, CoTi0*
etc.), tantalate is NiTa+ Qg+
Ni
Nb*01.0ONb10s etc.
ルテニウム酸塩とは、 Ｒｔ）＊ Ｒｕｂｓ等をいう。Ruthenate refers to Rt)* Rubs and the like.
酸化ジルコニウムは、電気抵抗値が低く、感湿素材とし
ての一つの好ましい性質を有するが。Zirconium oxide has a low electrical resistance value, which is one desirable property as a moisture-sensitive material.
湿度の変化に対する抵抗値の変化に直線性がないという
欠点がある。A drawback is that there is no linearity in the change in resistance value with respect to changes in humidity.
そこで、前記のチタン酸塩、タンタル酸塩。Therefore, the above-mentioned titanate and tantalate.
ニオブ酸塩、ルテニウム酸塩、イツトリウム酸塩の一種
以上を添加し、好ましい直線性を得る。One or more of niobate, ruthenate, and yttriate are added to obtain preferable linearity.
該添加は、好ましくは、酸化ジルコニウムに対し１０〜
６〇−加えられる。The addition is preferably from 10 to 10 to zirconium oxide.
60- Added.
さらに低温度で焼結させるためには、バインダーを用い
ることが好ましい。バインダーとしては、無鉛ホウケイ
酸ガラスを用いる。このバインダーの添加量は、前記酸
化ジルコニウムと添加物であるチタン酸塩等との合量に
対し好ましくは、５〜１５チ添加する。In order to further sinter at a lower temperature, it is preferable to use a binder. As the binder, lead-free borosilicate glass is used. The amount of the binder added is preferably 5 to 15 times the total amount of the zirconium oxide and the additive titanate.
また感湿素材を用いた感湿素子を蒸着によシ製造する場
合は、以下のごとく行う。In addition, when manufacturing a moisture-sensitive element using a moisture-sensitive material by vapor deposition, it is carried out as follows.
する。これらの電極は、第１図に示すとと〈ホ停または
、無電解メッキによシ行われる。do. These electrodes are formed by plating or electroless plating as shown in FIG.
前記した感湿素材およびバインダーは、上記電極上に塗
布される。その後１３０℃〜１９０℃の雰囲気中で０．
５〜２時間予備乾燥後、８００〜９００℃の雰囲気中で
数十分の焼結を行う。The moisture sensitive material and binder described above are applied onto the electrode. After that, in an atmosphere of 130°C to 190°C, 0.
After preliminary drying for 5 to 2 hours, sintering is performed for several minutes in an atmosphere of 800 to 900°C.
さらに他の感湿素材の製造法としては、感温素材ヲポリ
ビニールアルコールの水溶液で練シ上げ、練ったものを
金型に入れて所定圧（例えば１００ｂ／ａｌｌ〜７００
′Ｆ４／ｃｄ）をかけ常温３〜５分間加圧し、一定形状
のものを作成し。Furthermore, as a manufacturing method for other moisture-sensitive materials, the temperature-sensitive material is kneaded with an aqueous solution of polyvinyl alcohol, the kneaded material is put into a mold, and the predetermined pressure (for example, 100b/all to 700b/all) is kneaded.
'F4/cd) and pressurized at room temperature for 3 to 5 minutes to create a certain shape.
ぐ
その後一定の温度（例えば９５０〜１３００℃）で数時
間加熱する。After that, it is heated at a constant temperature (for example, 950 to 1300°C) for several hours.
成形されたものをダイヤモンドカッタを用いて、所定厚
（約１００〜５００μｍ）にスライスし、一定の角片を
得る。The molded product is sliced to a predetermined thickness (approximately 100 to 500 μm) using a diamond cutter to obtain a certain square piece.
この多孔質焼結体の表と裏の面に、ルテニウ、ム等の厚
膜ペーストを印刷し、一対の電極とし。A thick film paste of ruthenium, mu, etc. is printed on the front and back surfaces of this porous sintered body to form a pair of electrodes.
これに電極線を接合し、感湿素子を得る。Electrode wires are joined to this to obtain a humidity sensing element.
この感湿素子であると、不純物を含む無鉛ホウクイ酸ガ
ラスを使用していないためよシ好ましいものが得られる
。This moisture-sensitive element is more preferable because it does not use lead-free borosilicate glass containing impurities.
以上のように本発明の感湿素材を用いるとつぎのような
効果を得る。As described above, when the moisture-sensitive material of the present invention is used, the following effects can be obtained.
（！）酸化ジルコニウムのみの感湿素子に比べ。(!) Compared to a moisture-sensitive element made only of zirconium oxide.
湿度変化に対する電気抵抗値の変化に直線性がアシ、ヒ
ステリシス曲線も同一湿度においてほぼ同一の値を示す
。The change in electrical resistance value with respect to humidity change is linear, and the hysteresis curve also shows almost the same value at the same humidity.
（２） またくし形電極による感湿素子は、処理工程が
、簡単であシ簡易にできる。また無鉛ホウケイ酸ガラス
を用いるととによシ、よル低温で焼結することが可能で
ある。(2) Furthermore, the humidity sensing element using comb-shaped electrodes has a simple processing process. Furthermore, when lead-free borosilicate glass is used, it is possible to sinter at a much lower temperature.
（３） ホットプレスによシ得た焼結体をスライスして
感湿素材とする場合は、不純物を含む無鉛ホウケイ酸ガ
ラスを用いることを要しないため、よシ好ましい性状の
感湿素子を得る。(3) When slicing the sintered body obtained by hot pressing to make a moisture-sensitive material, it is not necessary to use lead-free borosilicate glass containing impurities, so a moisture-sensitive element with more favorable properties can be obtained. .
実施例！
Ａｌ５ｏ−基板上にニッケルを蒸着後、金を蒸着し第１
図に示すようなくし形電極をホトエツチングによシ形成
した。第１図において、１ば１８ｍ、２は９調、３は６
詔とし、４は１１３■、５は１２ｍに形成した。Example! After evaporating nickel on the Al5o-substrate, gold is evaporated and the first
A comb-shaped electrode as shown in the figure was formed by photoetching. In Figure 1, 1 is 18m, 2 is 9th tone, 3 is 6th
4 was 113 meters long and 5 was 12 meters long.
上記くし形電極上に下記の感湿素材を塗布した。感湿素
材は、酸化ジルコニウムに対して。The following moisture-sensitive material was applied onto the comb-shaped electrode. Moisture sensitive material is for zirconium oxide.
チタン酸ニッケル、タンタル酸コバルト、ニオブ酸ニッ
ケル、ルテニウム酸化ルビジウムを５０−それぞれ添加
し、その含量に対し１０チの無鉛ホウケイ酸を混合し、
アルミナ製の自動乳鉢で初売混錬したものを用いた。Add 50% of nickel titanate, cobalt tantalate, nickel niobate, and ruthenium rubidium oxide, and mix 10% of lead-free borosilicate to the content,
The mixture was first kneaded in an automatic alumina mortar.
粉砕、混錬後ブチルカルピトールおよびエポキシ系樹脂
塗料で粘度調整し、感湿膜の膜厚が↑
２０μｍ前後となるようにスクリーン印刷し塗布した。After pulverization and kneading, the viscosity was adjusted with butyl calpitol and epoxy resin paint, and screen printing was applied so that the thickness of the moisture-sensitive film was approximately ↑ 20 μm.
その後１７０ｃの雰囲気で１時間予備乾燥し。After that, it was pre-dried for 1 hour in an atmosphere of 170c.
８５０±１０℃の雰囲気で３０分焼結し、感湿素子を得
た。Sintering was carried out for 30 minutes in an atmosphere of 850±10° C. to obtain a moisture-sensitive element.
この感湿素子の湿度に対する電気抵抗値の変化を測定周
波数Ｉ Ｑ ００ ＨＭ、測定電圧１ｖとして測定した
結果、下記のような好ましい値であ°７・ 、、ヶ０、
また他のニオブ酸ニッケル、ルテニウム酸ルビジウムに
ついても同様に直線性ある電気抵抗値の極めて低いもの
が得られた。As a result of measuring the change in electrical resistance value of this humidity sensing element with respect to humidity at a measurement frequency of IQ 00 HM and a measurement voltage of 1V, the following preferable values were obtained. Similarly, extremely low electrical resistance values with linearity were obtained for rubidium ruthenate.
なお比較例と比較すると判るようＫ ＺｒＯ，のみのも
のに比べ抵抗値は高いがいづれも直線性のある値を示し
特に湿度４０ｇ、６０−において好ましい値を示した。As can be seen from the comparison with the comparative example, the resistance values were higher than those made only of K ZrO, but all values showed linearity, and particularly preferred values were shown at humidity of 40 g and 60 -.
第１図は、くシ形電極を有した感湿素子である。 特許出願人日本鉱業株式会社 代理人弁理士（７５６９）並川啓志 イ１１盟 FIG. 1 shows a moisture sensing element having a comb-shaped electrode. Patent applicant Nippon Mining Co., Ltd. Representative Patent Attorney (7569) Keishi Namikawa I11 Alliance
Claims (2)
る感湿素材。(1) Contains zirconium oxide and titanate. Tantalate, Niobate, Ruthenate. A moisture-sensitive material characterized by containing one or more types of iturate salts.
し低温で焼結可能とされる特許請求の範又は印刷又は無
電解メッキしこれを電極材とし、さらに酸化ジルコニウ
ムを含み、かつチタン酸塩、タンタル酸塩、ニオブ酸塩
、ルテニウム酸塩、イツトリウム酸塩のうち一種以上か
らなる感湿素材をバインダーとともに混合したものを前
記電極材上に塗布し、乾燥後。 焼結したことを特徴とする感湿素子。 （荀 特許請求の範囲第３項の電極が、くシ形である仁
とを特徴とする感湿素子。(2) A claim in which lead-free borosilicate glass is mixed as a binder and can be sintered at low temperatures, or printed or electroless plated and used as an electrode material, and further contains zirconium oxide and titanate and tantalate. A mixture of a moisture-sensitive material consisting of one or more of salt, niobate, ruthenate, and yttriate together with a binder is applied onto the electrode material, and after drying. A moisture-sensitive element characterized by being sintered. (Xun) The moisture sensing element according to claim 3, wherein the electrode is comb-shaped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58185041A JPS6077168A (en) | 1983-10-05 | 1983-10-05 | Moisture-sensitive material and moisture-sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58185041A JPS6077168A (en) | 1983-10-05 | 1983-10-05 | Moisture-sensitive material and moisture-sensitive element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6077168A true JPS6077168A (en) | 1985-05-01 |
| JPS64346B2 JPS64346B2 (en) | 1989-01-06 |
Family
ID=16163754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58185041A Granted JPS6077168A (en) | 1983-10-05 | 1983-10-05 | Moisture-sensitive material and moisture-sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6077168A (en) |
-
1983
- 1983-10-05 JP JP58185041A patent/JPS6077168A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS64346B2 (en) | 1989-01-06 |
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