JPS6080285A - gas laser equipment - Google Patents

Abstract

PURPOSE:To obtain the titled device of a small size and a low cost whereby stable output can be obtained by a method wherein a gas container of the total amount of inflow gas for 5sec or more is provided between the position of starting mixing gasses of single constituents and a laser tube. CONSTITUTION:He21, N222,, and CO223 are supplied while being controlled to a fixed ratio of flow via valves 24-26. At this time, the mixing container 29 having a volume of the total amount of inflow gas for at least 5sec or more is provided between said position 27 and the laser tube 28. The gasses controlled only in the mixing ratio are sufficiently mixed and stirred in this container by utilizing the kinetic energy they have, and then supplied to the laser tube. Reserve chambers 30-32, used for reducing the mutual interference of gas flow based on the difference in the mixing ratio, are not necessary for a small amount of flow. The closer is this container to a regular cube in shape, the higher output and stabler laser can be obtained. Besides, it is exhausted through a vacuum pump 13. This construction unnecessitates a gas mixer of a high cost and a large size and enables the stable laser output to be obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a gas laser device that requires efficient mixing of a plurality of single component gases.

That is, the gas laser device of the present invention not only maintains a constant gas mixture ratio, but also attempts to improve laser oscillation efficiency by maintaining a constant gas mixture ratio and sufficiently mixing the gases.

Structure of the Conventional Example and Its Problems FIG. 1 is a circuit diagram of a conventional gas laser device. Gas laser equipment generally uses three of He, N2, and 002.
Seed gas 1,2.3 (possibly CO or 0
(2 may be mixed). This He + N2 +0
02 is generally used in a mixing ratio of 80:16:5. At this time, the specific gravity of each gas 1)2+3 is different (
In particular, since He is light and CO2 is heavy), gas flow valve 4.
5. Even if the mixing ratio was controlled at 6, due to the difference in specific gravity of the gas, the gas was not supplied to the laser tube 7 in a sufficiently mixed state and at the set mixing ratio, and sufficient laser output could not be obtained. Therefore, in the past, each individual He gas 1. N2 gas 21C02 gas 3, etc. are supplied to the gas mixer 8 via the gas flow valves 4, 5.6, thoroughly mixed, and then supplied to the laser tube 7.

Vacuum pump 9 was evacuating air to outside the machine 10. Note that 11 is a DC power source for discharging the laser tube 7.

12 is a laser oscillator. Conventionally, the gas flow valve unit 13. Gas mixer8. It is divided into laser oscillators 12.

In addition, as shown in Fig. 2, He + N2
Filled mixed gas cylinder 1 containing gas such as +002
There is also a gas laser apparatus in which the gas is supplied to the laser tube 16 via a gas flow valve 16, the gas flow rate is increased by a vacuum pump 17, and the gas is exhausted to the outside of the machine 18. 19 is laser tube 1
6 is a DC power supply for discharging, and 20 is a laser oscillator. In the conventional example shown in Fig. 1, the mixing method of the gas mixer 8 uses a fan and a complicated anti-sealing plate for the gas piping 1, so the gas mixer 8 is large and needs to be installed separately from the laser oscillator. As a result, the entire device was large and expensive.

In addition, the conventional example shown in Figure 2 almost eliminates the drawbacks of the conventional example shown in Figure 1, but when the gases are mixed together, the gas price is approximately three times higher than when each gas is used alone. , medium power laser with large gas consumption (in the case of C02 laser,
If the continuous laser output is about 250 W or more, the running cost becomes high, which is extremely impractical.

Purpose of invention The present invention eliminates the above-mentioned conventional drawbacks.

The purpose is to supply a mixed gas that provides sufficient laser characteristics (laser output, stability, etc.) using each individual low-cost gas.

Structure of the Invention In order to achieve this object, the present invention provides a gas laser device that oscillates a laser by mixing a plurality of gases each having a single component, in which a gas is inserted between a mixing start position of the gases having a single component and a laser tube. A gas container for mixing gases using the kinetic energy possessed is provided with a size at least equal to or more than 6 seconds of the inflow gas flow rate.

DESCRIPTION OF EMBODIMENTS Embodiments of the present invention will now be described with reference to FIGS. 3 to 9 of the drawings. In this example, a single He gas 21 +
N2 gas22. Gas flow rate for CO2 gas 23 etc. is approximately 80:15:5 using gas flow valves 24 + 261 and 26, respectively.
At this time, a gas mixing container with a size of at least 6 seconds or more of the inflow gas flow rate is provided between the single component gas mixing start position 27 and the laser tube 28. be. A gas flow rate of 6 seconds or more means He
When the total inflow gas flow rate of +N2+C02 is 11/min (1
1/min - 1000Cd/min = 16.7 (1/sec...
...6 seconds is 1e, 71/second x 5≠841), 84
1 or more, and in the case of 217 minutes, there will be 1684 or more gas mixing containers.

The gas mixing container 29 generates the effect that only the mixture ratio is sidelined, and gases that are not sufficiently mixed or stirred are sufficiently mixed using the kinetic energy of the gases and then supplied to the laser tube 28. . 30 +31.32fd This is a preliminary chamber to reduce mutual interference due to gas flows due to different gas mixture ratios, but experimental results indicate that it is not necessary except in cases of particularly low flow rates (o, cs l1 min or less). Met.

The presence of gas mixing vessel 29 is shown in FIG.

Severely affects laser output. In other words, when the total flow rate of incoming gas is 11/min, a gas mixing vessel with a flow rate of 6 seconds or less will not have sufficient mixing capacity, and if it is more than 6 seconds, its effect will be saturated, so it should not be used as an excess device. Become. Note that 33 is a vacuum pump.

Next, specific examples of the present invention will be described. FIG. 5 shows a first specific configuration example of the present invention, in which the individual gases are mixed at a mixing ratio, then merged and enter a gas mixing container 36 from a gas mixture 34, and the gas is mixed at the wall of the container. Due to the kinetic energy of the
is supplied to the laser tube.

FIG. 6 shows a second specific configuration example of the present invention, in which gas is supplied to the inlet 34.
The gas is fed into the container 36 from the gas pipe inlet 37, passes through the gas pipe 38, and exits to the gas pipe outlet 36. However, compared to the first example, the presence of the gas pipe has the effect of more thorough mixing.

FIG. 7 shows a third specific configuration example of the present invention, in which gas is supplied to the inlet 34.
from the filter 39 and the gas vent hole 4.
0 and exit to exit 36. This third example can prevent dust from entering the laser tube, has the effect of extending the life of internal laser reflection mirrors, and can be used as a gas mixture with commercially available air filters and oil mist traps. There is an effect that the container 36 can be supplied at low cost. At this time, 41 is a filter support, 42 is an airtight O-ring, 4
3 is the container body, 44Fi lid, 46 is the body 43 and lid 4
The screws for connecting 4 are shown.

Figure 8 shows a fourth specific configuration example of the present invention, which is similar to the first example, but the gas does not go out in a short circuit than the first example, so the mixing effect can be further enhanced. can. However, the effect is not significant and is not sufficient to significantly reduce the content of the gas mixing container. That is, as shown in the first to fourth examples, various types of peripheral structures can be considered, but in all examples, it is necessary to have a gas mixing container with a capacity equal to or more than 6 seconds of the total flow rate of incoming gas. In the first to fourth examples, almost satisfactory laser outputs were obtained, and there was no significant difference in their characteristics.

The shape of the gas mixing container according to the present invention includes the first to fourth shapes.
As shown in the example, the shape that resembles a regular cube as much as possible produces a high and stable laser output.

In other words, if you simply use a slender cylindrical object that has a capacity equal to at least 5 seconds of the inflow gas flow rate, or use thicker piping hoses instead, sufficient mixing cannot be achieved and the laser output is reduced. becomes lower.

Gas mixture ratio depending on the rated output of the laser oscillator.

Although the gas amounts are somewhat different, by providing a gas mixing container with a size equal to or more than 6 seconds of the inflow gas flow rate, stable laser output can be obtained.

Effects of the Invention As described above, according to the present invention, it is possible to supply two or more gases in a sufficiently mixed state without using an expensive and large gas mixer, and the gas laser device can be downsized. , it is possible to reduce the price.

[Brief explanation of drawings]

Figures 1 and 2 are schematic configuration diagrams of conventional gas laser equipment;
Fig. 3 is a schematic configuration diagram of the gas laser device according to the present invention, Fig. 4 is a comparative experimental characteristic diagram of the capacity of the gas mixing container and the laser output, and Figs. 6 to 8 are gas mixtures used in the gas laser device of the present invention. FIG. 3 is a front sectional view of each container. 21.221 23...gas, 24,25)2
6... Gas flow valve, 27... Mixing start position, 28... Laser tube, 29.36 Old...
Gas mixing container. Name of agent: Patent attorney Toshio Nakao (1st person)
Figure 81'33'? 9 Figure 4 ε: 35 Figure 6 Figure 8 Procedural amendment February 79, 1988 l Indication of the case 1989 Patent Application No. 189110 2 Name of the invention Gas laser device 3 Person making the amendment I' Relationship with 1 Patent Application Person Address 1006 Kadoma, Kadoma City, Osaka Name (582) Matsushita Electric Industrial Co., Ltd. Representative Toshihiko Yamashita 4 Agent 571 Address 1006 Kadoma, Kadoma City, Osaka Prefecture We will make an amendment to 116.7 cm'/sec in the detailed description of the invention section of the specification subject to the 6th amendment within Matsushita Electric Industrial Co., Ltd. 841), a41 J on page 6, line 4 of the same. (4) Figure 4 of the drawing is amended as shown in the attached sheet. Procedural amendment March 1989, Showa 1968 Patent Application No. 189110 2 Name of the invention Gas laser device 3 Person making the amendment Relationship with f'l Patent application Person address 1006 Kadoma, Kadoma City, Osaka Prefecture Name Name (582) Matsushita Electric Industrial Co., Ltd. Representative: Toshihiko Yamashita 4 Agent: 571 Address: Matsushita Electric Industrial Co., Ltd., 1006 Kadoma, Kadoma City, Osaka Prefecture

Claims (1)

[Claims] In a gas laser device that mixes multiple single component gases for laser oscillation, a gas container is provided between the mixing start position of the single component gases and the laser tube to mix the gases using the kinetic energy of the gases. A gas laser device provided with a size that is at least 6 seconds worth of inflow gas flow rate.