JPS6081907U - conveyor belt - Google Patents
conveyor beltInfo
- Publication number
- JPS6081907U JPS6081907U JP17249983U JP17249983U JPS6081907U JP S6081907 U JPS6081907 U JP S6081907U JP 17249983 U JP17249983 U JP 17249983U JP 17249983 U JP17249983 U JP 17249983U JP S6081907 U JPS6081907 U JP S6081907U
- Authority
- JP
- Japan
- Prior art keywords
- conveyor belt
- belt
- core material
- conveyor
- conveyed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011162 core material Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 239000000356 contaminant Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Advancing Webs (AREA)
- Structure Of Belt Conveyors (AREA)
- Belt Conveyors (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は搬送ベルトの使用例を示す半導体ウェーハ移し
換え装置の概略側面図、第2図は第1図の搬癲ベルトの
一部拡大牛面図、第3図は本考案の一実施例を示す部分
平面図、第4図は第3図のX−X線に沿う拡大断面図、
第5図は第3図の搬送ベルトの部分断面拡大側面図、第
6図及び第7図は本考案の他の各実施例を示す部分断面
側面図である。
A、 B、 C・・・搬送ベルト、1・・・被搬送物(
半導体ウェーハ)、9,9′・・・ベルト芯材、10.
10・・・パイプ材(石英パイプ)。Figure 1 is a schematic side view of a semiconductor wafer transfer device showing an example of how the conveyor belt is used, Figure 2 is a partially enlarged view of the conveyor belt in Figure 1, and Figure 3 is an embodiment of the present invention. FIG. 4 is an enlarged sectional view taken along line X-X in FIG.
FIG. 5 is an enlarged partial cross-sectional side view of the conveyor belt of FIG. 3, and FIGS. 6 and 7 are partial cross-sectional side views showing other embodiments of the present invention. A, B, C... Conveyor belt, 1... Object to be conveyed (
semiconductor wafer), 9, 9'...belt core material, 10.
10... Pipe material (quartz pipe).
Claims (1)
る搬送ベルトであって、長尺な可撓性のベルト芯材に非
汚染材よりなる複数のチップ状パイプ材をベルト芯材の
変形が可能に且つ被搬送物がベルト芯材に当接しない間
隔で一連に装着したことを特徴とする搬送ベルト。A conveyor belt in an endless belt conveyor mechanism that carries objects to be conveyed, in which a plurality of chip-shaped pipe materials made of a non-contaminant material are attached to a long flexible belt core material so that the belt core material is not deformed. A conveyor belt characterized in that the conveyor belt is attached in series at intervals that are possible and prevent objects to be conveyed from coming into contact with the belt core material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17249983U JPS6081907U (en) | 1983-11-07 | 1983-11-07 | conveyor belt |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17249983U JPS6081907U (en) | 1983-11-07 | 1983-11-07 | conveyor belt |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6081907U true JPS6081907U (en) | 1985-06-06 |
| JPS6330732Y2 JPS6330732Y2 (en) | 1988-08-17 |
Family
ID=30376003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17249983U Granted JPS6081907U (en) | 1983-11-07 | 1983-11-07 | conveyor belt |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6081907U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62281344A (en) * | 1986-05-29 | 1987-12-07 | Sony Corp | Linear conveying means |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5558509U (en) * | 1978-10-16 | 1980-04-21 |
-
1983
- 1983-11-07 JP JP17249983U patent/JPS6081907U/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5558509U (en) * | 1978-10-16 | 1980-04-21 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62281344A (en) * | 1986-05-29 | 1987-12-07 | Sony Corp | Linear conveying means |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6330732Y2 (en) | 1988-08-17 |
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