JPS6081907U - conveyor belt - Google Patents

conveyor belt

Info

Publication number
JPS6081907U
JPS6081907U JP17249983U JP17249983U JPS6081907U JP S6081907 U JPS6081907 U JP S6081907U JP 17249983 U JP17249983 U JP 17249983U JP 17249983 U JP17249983 U JP 17249983U JP S6081907 U JPS6081907 U JP S6081907U
Authority
JP
Japan
Prior art keywords
conveyor belt
belt
core material
conveyor
conveyed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17249983U
Other languages
Japanese (ja)
Other versions
JPS6330732Y2 (en
Inventor
田中 克道
清野 寿也
長町 雅仁
Original Assignee
関西日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 関西日本電気株式会社 filed Critical 関西日本電気株式会社
Priority to JP17249983U priority Critical patent/JPS6081907U/en
Publication of JPS6081907U publication Critical patent/JPS6081907U/en
Application granted granted Critical
Publication of JPS6330732Y2 publication Critical patent/JPS6330732Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Advancing Webs (AREA)
  • Structure Of Belt Conveyors (AREA)
  • Belt Conveyors (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は搬送ベルトの使用例を示す半導体ウェーハ移し
換え装置の概略側面図、第2図は第1図の搬癲ベルトの
一部拡大牛面図、第3図は本考案の一実施例を示す部分
平面図、第4図は第3図のX−X線に沿う拡大断面図、
第5図は第3図の搬送ベルトの部分断面拡大側面図、第
6図及び第7図は本考案の他の各実施例を示す部分断面
側面図である。 A、 B、 C・・・搬送ベルト、1・・・被搬送物(
半導体ウェーハ)、9,9′・・・ベルト芯材、10.
10・・・パイプ材(石英パイプ)。
Figure 1 is a schematic side view of a semiconductor wafer transfer device showing an example of how the conveyor belt is used, Figure 2 is a partially enlarged view of the conveyor belt in Figure 1, and Figure 3 is an embodiment of the present invention. FIG. 4 is an enlarged sectional view taken along line X-X in FIG.
FIG. 5 is an enlarged partial cross-sectional side view of the conveyor belt of FIG. 3, and FIGS. 6 and 7 are partial cross-sectional side views showing other embodiments of the present invention. A, B, C... Conveyor belt, 1... Object to be conveyed (
semiconductor wafer), 9, 9'...belt core material, 10.
10... Pipe material (quartz pipe).

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 被搬送物を載置して搬送する無端ベルト搬送機構におけ
る搬送ベルトであって、長尺な可撓性のベルト芯材に非
汚染材よりなる複数のチップ状パイプ材をベルト芯材の
変形が可能に且つ被搬送物がベルト芯材に当接しない間
隔で一連に装着したことを特徴とする搬送ベルト。
A conveyor belt in an endless belt conveyor mechanism that carries objects to be conveyed, in which a plurality of chip-shaped pipe materials made of a non-contaminant material are attached to a long flexible belt core material so that the belt core material is not deformed. A conveyor belt characterized in that the conveyor belt is attached in series at intervals that are possible and prevent objects to be conveyed from coming into contact with the belt core material.
JP17249983U 1983-11-07 1983-11-07 conveyor belt Granted JPS6081907U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17249983U JPS6081907U (en) 1983-11-07 1983-11-07 conveyor belt

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17249983U JPS6081907U (en) 1983-11-07 1983-11-07 conveyor belt

Publications (2)

Publication Number Publication Date
JPS6081907U true JPS6081907U (en) 1985-06-06
JPS6330732Y2 JPS6330732Y2 (en) 1988-08-17

Family

ID=30376003

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17249983U Granted JPS6081907U (en) 1983-11-07 1983-11-07 conveyor belt

Country Status (1)

Country Link
JP (1) JPS6081907U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62281344A (en) * 1986-05-29 1987-12-07 Sony Corp Linear conveying means

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5558509U (en) * 1978-10-16 1980-04-21

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5558509U (en) * 1978-10-16 1980-04-21

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62281344A (en) * 1986-05-29 1987-12-07 Sony Corp Linear conveying means

Also Published As

Publication number Publication date
JPS6330732Y2 (en) 1988-08-17

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