JPS6092827U - 熱処理炉 - Google Patents

熱処理炉

Info

Publication number
JPS6092827U
JPS6092827U JP18635083U JP18635083U JPS6092827U JP S6092827 U JPS6092827 U JP S6092827U JP 18635083 U JP18635083 U JP 18635083U JP 18635083 U JP18635083 U JP 18635083U JP S6092827 U JPS6092827 U JP S6092827U
Authority
JP
Japan
Prior art keywords
heat treatment
treatment furnace
furnace body
heater
length direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18635083U
Other languages
English (en)
Inventor
修一 大橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP18635083U priority Critical patent/JPS6092827U/ja
Publication of JPS6092827U publication Critical patent/JPS6092827U/ja
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図乃至第３図は従来の熱処理炉を説明するための図
、第４図は本考案の一実施例の熱処理炉の炉体の要部横
断面図、第５図はその模式的斜視図である。 図において、２１は下部炉体、２２は上部炉体、２３は
螺番、２４は止め金具、２５はヒータ、２８は断熱材を
示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 反応管が収容される炉体の長さ方向にヒータが配線され
    、該ヒータを収納した円筒形炉体が炉体の長さ方向に半
    円状に二分割された構造を有する熱処理炉において、前
    記二分割面の外側面を断熱材で覆ったことを特徴とする
    熱処理炉。
JP18635083U 1983-11-30 1983-11-30 熱処理炉 Pending JPS6092827U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18635083U JPS6092827U (ja) 1983-11-30 1983-11-30 熱処理炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18635083U JPS6092827U (ja) 1983-11-30 1983-11-30 熱処理炉

Publications (1)

Publication Number Publication Date
JPS6092827U true JPS6092827U (ja) 1985-06-25

Family

ID=30402529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18635083U Pending JPS6092827U (ja) 1983-11-30 1983-11-30 熱処理炉

Country Status (1)

Country Link
JP (1) JPS6092827U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02137317A (ja) * 1988-11-18 1990-05-25 Nec Corp 抵抗線加熱炉

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52155059A (en) * 1976-08-04 1977-12-23 Tel Thermco Kk Device for high pressure oxidation diffusion for semiconductor
JPS5721744A (en) * 1980-07-15 1982-02-04 Fuji Electric Co Ltd Apparatus for heat treatment at high temperature

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52155059A (en) * 1976-08-04 1977-12-23 Tel Thermco Kk Device for high pressure oxidation diffusion for semiconductor
JPS5721744A (en) * 1980-07-15 1982-02-04 Fuji Electric Co Ltd Apparatus for heat treatment at high temperature

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02137317A (ja) * 1988-11-18 1990-05-25 Nec Corp 抵抗線加熱炉

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