JPS6097227A - Surface pressure distribution gage - Google Patents

Abstract

PURPOSE:To facilitate the measurement of distribution of static pressure and dynamic pressure, by forming electrode films on both surfaces of a macromolecular piezoelectric film, and making at least one of the electrode films to be a plurality of detecting electrode films, which are obtained by bonding current collecting electrodes under the conductive state. CONSTITUTION:On a printed board 6, 80 current collecting electrodes 4 made of, e.g., copper foils, are arranged in an array pattern by a printing method and the like. An aluminum electrode film 2 is formed on one surface of a macromolecular piezoelectric film 1 having the same size by an evaporation method. On the other surface of the piezoelectric film 1, 80 detecting electrode films 3 made of aluminum corresponding to the current collecting electrodes 4 are formed by the evaporation method. The detecting electrode films 3 and the current collecting electrode 4 are bonded through a conductive bonding agent layer 5. With the aluminum electrode film 2 of the macromolecular piezoelectric film 1 as a common grounding electrode, pressure is received. The pressure of each pressure receiving part is detected as an electric signal, which is proportional to the pressure, by each detecting electrode 3.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical field to which the invention pertains] The present invention relates to a pressure gauge that measures pressure, and more particularly to a surface pressure distribution meter that measures the distribution of surface pressure.

[Prior art]

Conventional pressure gauges measure the pressure at a certain point in a device or process and display a representative pressure in the vicinity. This means that even if the pressure inside the distillation equipment 9 reactor is represented by the pressure at one point, there was no problem in the upper right corner of the device operation. It is a nozzle that is measuring static pressure. In this way, pressure is generally measured by measuring static pressure, which is atmospheric pressure.

This static pressure is used to measure the water pressure used to measure the depth of water, the pressure of propane gas cylinders, the pressure of chemical equipment, the vacuum pressure of vacuum tubes, etc.

Measuring dynamic pressure is necessary as a method to understand phenomena caused by kinetic energy of liquids and gases.

A pitot tube that measures flow velocity is a device that measures static pressure and dynamic pressure, and measures the flow velocity from the difference between them, and is a typical example of dynamic pressure measurement.

Conventionally, dynamic pressure has to be measured at a point or an area close to a point, making it impossible to measure dynamic pressure over a wide area. For example, when measuring the spray state from a spray nozzle, it is possible to calculate the amount of sprayed N from the back pressure of the nozzle, but if the nozzle is clogged or uneven, it is not possible to calculate the It is impossible to grasp the spray state.

[Purpose of the invention]

Therefore, in order to directly measure the spray state from a nozzle, r9! The best method is to measure fog conditions. On the other hand, there has been remarkable progress in research and development of polymeric materials in recent years, and by applying piezoelectric resin films, it is possible to
It became possible to measure pressure in mm2).

The present invention has been made with attention to this point, and it is possible to measure dynamic pressure by utilizing the piezoelectric properties of a polymeric piezoelectric film and by arranging a plurality of detection electrode films on the piezoelectric film. The purpose of this invention is to obtain a surface pressure distribution meter that can measure the distribution of surface pressure.

[Structure of the invention]

The surface pressure distribution meter of the present invention measures pressure and pressure distribution over a wide area, and as shown in the first diagram, a polymer-based piezoelectric film 1
Electrode films 2 and 3 are formed on both sides of the electrode film 3, and at least one of the electrode films 3 is used as a plurality of detection electrode films defined at required intervals, and a current collecting electrode 4 is electrically connected to each detection electrode film 3. It will be glued as much as possible.

The polymeric piezoelectric film 1 may be a piezoelectric film formed from polyvinylidene fluoride or cyanovinylidene polymer, etc., and then subjected to polarization treatment, or a thermoplastic resin such as polyacetal, polyamide, polyvinylidene fluoride, etc. with titanic acid. After kneading piezoelectric ceramic powder such as lead and barium titanate and forming it into a film,
A polarized material can be used.

The other electrode film 2 may be one electrode film common to the plurality of electrode films 3 on one side, but
There may be a plurality of electrode films corresponding to the respective electrode films.

Each electrode film and the current collecting electrode are attached by partially adhering them with an insulating adhesive so that they are in partial contact with each other, but once they break, they are adhered with a conductive adhesive. 5 is a conductive adhesive layer.

It is also possible to attach lead wires to each electrode film 3 and extract signals from this, but adhering the lead wires is not easy and takes time, the bonded parts are mechanically weak, and the electrode films 3 In order to avoid drawbacks such as it being impossible to extract signals from parts that are not connected to lead wires when they are cut and divided into multiple parts, current is collected in each electrode film 3 as in the present invention. It is desirable to bond the electrode 4 in a state where it can be electrically conductive.

In this case, when using a conductive adhesive, it goes without saying that it should be adhered to avoid leakage with adjacent electrodes.

[Configuration of Example]

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1(a) shows the configuration of an embodiment of the surface pressure distribution meter of the present invention.

FIG. 1(b) is also a cross-sectional plan view thereof.

A surface pressure distribution meter 7 shown in FIG. 1 uses a piezoelectric film (polymer-based piezoelectric film) 1 made of a piezoelectric polymer or a composite thereof as a pressure-sensitive element.

This element can be made into thin films (less than 100 μm) and larger in area, which was difficult to achieve with conventional ceramic piezoelectric materials or quartz piezoelectric materials, and has the flexibility unique to plastics and excels in moldability. It has the following characteristics, and has a high fluxiple property in element shape (2).

The surface pressure distribution meter of the present invention that takes advantage of these features is
For example, on a printed circuit board 6 with a width of 500++ m and a length of 50 mm, there are 8 current collecting electrodes 4 made of copper foil with a width of 5 tm and a length of 30 cm.
At the same time, an aluminum electrode film 2 is formed on one surface of a polymeric piezoelectric film 1 of the same size by a vapor deposition method.
On the other surface of the piezoelectric film 1, 80 aluminum detection electrode films 3 corresponding to the current collection electrodes 4 are formed by vapor deposition, and each of the detection electrode films 3 and the current collection electrodes 4 are made electrically conductive. The adhesive layer 5 is used for adhesion.

The pressure is received by the aluminum electrode film 2 of the polymeric piezoelectric film 1 of the surface pressure distribution meter 7 as a common ground electrode, and the pressure of each pressure receiving part is received by each detection electrode film 3 of the polymeric piezoelectric film 1. Detected as an electrical signal (pressure signal) proportional to Each of these pressure signals can be taken out from the current collecting electrode 4, and by measuring the magnitude of each pressure signal, the magnitude and distribution of the pressure acting on the common aluminum electrode film 2 can be known. In this example, the pressure distribution is divided into 80 parts, so the pressure distribution for 80 parts (80 channels) can be obtained. The pressure distribution for the desired division can be known.

The amount of electricity output by the surface pressure distribution meter 7 of the present invention in response to pressure is basically the amount of electricity that appears in the thickness direction in response to the compressive force of the piezoelectric film 1. If the structure on the third side is devised, the piezoelectric output in the length direction can be increased, and higher sensitivity can be achieved.

In order to measure the surface pressure distribution using such a surface pressure distribution meter 7 of the present invention, a configuration as shown in FIG. 2 can be adopted, for example.

FIG. 2 is a block diagram showing an example of the configuration of the measurement system. Since the surface pressure distribution meter 7 of the present invention has a high impedance output in the electrically low frequency range, the measurement unit 9
In order to connect to, appropriate consideration is required. In this example, matching amplifiers Zt+Z21...zn for impedance matching are connected to each current collecting electrode 4, and a scanning multiplexer is used to switch and output the output to each of the matching amplifiers Z1 to zn in a time-division manner. MPX'
A sensor unit 8 is constructed by connecting an analog amplifier M to the multiplexer MPX by H-connection and X-connection, and integrating these into the surface pressure distribution meter 7.

The multiplexer MPX inputs the outputs of the matching amplifiers 21 to zn, and sends the input signals to the measurement unit 9 side as appropriate at a scanning speed suitable for displaying the distribution state, for example, in a graphic form using a switching signal from the measurement unit 9 side. The output is switched via analog amplifier AA.

By adopting this multiplexer MPX, even if the number of output divisions of the surface pressure distribution meter 7 increases, it is possible to easily supply a high quality output signal to the measurement unit 9 while being protected from electrical noise. can.

The measurement unit 9 is an analog-to-digital converter A/DC that converts the output of the analog amplifier IAA into a digital signal.
(hereinafter also referred to as converter) and the output of this human/D converter are input and the input signal is smoothed.

A processor CPU such as a microprocessor that performs peak hold and filtering processing and outputs a switching signal to the multiplexer MPX, and this processor C
A memory MMY such as a disk memory that stores pressure values processed by the processor CPU, a display device DSY such as a cathode ray tube that displays a pressure distribution diagram by inputting the pressure values also processed by the processor CPU, and a display device DSY that stores the pressure values processed by the processor CPU. It consists of a printer PRT such as a dot printer that inputs data and prints it on paper.

As the display device DSY, either black and white or color can be used, and the pattern can be displayed in any shape such as a bar, a circle, or a circle.

Furthermore, if there is variation in the zero point of the output of each detection electrode film 3 of the surface pressure distribution meter 7, an error will occur in the measured value, so the variation in the zero point of each output is automatically corrected in advance by the processor CPU using the following method. ing.

That is, while applying a certain uniform pressure to the detection electrode membrane 3 divided into n pieces, the output signal from each detection electrode membrane 3 is inputted to the processor CPU via the multiplexer MPX, etc., and is stored in the memory MMY. By changing the constants in the stored constant table so that the results are uniform, variations in the zero points of the outputs of the respective detection electrode films 3 are automatically corrected.

The interpolation formula that automatically changes the constant is Y = AX2 + BX + C...
・・・・・・ (1) Use or. Generally, equation (1) is used.

In the above equation, A, B, and C are constants, and The signals X1 to Xn obtained from the above are input to the processor CPU. Y is the output signal of the processor CPU when the output signals X1 to X of each detection electrode film 3 are input, and the constants A, B, and C are automatically changed so that these values are uniform.

[Effect of the embodiment]

Next, its effect will be explained. When pressure is received by the common aluminum electrode film 2 of the surface pressure distribution meter 7, the pressure of each pressure receiving part is detected as an electrical signal by each detection electrode film 3 divided into a plurality of parts.

Each pressure signal is amplified by matching amplifiers 21 to zn and input to a multiplexer MPX, and is switched by a switching signal output from the processor CPU and sequentially input to an analog amplifier AA where it is amplified. The pressure signals output from this analog amplifier crystal are sequentially converted into digital signals by a converter and input to the processor CPU, where the pressure values of each pressure receiving section are determined.

These pressure values are input into the memory MMY and stored,
It is also input to the display device DSY to display a pressure distribution diagram, and is also input to the printer PRT to be printed on paper.

If the pressure is static pressure such as atmospheric pressure or water pressure, each pressure value will be the same, and if it is dynamic pressure, such as when measuring the spray state from a nozzle, the pressure of each pressure receiving part will be different, so we measured it. Each pressure value may also be different. In this way, the pressure value and pressure distribution of each pressure receiving part can be measured.

For example, clogging of a plurality of spray nozzles, that is, variations in spray amount can be measured, and the state of pressure distribution, which has been difficult in the past, can be easily and clearly measured.

Abnormal nozzle back pressure, nozzle blockage, nozzle installation position,
In order to be able to detect abnormalities in direction and atomized particle size, it is important to devise ways of attaching the piezoelectric film 1, data processing of piezoelectric signals, display methods, etc.
If the surface pressure distribution meter 7 of the present invention using the polymer composite piezoelectric film 1 is used, the pressure is received by the large-area common electrode 2, and the pressure of each pressure-receiving part is electrically transmitted from the detection electrode film 3, which is divided into multiple parts. Since it can be easily detected as a signal, it is also easy to measure and display the distribution of surface pressure.

〔Effect of the invention〕

As described above, according to the present invention, the polymeric piezoelectric film 1
Electrode films 2.3 are formed on both sides of the electrode film 2.3, at least one of the electrode films 3 is used as a plurality of detection electrode films defined at required intervals, and a current collecting electrode 4 is connected to each detection electrode film 3. Since the surface pressure distribution meter 7 is bonded in a state where it is possible, it is easy to measure not only static pressure but also dynamic pressure and pressure distribution. The electromotive force of the film can be extracted and the reproducibility is excellent. Even if the detection electrode film 3 is cut and divided into multiple parts, the signal can be taken out from the current collecting electrode 4. Adhesion of the current collecting electrode 4 is also easy, and the mechanical strength of the bonded portion can be improved.

[Brief explanation of the drawing]

FIG. 1(a) is a longitudinal sectional front view showing the configuration of an embodiment of the surface pressure distribution meter of the present invention, FIG. 1(b) is a lateral plan view thereof,
FIG. 2 is a block diagram showing an example of a measurement system using the surface pressure distribution meter of the present invention. 1... Polymer-based piezoelectric film, 2...
Aluminum electrode film (earth electrode film), 3...Detection type, polar film, 4...Electrode film for current collection, 5...
Conductive adhesive layer, 6... Printed board, 7...
...Surface pressure distribution meter, 8...Sensor unit, 9
...Measuring unit, Zs-Zn...Matching amplifier, MPX...Multiplexer,
AA: Analog amplifier, VD: Analog-to-digital converter, CPU: Processor, MMY: Memory, DSY: Display device , PRT...Printer. Book 10 (a) Book 2 area

Claims (1)

[Claims] Electrode films are formed on both sides of the polymeric piezoelectric film, and at least one of the electrode films is used as a plurality of detection electrode films defined at required intervals, and a current collecting electrode can be electrically conductive to each detection electrode film. A surface pressure distribution meter that can be glued together in a stable condition.