JPS609941U - Transport platform - Google Patents

Transport platform

Info

Publication number
JPS609941U
JPS609941U JP10210583U JP10210583U JPS609941U JP S609941 U JPS609941 U JP S609941U JP 10210583 U JP10210583 U JP 10210583U JP 10210583 U JP10210583 U JP 10210583U JP S609941 U JPS609941 U JP S609941U
Authority
JP
Japan
Prior art keywords
transport platform
abstract
coated
heating element
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10210583U
Other languages
Japanese (ja)
Other versions
JPS6328192Y2 (en
Inventor
杉本　善幸
岡崎　剛雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP10210583U priority Critical patent/JPS609941U/en
Publication of JPS609941U publication Critical patent/JPS609941U/en
Application granted granted Critical
Publication of JPS6328192Y2 publication Critical patent/JPS6328192Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Furnace Charging Or Discharging (AREA)
  • Powder Metallurgy (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来例の熱処理装置内部構造の断面図、第２図
は、従来例の搬送台の断面図、第３図ａ。 ｂ、　　ｃ、　　ｄは本考案による搬送台の断面を示す
断面図である。 １・・・・・・（熱処理する）製品、２・・・・・・搬
送台、３・・・・・・発熱体、４・・・・・・熱遮蔽体
、５・・・・・・カーボン円板、６・・・・・・タング
ステン板、７…・・・タンタル板、Ａ・・・・・・搬送
台と対向する部分の発熱体及び熱遮蔽体の損傷部。FIG. 1 is a sectional view of the internal structure of a conventional heat treatment apparatus, FIG. 2 is a sectional view of a conventional transfer table, and FIG. b, c, and d are cross-sectional views showing the cross section of the conveyance table according to the present invention. 1...Product (to be heat treated), 2...Transfer platform, 3...Heating element, 4...Heat shield, 5... - Carbon disk, 6...Tungsten plate, 7...Tantalum plate, A...Damaged portion of the heating element and heat shield in the portion facing the conveyance table.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 高温、高真空中で熱処理する製品の搬送台の基材をカー
ボン材とし、少なくとも発熱体と対向する面を、タング
ステンで被覆し、さらにその上をタンタルで被覆したこ
とを特徴とする搬送台。1. A carrier for products to be heat-treated at high temperatures and in a high vacuum, the base material of which is made of carbon material, at least the surface facing the heating element is coated with tungsten, and the top thereof is further coated with tantalum.
JP10210583U 1983-07-01 1983-07-01 Transport platform Granted JPS609941U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10210583U JPS609941U (en) 1983-07-01 1983-07-01 Transport platform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10210583U JPS609941U (en) 1983-07-01 1983-07-01 Transport platform

Publications (2)

Publication Number Publication Date
JPS609941U true JPS609941U (en) 1985-01-23
JPS6328192Y2 JPS6328192Y2 (en) 1988-07-29

Family

ID=30240829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10210583U Granted JPS609941U (en) 1983-07-01 1983-07-01 Transport platform

Country Status (1)

Country Link
JP (1) JPS609941U (en)

Also Published As

Publication number Publication date
JPS6328192Y2 (en) 1988-07-29

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