JPS61101480A - Sliding member of high density silicon carbide sintered bodyand method of processing sliding side surface groove - Google Patents
Sliding member of high density silicon carbide sintered bodyand method of processing sliding side surface grooveInfo
- Publication number
- JPS61101480A JPS61101480A JP59222574A JP22257484A JPS61101480A JP S61101480 A JPS61101480 A JP S61101480A JP 59222574 A JP59222574 A JP 59222574A JP 22257484 A JP22257484 A JP 22257484A JP S61101480 A JPS61101480 A JP S61101480A
- Authority
- JP
- Japan
- Prior art keywords
- sliding member
- sintered body
- silicon carbide
- decomposition
- carbide sintered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 32
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 32
- 238000000034 method Methods 0.000 title description 15
- 238000012545 processing Methods 0.000 title description 6
- 238000000354 decomposition reaction Methods 0.000 claims description 42
- 238000000576 coating method Methods 0.000 claims description 16
- 239000011248 coating agent Substances 0.000 claims description 15
- 239000003112 inhibitor Substances 0.000 claims description 15
- 238000002844 melting Methods 0.000 claims description 15
- 230000008018 melting Effects 0.000 claims description 15
- 230000003647 oxidation Effects 0.000 claims description 5
- 238000007254 oxidation reaction Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 230000001050 lubricating effect Effects 0.000 claims description 2
- 238000003672 processing method Methods 0.000 claims description 2
- 239000000314 lubricant Substances 0.000 claims 1
- 238000005461 lubrication Methods 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 8
- 238000000859 sublimation Methods 0.000 description 7
- 230000008022 sublimation Effects 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 238000005245 sintering Methods 0.000 description 5
- 238000003754 machining Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910020489 SiO3 Inorganic materials 0.000 description 1
- 229910033181 TiB2 Inorganic materials 0.000 description 1
- 229910007948 ZrB2 Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- VWZIXVXBCBBRGP-UHFFFAOYSA-N boron;zirconium Chemical compound B#[Zr]#B VWZIXVXBCBBRGP-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000002803 maceration Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Sliding-Contact Bearings (AREA)
- Mechanical Sealing (AREA)
- Ceramic Products (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】 〔産業上の利用分野〕 溝加工方法に関するものである。[Detailed description of the invention] [Industrial application field] The present invention relates to a groove processing method.
炭化珪素の高密度焼結体（以下賓Ｃ焼結体と略す）は、
よく知られているように、耐熱性、＃塵耗性および耐腐
食性に優れた特長を有し、例えばカスタービン材料など
のために非常に期待されているセラミック材料であり、
なかでも醋も早く実用化されたのは、メカニカルシール
の摺動部材としてＣあって、現在ではその優れた特性の
故に最高の性能を発揮する摺動部材として位置づけられ
ているところである。The high-density sintered body of silicon carbide (hereinafter abbreviated as ``Hin-C sintered body'') is
As is well known, it is a ceramic material that has excellent heat resistance, dust resistance, and corrosion resistance, and is highly expected for use in cast turbine materials, for example.
Of these, C was the first to be put into practical use as a sliding member for mechanical seals, and today it is positioned as the sliding member that exhibits the best performance due to its excellent properties.
また一方、技術の発達に併せて、この種のメカニカルシ
ールとしての使用環境は、日毎に厳格さを増してきてお
り、これに伴なってより一層高度なソール性能が要求さ
れ、シール構造についても一層複雑化を増す傾向にある
。そしてこのような折から、摺動端面での潤滑性の向上
、ならびに冷却性の促進などを意図して、同摺動端面に
溝加工を施したところの、いわゆるハイドロダイナミッ
クシールの構成が、最先端のシール設計技術として注目
されており、このように現時点での最高級の摺動部材で
あるＳＩＣ焼結体を、ハイドロダイナミックシールに使
用することは、とりも直さず最高級のメカニカルシール
を提供することにほかならないものである。On the other hand, along with the development of technology, the usage environment for this type of mechanical seal is becoming more and more severe day by day, and as a result, even more advanced sole performance is required, and the seal structure is There is a tendency for things to become even more complex. At this time, the structure of the so-called hydrodynamic seal, in which grooves are machined on the sliding end face with the intention of improving lubricity on the sliding end face and promoting cooling performance, has become the most effective. It is attracting attention as a cutting-edge seal design technology, and the use of SIC sintered bodies, which are currently the highest-grade sliding members, in hydrodynamic seals is an extremely effective way to create the highest-grade mechanical seals. It is nothing but providing.
しかしなから、一方、この種′の一般的に使用されてＳ
ｉＣ焼結体は、極めて高硬度で耐玲耗性に優れた材料で
あるが故に、その機械加工が容易ではなく、また高硬度
な性状から反面、＃ｉ性材料でもあるために、これらの
性状を無視した強引な機械加工によっては、加工傷その
他の欠陥を生じて。However, on the other hand, this kind of commonly used S
iC sintered body is a material with extremely high hardness and excellent abrasion resistance, so machining is not easy. Forcible machining that ignores properties can result in processing scratches and other defects.
破壊しかねない惧れがあり、さらには＃腐食性であるこ
とから、化学薬品処理によるエツチング加工なども困難
、もしくは不可能に近いという問題点を有している。There is a risk of destruction, and furthermore, because it is corrosive, it is difficult or almost impossible to perform etching processes using chemicals.
この発明は従来のこのような問題点に鑑み、この摺動部
材の材料としてのＳＩＣ焼結体の目己昇革分解を利用し
て、摺動端面に凹凸形状などの溝加工を、精度良くしか
も容易に施すようにしたものである。In view of these conventional problems, this invention utilizes the self-promoting decomposition of the SIC sintered body as the material of the sliding member to form grooves such as uneven shapes on the sliding end surface with high precision. Moreover, it is designed to be easily applied.
すなわち、この発明は、高密度炭化珪素焼結体で構成さ
れた摺動部材の摺動端面所要部分に、その所要部分を除
く摺動部材の全表面を高高度珪素焼結体の分解点より高
い融点をもつ分解防止剤でコーティング被覆し、このコ
ーティング被覆された摺動部材を高密度炭化珪素焼結体
の分解点より高い温１化で且つ分解防【ヒ剤の融点より
低い温度で熱処理して、前記コーティング被覆されてい
ない所要部分を所定深さに亘り昇華分解させることによ
り得られる潤滑用の溝を、設けたことを特徴とする高密
度炭化珪素焼結体製摺動部材と、それに高密度炭化珪素
焼結体で構成された摺動部材を用い、その摺動部材の摺
動端面の被加工溝形成部分を除く全表面に、高密度炭化
珪素焼結体の分解点より高い融点をもつ分解防止剤をコ
ーティング被覆し、次いでコーティング被覆された摺動
部材を、高密度炭化珪素焼結体の分解点より高い温度で
且つ分解防止剤の融点より低い温度で熱処理して、前記
コーティング被覆されていない被加工溝形部分を所定深
さに亘り昇華分解させて溝加工をなし、その後、酸化ま
たは薬品処理若しくは機械的処理によって、前記コーテ
ィング被覆を除去することを特徴とする高密度炭化珪素
焼結体製摺動部材の摺動端面溝加工方法である。That is, the present invention provides a method in which the entire surface of the sliding member other than the required portion is located at a required portion of the sliding end face of a sliding member made of a high-density silicon carbide sintered body from the decomposition point of the high-density silicon carbide sintered body. The sliding member coated with a decomposition inhibitor having a high melting point is heat-treated at a temperature higher than the decomposition point of the high-density silicon carbide sintered body and lower than the melting point of the decomposition preventive agent. A sliding member made of a high-density silicon carbide sintered body, characterized in that a lubrication groove is provided by subliming and decomposing the required portion not covered with the coating to a predetermined depth; For this purpose, a sliding member made of a high-density silicon carbide sintered body is used, and the entire surface of the sliding end face of the sliding member except for the groove forming part is covered with a temperature higher than the decomposition point of the high-density silicon carbide sintered body. A decomposition inhibitor having a melting point is coated, and then the coated sliding member is heat-treated at a temperature higher than the decomposition point of the high-density silicon carbide sintered body and lower than the melting point of the decomposition inhibitor, and the above-mentioned A high-density method characterized in that the groove-shaped portion to be processed that is not coated is sublimated and decomposed to a predetermined depth to form the groove, and then the coating is removed by oxidation, chemical treatment, or mechanical treatment. This is a method for machining grooves on a sliding end face of a sliding member made of sintered silicon carbide.
以下、この発明に係る摺動端面溝を有する高密度ＳｉＣ
焼結体製摺動部材、および同摺動部材の摺切端面溝加工
方法の一実施例につき、第１図（ａ）ないしくｄ）を参
照して詳細に説明する。Hereinafter, high-density SiC with sliding end grooves according to the present invention will be described.
An embodiment of a sintered body sliding member and a method of machining grooves on the sliding end face of the sliding member will be described in detail with reference to FIGS. 1(a) to 1(d).
一般的に高密度ＳｉＣ焼結体は、例えば、高純度に精製
された炭化珪素の微粉末原料に、焼結促進材としての所
定量のホウ素系化合物または／８よひアルミ系化合物と
、焼結助材としての所定量の炭素とを添加混合し、かつ
成形して２０００℃以上の高温で不活性雰囲気下に焼成
することによって構成される。Generally, high-density SiC sintered bodies are produced by adding a predetermined amount of a boron-based compound or /8 aluminum-based compound as a sintering accelerator to a finely powdered raw material of highly purified silicon carbide. It is constructed by adding and mixing a predetermined amount of carbon as a binder, molding, and firing in an inert atmosphere at a high temperature of 2000° C. or higher.
そしてこのように構成される高密度ＳｉＣ焼結体を、メ
カニカルシールの摺動部材とする場合は、その摺動端面
をラップ仕上げして使用するようにしている。一方、こ
の種のメカニカルシールの摺動部材においては、高負荷
における使用条件下で所定の潤滑シール特性、すなわち
重圧、高速下でのＰｖ値、また高温下でのＰｖＴ値など
を向上させるのには、単なるシール摺動端面間での境界
潤滑のみでは不充分であって、このために多少のンール
漏洩を許容してＣも、摺動端面に潤滑用の溝形成をなす
ようにした。いわゆるハイドロダイナミックシール構造
を採用しているが、さきにも述べたように、この摺動部
材としての、′、：ｉ密庶訓Ｃ焼結体は、その焼結後の
二次加工が極めて困難であり、前記のハイドロタイナミ
ックシール構造のための摺動端面への潤滑用の溝形成に
ついても例外ではない。When the high-density SiC sintered body constructed in this manner is used as a sliding member of a mechanical seal, the sliding end surface thereof is used with a lapping finish. On the other hand, in the sliding member of this type of mechanical seal, it is necessary to improve the specified lubrication seal characteristics under high load usage conditions, such as Pv value under heavy pressure and high speed, and PvT value under high temperature. In C, mere boundary lubrication between the sliding end surfaces of the seal is insufficient, and for this reason, a groove for lubrication is formed on the sliding end surface of C to allow for some leakage. The so-called hydrodynamic seal structure is adopted, but as mentioned earlier, the secondary processing after sintering of the sintered body used as a sliding member is extremely difficult. This is difficult, and the formation of lubrication grooves on the sliding end surface of the hydrodynamic seal structure is no exception.
そこで発明者はこの高密度ＳｉＣ焼結体による摺動部材
をハイドロタイナミックシール構造とするための溝加工
形成について鋭意検討した結果１次のような手段を見出
した。Therefore, the inventor conducted extensive research on forming grooves to create a hydrodynamic seal structure in a sliding member made of this high-density SiC sintered body, and as a result, the following method was discovered.
すなわち、一旦焼成後の高密度ＳｉＣ焼結体は、通ｇ
、 ２（１００℃以上で自己昇華分解を生じ、かつ真空
減圧下では１９００℃位から分解し始めるから、こ↑
の昇華分解作用（Ｓ ｉＣ−＋ Ｓ Ｉ＋ Ｃ）を利用
して、摺動端面に所望の凹凸形状などの溝加工を施すよ
うにしたものであり、またこのように昇華分解反応を効
果的に利用するために、摺動端面の被加工溝形成部分を
除く全表面を、高密度ＳＩＣ焼結体の分解点より高い融
点をもつ分解防止剤でコーティング被覆したのち、高に
度ＳｉＣ焼結体の分解点より高い温瓜で且つ分解防止剤
の融点より低い温度で熱処理して、コーティング被覆さ
れていない被加工溝形成部分を、所定の深さ範囲に亘り
昇華分解して溝加工をなす新規な技術手段である。In other words, once fired, the high-density SiC sintered body is
, 2 (Self-sublimation decomposition occurs at temperatures above 100°C, and decomposition starts at about 1900°C under reduced pressure in vacuum, so by utilizing this sublimation decomposition action (S iC-+ S I+ C), the sliding end surface In order to effectively utilize the sublimation and decomposition reaction in this way, the entire surface of the sliding end surface except for the groove-forming part is made with a high height. After being coated with a decomposition inhibitor that has a melting point higher than the decomposition point of the density SIC sintered body, it is heat-treated at a temperature that is higher than the decomposition point of the SiC sintered body and lower than the melting point of the decomposition inhibitor. This is a novel technical means for forming grooves by sublimating and decomposing the groove-forming portion to be machined that is not coated over a predetermined depth range.
次にこの発明の堕ましい一実施例につき、第１図（ａ）
ないしくｄ）を参すして詳細に説明する。Next, regarding one corrupt embodiment of this invention, Fig. 1(a)
This will be explained in detail with reference to d).
この実施例方法では、所定の摺動部材形状に成形し、所
定の焼結温度で焼成された高密度ＳｉＣ焼結体を用いる
。そしてまず、第１図（ａ）に示されているように、こ
の所定形状に成形された高密度Ｓｉσ焼結体からなる摺
動部材１は、全表面、こ−では少なくとも摺動端面２を
含む所定表面をラップ仕上げする。This embodiment method uses a high-density SiC sintered body formed into a predetermined sliding member shape and fired at a predetermined sintering temperature. First, as shown in FIG. 1(a), the entire surface of the sliding member 1 made of a high-density Siσ sintered body formed into a predetermined shape, in this case at least the sliding end surface 2, is Lap the predetermined surfaces including.
ついで同図（ｂ）に示されているように、前記摺動端面
２の被加工溝形成部分２ａを除いた全表面に対し、高融
点を有していて、かつ焼結温度、ニーでは例えば２００
０℃以下では蒸気圧が低くて昇華分解作用を生じない物
質による分解防止剤３をコーティング被Ｙｇさせる。こ
Ｘで分解防止剤３としては、カーホンと力’ Ｂ ４
（： 、Ｔ ＩＣなどのような炭化物、またはＴｉＢ２
．ＺｒＢ２などのようなホウ化物、さらにはタングステ
ン、モリブデンなどを用いることができ、またコーティ
ング方法としては、スプレーコーティング法、浸漬法、
印刷付着法とか、あるいはＣＶＤ法、ｐｖｏ法などであ
ってよい。Next, as shown in FIG. 2(b), the entire surface of the sliding end surface 2 excluding the groove forming portion 2a to be machined has a high melting point, and the sintering temperature, for example, 200
Yg is coated with a decomposition inhibitor 3 made of a substance that has a low vapor pressure and does not cause sublimation and decomposition at temperatures below 0°C. In this case, as the decomposition inhibitor 3, carphone and power' B 4
(: , carbide like TIC etc., or TiB2
．． Borides such as ZrB2, tungsten, molybdenum, etc. can be used, and coating methods include spray coating, dipping,
It may be a printing adhesion method, a CVD method, a PVO method, or the like.
そして次に、前記コーティング被覆処理した摺動部材１
を、真空炉中にわいて、減圧下１１１９００℃以上の温
度で熱処理する。すなわち、この熱処理によって、同図
（ｃ）に示すように、摺動部材１のコーティング被覆処
理されていない被加工溝形成↑
部分２ａに、昇華分解反応（ＳｉＣ−→Ｓ＋ ＋Ｃ）
を生じて、間部分２ａに凹状溝喀が形成される。こ−で
前記が処理温度としては、１９００℃以上で望ましくは
同宿動部材ｌとしての市雀度ＳｉＣ焼結体の焼結温度を
越えないように制御するのがよいもので、これは焼結温
度を越える場合、同焼結体の内部組織に変化をきたす惧
れを避けるためである。また前記凹状溝４の形成深さは
、熱処理温度と熱処理時間とを制御することによって自
由に調整可能である。Next, the sliding member 1 subjected to the coating treatment is
is placed in a vacuum furnace and heat-treated at a temperature of 111,900° C. or higher under reduced pressure. That is, by this heat treatment, as shown in the same figure (c), a sublimation decomposition reaction (SiC-→S+ +C) occurs in the groove formation ↑ portion 2a of the sliding member 1 that has not been coated.
As a result, a concave groove is formed in the intermediate portion 2a. Therefore, the processing temperature mentioned above is preferably controlled at 1900° C. or higher, preferably so as not to exceed the sintering temperature of the high-quality SiC sintered body used as the passive member. This is to avoid the possibility that the internal structure of the sintered body may change if the temperature exceeds that temperature. Further, the depth of the concave groove 4 can be freely adjusted by controlling the heat treatment temperature and heat treatment time.
その後、同図（ｄ）に示すように、前記コーティング被
覆した分解防止剤３を、醇化処理とか、薬品によるエツ
チング処理、その他の機械的処理などにより除去して、
目的とするところの、摺動端面２に潤滑用の溝４をＦｆ
ｇ成した摺動部材１を得るのである。Thereafter, as shown in FIG. 3(d), the coated anti-decomposition agent 3 is removed by maceration treatment, chemical etching treatment, or other mechanical treatment.
A groove 4 for lubrication is formed on the sliding end surface 2 for the purpose Ff.
Thus, a sliding member 1 having a shape of 1.g is obtained.
こ＼でコーティング被覆をなす分解防止剤３として、カ
ーボンを用いるのが効果的であり、このカーボンを用い
るときは、熱処理時のマスキング作用に有効であるほか
に、熱処理後の除去を酸化処理に゛より容易に実行でき
、また必要に応じて、摺動端面２のみの昇華分解による
凹凸溝４の加工であれば、単なるラップ処理によっても
機械的除去処理が容易である。It is effective to use carbon as the decomposition inhibitor 3 that forms the coating. When carbon is used, it is effective for masking during heat treatment, and also for removal after heat treatment by oxidation treatment. If it is easier to carry out, and if necessary, the uneven grooves 4 are formed by sublimation and decomposition of only the sliding end surface 2, the mechanical removal process can be easily carried out by a simple lapping process.
またこの摺動部材ｌをハイドロダイナミックシールに適
用したとき、シール対象流体が紬糸の場合には、溝４部
に潤滑油をより一層安定に保持させるために、界層分解
によって生ずる溝４部内のカーホン層はこれが親油性で
あることから、そのま〜で残す方がよく、またシール対
象流体が水系の場合は、逆に昇華分解によって生ずる溝
４部内のカーボン層が疎水性として作用し、水潤滑が妨
げられるから、分解処理後、この溝４部内のカーホン層
を酸化処理などによって除去すると共に。In addition, when this sliding member l is applied to a hydrodynamic seal, and the fluid to be sealed is pongee thread, in order to more stably retain the lubricating oil in the groove 4, the groove 4 generated by interfacial decomposition is Since the carphone layer is lipophilic, it is better to leave it as is.If the fluid to be sealed is water-based, on the other hand, the carbon layer in the groove 4, which is produced by sublimation and decomposition, acts as a hydrophobic property, Since lubrication is hindered, the carbon layer within the groove 4 is removed by oxidation treatment or the like after the decomposition treatment.
開溝４ｆｉＢ内には親水性のＳｉＯ３などの酸化膜を形
成させるようにして、水潤滑の効果を向上させるのがよ
い。It is preferable to form a hydrophilic oxide film such as SiO3 in the open groove 4fiB to improve the water lubrication effect.
以上詳述したようにこの発明によれば、高密度ＳｉＧ焼
結体による摺動部材の摺動端面所要部分に、その所要部
分を除く摺動部材の全表面を高密度ＳｉＧ焼結体の分解
点より高い融点をもつ分解防止剤でコーティング被覆し
、このコーティング被覆された摺動部材を高密度ＳｉＣ
焼結体の分解点より高い温度で且つ分解防止剤の融点よ
り低い温度で熱処理して、前記コーティング被覆されて
いない所要部分を所定深さに亘り昇華分解させることに
より得られる潤滑用の溝を、設けたから、高密度ＳＩＣ
焼結体による摺動部材としては、耐熱性、耐）９！耗性
および耐腐食性に優れていることは勿論のこと、摺動端
面での潤滑性ならびに冷却性なども大幅に向上し得、こ
のため高負荷条件下でも好適に使用できる高密度炭化珪
素焼結体製摺動部材を提供できるものである。また、こ
の発明の潜動端面の溝加工方法によれば、高密度ＳｒＣ
焼結体による摺動部材において、摺動端面の被加工溝形
成部分を除く全表面を、高密度ＳＩＣ焼結体の分解点よ
り高い融点をもつ分解防止剤でコーティング被覆し、次
いでコーティング被覆された摺動部材を。As described in detail above, according to the present invention, the entire surface of the sliding member other than the required portion is disassembled from the high-density SiG sintered body at a required portion of the sliding end face of the sliding member made of the high-density SiG sintered body. The sliding member coated with a coating is coated with a decomposition inhibitor having a melting point higher than that of high-density SiC.
Lubricating grooves obtained by heat treatment at a temperature higher than the decomposition point of the sintered body and lower than the melting point of the decomposition inhibitor to sublimate and decompose the required portions not covered with the coating over a predetermined depth. , high-density SIC
As a sliding member made of a sintered body, heat resistance, durability) 9! High-density silicon carbide sintered material not only has excellent wear and corrosion resistance, but also has greatly improved lubricity and cooling performance on the sliding end surface, making it suitable for use even under high load conditions. A solid sliding member can be provided. Further, according to the method of grooving the latent end face of the present invention, high-density SrC
In a sliding member made of a sintered body, the entire surface of the sliding end surface excluding the groove forming portion to be machined is coated with a decomposition inhibitor having a melting point higher than the decomposition point of the high-density SIC sintered body, and then the coating is coated. sliding members.
高密度ＳｉＣ焼結体の分解点より高い温度で且つ分解防
止剤の融点より低い温度で熱処理して、＠記コーティン
グ被覆されていない被加工溝形成部分を所定深さに亘り
昇華分解させて溝加工をなし、その後、酸化または薬品
処理若しくは機械的処理によって、前記コーティング被
覆を除去するようにしたから、従来、極めて困難であっ
た高密度ＳＩＣ焼結体による摺動部材への潤滑用の溝加
工を頗る容易に行うことができ、しかも熱処理時の温度
および時間を制御することで、その加工溝深さなどを精
とにｙＪ整することができるなどの特徴を有するもので
ある。Heat treatment is performed at a temperature higher than the decomposition point of the high-density SiC sintered body and lower than the melting point of the decomposition inhibitor to sublime and decompose the groove-forming portion to be machined over a predetermined depth, which is not coated with the coating described in @. Since the coating is removed by processing and then oxidation, chemical treatment, or mechanical treatment, it has been extremely difficult to create grooves for lubrication on sliding members using high-density SIC sintered bodies. It is characterized by being extremely easy to process, and by controlling the temperature and time during heat treatment, the depth of the processed groove can be precisely adjusted to yJ.
第１図Ｃ＆）ないしくｄ）はこの発明に係る摺動端面溝
を有する高密度ＳｉＣ焼結体製摺動部材の摺動端面溝加
工方法の一実施例を工程順に示すそれぞれ要部の拡大断
面図である。
１・・・・高密度炭化珪素焼結体製摺動部材、２・・・
・同１ｆ！ｌ動部材の摺動端面、 ２ａ・・・・同摺動
端面の被加工溝形成部分、３・・・・コーティング被覆
させた分解防１ヒ剤、４・・・・摺動端面に形成された
溝。
特許出願人 日木ビラーエ業株式会社代 理 人
弁理士 鈴江 孝−ｍ−Ｊ［は
第１図Figures 1C&) to d) are enlargements of important parts of an embodiment of the method for processing sliding end grooves of a high-density SiC sintered sliding member having sliding end grooves according to the present invention in the order of steps. FIG. 1... Sliding member made of high-density silicon carbide sintered body, 2...
・Same 1st floor! 1. Sliding end surface of the moving member, 2a... Processed groove forming portion of the sliding end surface, 3... Decomposition prevention agent coated with coating, 4... Formed on the sliding end surface. groove. Patent Applicant: Representative of Hiki Virae Gyo Co., Ltd.
Patent attorney Takashi Suzue-m-J [Figure 1
Claims (2)
動端面所要部分に、その所要部分を除く摺動部材の全表
面を高密度炭化珪素焼結体の分解点より高い融点をもつ
分解防止剤でコーティング被覆し、このコーティング被
覆された摺動部材を高密度炭化珪素焼結体の分解点より
高い温度で且つ分解防止剤の融点より低い温度で熱処理
して、前記コーティング被覆されていない所要部分を所
定深さに亘り昇華分解させることにより得られる潤滑用
の溝を、設けたことを特徴とする高密度炭化珪素焼結体
製摺動部材。(1) At a required portion of the sliding end face of a sliding member made of a high-density silicon carbide sintered body, the entire surface of the sliding member except for the required portion has a melting point higher than the decomposition point of the high-density silicon carbide sintered body. The sliding member coated with the coating is heat-treated at a temperature higher than the decomposition point of the high-density silicon carbide sintered body and lower than the melting point of the decomposition inhibitor to remove the coating. A sliding member made of a high-density silicon carbide sintered body, characterized in that it is provided with a lubricating groove obtained by sublimating and decomposing the necessary portions that are not covered by the lubricant over a predetermined depth.
い、その摺動部材の摺動端面の被加工溝形成部分を除く
全表面に、高密度炭化珪素焼結体の分解点より高い融点
をもつ分解防止剤でコーティング被覆し、次いでコーテ
ィング被覆された摺動部材を、高密度炭化珪素焼結体の
分解点より高い温度で且つ分解防止剤の融点より低い温
度で熱処理して、前記コーティング被覆されていない被
加工溝形部分を所定深さに亘り昇華分解させて溝加工を
なし、その後、酸化または薬品処理若しくは機械的処理
によって、前記コーティング被覆を除去することを特徴
とする高密度炭化珪素焼結体製摺動部材の摺動端面溝加
工方法。(2) Using a sliding member made of a high-density silicon carbide sintered body, the decomposition point of the high-density silicon carbide sintered body is The coating is coated with a decomposition inhibitor having a higher melting point, and then the coated sliding member is heat-treated at a temperature higher than the decomposition point of the high-density silicon carbide sintered body and lower than the melting point of the decomposition inhibitor. , characterized in that the groove-shaped portion to be machined which is not covered with the coating is sublimed and decomposed to a predetermined depth to form the groove, and then the coating is removed by oxidation, chemical treatment, or mechanical treatment. A sliding end face groove processing method for a sliding member made of high-density silicon carbide sintered body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59222574A JPS61101480A (en) | 1984-10-22 | 1984-10-22 | Sliding member of high density silicon carbide sintered bodyand method of processing sliding side surface groove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59222574A JPS61101480A (en) | 1984-10-22 | 1984-10-22 | Sliding member of high density silicon carbide sintered bodyand method of processing sliding side surface groove |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61101480A true JPS61101480A (en) | 1986-05-20 |
| JPH0218317B2 JPH0218317B2 (en) | 1990-04-25 |
Family
ID=16784598
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59222574A Granted JPS61101480A (en) | 1984-10-22 | 1984-10-22 | Sliding member of high density silicon carbide sintered bodyand method of processing sliding side surface groove |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61101480A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0366919A (en) * | 1989-08-04 | 1991-03-22 | Eagle Ind Co Ltd | Sliding bearing and manufacture thereof |
| US6973010B1 (en) | 1999-08-26 | 2005-12-06 | Seiko Epson Corporation | Timepiece device |
| JP2006021986A (en) * | 2004-06-08 | 2006-01-26 | Fujitsu Ltd | Method for processing silicon carbide material |
-
1984
- 1984-10-22 JP JP59222574A patent/JPS61101480A/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0366919A (en) * | 1989-08-04 | 1991-03-22 | Eagle Ind Co Ltd | Sliding bearing and manufacture thereof |
| US6973010B1 (en) | 1999-08-26 | 2005-12-06 | Seiko Epson Corporation | Timepiece device |
| JP2006021986A (en) * | 2004-06-08 | 2006-01-26 | Fujitsu Ltd | Method for processing silicon carbide material |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0218317B2 (en) | 1990-04-25 |
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