JPS61102871U - - Google Patents
Info
- Publication number
- JPS61102871U JPS61102871U JP18608484U JP18608484U JPS61102871U JP S61102871 U JPS61102871 U JP S61102871U JP 18608484 U JP18608484 U JP 18608484U JP 18608484 U JP18608484 U JP 18608484U JP S61102871 U JPS61102871 U JP S61102871U
- Authority
- JP
- Japan
- Prior art keywords
- cantilever beam
- center
- weights
- acceleration sensor
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005484 gravity Effects 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 2
- 230000001133 acceleration Effects 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18608484U JPS61102871U (mo) | 1984-12-10 | 1984-12-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18608484U JPS61102871U (mo) | 1984-12-10 | 1984-12-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61102871U true JPS61102871U (mo) | 1986-06-30 |
Family
ID=30743546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18608484U Pending JPS61102871U (mo) | 1984-12-10 | 1984-12-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61102871U (mo) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5236395A (en) * | 1975-09-17 | 1977-03-19 | Sintokogio Ltd | Moving type grinding and cleaning apparatus |
-
1984
- 1984-12-10 JP JP18608484U patent/JPS61102871U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5236395A (en) * | 1975-09-17 | 1977-03-19 | Sintokogio Ltd | Moving type grinding and cleaning apparatus |
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