JPS61105806U - - Google Patents
Info
- Publication number
- JPS61105806U JPS61105806U JP19122384U JP19122384U JPS61105806U JP S61105806 U JPS61105806 U JP S61105806U JP 19122384 U JP19122384 U JP 19122384U JP 19122384 U JP19122384 U JP 19122384U JP S61105806 U JPS61105806 U JP S61105806U
- Authority
- JP
- Japan
- Prior art keywords
- light
- intensity detector
- light source
- source section
- light intensity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
- 230000003321 amplification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Spectrometry And Color Measurement (AREA)
Description
第１図は本考案の一実施例を示すブロツク図、
第２図は上記実施例に於ける各部の信号波形図、
第３図は既存の装置構成を示すブロツク図、第４
図乃至第６図はそれぞれ上記第３図の動作を説明
するための各部の信号波形図である。
１…２波長光源、２…スキヤニング反射鏡、３
，１１，１２…半透明鏡、４…ワーク、５…光強
度検出器Ａ、６…増幅回路、７…２乗回路、８…
フイルタ回路、９…演算処理回路、１０…単一波
長光源、１８…光強度検出器Ｂ、１９…除算回路
。
FIG. 1 is a block diagram showing an embodiment of the present invention.
FIG. 2 is a signal waveform diagram of each part in the above embodiment,
Figure 3 is a block diagram showing the existing equipment configuration, Figure 4
6 to 6 are signal waveform diagrams of various parts for explaining the operation shown in FIG. 3, respectively. 1...2-wavelength light source, 2...Scanning reflector, 3
, 11, 12...Semi-transparent mirror, 4...Workpiece, 5...Light intensity detector A, 6...Amplification circuit, 7...Squaring circuit, 8...
Filter circuit, 9... Arithmetic processing circuit, 10... Single wavelength light source, 18... Light intensity detector B, 19... Division circuit.
Claims (1)
源部、及び該光源部からの発振レーザ光を所定の
光路を経て入射する第１の光強度検出器と独立し
て、レベル補正用のレーザ光源部、及び該光源部
からの発振レーザ光を所定の光路を経て入射する
第２の光強度検出器を設け、上記第２の光強度検
出器の出力により上記第１の光強度検出器の出力
レベルを補正することを特徴とした２波長干渉レ
ーザ測長装置。 In a two-wavelength interference laser length measuring device, a laser for level correction is installed independently of a two-wavelength light source section and a first light intensity detector into which the oscillated laser light from the light source section enters through a predetermined optical path. A light source section and a second light intensity detector into which the oscillated laser light from the light source section enters through a predetermined optical path are provided, and the output of the second light intensity detector is used to detect the output of the first light intensity detector. A two-wavelength interferometric laser length measuring device characterized by correcting the output level.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19122384U JPH0346322Y2 (en) | 1984-12-17 | 1984-12-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19122384U JPH0346322Y2 (en) | 1984-12-17 | 1984-12-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61105806U true JPS61105806U (en) | 1986-07-05 |
| JPH0346322Y2 JPH0346322Y2 (en) | 1991-09-30 |
Family
ID=30748663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19122384U Expired JPH0346322Y2 (en) | 1984-12-17 | 1984-12-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0346322Y2 (en) |
-
1984
- 1984-12-17 JP JP19122384U patent/JPH0346322Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0346322Y2 (en) | 1991-09-30 |
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