JPS61106028U - - Google Patents
Info
- Publication number
- JPS61106028U JPS61106028U JP1984192383U JP19238384U JPS61106028U JP S61106028 U JPS61106028 U JP S61106028U JP 1984192383 U JP1984192383 U JP 1984192383U JP 19238384 U JP19238384 U JP 19238384U JP S61106028 U JPS61106028 U JP S61106028U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- chamber
- inner chamber
- furnace body
- reactor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984192383U JPS61106028U (cs) | 1984-12-17 | 1984-12-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984192383U JPS61106028U (cs) | 1984-12-17 | 1984-12-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61106028U true JPS61106028U (cs) | 1986-07-05 |
Family
ID=30749800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984192383U Pending JPS61106028U (cs) | 1984-12-17 | 1984-12-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61106028U (cs) |
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1984
- 1984-12-17 JP JP1984192383U patent/JPS61106028U/ja active Pending