JPS61107046A - 脱イオン化水の加熱装置 - Google Patents

脱イオン化水の加熱装置

Info

Publication number
JPS61107046A
JPS61107046A JP59230738A JP23073884A JPS61107046A JP S61107046 A JPS61107046 A JP S61107046A JP 59230738 A JP59230738 A JP 59230738A JP 23073884 A JP23073884 A JP 23073884A JP S61107046 A JPS61107046 A JP S61107046A
Authority
JP
Japan
Prior art keywords
heater
deionized water
pipe
tank
dry gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59230738A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0160754B2 (de
Inventor
Tatsuhiko Hattori
達彦 服部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Bellows Co Ltd
Original Assignee
Fuji Bellows Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Bellows Co Ltd filed Critical Fuji Bellows Co Ltd
Priority to JP59230738A priority Critical patent/JPS61107046A/ja
Publication of JPS61107046A publication Critical patent/JPS61107046A/ja
Publication of JPH0160754B2 publication Critical patent/JPH0160754B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H9/00—Details
    • F24H9/20—Arrangement or mounting of control or safety devices
    • F24H9/2007—Arrangement or mounting of control or safety devices for water heaters
    • F24H9/2014—Arrangement or mounting of control or safety devices for water heaters using electrical energy supply
    • F24H9/2021—Storage heaters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
    • F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
    • F24H1/101—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium using electric energy supply
    • F24H1/102—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium using electric energy supply with resistance
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00—Control of fluid heaters
    • F24H15/20—Control of fluid heaters characterised by control inputs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00—Control of fluid heaters
    • F24H15/30—Control of fluid heaters characterised by control outputs; characterised by the components to be controlled
    • F24H15/355—Control of heat-generating means in heaters
    • F24H15/37—Control of heat-generating means in heaters of electric heaters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00—Control of fluid heaters
    • F24H15/30—Control of fluid heaters characterised by control outputs; characterised by the components to be controlled
    • F24H15/395—Information to users, e.g. alarms

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Heat-Pump Type And Storage Water Heaters (AREA)
JP59230738A 1984-10-31 1984-10-31 脱イオン化水の加熱装置 Granted JPS61107046A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59230738A JPS61107046A (ja) 1984-10-31 1984-10-31 脱イオン化水の加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59230738A JPS61107046A (ja) 1984-10-31 1984-10-31 脱イオン化水の加熱装置

Publications (2)

Publication Number Publication Date
JPS61107046A true JPS61107046A (ja) 1986-05-24
JPH0160754B2 JPH0160754B2 (de) 1989-12-25

Family

ID=16912525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59230738A Granted JPS61107046A (ja) 1984-10-31 1984-10-31 脱イオン化水の加熱装置

Country Status (1)

Country Link
JP (1) JPS61107046A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105674457A (zh) * 2016-01-28 2016-06-15 温州医科大学 基于蜗牛状加热轨道的可回收式医用加湿方法及加湿器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105674457A (zh) * 2016-01-28 2016-06-15 温州医科大学 基于蜗牛状加热轨道的可回收式医用加湿方法及加湿器
CN105674457B (zh) * 2016-01-28 2018-08-24 温州医科大学 基于蜗牛状加热轨道的可回收式医用加湿方法及加湿器

Also Published As

Publication number Publication date
JPH0160754B2 (de) 1989-12-25

Similar Documents

Publication Publication Date Title
TW546465B (en) Apparatus for conditioning the temperature of a fluid
JPS59214191A (ja) 可撓性ヒ−タケ−ブル、可撓性ヒ−タケ−ブル装置および液体の加熱方法
TW505547B (en) Self-cleaning vacuum purge system
CN106032932A (zh) 一种加热装置及使用该装置的局部冲洗装置
JPH05317843A (ja) 超純水加熱装置および超純水加熱方法
KR101792935B1 (ko) 히터 이상 검출 장치, 처리액 공급 장치 및 기판 처리 시스템
TW529073B (en) Exhaust heat utilization system and exhaust heat utilization method for a semiconductor manufacturing device, and heat exchanger used in exhaust heat utilization for a semiconductor manufacturing device
CN101213408A (zh) 流体加热装置及具有该流体加热装置的洗净装置
JPH0160754B2 (de)
US3663799A (en) Fluoroplastic encapsulated electrical resistance heaters
CN109228429B (zh) 一种改性聚乙烯管材及其制作方法
JP2000161779A (ja) 流体加熱装置
JP3180920B2 (ja) 薬液の高温加熱装置
CN218596574U (zh) 一种单晶炉用换热器及单晶炉
JP3917254B2 (ja) 流体加熱装置
CN206616027U (zh) 一种净水机
JPH0949660A (ja) 流体加熱ヒーターユニット
JP2000304353A (ja) 液体加熱装置
CN207321569U (zh) 一种稳定耐用安全液体加热管
CN223807373U (zh) 热水机
CN101013663A (zh) 基片湿法处理设备及使用该设备对化学物质加热的方法
JPH089028B2 (ja) 超純水加熱装置
KR100665849B1 (ko) 히터 과열방지장치
CN212730803U (zh) 一种水带烘干器
CN204852934U (zh) 一种带蒸汽加温装置的氢氧化钠溶液上料装置