JPS61109133U - - Google Patents
Info
- Publication number
- JPS61109133U JPS61109133U JP19377984U JP19377984U JPS61109133U JP S61109133 U JPS61109133 U JP S61109133U JP 19377984 U JP19377984 U JP 19377984U JP 19377984 U JP19377984 U JP 19377984U JP S61109133 U JPS61109133 U JP S61109133U
- Authority
- JP
- Japan
- Prior art keywords
- dummy wafer
- wafer
- view
- barcodes
- concentric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19377984U JPS61109133U (mo) | 1984-12-20 | 1984-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19377984U JPS61109133U (mo) | 1984-12-20 | 1984-12-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61109133U true JPS61109133U (mo) | 1986-07-10 |
Family
ID=30751208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19377984U Pending JPS61109133U (mo) | 1984-12-20 | 1984-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61109133U (mo) |
-
1984
- 1984-12-20 JP JP19377984U patent/JPS61109133U/ja active Pending
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