JPS6111224Y2 - - Google Patents

Info

Publication number
JPS6111224Y2
JPS6111224Y2 JP7355981U JP7355981U JPS6111224Y2 JP S6111224 Y2 JPS6111224 Y2 JP S6111224Y2 JP 7355981 U JP7355981 U JP 7355981U JP 7355981 U JP7355981 U JP 7355981U JP S6111224 Y2 JPS6111224 Y2 JP S6111224Y2
Authority
JP
Japan
Prior art keywords
container
refractory
electron beam
beam evaporation
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7355981U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57185757U (it
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7355981U priority Critical patent/JPS6111224Y2/ja
Publication of JPS57185757U publication Critical patent/JPS57185757U/ja
Application granted granted Critical
Publication of JPS6111224Y2 publication Critical patent/JPS6111224Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7355981U 1981-05-20 1981-05-20 Expired JPS6111224Y2 (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7355981U JPS6111224Y2 (it) 1981-05-20 1981-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7355981U JPS6111224Y2 (it) 1981-05-20 1981-05-20

Publications (2)

Publication Number Publication Date
JPS57185757U JPS57185757U (it) 1982-11-25
JPS6111224Y2 true JPS6111224Y2 (it) 1986-04-09

Family

ID=29869324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7355981U Expired JPS6111224Y2 (it) 1981-05-20 1981-05-20

Country Status (1)

Country Link
JP (1) JPS6111224Y2 (it)

Also Published As

Publication number Publication date
JPS57185757U (it) 1982-11-25

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