JPS61112654U - - Google Patents
Info
- Publication number
- JPS61112654U JPS61112654U JP1984196282U JP19628284U JPS61112654U JP S61112654 U JPS61112654 U JP S61112654U JP 1984196282 U JP1984196282 U JP 1984196282U JP 19628284 U JP19628284 U JP 19628284U JP S61112654 U JPS61112654 U JP S61112654U
- Authority
- JP
- Japan
- Prior art keywords
- cantilever beam
- semiconductor device
- film
- thin film
- resonant frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984196282U JPS61112654U (2) | 1984-12-27 | 1984-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984196282U JPS61112654U (2) | 1984-12-27 | 1984-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61112654U true JPS61112654U (2) | 1986-07-16 |
Family
ID=30753983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984196282U Pending JPS61112654U (2) | 1984-12-27 | 1984-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61112654U (2) |
-
1984
- 1984-12-27 JP JP1984196282U patent/JPS61112654U/ja active Pending
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