JPS61112654U - - Google Patents
Info
- Publication number
- JPS61112654U JPS61112654U JP19628284U JP19628284U JPS61112654U JP S61112654 U JPS61112654 U JP S61112654U JP 19628284 U JP19628284 U JP 19628284U JP 19628284 U JP19628284 U JP 19628284U JP S61112654 U JPS61112654 U JP S61112654U
- Authority
- JP
- Japan
- Prior art keywords
- cantilever beam
- semiconductor device
- film
- thin film
- resonant frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000010408 film Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19628284U JPS61112654U (2) | 1984-12-27 | 1984-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19628284U JPS61112654U (2) | 1984-12-27 | 1984-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61112654U true JPS61112654U (2) | 1986-07-16 |
Family
ID=30753983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19628284U Pending JPS61112654U (2) | 1984-12-27 | 1984-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61112654U (2) |
-
1984
- 1984-12-27 JP JP19628284U patent/JPS61112654U/ja active Pending
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